EP0781203B1 - Tetes d'impression a jet d'encre - Google Patents

Tetes d'impression a jet d'encre Download PDF

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Publication number
EP0781203B1
EP0781203B1 EP95931308A EP95931308A EP0781203B1 EP 0781203 B1 EP0781203 B1 EP 0781203B1 EP 95931308 A EP95931308 A EP 95931308A EP 95931308 A EP95931308 A EP 95931308A EP 0781203 B1 EP0781203 B1 EP 0781203B1
Authority
EP
European Patent Office
Prior art keywords
protective layer
ablatable
printhead
layer
high energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP95931308A
Other languages
German (de)
English (en)
Other versions
EP0781203A1 (fr
Inventor
Stephen Temple
Robert Alan Harvey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xaar Technology Ltd
Original Assignee
Xaar Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xaar Technology Ltd filed Critical Xaar Technology Ltd
Publication of EP0781203A1 publication Critical patent/EP0781203A1/fr
Application granted granted Critical
Publication of EP0781203B1 publication Critical patent/EP0781203B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates

Definitions

  • the present invention relates to inkjet printheads, and in particular to the production of inkjet nozzles and other instances where removal of material from elements of inkjet printheads is required. Such material can usefully be removed, at least in part, by ablation.
  • ablation - also known as photoablative decomposition - is known: see, for example, R. Srinivasan, J. Vac. Sci. Technol. B, Vol 4, page 923 (1983).
  • both the adhesive layer and backing tape are removed from those areas where the nozzles are formed.
  • a similar adhesive layer and backing tape arrangement is known from WO93/22141.
  • EP-A-0 367 541 further discloses an alternative arrangement in which no adhesive layer is employed.
  • the nozzle plate is carried on a backing layer and the face of the nozzle plate which is to be bonded to the print head body is covered by a protective layer. Ablation takes place through this protective layer which is removed prior to the bonding process.
  • nozzles are formed in a nozzle plate after application of a non-wetting coating by ablation of the nozzle plate material using a laser beam which impinges on the opposite surface of the nozzle plate to that on which the non-wetting coating is located.
  • a problem associated with this method is shown in Figure 4a of the document: where the non-wetting coating layer has a thickness less than 20nm, a portion of the layer at the periphery of the nozzle is blown away in the course of ablation, leaving an area where no non-wetting layer exists.
  • the document proposes using a thicker non-wetting coating, ablating it with the aid of a covering layer so as to achieve a satisfactory nozzle shape.
  • EP-A-0 309 146, WO92/16822 and WO93/15911 - belonging to the same applicant as the present invention - also relate to ablation in the context of inkjet printheads.
  • All three documents disclose methods of removing material from an element of an inkjet printhead - in this case a nozzle plate - using a laser beam which impinges on a surface forming or intended to form part of the external surface of the printhead - in this case a surface having a non-wetting coating. Since, in these examples, the laser beam does not ablate the non-wetting coating from the rear, the above-mentioned problem with the non-wetting coating being blown away does not occur.
  • the originators of the present invention have encountered problems with damage to that surface which is intended to form part of the external surface of the printhead.
  • the damage has impaired the performance of the nozzle.
  • the originators of the present invention believe that the damage is caused by high energy free radicals and other highly reactive chemical species, liberated during the ablation process, diffusing back onto that surface intended to form part of the external surface of the printhead.
  • the present invention allows the damage referred to above to be avoided.
  • a method of removing material from an element of an inkjet printhead said element including an ablatable material and having a surface intended to form part of the external surface of the printhead, the method being characterised by the steps of:
  • the protective layer may be releasably bonded to said surface, advantageously by the use of an adhesive layer.
  • an adhesive layer may be transparent to the high energy beam. Removal of the adhesive layer can then take place by the action of the high-energy radicals generated during the ablation of material lying beneath the adhesive layer, for example the material of the nozzle plate.
  • the adhesive layer is itself ablatable.
  • the UV absorbing characteristic may be an intrinsic property of the adhesive or may be achieved by the use of a UV absorbing additive.
  • the protective layer this also may be transparent to the high-energy beam but will advantageously comprise ablatable material. This will allow the protective layer to be removed by the high energy beam during the material removal process and yet be of sufficient thickness that it will effectively protect the surface from the effects of high energy radicals as described above. Where the protective layer is not ablatable, removal will be by the action of the high-energy radicals generated during the ablation of material lying beneath the protective layer e.g. material of the nozzle plate.
