EP0812455B1 - Mehrschichtstruktur-magnetkopf mit elektrisch leitenden kopfelementen - Google Patents

Mehrschichtstruktur-magnetkopf mit elektrisch leitenden kopfelementen Download PDF

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Publication number
EP0812455B1
EP0812455B1 EP96939256A EP96939256A EP0812455B1 EP 0812455 B1 EP0812455 B1 EP 0812455B1 EP 96939256 A EP96939256 A EP 96939256A EP 96939256 A EP96939256 A EP 96939256A EP 0812455 B1 EP0812455 B1 EP 0812455B1
Authority
EP
European Patent Office
Prior art keywords
head
electrically conducting
elements
magnetic head
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96939256A
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English (en)
French (fr)
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EP0812455A1 (de
Inventor
Eeltje Aize Draaisma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
OnStream Inc
Original Assignee
Koninklijke Philips Electronics NV
OnStream Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV, OnStream Inc filed Critical Koninklijke Philips Electronics NV
Priority to EP96939256A priority Critical patent/EP0812455B1/de
Publication of EP0812455A1 publication Critical patent/EP0812455A1/de
Application granted granted Critical
Publication of EP0812455B1 publication Critical patent/EP0812455B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3916Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide
    • G11B5/3919Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path
    • G11B5/3922Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure
    • G11B5/3925Arrangements in which the active read-out elements are coupled to the magnetic flux of the track by at least one magnetic thin film flux guide the guide being interposed in the flux path the read-out elements being disposed in magnetic shunt relative to at least two parts of the flux guide structure the two parts being thin films
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3967Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
    • G11B5/397Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read with a plurality of independent magnetoresistive active read-out elements for respectively transducing from selected components
    • G11B5/3977Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read with a plurality of independent magnetoresistive active read-out elements for respectively transducing from selected components from different information tracks
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers
    • G11B5/3133Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure

