EP0715330A1 - Strahlungskühlvorrichtung in Bezug auf Anzeigevorrichtungen - Google Patents
Strahlungskühlvorrichtung in Bezug auf Anzeigevorrichtungen Download PDFInfo
- Publication number
- EP0715330A1 EP0715330A1 EP95308552A EP95308552A EP0715330A1 EP 0715330 A1 EP0715330 A1 EP 0715330A1 EP 95308552 A EP95308552 A EP 95308552A EP 95308552 A EP95308552 A EP 95308552A EP 0715330 A1 EP0715330 A1 EP 0715330A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- cooling
- workpiece
- radiation
- accordance
- radiation cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D13/00—Stationary devices, e.g. cold-rooms
- F25D13/06—Stationary devices, e.g. cold-rooms with conveyors carrying articles to be cooled through the cooling space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D15/00—Handling or treating discharged material; Supports or receiving chambers therefor
- F27D15/02—Cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D31/00—Other cooling or freezing apparatus
Definitions
- the present invention relates generally to field emission flat panel display device production and, more particularly, to radiation cooling of a field emission device anode, cathode, and final assembly during manufacturing.
- Radiation cooling is the process by which heat is transferred from a body of higher temperature to a body of lower temperature by virtue of its temperature difference, without the aid of an intervening medium.
- the energy is transferred by electromagnetic radiation.
- Radiation is the primary means of thermal transport in a vacuum.
- the Clerc ('820) patent listed above discloses a field emission device (FED) flat panel color display.
- This color display has a first glass substrate on which are arranged a matrix of conductors forming the cathode and gate electrodes.
- the field emission flat panel display also has a second glass substrate facing the first substrate and including regularly spaced parallel conductive stripes coated with phosphor comprising the anode electrode. The image created by the phosphor stripes is observed from the side of the anode glass substrate which is opposite to the phosphor excitation.
- the anode and cathode of a field emission display are attached to each other using a glass frit seal or rod at >400°C in air or vacuum.
- the display is heated by placing it between two heated plates.
- the time required to heat the device is moderate in order to limit the thermal gradients in the glass from the outside of the device to the inside of the device. Thermal gradients in the glass can cause stress in the glass, resulting in breakage if the gradients are large enough. Thermal gradients cause stress in the glass because of thermal expansion. If the outside of the glass is at a higher temperature than the inside of the display, the outside surface will be in tension.
- An apparatus for providing radiation cooling of a workpiece which has an evacuated chamber which encloses the workpiece, and has a cold plate for facilitating the cooling of the workpiece by radiation cooling.
- the temperature of the cold surface is maintained by actively cooling the cold plate using a cold fluid, such as liquid nitrogen.
- Methods for radiation cooling the workpiece are also disclosed.
- FIG. 1 there is shown a schematic diagram of a first embodiment of a radiation cooling apparatus of the present invention.
- the radiation cooling apparatus 10 is coupled to a standard radiation heating apparatus 20.
- the essential elements of a standard radiation heating apparatus are a quartz lamp 40 and a vacuum chamber 30 which is evacuated by vacuum pump 60 to a pressure of about 1 x 10 -7 Torr.
- a workpiece 50 disposed in the beam of the lamp 40, is heated through radiation heating.
- Workpiece 50 in the preferred embodiment is either an anode, a cathode, or an anode/cathode assembly.
- the workpiece 50 enters the chamber 30 through a door 70.
- a holding apparatus such as holding rods 80 which slide on tracks 90 hold the workpiece 50 in place during radiation heating and also carry the workpiece 50 from heating chamber 30 to cooling chamber 100.
- holding rods 80 are made of a material having a low thermal conductivity. Holding rods 80 made of such a material will be less likely to remove heat by conduction from workpiece 50 at the points of contact between holding rods 80 and workpiece 50.
- the purpose for heating the individual FED anode and cathode is to outgas contaminants from workpiece 50.
- the gaseous contaminants are removed from the ambient by the pumping system. Removing contaminants before and during assembly reduces outgassing after the panel is sealed. This will improve the long term reliability of the panel.
- This process of removing contaminants, called conditioning, is performed by raising the temperature of the workpiece 50. Next, the workpiece is stabilized at that high temperature to ensure that the conditioning process is complete.
- a second reason for heating the FED assembly is to cause a glass frit or rod placed between the anode and cathode to melt and form a glass seal. This sealing operation takes place at >400°C. This seal is used to maintain a vacuum between the anode and cathode.
- isolation gate 190 which separates chamber 30 from chamber 100, is opened. Holding rods 80 move the workpiece 50 along tracks 90 into evacuated cooling chamber 100. Isolation gate 190 is now closed and a new workpiece can now be conditioned in the radiation heating apparatus 20 as workpiece 50 is being cooled in the radiation cooling apparatus 10.
