EP0695641A3 - Arrangement for plate-like piezoelectric actuators and method of manufacturing - Google Patents

Arrangement for plate-like piezoelectric actuators and method of manufacturing Download PDF

Info

Publication number
EP0695641A3
EP0695641A3 EP95250165A EP95250165A EP0695641A3 EP 0695641 A3 EP0695641 A3 EP 0695641A3 EP 95250165 A EP95250165 A EP 95250165A EP 95250165 A EP95250165 A EP 95250165A EP 0695641 A3 EP0695641 A3 EP 0695641A3
Authority
EP
European Patent Office
Prior art keywords
arrangement
manufacturing
plate
piezoelectric actuators
actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95250165A
Other languages
German (de)
French (fr)
Other versions
EP0695641A2 (en
EP0695641B1 (en
Inventor
Wolfgang Dr Thiel
Junming Dr Zhang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Francotyp Postalia GmbH
Original Assignee
Francotyp Postalia GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Francotyp Postalia GmbH filed Critical Francotyp Postalia GmbH
Publication of EP0695641A2 publication Critical patent/EP0695641A2/en
Publication of EP0695641A3 publication Critical patent/EP0695641A3/en
Application granted granted Critical
Publication of EP0695641B1 publication Critical patent/EP0695641B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP95250165A 1994-08-03 1995-07-06 Arrangement for plate-like piezoelectric actuators and method of manufacturing Expired - Lifetime EP0695641B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4428847 1994-08-03
DE4428847 1994-08-03

Publications (3)

Publication Number Publication Date
EP0695641A2 EP0695641A2 (en) 1996-02-07
EP0695641A3 true EP0695641A3 (en) 1997-03-12
EP0695641B1 EP0695641B1 (en) 2001-04-04

Family

ID=6525703

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95250165A Expired - Lifetime EP0695641B1 (en) 1994-08-03 1995-07-06 Arrangement for plate-like piezoelectric actuators and method of manufacturing

Country Status (3)

Country Link
US (2) US5729263A (en)
EP (1) EP0695641B1 (en)
DE (1) DE59509149D1 (en)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3697829B2 (en) * 1997-04-09 2005-09-21 ブラザー工業株式会社 Inkjet head manufacturing method
WO1999000252A1 (en) * 1997-06-27 1999-01-07 Seiko Epson Corporation Piezoelectric vibrator unit, method for manufacturing the same, and ink-jet recording head
EP1046506A1 (en) * 1999-04-19 2000-10-25 Océ-Technologies B.V. Inkjet printhead
JP4713742B2 (en) 1999-04-20 2011-06-29 シーゲイト テクノロジー エルエルシー Method for forming electrode pattern of differential PZT actuator
US6755511B1 (en) * 1999-10-05 2004-06-29 Spectra, Inc. Piezoelectric ink jet module with seal
US20060222756A1 (en) * 2000-09-29 2006-10-05 Cordis Corporation Medical devices, drug coatings and methods of maintaining the drug coatings thereon
US7261735B2 (en) * 2001-05-07 2007-08-28 Cordis Corporation Local drug delivery devices and methods for maintaining the drug coatings thereon
US8182527B2 (en) 2001-05-07 2012-05-22 Cordis Corporation Heparin barrier coating for controlled drug release
US7195640B2 (en) * 2001-09-25 2007-03-27 Cordis Corporation Coated medical devices for the treatment of vulnerable plaque
US20040148016A1 (en) * 2002-11-07 2004-07-29 Klein Dean A. Biocompatible medical device coatings
US6890067B2 (en) * 2003-07-03 2005-05-10 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US20050206679A1 (en) * 2003-07-03 2005-09-22 Rio Rivas Fluid ejection assembly
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
KR20070087223A (en) 2004-12-30 2007-08-27 후지필름 디마틱스, 인크. Ink jet printing
US7380914B2 (en) * 2005-04-26 2008-06-03 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7540593B2 (en) * 2005-04-26 2009-06-02 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US8125120B2 (en) * 2008-02-15 2012-02-28 Nikon Corporation Vibration device, antidust device, camera, vibration device inspection method, method for manufacturing vibration device and vibration method
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US9070394B1 (en) 2013-03-18 2015-06-30 Magnecomp Corporation Suspension microactuator with wrap-around electrode on inactive constraining layer
US9224410B1 (en) * 2013-09-04 2015-12-29 Magnecomp Corporation Suspension having microactuator grounded to opposite side of metal support layer
JP6451306B2 (en) * 2014-12-23 2019-01-16 ブラザー工業株式会社 Liquid ejection device and liquid ejection head
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing
JP7310133B2 (en) * 2018-12-26 2023-07-19 セイコーエプソン株式会社 liquid injection unit

