EP0838859A3 - Photoelectric conversion apparatus with signal correction capability - Google Patents

Photoelectric conversion apparatus with signal correction capability Download PDF

Info

Publication number
EP0838859A3
EP0838859A3 EP97308446A EP97308446A EP0838859A3 EP 0838859 A3 EP0838859 A3 EP 0838859A3 EP 97308446 A EP97308446 A EP 97308446A EP 97308446 A EP97308446 A EP 97308446A EP 0838859 A3 EP0838859 A3 EP 0838859A3
Authority
EP
European Patent Office
Prior art keywords
photoelectric conversion
conversion elements
conversion apparatus
signal correction
correction capability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97308446A
Other languages
German (de)
French (fr)
Other versions
EP0838859A2 (en
EP0838859B1 (en
Inventor
Isao Kobayashi
Noriyuki Kaifu
Toshiaki Sato
Satoshi Itabashi
Tadao Endo
Toshio Kameshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of EP0838859A2 publication Critical patent/EP0838859A2/en
Publication of EP0838859A3 publication Critical patent/EP0838859A3/en
Application granted granted Critical
Publication of EP0838859B1 publication Critical patent/EP0838859B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14665—Imagers using a photoconductor layer
    • H01L27/14676—X-ray, gamma-ray or corpuscular radiation imagers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/1462—Coatings
    • H01L27/14623—Optical shielding

Abstract

A photoelectric conversion apparatus comprises a plurality of photoelectric conversion elements arranged two-dimensionally on a substrate wherein the X-ray or light incidence side of some proper one or ones of the photoelectric conversion elements S13 is covered with a shielding member whose transmittance to an X-ray or light is equal to zero or substantially zero so that the photoelectric conversion elements covered with the shielding member act as correction photoelectric conversion elements thereby achieving an improvement in production yield, a reduction in cost, and a reduction in the time required to read the correction output signals, and also high performance capable of obtaining a moving picture.
EP97308446A 1996-10-24 1997-10-23 Photoelectric conversion apparatus with signal correction capability Expired - Lifetime EP0838859B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP282342/96 1996-10-24
JP28234296 1996-10-24
JP26964897A JP4100739B2 (en) 1996-10-24 1997-10-02 Photoelectric conversion device
JP269648/97 1997-10-02

Publications (3)

Publication Number Publication Date
EP0838859A2 EP0838859A2 (en) 1998-04-29
EP0838859A3 true EP0838859A3 (en) 1999-04-14
EP0838859B1 EP0838859B1 (en) 2007-08-22

Family

ID=26548863

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97308446A Expired - Lifetime EP0838859B1 (en) 1996-10-24 1997-10-23 Photoelectric conversion apparatus with signal correction capability

Country Status (4)

Country Link
US (1) US6034406A (en)
EP (1) EP0838859B1 (en)
JP (1) JP4100739B2 (en)
DE (1) DE69738043T2 (en)