  • a protective layer and/or adhesive that absorbs UV radiation has the
  • the element of the inkjet printhead may be an integral part of the printhead or a separate entity which is attached to the printhead. In the latter case, material removal from the element may take place before or after attachment of the element to the printhead.
  • the element of an inkjet printhead in question may be of homogeneous construction or may comprise at least two layers. In the former case, the whole element will necessarily be of ablatable material. Although in the latter case only one of the inner layers need be ablatable, if the outer layer is not ablatable it should be sufficiently thin that it will be removed by the high energy beam. Another possibility is for material to be removed from the outer layer only.
  • Removal of the protective layer following ablation may be effected mechanically e.g. by peeling, or chemically e.g. by dissolving the layer using a solvent such as acetone, or by a combination of both.
  • FIG. 1 there is shown a nozzle plate (4) having a non-wetting coating (6) which forms part of the external surface of the printhead.
  • the nozzle plate and non-wetting coating may be of the types disclosed, for example, in EP-A-367 438 belonging to the present applicant and incorporated in the present application by reference.
  • the nozzle plate is attached to a body (2) of an inkjet printhead having ink ejection channels (12). It is noted that correct positioning of each of the nozzles relative to its respective ink ejection channel is conveniently facilitated by attaching the nozzle plate to the printhead body prior to formation of the nozzles.
  • the nozzle plate may comprise any ablatable material - for example plastics material such as polyimide, polycarbonate, polyester, polyetheretherketone, acrylics or non-vitreous inorganic material such as metal, in particular aluminium, or ceramics. Where a plastics material is used, this may include additives of the kind normally employed with plastics, including organic and/or inorganic fillers.
  • plastics material such as polyimide, polycarbonate, polyester, polyetheretherketone, acrylics or non-vitreous inorganic material such as metal, in particular aluminium, or ceramics.
  • plastics material such as polyimide, polycarbonate, polyester, polyetheretherketone, acrylics or non-vitreous inorganic material such as metal, in particular aluminium, or ceramics.
  • this may include additives of the kind normally employed with plastics, including organic and/or inorganic fillers.
  • the non-wetting coating may be of the kind comprising fluorocarbon functional silane and may be formed by the method described in the above-mentioned EP-A-0 367 438, whereby an adherent first layer comprising cured siloxane is formed on the surface of the nozzle plate, followed by a second layer derived from at least one fluorosilane having a silicon atom to which is attached at least one hydrolysable group and at least one fluorine-containing organic group which donates non-wetting properties to the layer.
  • FIG. 2 shows the nozzle plate and non-wetting coating of Figure 1 when provided with a protective layer (10) as per a first embodiment of the present invention.
  • This layer is preferably polyester film, for example the polyethylene terephthlate (PET) film sold by ICI under the trade name Melinex (trade mark), or polyimide (PI) film, for example that sold by UBE under the name Upilex (trade mark). Both these materials are ablatable and have a high absorbance of ultra-violet radiation in the region of 248 nm wavelength.
  • the protective layer is attached to the non-wetting coating by a layer (8) of pressure sensitive adhesive.
  • the adhesive is preferably applied first to the protective layer (rather than the non-wetting surface) by any suitable means e.g. a wire-wound meter bar, the adhesive-coated protective layer then being applied to the non-wetting coating using pressure.
  • the adhesive is preferably ablatable - this property being either intrinsic or obtained by means of an ultra-viol
  • a protective layer may be applied to a sheet of nozzle plate material to which a non-wetting coating has been applied. Such a sheet is subsequently cut up to form individual nozzle plates, each of which is attached to a printhead. Only then would the step of material removal - in this case nozzle formation - take place.
  • Material removal is effected by directing a high energy beam - such as an excimer laser beam - at that side of the nozzle plate (4) on which the non-wetting coating (6) is located such that material is removed from the nozzle plate by ablation.
  • a high energy beam - such as an excimer laser beam -
  • the wavelengths of laser light chosen are typically 193, 248 or 308 nm, corresponding to photon emission at the excimer line of argon fluoride (ArF), krypton fluoride (KrF) or xenon fluoride (XeCl) respectively.