Definitions

  • the invention relates to a magnetic head according to the preamble of claim 1, and to a device for writing and/or reading a magnetic record carrier, including such a magnetic head.
  • a magnetic head that comprises ferromagnetic substrate.
  • the head On the head face side of the substrate the head contains ferromagnetic yoke portions.
  • Inductive coils run through the head gaps between the yoke portions and the substrate.
  • the inductive coils serve as head elements in head gaps.
  • the terminals of the inductive coils are connected to connection faces on the side of the substrate opposite the head face.
  • First terminals of the coils are connected to a common connection face via a common conductor.
  • the common conductor is realized means of a electrode on the surface of the substrate between the yoke portions and the connection faces.
  • Second terminals of the coils run individually to further connection faces crossing the common conductor, and isolated from it by isolating film.
  • the electrode and the isolating film are shaped photolithographically, the film leaving end portions of the common electrodes open to connect to the first terminals of the coils.
  • This head suffers from the problem that it requires accurate two dimensional patterns in the conductor and the isolating film. This increases the cost of manufacturing.
  • the known magnetic head has a multilayer structure, provided on a substrate, with a plurality of electrically conducting head elements such as magnetoresistive elements and bias elements for biasing the magnetoresistive elements.
  • Each head element present is provided with a pair of electrically conducting connecting tracks terminating in a connection face.
  • the connecting tracks which thus extend between head elements and connection faces, are present as a pattern of tracks in a layer of the multilayer structure in which the pattern is formed by means of structuring.
  • the size of the pattern of tracks is largely determined by the number of head elements present in the magnetic head. The more head elements are used, the more connecting tracks must be realized in the pattern of tracks. With an increasing number of head elements, the pattern of tracks will become more complicated and more difficult to realize in the available space. Moreover, such a pattern of tracks is an impediment to miniaturization of magnetic heads.
  • the magnetic head according to the invention is characterized in that the substrate is provided in a multi-layer structure with the electrically conducting head elements and the electrically conducting connections, the common electric conductor being constituted by an electrically conducting layer of the multi-layer structure that reaches substantially to the head face.
  • the measure used in the magnetic head according to the invention provides ample possibilities for realizing suitable patterns of connecting tracks. By implementing a plurality of the total number of connecting tracks, comprising both collect tracks and return tracks, substantially as a common conductor, for example, the return tracks, a greater freedom of creating a suitable layout is obtained for the remaining number.
  • An additional, but important advantage is that the use of the common conductor leads to a lower electric resistance of the total system of connecting tracks.
  • a further advantage is that the common electric conductor does not need to be structured, which leads to an economy of manufacturing costs of the magnetic head.
  • the bead elements used in the magnetic head according to the invention may be transducing elements such as magnetoresistive elements or inductive elements, but they may alternatively be different functional conducting elements such as bias windings and/or test windings or head face sensors.
  • An embodiment of the magnetic head according to the invention is characterized in that the common conductor is constituted by an electrically conducting layer of the multilayer structure.
  • the common conductor is constituted by an electrically conducting layer of the multilayer structure.
  • use may be made of a substrate which is electrically non-conducting or has a poor conductivity, which substrate is provided with the layer constituting the common conductor by deposition of material having a satisfactory electrical conductivity, using known deposition methods such as vapour deposition or sputtering. Suitable materials are, for example, gold or chromium.
  • the electrically conducting layer does not need to be structured.
  • An embodiment of the magnetic head according to the invention is characterized in that the substrate is electrically conducting and constitutes the common conductor.
  • the common conductor is realized in an extremely simple manner, in which the electrically conducting layer used in the embodiment described hereinbefore is constituted by the substrate itself, so that it is not necessary to provide an electrically conducting layer during manufacture of the magnetic head.
  • a suitable electrically conducting substrate material is, for example, the ceramic material Al 2 O 3 /TiC or an electrically conducting ferrite such as MnZn ferrite.
  • An embodiment of the magnetic head according to the invention is characterized in that the common conductor, on the one hand, and head elements electrically connected to connecting tracks of the set of connecting tracks, on the other hand, are present in different planes, while electric through-connections are present between the common conductor and the last-mentioned head elements.
  • the through-connections which are provided in an electrically insulating layer extending between the common conductor and said head elements, can be realized during manufacture of the magnetic head by means of known structuring and deposition methods such as etching, vapour deposition or sputtering, respectively.
  • the through-connections require little space, particularly because they usually extend substantially transversely to the layers.
  • a further advantage is the great freedom of choice of the magnetic head layout, resulting, for example, in a magnetic head having surprisingly small dimensions.
  • An embodiment of the magnetic head according to the invention is characterized in that the common conductor is electrically connected to a connection face constituting a common connection face for the set of connecting tracks.
  • the number of required connection faces is limited, which facilitates the connection of the magnetic head to an external source.
  • the limited number of connection faces provides the possibility of smaller dimensions of the magnetic head.
  • An embodiment of the magnetic head according to the invention is characterized in that the common conductor and the connection face are present in different planes, an electric through-connection being present between the common conductor and the connection face.
  • This embodiment provides the possibility of positioning all connection faces in one and the same plane.
  • the through-connection used is provided in an electrically insulating layer extending between the common conductor and the connection face. Such a layer may be formed, for example, from Al 2 O 3 or SiO 2 .
  • the invention also relates to a device for writing and/or reading a magnetic record carrier, including the magnetic head according to the invention.
  • the device may be an audio, video or data-storage device, in which the record carrier is a magnetic tape or a magnetic disc.
  • the magnetic head according to the invention shown diagrammatically in Fig. 1, has a head face 1 and comprises a substrate 3 which is provided with a multilayer structure 5.
  • the multilayer structure 5 is provided with electrically conducting head elements 7, such as transducing elements.
  • Each head element 7 is electrically arranged between an electrically conducting connecting track 9 and electrically conducting connecting tracks.
  • a set of connecting tracks is substantially implemented as a common conductor 9A .
  • the common conductor 9A may be constituted by the substrate 3, if this substrate is electrically conducting, or by an electrically conducting layer of the multilayer structure 5.
  • the common conductor 9A is connected to a common connection face 13, while separate connecting tracks 11 are each connected to a separate connection face 15.
  • the common conductor 9A on the one hand, and the head elements 7, on the other hand, may be present in different planes, while electric through-connections 17 and possibly electric tracks 9a are present between the common conductor 9A and the head elements 7. In that case, an electric through-connection 19 and possibly an electric track 9b are present between the common conductor 9A and the connection face 13.
