EP0748880A3 - Method of fabricating a hard, adherent and corrosion resistant layer - Google Patents

Method of fabricating a hard, adherent and corrosion resistant layer Download PDF

Info

Publication number
EP0748880A3
EP0748880A3 EP96108290A EP96108290A EP0748880A3 EP 0748880 A3 EP0748880 A3 EP 0748880A3 EP 96108290 A EP96108290 A EP 96108290A EP 96108290 A EP96108290 A EP 96108290A EP 0748880 A3 EP0748880 A3 EP 0748880A3
Authority
EP
European Patent Office
Prior art keywords
adherent
fabricating
hard
resistant layer
corrosion resistant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP96108290A
Other languages
German (de)
French (fr)
Other versions
EP0748880A2 (en
Inventor
Hans-Peter Woeste
Dietmar Dr Rer Nat Schulze
Ruediger Wilberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hochvakuum Dresden VEB
Jado Design Armatur und Beschlag AG
VTD Vakuumtechnik Dresden GmbH
Original Assignee
Hochvakuum Dresden VEB
Jado Design Armatur und Beschlag AG
VTD Vakuumtechnik Dresden GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hochvakuum Dresden VEB, Jado Design Armatur und Beschlag AG, VTD Vakuumtechnik Dresden GmbH filed Critical Hochvakuum Dresden VEB
Publication of EP0748880A2 publication Critical patent/EP0748880A2/en
Publication of EP0748880A3 publication Critical patent/EP0748880A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
EP96108290A 1995-05-29 1996-05-24 Method of fabricating a hard, adherent and corrosion resistant layer Withdrawn EP0748880A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19518981 1995-05-29
DE19518981 1995-05-29

Publications (2)

Publication Number Publication Date
EP0748880A2 EP0748880A2 (en) 1996-12-18
EP0748880A3 true EP0748880A3 (en) 1997-03-12

Family

ID=7762709

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96108290A Withdrawn EP0748880A3 (en) 1995-05-29 1996-05-24 Method of fabricating a hard, adherent and corrosion resistant layer

Country Status (2)

Country Link
EP (1) EP0748880A3 (en)
DE (1) DE19618863C3 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5879532A (en) * 1997-07-09 1999-03-09 Masco Corporation Of Indiana Process for applying protective and decorative coating on an article
DE19808508A1 (en) * 1998-02-27 1999-09-02 Grohe Armaturen Friedrich Body with a coated surface

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2045810A (en) * 1979-03-22 1980-11-05 Nl Vintage Preheating substrates prior to coating to remove hydrogen

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2045810A (en) * 1979-03-22 1980-11-05 Nl Vintage Preheating substrates prior to coating to remove hydrogen

Also Published As

Publication number Publication date
EP0748880A2 (en) 1996-12-18
DE19618863C3 (en) 2003-06-26
DE19618863C2 (en) 1999-04-22
DE19618863A1 (en) 1996-12-05

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