  • the material of the protective layer (10) is also ablated away ( Figure 3).
  • the non-wetting coating is sufficiently thin - no greater than 1 micron for example - that it may be removed without necessarily being made of an ablatable material.
  • Material may be removed from the nozzle plate to create not only nozzles of the types mentioned in the aforementioned documents but also solvent wettable areas of the type disclosed in EP-A-0 389 217 or nozzles having a formation provided within the bore serving to control the nozzle ink meniscus as per WO93/15911 - both of these documents belonging to the present applicant and being incorporated herein by reference. Material removal may take place with the nozzle plate remote from the rest of the printhead or attached to the printhead. The latter method avoids problems with both registration of the nozzles in the nozzle plate with the channels of the inkjet printhead and alignment of the nozzle axes in the plane of the channels.
  • the protective layer is removed from the surface of the non-wetting coating (6) to leave the arrangement shown in Figure 4. Any ablation products that might otherwise have diffused back towards the printhead and have been deposited upon the protection layer, are also removed in this step. There is left a nozzle plate having well-formed nozzle bores (14) and outlets (16) having sharp edges (18) and surrounded by an undamaged non-wetting coating (6).
  • the protective layer may be of such a constitution - for example a liquid or a gel - that it establishes by itself a sealing engagement with the surface to be protected.
  • the liquid/gel layer according to the second embodiment may simply be applied to the surface to be protected by any conventional means e.g. roll coating.
  • Figure 5 shows an arrangement of this second embodiment where the liquid/gel layer (20) is held between the surface (6) of the printhead and a plate (26) having an aperture (28) through which can pass the hight energy beam. That part of the liquid/gel lying in the path (22) of the beam is removed whilst the liquid/gel lying outside the path of the beam remains and protects the surface of the nozzle plate and in particular that surface lying at the periphery of the nozzle outlet (24).
  • the viscosity of the liquid/gel layer is selected so that the layer remains in place around the periphery of the nozzle aperture, during the ablation process.
  • the non-wetting action of a coated nozzle plate will be taken into consideration, in selecting this viscosity, together with the period of time required for the ablation process.
  • the liquid/gel is preferably ablatable, thereby avoiding the problems with non-ablatable layers discussed earlier.
  • the liquid/gel is of sufficiently high viscosity that it remains in location once applied - either to the surface of the printhead or between the surface of the printhead and the plate.
  • a suitable liquid is a high molecular weight liquid such as polypropylene glycol.
  • the plate may hold the liquid/gel in position or may itself be held in position by the liquid/gel layer. In both of cases, the plate offers an additional degree of protection to the surface of the printhead from ablation products.
  • the plate may be of such construction as to be reusable many times or to be discarded after ablation of the nozzle along with the liquid/gel. It may advantageously comprise polyester film, for example the polyethylene terephthlate (PET) film sold by ICI under the trade name Melinex (trade mark).
  • the aperture in the plate can be formed prior to ablation of the nozzle using the same high energy beam as used for nozzle formation, an aperture larger than the outlet aperture of the nozzle being obtained by displacing the plate along the axis of the tapered beam such that a larger section of this tapered beam ablates a larger aperture.
  • the plate can either be in-situ on the surface of the printhead or remote from the printhead during this process.
  • the liquid/gel may be inserted between the plate and the printhead surface in any suitable fashion, for example roll coating of the plate or the printhead surface prior to assembly, or by pumping the liquid between the plate and the printhead surface.
  • An design of plate (26) particularly suited to this latter process is shown in Figure 6: in addition to an aperture (28), the plate has a chamber (30) formed beneath the aperture in which the liquid layer can form in the particularly critical area around the nozzle. Liquid may be fed to the chamber (as indicated by arrows 34) via channels (32) formed in the plate.
  • the present invention is also applicable to the case where the element to be ablated is an integral part of the printhead e.g. where nozzles are created directly in the printhead as per EP-A-0 595 654.
  • both the method of removing material and the protective layer arrangement described in the present document are not restricted to the manufacture of nozzles or nozzle plates but are applicable to any element of an inkjet printhead which includes an ablatable material and which has a surface intended to form part of the external surface of the printhead.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Claims (26)

