EP0755064A3 - Cathode having a reservoir and method of manufacturing the same - Google Patents

Cathode having a reservoir and method of manufacturing the same Download PDF

Info

Publication number
EP0755064A3
EP0755064A3 EP96111123A EP96111123A EP0755064A3 EP 0755064 A3 EP0755064 A3 EP 0755064A3 EP 96111123 A EP96111123 A EP 96111123A EP 96111123 A EP96111123 A EP 96111123A EP 0755064 A3 EP0755064 A3 EP 0755064A3
Authority
EP
European Patent Office
Prior art keywords
reservoir
cathode
manufacturing
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96111123A
Other languages
German (de)
French (fr)
Other versions
EP0755064B1 (en
EP0755064A2 (en
Inventor
Hiroyuki Shinada
Satoru Fukuhara
Katsuhiro Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of EP0755064A2 publication Critical patent/EP0755064A2/en
Publication of EP0755064A3 publication Critical patent/EP0755064A3/en
Application granted granted Critical
Publication of EP0755064B1 publication Critical patent/EP0755064B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
EP96111123A 1995-07-17 1996-07-10 Cathode having a reservoir and method of manufacturing the same Expired - Lifetime EP0755064B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP17980295A JP3556331B2 (en) 1995-07-17 1995-07-17 Manufacturing method of electron source
JP17980295 1995-07-17
JP179802/95 1995-07-17

Publications (3)

Publication Number Publication Date
EP0755064A2 EP0755064A2 (en) 1997-01-22
EP0755064A3 true EP0755064A3 (en) 1997-06-11
EP0755064B1 EP0755064B1 (en) 2000-06-14

Family

ID=16072157

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96111123A Expired - Lifetime EP0755064B1 (en) 1995-07-17 1996-07-10 Cathode having a reservoir and method of manufacturing the same

Country Status (4)

Country Link
US (1) US5838096A (en)
EP (1) EP0755064B1 (en)
JP (1) JP3556331B2 (en)
DE (1) DE69608859T2 (en)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3440448B2 (en) * 1996-11-12 2003-08-25 日本電子株式会社 Thermal field emission electron gun
FR2795861B1 (en) * 1999-06-29 2002-11-08 Schlumberger Technologies Inc SCHOTTKY ISSUING CATHODE HAVING A ZRO2 RESERVOIR, STABILIZED AND STABILIZATION METHOD
US6680562B1 (en) 1999-08-20 2004-01-20 Fei Company Schottky emitter having extended life
JP4656790B2 (en) * 1999-08-20 2011-03-23 エフ イー アイ カンパニ Schottky emitter with extended life
US6771013B2 (en) 2000-10-17 2004-08-03 Fei Company Low power schottky emitter
EP1207545A3 (en) * 2000-11-17 2007-05-23 Denki Kagaku Kogyo Kabushiki Kaisha Method for determining and setting an operational condition of a thermal field electron emitter
US6798126B2 (en) * 2002-05-03 2004-09-28 Fei Company High angular intensity Schottky electron point source
WO2005008706A2 (en) * 2003-04-01 2005-01-27 Cabot Microelectronics Corporation Electron source and method for making same
US7447298B2 (en) * 2003-04-01 2008-11-04 Cabot Microelectronics Corporation Decontamination and sterilization system using large area x-ray source
ATE453924T1 (en) * 2005-07-14 2010-01-15 Lightlab Sweden Ab CARBON BASED FIELD EMISSION CATHODE AND PRODUCTION PROCESS THEREOF
JP2011076753A (en) * 2009-09-29 2011-04-14 Denki Kagaku Kogyo Kk Electron source and electronic equipment
US8896195B2 (en) * 2010-10-21 2014-11-25 Hermes Microvision, Inc. Filament for electron source
US8810161B2 (en) 2011-12-29 2014-08-19 Elwha Llc Addressable array of field emission devices
US9171690B2 (en) 2011-12-29 2015-10-27 Elwha Llc Variable field emission device
US8946992B2 (en) 2011-12-29 2015-02-03 Elwha Llc Anode with suppressor grid
US9646798B2 (en) 2011-12-29 2017-05-09 Elwha Llc Electronic device graphene grid
US8575842B2 (en) 2011-12-29 2013-11-05 Elwha Llc Field emission device
US8928228B2 (en) 2011-12-29 2015-01-06 Elwha Llc Embodiments of a field emission device
US9018861B2 (en) 2011-12-29 2015-04-28 Elwha Llc Performance optimization of a field emission device
IN2014DN05630A (en) * 2011-12-29 2015-04-03 Elwha Llc
US9349562B2 (en) 2011-12-29 2016-05-24 Elwha Llc Field emission device with AC output
US8692226B2 (en) 2011-12-29 2014-04-08 Elwha Llc Materials and configurations of a field emission device
US8810131B2 (en) 2011-12-29 2014-08-19 Elwha Llc Field emission device with AC output
US8970113B2 (en) 2011-12-29 2015-03-03 Elwha Llc Time-varying field emission device
US9659734B2 (en) 2012-09-12 2017-05-23 Elwha Llc Electronic device multi-layer graphene grid
US9659735B2 (en) 2012-09-12 2017-05-23 Elwha Llc Applications of graphene grids in vacuum electronics