- Radiation cooling apparatus 10 shown in FIG. 1 has a cooling chamber 100 which is also evacuated by vacuum pump 60 to approximately 1 x 10 -7 Torr. Located in the chamber 100 are very cold plates 140 which are disposed parallel to workpiece 50. The temperature of cold plates 140 is regulated by the flow of a gas or liquid, such as nitrogen, through pipes 150 within the cold plates 140. The gas or liquid flowing through pipes 150 removes, by conduction, energy collected by the cold plates 140 from workpiece 50. Cooling units 160 contain a compressor 180 and condenser 170 which together refrigerate the liquid in the pipes 150. In the preferred embodiment, the cold plates 140 are maintained at a temperature of around -196°C. Therefore, a very large temperature differential is maintained between the heated workpiece 50 and cold plates 140.
- a gas or liquid such as nitrogen
- the cold plates 140 are made of a high emissivity and high thermal conductivity material such as black anodized aluminum or oxidized copper.
- a high emissivity material as cold plates 140 facilitates efficient absorption of the thermal radiation emitted by workpiece 50.
- the use of a high thermal conductivity material facilitates efficient conduction of the heat from cold plates 140 to the circulating fluid in pipes 150.
- the heat transferred by radiant energy from workpiece 50 is proportional to (1) the difference in the fourth power of the absolute temperatures (T 4 ) of the hot source (workpiece 50) and the more-cool receiver of the radiation (cold plates 140) and to (2) a geometric constant which describes the form factors of workpiece 50 and the cold plates 140.
- the workpiece 50 cools more rapidly at the initial high temperature when the temperature difference between the workpiece and the cold plates is maximum. Because the workpiece 50 is in greatest danger of temperature induced stress at temperatures above 250°C, it is possible to safely remove the workpiece 50 from chamber 100 through door 200 at temperatures somewhere between 250°C and room temperature. In this non-critical temperature range, standard conduction and convection techniques may be used to complete the cooling process of the workpiece 50.
- the process of radiative cooling as described is used to cool the FED anode and cathode after conditioning, and to cool a FED after the anode and cathode has been assembled.
- the radiant cooling process of the present invention as described above can reduce the time for cooling the workpiece 50 from approximately 8 hours to approximately 5 minutes. Even though the present invention reduces the cooling time of workpiece 50, the technique of the present invention does not introduce harmful stress into workpiece 50.
- the radiation cooling process of the present invention is used to cool the anode and cathode after conditioning and is also used to cool the anode/cathode assembly after sealing. Because the cooling process is used at least three times during the manufacture of a single FED, a significant manufacturing cycle time reduction is realized. By reducing cycle time in this manner, manufacturing costs are reduced and therefore the FED can be priced more competitively in the marketplace.
- the cold plate 210 encircles the workpiece 50. By encompassing the workpiece 50, a more uniform cooling of workpiece 50 from all sides may be realized.
- cool plate 110 and cold plates 140 can be chilled by the use of other fluids or gases or other refrigeration techniques.
- other methods may be used to transport the workpiece 50 between chambers 30 and 100; and other methods may be used to hold the workpiece 50 in place during heating and cooling.
- the cold plates 140 may be adjustable. Adjustable cold plates 140 could be moved throughout the radiation cooling process to increase or decrease the cooling rate by changing the geometric constant. Additionally, adjustable cold plates 140 could be positioned closer or further apart to accommodate differences in workpiece sizes and shapes.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
- Cold Cathode And The Manufacture (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US34518494A | 1994-11-28 | 1994-11-28 | |
US345184 | 1994-11-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
EP0715330A1 true EP0715330A1 (de) | 1996-06-05 |
Family
ID=23353921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP95308552A Withdrawn EP0715330A1 (de) | 1994-11-28 | 1995-11-28 | Strahlungskühlvorrichtung in Bezug auf Anzeigevorrichtungen |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0715330A1 (de) |
JP (1) | JPH08222130A (de) |