  • the embodiment of the magnetic head according to the invention is a multiple read head.
  • the Figure only shows a head element of the magnetic head.
  • the magnetic head has a head face 101 and comprises a substrate 103 of an electrically non-conducting, soft-magnetic material such as an NiZn ferrite, provided with a thin-film structure and a protective counterblock 102 of, for example, BaTiO 3 or CaTiO 3 .
  • the thin-film structure may be obtained by means of known techniques such as sputtering, etching, etc.
  • the thin-film structure is provided, inter alia, with an electrically conducting layer 109 of, for example, gold.
  • the thin-film structure is also provided with conducting layers 104 of, for example, gold, constituting test and/or bias windings, and layer portions 104A, preferably of the same electrically conducting material.
  • the thin-film structure is provided with soft-magnetic layers 106 of, for example, an NiFe alloy for constituting flux guides. Electrically conducting layer portions 106A, preferably of the same material as the layers 106, are preferably formed simultaneously with the layers 106.
  • the thin-film structure is further provided with layers of a magnetoresistive material, such as an NiFe alloy, for constituting magnetoresistive elements 107, and layers 108 of an electrically conducting material, for example Au, for forming structures of equipotential strips 108A on the magnetoresistive elements 107 and for forming electrically conducting strips contacting the magnetoresistive elements 107.
  • a magnetoresistive material such as an NiFe alloy
  • an electrically conducting material for example Au
  • a number of strips 109a of these electrically conducting strips is in contact with the layer portions 106A which, together with the layer portions 104A, constitute electric through-connections 117 to the electrically conducting layer 109.
  • the layer 109 constitutes a common conductor for a set of connecting tracks, of which the conducting tracks 109a in contact with the layer portions 106A form part, while the electric layer 109 is provided with a common connection face 113.
  • the conducting strips in the layers 108 which are not in contact with the layer portions 106A, each function as separate connection tracks terminating in a separate connection face.
  • insulating layers of, for example, SiO 2 or Al 2 O 3 extend between various layers of the layers mentioned above. The insulating layers are not shown separately in the Figure, but are only denoted by the reference numeral 110. It is also to be noted that only one layer and a layer portion of the layers 104, 106 and 108 and the layer portions 104A and 106A being present, respectively, are visible in the Figure.
  • the embodiment shown in Fig. 3 is a multiple read/write head having a head face 201.
  • This magnetic head comprises a substrate 203 of a soft-magnetic, electrically conducting material such as MnZn ferrite, and a multilayer structure which is present on the substrate 203. Viewed in a direction transverse to the head face, this structure comprises a plurality of juxtaposed read/write units, only one of which is visible in the Figure.
  • Each read/write unit has a read element in the form of a magnetoresistive element 207A in the multilayer structure and a write element in the form of an inductive element 207B.
  • Each read/write unit also has a first soft-magnetic layer 206 of, for example, an NiFe alloy in the multilayer structure, which layer constitutes a shared flux guide, an electrically conducting first layer portion 206 of, for example an NiFe alloy, copper or gold, which layer portion 206A is in contact with the conducting substrate 203, a second soft-magnetic layer 216 of, for example an NiFe alloy, constituting an interrupted flux guide, and a second layer portion 216A of, for example an NiFe alloy, copper or gold, which layer portion is in contact with the layer portion 206A.
  • a first soft-magnetic layer 206 of, for example, an NiFe alloy in the multilayer structure, which layer constitutes a shared flux guide
  • an electrically conducting first layer portion 206 of, for example an NiFe alloy, copper or gold which layer portion 206A is in contact with the conducting substrate 203
  • a second soft-magnetic layer 216 of, for example an NiFe alloy, constituting an interrupted flux guide
  • the read/write unit shown also has a further first layer portion 206B which is in electrical contact with the substrate 203, and a further second layer portion 216B which is in electrical contact with the layer portion 206B.
  • Electrically insulating material 110 such as quartz, is present between the substrate 203, the inductive element 207B, the first layer 206, the second layer 216 and the magnetoresistive element 207A.
  • the layer portions 206A and 216A and the layer portions 206B and 216B constitute through-connections 217 and 219, respectively, with the electrically conducting substrate 203 in the insulating material of the layer structure.
  • the magnetoresistive elements 207A of the magnetic head are provided with connecting tracks which terminate in connection faces to which external electronic means can be connected. A set of these connecting tracks terminates in a common connection face 213.
  • This set of connecting tracks is also characterized in that the electrically conducting substrate 203 serves as a common conductor for this set, while conducting tracks 209a connected to the magnetoresistive element 207A blend with the substrate 203 via the through-connections 217, and the through-connection 219 connects the substrate 203 to an electrically conducting track 209b which is contact with the connection face 213.
  • Each connecting track which does not terminate in the common connection face 213 may terminate in its own connection face in a manner as is shown diagrammatically in Fig. 1 by means of the connecting tracks 11 and the connection faces 15.
  • the magnetic head according to the invention shown in Fig. 4, has a head face 301 and comprises a substrate which is provided with a multilayer structure 305.
  • the multilayer structure 305 is provided with a transducing system 306 comprising, for example, one or more magnetoresistive elements.
  • the structure 305 is further provided with head elements in the form of head face sensors 307 which adjoin the head face 301.
  • the sensors 307 which serve to provide information about the head face which is being produced in the manufacture of the magnetic head, are electrically arranged between electrically conducting connecting tracks 309a and electrically conducting connecting tracks 311.
  • the connecting tracks 309a blend via through-connections 317 with a common conductor which is present in a further face, which common conductor is connected to a common connection face 313 via a through-connection 319.
  • Each connecting track 311 terminates in a separate connection face 315.
  • the device according to the invention is suitable for writing and/or reading a magnetic tape 603 present in a cassette 601 shown in Fig. 6.
  • the device has a housing 501 with a frame 503.
  • the housing 501 accommodates, inter alia, a drive motor 505 for driving a drive roll 507, a magnetic head 511 according to the invention, secured in this embodiment to a sub-frame 509, and a drive motor 513 for moving the sub-frame 509 along a guide shaft 515.
  • the device is also provided with a guiding means 517 for sliding the cassette 601 into and out of the housing 501.
  • the cassette 601 is intended for storing data information.
  • the cassette has two take-up reels 605 and 607 holding the greater part of the magnetic tape 603.
  • the part of the magnetic tape 603 present between the two reels is passed along two tape guides 609 and 611, which are fixed in this embodiment, and travels along a capstan 613.
  • the cassette 601 accommodates an endless drive belt 615 travelling along the capstan 613, the reels 605 and 607 and two belt guides 617 and 619.
  • the magnetic head 511 projects into a recess 621 in the cassette and is then in contact with the magnetic tape 603.
  • the drive roll 507 is in contact with the capstan 613, via which the magnetic tape 603 is longitudinally movable from the one to the other reel.
  • the device shown is a data-storage device
  • the device according to the invention is not limited thereto. It may alternatively be an audio or video device.
  • the invention is neither limited to the magnetic heads shown.
  • the measures used may be successfully used in various types of thin-film magnetic heads, particularly read heads, write heads and read/write heads, irrespective of the number of head elements.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Claims (7)