  1. Un procédé pour éliminer une matière d'un élément d'une tête d'impression à jet d'encre, ledit élément contenant une matière ablative et ayant une surface conçue pour faire partie de la surface externe de la tête d'impression, le procédé étant caractérisé par les étapes consistant à:
    (a) appliquer une couche de protection afin qu'elle soit hermétiquement engagée dans ladite surface;
    (b) diriger un faisceau de grande énergie sur ladite couche de protection depuis le côté du dit élément sur lequel ladite couche de protection est appliquée, éliminant ainsi de la matière de ladite couche de protection et ledit élément ayant ladite surface, au moins une partie de la matière éliminée du dit élément étant éliminée par ablation;
    (c) éliminer ladite couche de protection de ladite surface.
  2. Procédé selon la revendication 1 dans lequel la couche de protection est liée de façon détachable à ladite surface.
  3. Procédé selon la revendication 2 dans lequel la couche de protection est liée de façon détachable à ladite surface par une couche d'adhésif.
  4. Procédé selon la revendication 3 dans lequel la couche d'adhésif peut être ablatée.
  5. Procédé selon la revendication 4 dans lequel la couche d'adhésif comprend un additif absorbant les rayons ultraviolets.
  6. Procédé selon la revendication 4 dans lequel la propriété d'ablation est une propriété intrinsèque de l'adhésif.
  7. Procédé selon la revendication 3 dans lequel la couche d'adhésif est transparente au faisceau de grande énergie.
  8. Procédé selon l'une quelconque des revendications précédentes dans lequel la couche de protection comprend une matière qui peut être ablatée.
  9. Procédé selon la revendication 8 dans lequel la matière qui peut être ablatée contient du polyester ou du polyimide.
  10. Procédé selon la revendication 1 dans lequel la couche de protection crée à elle seule un engagement hermétique avec ladite surface.
  11. Procédé selon la revendication 10 dans lequel la couche de protection est un liquide ou un gel.
  12. Procédé selon la revendication 11 dans lequel ledit liquide ou ledit gel peut être ablaté.
  13. Procédé selon la revendication 12 dans lequel le liquide est du polypropylène glycol.
  14. Procédé selon la revendication 11 dans lequel ladite couche de protection se trouve entre ladite surface et un élément qui est adjacent à la périphérie d'une zone de suppression de matière.
  15. Procédé selon la revendication 14 dans lequel ledit élément est une plaque qui est située à l'écart de ladite surface et a une ouverture à travers laquelle passe le faisceau de haute énergie.
  16. Procédé selon la revendication 14 dans lequel ladite ouverture est formée par ledit faisceau de haute énergie avant la suppression de la matière du dit élément ayant ladite surface.
  17. Procédé selon la revendication 15 dans lequel ledit élément comprend une chambre située du côté de la plaque qui repose au plus près de ladite surface, du liquide ou du gel pouvant ainsi être pompé dans ladite chambre pour créer une couche de protection.
  18. Procédé selon l'une quelconque des revendications précédentes, dans lequel l'élément comprend une portion de corps comprenant une matière qui peut être ablatée et une couche de surface d'une matière différente de celle de la portion de corps.
  19. Procédé selon la revendication 18 dans lequel la matière est éliminée sur une couche seulement.
  20. Procédé selon l'une quelconque des revendications précédentes dans lequel ladite surface conçue pour faire partie de la surface externe de la tête d'impression a une fonctionnalité susceptible d'interférence de la part des produits d'ablation.
  21. Procédé selon la revendication 20, dans lequel ladite fonctionnalité comprend une action non-mouillante ou une conductivité électrique.
  22. Procédé selon l'une quelconque des revendications précédentes dans lequel la suppression de la matière a lieu quand ledit élément fait partie de ladite tête d'impression à jet d'encre.
  23. Procédé selon l'une quelconque des revendications 1 à 21 dans lequel la suppression de la matière a lieu lorsque ledit élément est séparé de ladite tête d'impression à jet d'encre.
  24. Procédé selon l'une quelconque des revendications précédentes dans lequel ledit faisceau de haute énergie est un faisceau laser d'excimère.
  25. Procédé selon l'une quelconque des revendications précédentes dans lequel le faisceau de haute énergie est modelé pour définir la géométrie de la suppression de la matière, par un moyen situé à l'écart de la couche de protection.
  26. Procédé selon la revendication 25 dans lequel des moyens pour masquer sont situés à l'écart de la couche de protection et sont projetés sur la couche de protection au moyen d'un système de mise au point optique.
EP95931308A 1994-09-13 1995-09-12 Tetes d'impression a jet d'encre Expired - Lifetime EP0781203B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB9418412A GB9418412D0 (en) 1994-09-13 1994-09-13 Removal of material from inkjet printheads
GB9418412 1994-09-13
PCT/GB1995/002157 WO1996008375A1 (fr) 1994-09-13 1995-09-12 Tetes d'impression a jet d'encre