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210988A (en) * 1978-08-24 1980-07-08 Rca Corporation Method for making an indirectly-heated cathode assembly
EP0068111A2 (en) * 1981-06-30 1983-01-05 International Business Machines Corporation Method of forming a cathode structure
JPH0676731A (en) * 1992-06-24 1994-03-18 Denki Kagaku Kogyo Kk Thermoelectric field emission cathode
US5449968A (en) * 1992-06-24 1995-09-12 Denki Kagaku Kogyo Kabushiki Kaisha Thermal field emission cathode
EP0732720A1 (en) * 1995-03-14 1996-09-18 Hitachi, Ltd. Cathode, electron beam emission apparatus using the same, and method of manufacturing the cathode

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356887A (en) * 1965-07-30 1967-12-05 Frederick C W Heil Fe cathode redesign
US3814975A (en) * 1969-08-06 1974-06-04 Gen Electric Electron emission system
US4055780A (en) * 1975-04-10 1977-10-25 National Institute For Researches In Inorganic Materials Thermionic emission cathode having a tip of a single crystal of lanthanum hexaboride
CA1083266A (en) * 1975-06-27 1980-08-05 Hitachi, Ltd. Field emission cathode and method for preparation thereof
US4258283A (en) * 1978-08-31 1981-03-24 Balzers Aktiengesellschaft Fur Hochvakuumtechnik Und Dunne Schichten Cathode for electron emission
JP3264775B2 (en) * 1994-06-29 2002-03-11 電気化学工業株式会社 Thermal field emission electron gun
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4210988A (en) * 1978-08-24 1980-07-08 Rca Corporation Method for making an indirectly-heated cathode assembly
EP0068111A2 (en) * 1981-06-30 1983-01-05 International Business Machines Corporation Method of forming a cathode structure
JPH0676731A (en) * 1992-06-24 1994-03-18 Denki Kagaku Kogyo Kk Thermoelectric field emission cathode
US5449968A (en) * 1992-06-24 1995-09-12 Denki Kagaku Kogyo Kabushiki Kaisha Thermal field emission cathode
EP0732720A1 (en) * 1995-03-14 1996-09-18 Hitachi, Ltd. Cathode, electron beam emission apparatus using the same, and method of manufacturing the cathode

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 018, no. 324 (E - 1564) 20 June 1994 (1994-06-20) *

Also Published As

Publication number Publication date
DE69608859T2 (en) 2001-02-15
EP0755064B1 (en) 2000-06-14
JP3556331B2 (en) 2004-08-18
EP0755064A2 (en) 1997-01-22
JPH0935674A (en) 1997-02-07
US5838096A (en) 1998-11-17
DE69608859D1 (en) 2000-07-20

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