  1. Ein magnetischer Kopf, mit einer Kopfseite (101, 201), und umfassend ein Substrat (103, 203), ein elektrisch leitendes Kopfelement (107, 207A, 207B), Verbindungsseiten (13, 15, 113, 213) und elektrisch leitende Verbindungen (109, 109A, 203), die die Verbindungsseiten (13, 15, 113, 213) mit den Kopfelementen (107, 207A, 207B) elektrisch verbinden, wobei die Verbindungen (109, 109A, 203) einen gewöhnlichen elektrischen Leiter (109, 203) einschließen, durch welchen eine elektrische Bahn von den Verbindungsseiten (13, 15) zu den Kopfelementen (107, 207A, 207B) gemeinsam für die Kopfelemente (107, 207A, 207B) verläuft, dadurch gekennzeichnet, dass das Substrat (103, 203) in einer Mehrschichtenstruktur mit den elektrisch leitenden Kopfelementen (107, 207A, 207B) und elektrisch leitenden Verbindungen (109, 109A, 109B) bereitgestellt ist, wobei der gemeinsame elektrische Leiter (109, 203), durch eine elektrisch leitende Schicht (109, 203) der Mehrschichtenstruktur, die im wesentlichen bis zur Kopfseite (101, 201) reicht, gebildet wird.
  2. Ein magnetischer Kopf wie beansprucht in Anspruch 1, wobei das Substrat (203) die elektrisch leitende Schicht ist.
  3. Ein magnetischer Kopf nach Anspruch 1 oder 2, der eine elektrische nicht leitende Schicht (110) zwischen einer weiteren Schicht der Mehrschichtenstruktur, worin Kopfelemente vorhanden sind, und der elektrisch leitenden Schicht (109, 203), die den gewöhnlichen elektrischen Leiter bildet, umfasst, wobei Durchleitungen (104A, 106A, 206A, 216A) durch die nicht leitende Schicht (110) elektrisch zwischen dem gewöhnlichen Leiter (109, 203) und den Kopfelementen (107, 207A, 207B) vorhanden sind.
  4. Ein magnetisches Kopfelement nach Anspruch 3, wobei die elektrisch leitende Schicht (109, 203) mit mindestens einer der Verbindungsseiten (213) über eine weitere Durchleitung (206B, 216B) durch die nicht leitende Schicht elektrisch verbunden ist.
  5. Ein magnetisches Kopfelement nach irgendeinem der Ansprüche 1 bis 4, wobei die Kopfelemente (107, 207A) Schallkopfelemente sind.
  6. Ein magnetisches Kopfelement nach Anspruch 5, wobei die Schallkopfelemente magnetwiderstehende Elemente sind (107, 207A).
  7. Eine Vorrichtung zum Schreiben und/oder Lesen eines magnetischen Datenträgers, der den magnetischen Kopf, wie beansprucht in irgendeinem der vorausgehenden Ansprüche, beinhaltet.
EP96939256A 1995-12-27 1996-12-06 Mehrschichtstruktur-magnetkopf mit elektrisch leitenden kopfelementen Expired - Lifetime EP0812455B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP96939256A EP0812455B1 (de) 1995-12-27 1996-12-06 Mehrschichtstruktur-magnetkopf mit elektrisch leitenden kopfelementen