Publications (2)

Publication Number Publication Date
EP0781203A1 EP0781203A1 (fr) 1997-07-02
EP0781203B1 true EP0781203B1 (fr) 1999-01-27

Family

ID=10761239

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95931308A Expired - Lifetime EP0781203B1 (fr) 1994-09-13 1995-09-12 Tetes d'impression a jet d'encre

Country Status (7)

Country Link
EP (1) EP0781203B1 (fr)
JP (1) JPH10505557A (fr)
KR (1) KR970706128A (fr)
CA (1) CA2199033A1 (fr)
DE (1) DE69507622T2 (fr)
GB (1) GB9418412D0 (fr)
WO (1) WO1996008375A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010003817A1 (de) * 2010-04-09 2011-10-13 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Werkstücküberzug und damit überzogenes Werkstück

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9622177D0 (en) 1996-10-24 1996-12-18 Xaar Ltd Passivation of ink jet print heads
US6447984B1 (en) * 1999-02-10 2002-09-10 Canon Kabushiki Kaisha Liquid discharge head, method of manufacture therefor and liquid discharge recording apparatus
US6288360B1 (en) * 1999-07-14 2001-09-11 Aradigm Corporation Excimer laser ablation process control of multilaminate materials
GB0113639D0 (en) 2001-06-05 2001-07-25 Xaar Technology Ltd Nozzle plate for droplet deposition apparatus
JP4726157B2 (ja) * 2005-02-16 2011-07-20 株式会社リコー ノズル板の製造方法
GB0510987D0 (en) 2005-05-28 2005-07-06 Xaar Technology Ltd Droplet deposition apparatus
CN105189019B (zh) * 2013-06-24 2017-12-22 株式会社日立制作所 激光加工部件的制造方法和激光加工方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2060789T3 (es) * 1988-10-31 1994-12-01 Canon Kk Metodo de fabricacion de un cabezal de impresion por chorros de tinta.
DE69132855T2 (de) * 1990-07-21 2002-06-06 Canon Kk Herstellungsverfahren eines Farbstrahlaufzeichnungskopfes und Farbstrahlaufzeichnungskopf
ATE157046T1 (de) * 1991-01-18 1997-09-15 Canon Kk Verfahren zur herstellung eines farbstrahlaufzeichnungskopfes

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010003817A1 (de) * 2010-04-09 2011-10-13 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Werkstücküberzug und damit überzogenes Werkstück
DE102010003817B4 (de) * 2010-04-09 2013-04-11 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Werkstückschutzfolie und damit folienbeschichtetes Werkstück

Also Published As

Publication number Publication date
EP0781203A1 (fr) 1997-07-02
KR970706128A (ko) 1997-11-03
CA2199033A1 (fr) 1996-03-21
JPH10505557A (ja) 1998-06-02
DE69507622D1 (de) 1999-03-11
GB9418412D0 (en) 1994-11-02
DE69507622T2 (de) 1999-09-09
WO1996008375A1 (fr) 1996-03-21

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