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US6407418B1 (en) 1998-09-16 2002-06-18 Nec Corporation Semiconductor device, method of manufacturing the same, image sensor apparatus having the same and image reader having the same
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JP2002022842A (en) * 2000-07-07 2002-01-23 Canon Inc X-ray image detector
JP5016746B2 (en) * 2000-07-28 2012-09-05 キヤノン株式会社 Imaging apparatus and driving method thereof
JP3984808B2 (en) 2000-09-07 2007-10-03 キヤノン株式会社 Signal processing apparatus, imaging apparatus using the same, and radiation imaging system
US6618604B2 (en) * 2000-12-28 2003-09-09 Ge Medical Systems Global Technology Company, Llc. Method and apparatus for correcting the offset induced by field effect transistor photo-conductive effects in a solid state x-ray detector
GB2370960A (en) * 2001-01-05 2002-07-10 Spectral Fusion Technologies L Partially shielded photodiode array
US6960753B2 (en) * 2001-01-24 2005-11-01 Hewlett-Packard Development Company, L.P. Photosensor arrays with encoded permanent information
JP4208491B2 (en) * 2002-06-11 2009-01-14 キヤノン株式会社 Imaging device and fingerprint recognition device
US7205988B2 (en) * 2002-07-12 2007-04-17 Toshiba Matsushita Display Technology Co., Ltd. Display device
KR100956338B1 (en) * 2002-12-11 2010-05-06 삼성전자주식회사 a thin film transistor array panel for X-ray detector and a method for manufacturing the same
US20040217258A1 (en) * 2003-04-30 2004-11-04 Clugston P. Edward Solar sensor including reflective element to transform the angular response
US20080258067A1 (en) * 2004-08-20 2008-10-23 Koninklijke Philips Electronics N.V. Microelectronic System with a Passivation Layer
US20090096052A1 (en) * 2006-03-15 2009-04-16 Koninklijke Philips Electronics N.V. Semiconductor device for radiation detection
DE102006021046B4 (en) * 2006-05-05 2013-06-06 Siemens Aktiengesellschaft X-ray detector
JP5280671B2 (en) * 2006-12-20 2013-09-04 富士フイルム株式会社 Image detector and radiation detection system
EP2269231A4 (en) * 2008-03-11 2011-04-20 Lightwave Power Inc Integrated solar cell with wavelength conversion layers and light guiding and concentrating layers
US8384559B2 (en) 2010-04-13 2013-02-26 Silicon Laboratories Inc. Sensor device with flexible interface and updatable information store
US8384041B2 (en) 2010-07-21 2013-02-26 Carestream Health, Inc. Digital radiographic imaging arrays with reduced noise
JP5988291B2 (en) * 2012-06-13 2016-09-07 ソニーセミコンダクタソリューションズ株式会社 Imaging apparatus and imaging display system
JP6570315B2 (en) * 2015-05-22 2019-09-04 キヤノン株式会社 Radiation imaging apparatus and radiation imaging system
RU2734452C2 (en) 2015-11-26 2020-10-16 Конинклейке Филипс Н.В. Dark current compensation
JP6808317B2 (en) * 2015-12-04 2021-01-06 キヤノン株式会社 Imaging device and imaging system
JP6808316B2 (en) * 2015-12-04 2021-01-06 キヤノン株式会社 Imaging device and imaging system
JP2017220616A (en) * 2016-06-09 2017-12-14 キヤノン株式会社 Imaging apparatus and radiation imaging system
EP3704514A4 (en) * 2017-10-30 2021-04-21 Shenzhen Xpectvision Technology Co., Ltd. Dark noise compensation in radiation detector

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EP0660421A2 (en) * 1993-12-27 1995-06-28 Canon Kabushiki Kaisha Photoelectric converter, its driving method, and system including the photoelectric converter

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Patent Citations (5)

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US4746793A (en) * 1986-09-10 1988-05-24 Hewlett-Packard Company Mask for spectrophotometer photodiode array having a bridge portion that substantially covers each photodiode
US5065015A (en) * 1988-02-26 1991-11-12 Hitachi, Ltd. Solar radiation sensor for use in an automatic air conditioner
US5087809A (en) * 1990-11-26 1992-02-11 Eastman Kodak Company Spectrally selective dithering and color filter mask for increased image sensor blue sensitivity
EP0605259A2 (en) * 1993-01-01 1994-07-06 Canon Kabushiki Kaisha Image reading apparatus and image processing apparatus
EP0660421A2 (en) * 1993-12-27 1995-06-28 Canon Kabushiki Kaisha Photoelectric converter, its driving method, and system including the photoelectric converter

Also Published As

Publication number Publication date
DE69738043T2 (en) 2008-05-15
EP0838859A2 (en) 1998-04-29
JP4100739B2 (en) 2008-06-11
US6034406A (en) 2000-03-07
DE69738043D1 (en) 2007-10-04
EP0838859B1 (en) 2007-08-22
JPH10189932A (en) 1998-07-21

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