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP95203639 1995-12-27
EP95203639 1995-12-27
PCT/IB1996/001375 WO1997024712A1 (en) 1995-12-27 1996-12-06 Magnetic head comprising a multilayer structure with electrically conducting head elements
EP96939256A EP0812455B1 (de) 1995-12-27 1996-12-06 Mehrschichtstruktur-magnetkopf mit elektrisch leitenden kopfelementen

Publications (2)

Publication Number Publication Date
EP0812455A1 EP0812455A1 (de) 1997-12-17
EP0812455B1 true EP0812455B1 (de) 2003-05-02

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EP96939256A Expired - Lifetime EP0812455B1 (de) 1995-12-27 1996-12-06 Mehrschichtstruktur-magnetkopf mit elektrisch leitenden kopfelementen

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Country Link
US (1) US5796562A (de)
EP (1) EP0812455B1 (de)
JP (1) JPH11501446A (de)
CN (1) CN1176704A (de)
DE (1) DE69627836D1 (de)
WO (1) WO1997024712A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5940956A (en) * 1996-10-31 1999-08-24 Aiwa Co., Ltd. Chemical-mechanical contouring (CMC) method for forming a contoured surface
EP1903159A1 (de) 2006-09-21 2008-03-26 GA.MI s.r.l. Tragkonstruktion für einen Doppelboden und andere moduläre Baustrukturen
US10930306B1 (en) * 2019-11-12 2021-02-23 International Business Machines Corporation Magnetic measurement of head span spacing

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3821815A (en) * 1972-10-11 1974-06-28 Ibm Apparatus for batch fabricating magnetic film heads and method therefor
US4072993A (en) * 1974-11-12 1978-02-07 Matsushita Electric Industrial Co., Ltd. Multi-element magnetic head
DE3204184A1 (de) * 1982-02-06 1983-08-11 Robert Bosch Gmbh, 7000 Stuttgart Duennschicht-mehrspur-magnetkopf hoher spurdichte
JPS6457413A (en) * 1987-08-27 1989-03-03 Matsushita Electric Ind Co Ltd Thin film magnetic head
NL9001147A (nl) * 1990-05-17 1991-12-16 Philips Nv Dunnefilm magneetkop.
NL9100191A (nl) * 1991-02-04 1992-09-01 Philips Nv Werkwijze voor het vervaardigen van een magneetkop en magneetkop vervaardigd volgens de werkwijze.
US5065483A (en) * 1991-02-19 1991-11-19 International Business Machines Corporation Method of lapping magnetic recording heads
MY107033A (en) * 1992-02-12 1995-08-30 Koninklijke Philips Electronics Nv Magnetic head

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Publication number Publication date
US5796562A (en) 1998-08-18
JPH11501446A (ja) 1999-02-02
CN1176704A (zh) 1998-03-18
EP0812455A1 (de) 1997-12-17
WO1997024712A1 (en) 1997-07-10
DE69627836D1 (de) 2003-06-05

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