KR (1) | KR960019424A (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021020707A1 (ko) * | 2019-07-29 | 2021-02-04 | 고려대학교 산학협력단 | 복사냉각 성능 측정장치 |
CN114885450A (zh) * | 2022-07-11 | 2022-08-09 | 中国飞机强度研究所 | 一种空天飞机测试用的极高温极低温热强度循环试验系统 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100370415B1 (ko) * | 1996-09-24 | 2003-03-15 | 삼성에스디아이 주식회사 | 전계 효과 전자 방출 소자의 봉착 장치 및 방법 |
KR100434524B1 (ko) * | 1997-11-28 | 2004-09-07 | 삼성에스디아이 주식회사 | 전계방출소자의제조방법 |
JP3754859B2 (ja) * | 2000-02-16 | 2006-03-15 | キヤノン株式会社 | 画像表示装置の製造法 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3001382A (en) * | 1958-06-16 | 1961-09-26 | Reflectotherm Inc | Radiant cooling systems |
US3645712A (en) * | 1970-05-06 | 1972-02-29 | Corning Glass Works | Radiation target structure and use to cool molten glass |
US3840360A (en) * | 1971-07-09 | 1974-10-08 | Pilkington Brothers Ltd | Method of thermally conditioning hot materials |
JPS5931540A (ja) * | 1982-08-17 | 1984-02-20 | Toshiba Corp | ブラウン管の製造方法 |
US4443955A (en) * | 1980-05-30 | 1984-04-24 | Waagner-Biro A.G. | Method and installation for cooling hot bulk material |
JPS59108238A (ja) * | 1982-12-13 | 1984-06-22 | Matsushita Electric Ind Co Ltd | 画像表示装置の製造方法 |
JPS61131354A (ja) * | 1984-11-29 | 1986-06-19 | Fujitsu Ltd | 半導体装置の製造装置 |
SU1302349A1 (ru) * | 1984-12-25 | 1987-04-07 | МВТУ им.Н.Э.Баумана | Способ термообработки стеклооболочек электровакуумных приборов |
JPS62103366A (ja) * | 1985-10-31 | 1987-05-13 | Nippon Kokan Kk <Nkk> | 鋼帯の冷却方法 |
US5096480A (en) * | 1991-03-20 | 1992-03-17 | Glasstech, Inc. | Apparatus for radiatively cooling glass sheets |
JPH06163446A (ja) * | 1992-11-25 | 1994-06-10 | Ishikawajima Harima Heavy Ind Co Ltd | イオンドーピング方法及び装置 |
JPH06323577A (ja) * | 1993-05-14 | 1994-11-25 | Central Res Inst Of Electric Power Ind | 放射冷房装置 |
-
1995
- 1995-11-27 KR KR1019950043861A patent/KR960019424A/ko not_active Application Discontinuation
- 1995-11-28 JP JP30953095A patent/JPH08222130A/ja active Pending
- 1995-11-28 EP EP95308552A patent/EP0715330A1/de not_active Withdrawn
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3001382A (en) * | 1958-06-16 | 1961-09-26 | Reflectotherm Inc | Radiant cooling systems |
US3645712A (en) * | 1970-05-06 | 1972-02-29 | Corning Glass Works | Radiation target structure and use to cool molten glass |
US3840360A (en) * | 1971-07-09 | 1974-10-08 | Pilkington Brothers Ltd | Method of thermally conditioning hot materials |
US4443955A (en) * | 1980-05-30 | 1984-04-24 | Waagner-Biro A.G. | Method and installation for cooling hot bulk material |
JPS5931540A (ja) * | 1982-08-17 | 1984-02-20 | Toshiba Corp | ブラウン管の製造方法 |
JPS59108238A (ja) * | 1982-12-13 | 1984-06-22 | Matsushita Electric Ind Co Ltd | 画像表示装置の製造方法 |
JPS61131354A (ja) * | 1984-11-29 | 1986-06-19 | Fujitsu Ltd | 半導体装置の製造装置 |
SU1302349A1 (ru) * | 1984-12-25 | 1987-04-07 | МВТУ им.Н.Э.Баумана | Способ термообработки стеклооболочек электровакуумных приборов |
JPS62103366A (ja) * | 1985-10-31 | 1987-05-13 | Nippon Kokan Kk <Nkk> | 鋼帯の冷却方法 |
US5096480A (en) * | 1991-03-20 | 1992-03-17 | Glasstech, Inc. | Apparatus for radiatively cooling glass sheets |
JPH06163446A (ja) * | 1992-11-25 | 1994-06-10 | Ishikawajima Harima Heavy Ind Co Ltd | イオンドーピング方法及び装置 |
JPH06323577A (ja) * | 1993-05-14 | 1994-11-25 | Central Res Inst Of Electric Power Ind | 放射冷房装置 |
Non-Patent Citations (7)
Title |
---|
DATABASE WPI Week 8746, Derwent World Patents Index; AN 87-326900 * |
PATENT ABSTRACTS OF JAPAN vol. 008, no. 119 (E - 248) 5 June 1984 (1984-06-05) * |
PATENT ABSTRACTS OF JAPAN vol. 008, no. 226 (E - 272) 17 October 1984 (1984-10-17) * |
PATENT ABSTRACTS OF JAPAN vol. 010, no. 319 (E - 450) 30 October 1986 (1986-10-30) * |
PATENT ABSTRACTS OF JAPAN vol. 011, no. 317 (C - 452) 15 October 1987 (1987-10-15) * |
PATENT ABSTRACTS OF JAPAN vol. 018, no. 477 (E - 1602) 6 September 1994 (1994-09-06) * |
PATENT ABSTRACTS OF JAPAN vol. 940, no. 011 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021020707A1 (ko) * | 2019-07-29 | 2021-02-04 | 고려대학교 산학협력단 | 복사냉각 성능 측정장치 |
CN114885450A (zh) * | 2022-07-11 | 2022-08-09 | 中国飞机强度研究所 | 一种空天飞机测试用的极高温极低温热强度循环试验系统 |
CN114885450B (zh) * | 2022-07-11 | 2022-09-20 | 中国飞机强度研究所 | 一种空天飞机测试用的极高温极低温热强度循环试验系统 |
Also Published As
Publication number | Publication date |
---|---|
KR960019424A (ko) | 1996-06-17 |
JPH08222130A (ja) | 1996-08-30 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB IT NL |
|
17P | Request for examination filed |
Effective date: 19961205 |
|
17Q | First examination report despatched |
Effective date: 19980605 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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18D | Application deemed to be withdrawn |
Effective date: 19981216 |