FR2795861B1 - SCHOTTKY ISSUING CATHODE HAVING A ZRO2 RESERVOIR, STABILIZED AND STABILIZATION METHOD - Google Patents

SCHOTTKY ISSUING CATHODE HAVING A ZRO2 RESERVOIR, STABILIZED AND STABILIZATION METHOD

Info

Publication number
FR2795861B1
FR2795861B1 FR0006706A FR0006706A FR2795861B1 FR 2795861 B1 FR2795861 B1 FR 2795861B1 FR 0006706 A FR0006706 A FR 0006706A FR 0006706 A FR0006706 A FR 0006706A FR 2795861 B1 FR2795861 B1 FR 2795861B1
Authority
FR
France
Prior art keywords
zro2
schottky
issuing
stabilized
reservoir
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0006706A
Other languages
French (fr)
Other versions
FR2795861A1 (en
Inventor
Paul J Duval
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Schlumberger Technologies Inc
Original Assignee
Schlumberger Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Technologies Inc filed Critical Schlumberger Technologies Inc
Publication of FR2795861A1 publication Critical patent/FR2795861A1/en
Application granted granted Critical
Publication of FR2795861B1 publication Critical patent/FR2795861B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H01J1/144—Solid thermionic cathodes characterised by the material with other metal oxides as an emissive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/28—Dispenser-type cathodes, e.g. L-cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Cold Cathode And The Manufacture (AREA)
FR0006706A 1999-06-29 2000-05-25 SCHOTTKY ISSUING CATHODE HAVING A ZRO2 RESERVOIR, STABILIZED AND STABILIZATION METHOD Expired - Fee Related FR2795861B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US34310799A 1999-06-29 1999-06-29

Publications (2)

Publication Number Publication Date
FR2795861A1 FR2795861A1 (en) 2001-01-05
FR2795861B1 true FR2795861B1 (en) 2002-11-08

Family

ID=23344742

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0006706A Expired - Fee Related FR2795861B1 (en) 1999-06-29 2000-05-25 SCHOTTKY ISSUING CATHODE HAVING A ZRO2 RESERVOIR, STABILIZED AND STABILIZATION METHOD

Country Status (4)

Country Link
JP (1) JP2001052596A (en)
KR (1) KR20010029866A (en)
DE (1) DE10029840A1 (en)
FR (1) FR2795861B1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4656790B2 (en) * 1999-08-20 2011-03-23 エフ イー アイ カンパニ Schottky emitter with extended life
JP3998556B2 (en) 2002-10-17 2007-10-31 株式会社東研 High resolution X-ray microscope
US7218703B2 (en) 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus
EP1557865A1 (en) * 2004-01-23 2005-07-27 Tohken Co., Ltd. Microfocus x-ray tube for microscopic inspection apparatus
EP1622184B1 (en) 2004-07-28 2011-05-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter for an ion source and method of producing same
EP1705684A1 (en) * 2005-03-22 2006-09-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Stabilized emitter and method for stabilizing same
US7969080B2 (en) 2006-09-05 2011-06-28 Denki Kagaku Kogyo Kabushiki Kaisha Electron source
JP4782736B2 (en) 2007-07-12 2011-09-28 電気化学工業株式会社 Electron source

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3814975A (en) * 1969-08-06 1974-06-04 Gen Electric Electron emission system
US5449968A (en) * 1992-06-24 1995-09-12 Denki Kagaku Kogyo Kabushiki Kaisha Thermal field emission cathode
US5616926A (en) * 1994-08-03 1997-04-01 Hitachi, Ltd. Schottky emission cathode and a method of stabilizing the same
JP3556331B2 (en) * 1995-07-17 2004-08-18 株式会社日立製作所 Manufacturing method of electron source

Also Published As

Publication number Publication date
FR2795861A1 (en) 2001-01-05
JP2001052596A (en) 2001-02-23
DE10029840A1 (en) 2001-01-04
KR20010029866A (en) 2001-04-16

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Legal Events

Date Code Title Description
ST Notification of lapse