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3628346A1 (en) * 1986-08-21 1988-02-25 Siemens Ag Ink jet print had in thick-layer technology
DE3805279A1 (en) * 1988-02-19 1989-08-31 Siemens Ag Piezoelectric ink jet print head and method for its manufacture
JPH0292644A (en) * 1988-09-30 1990-04-03 Seiko Epson Corp Ink jet head
EP0469916A1 (en) * 1990-08-03 1992-02-05 Canon Kabushiki Kaisha Ink jet recording head manufacturing method
EP0494401A1 (en) * 1991-01-07 1992-07-15 Sharp Kabushiki Kaisha Ink jet head apparatus
EP0516284A2 (en) * 1991-05-28 1992-12-02 Brother Kogyo Kabushiki Kaisha Droplet jet device
WO1993025390A1 (en) * 1992-06-11 1993-12-23 Seiko Epson Corporation Ink jet head and method of manufacturing ink jet head

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US4551647A (en) * 1983-03-08 1985-11-05 General Electric Company Temperature compensated piezoelectric transducer and lens assembly and method of making the assembly
DE3630206A1 (en) * 1985-09-06 1987-03-19 Fuji Electric Co Ltd INK JET PRINT HEAD
US4703333A (en) * 1986-01-30 1987-10-27 Pitney Bowes Inc. Impulse ink jet print head with inclined and stacked arrays
DE3710654A1 (en) 1987-03-31 1988-10-13 Siemens Ag Ink jet print head of multi-layer construction
DE3701470A1 (en) * 1987-01-20 1988-07-28 Siemens Ag Method for producing a transducer element for electroacoustic transducers
DE3725499A1 (en) * 1987-07-31 1989-02-09 Siemens Ag PIEZOELECTRIC INK PRINT HEAD AND METHOD FOR PRODUCING THE SAME
DE3725500A1 (en) * 1987-07-31 1989-02-09 Siemens Ag PIEZOELECTRIC INK PRINT HEAD AND METHOD FOR PRODUCING THE SAME
DE3733109A1 (en) 1987-09-30 1989-04-13 Siemens Ag Method for producing a piezoceramic element for an ink jet printer
DE3804165A1 (en) 1988-02-11 1989-08-24 Olympia Aeg METHOD FOR EQUIPPING AN INK JET PRINT HEAD WITH PIEZO CRYSTALS
EP0486256B1 (en) * 1990-11-13 1997-08-13 Citizen Watch Co., Ltd. Printing head for ink-jet printer
JP3144949B2 (en) * 1992-05-27 2001-03-12 日本碍子株式会社 Piezoelectric / electrostrictive actuator
DE4225799A1 (en) 1992-07-31 1994-02-03 Francotyp Postalia Gmbh Inkjet printhead and process for its manufacture
DE9404328U1 (en) * 1994-03-10 1994-05-19 Francotyp-Postalia Gmbh, 13409 Berlin Inkjet printhead

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3628346A1 (en) * 1986-08-21 1988-02-25 Siemens Ag Ink jet print had in thick-layer technology
DE3805279A1 (en) * 1988-02-19 1989-08-31 Siemens Ag Piezoelectric ink jet print head and method for its manufacture
JPH0292644A (en) * 1988-09-30 1990-04-03 Seiko Epson Corp Ink jet head
EP0469916A1 (en) * 1990-08-03 1992-02-05 Canon Kabushiki Kaisha Ink jet recording head manufacturing method
EP0494401A1 (en) * 1991-01-07 1992-07-15 Sharp Kabushiki Kaisha Ink jet head apparatus
EP0516284A2 (en) * 1991-05-28 1992-12-02 Brother Kogyo Kabushiki Kaisha Droplet jet device
WO1993025390A1 (en) * 1992-06-11 1993-12-23 Seiko Epson Corporation Ink jet head and method of manufacturing ink jet head
EP0616890A1 (en) * 1992-06-11 1994-09-28 Seiko Epson Corporation Ink jet head and method of manufacturing ink jet head

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 014, no. 291 (M - 0989) 22 June 1990 (1990-06-22) *

Also Published As

Publication number Publication date
EP0695641A2 (en) 1996-02-07
EP0695641B1 (en) 2001-04-04
US5729263A (en) 1998-03-17
US5883651A (en) 1999-03-16
DE59509149D1 (en) 2001-05-10

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