EP0695641A2 - Arrangement for plate-like piezoelectric actuators and method of manufacturing - Google Patents

Arrangement for plate-like piezoelectric actuators and method of manufacturing Download PDF

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Publication number
EP0695641A2
EP0695641A2 EP95250165A EP95250165A EP0695641A2 EP 0695641 A2 EP0695641 A2 EP 0695641A2 EP 95250165 A EP95250165 A EP 95250165A EP 95250165 A EP95250165 A EP 95250165A EP 0695641 A2 EP0695641 A2 EP 0695641A2
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EP
European Patent Office
Prior art keywords
plate
electrodes
piezo actuators
process according
metallized
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP95250165A
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German (de)
French (fr)
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EP0695641B1 (en
EP0695641A3 (en
Inventor
Wolfgang Dr. Thiel
Junming Dr. Zhang
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Francotyp Postalia GmbH
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Francotyp Postalia GmbH
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Publication of EP0695641A3 publication Critical patent/EP0695641A3/en
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Publication of EP0695641B1 publication Critical patent/EP0695641B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection

Definitions

  • the invention relates to an arrangement and a manufacturing method for plate-shaped piezo actuators, in particular for ink printheads, which are composed of ink printing modules in a stacked construction.
  • Such ink printheads are intended for use in small, fast printers, which in turn are part of modern machines for franking mail or for printing addresses. In contrast to the conventional office printer with line-by-line printing, these machines print as a single franking imprint in one pass of the mail. Corresponding to this substantially larger print width - approximately one inch - the number of ink nozzles to be arranged one below the other and thus also the number of piezo actuators in an ink print head is considerably larger than in the case of ink print heads for office printers.
  • piezo actuators are usually used as piezo actuators in which a piezoelectric material, for example lead zirconate titanate (PZT), is arranged between two metal electrodes.
  • PZT lead zirconate titanate
  • the carrier plate - at the same time membrane plate over the ink pressure chambers - for the piezo actuators can consist of glass, ceramic, plastic or metal. In the latter case, an electrode could be omitted, but then a conductive adhesive is required.
  • a planar ink print head is known, compare DE 37 10 654 A1, which is composed of metal plates.
  • One of the plates is a membrane plate made of nickel with a plate thickness of 0.03 mm, on which, according to the number of nozzles, piezo plates with a diameter of approximately 1 mm are arranged as drive elements for the pressure chambers.
  • a pressure chamber plate made of nickel with a plate thickness of 0.2 mm adjoins the membrane plate; this corresponds to the desired height of the pressure chambers.
  • the piezoplates are individually glued or soldered onto the membrane plate in the areas above the pressure chambers. The assembly and adjustment effort is considerable for this.
  • the situation is similar in the case of another known solution for an ink print head, compare US 4,703,333.
  • the coatings on the piezo actuators facing away from the membrane plate are contacted with the connections of a strip conductor.
  • a piezoelectric ink print head with a monolithic piezoceramic body is known, compare DE 38 05 279 A1, which has transducers arranged parallel to one another.
  • Each transducer has a planar, piezoelectric drive element, a pressure chamber, an ink channel and a nozzle.
  • the pressure chambers, the ink channels and the nozzles are designed as cavities in a piezoceramic body.
  • Each drive element has an outer electrode, an inner electrode and an active piezoceramic layer arranged between the electrodes.
  • the drive elements are acoustically separated from one another by cuts in the active piezoceramic layer. In other words, the incisions are intended to prevent crosstalk between the individual drive elements.
  • piezoceramic raw foils are stacked on top of one another, pressed under vacuum and sintered.
  • a piezoceramic raw foil is structured by etching; the resulting cavities correspond to the shape of the pressure chambers, the pressure chamber exits and the ink channels. The etching is done by spray etching or laser etching.
  • An intermediate raw foil made of piezoceramic, which is metallized on one side, is placed on the structured piezoceramic raw foil. After sintering, the piezoceramic of the intermediate raw film forms the pressure chamber walls, the metallization being on the side facing away from the pressure chambers.
  • the metallization is produced by printing the intermediate raw film with a metal paste. After sintering, it forms the interconnected inner electrodes.
  • An upper piezoceramic raw film is arranged on the intermediate raw film, from which the active piezoceramic layers are formed after sintering.
  • the openings of the ink channels are exposed by material removal during mechanical processing.
  • the outer electrodes are applied to the outer side of the active piezoceramic layers by sputtering using a mask or by screen printing.
  • the converters are then polarized and the drive elements separated.
  • the resulting piezoceramic body is contacted with connections of a connecting tape and inserted into a housing or a holding frame.
  • a method for equipping an ink jet print head with piezo actuators is known, compare DE 38 04 165 A1, in which a piezoceramic plate is first firmly connected to a membrane plate and only then is the piezo actuators separated from the piezoceramic plate.
  • the membrane plate is made of glass and is provided with a zinc or nickel oxide layer on the side facing the piezoceramic plate. Both plates are connected with an adhesive.
  • the piezo actuators are by means of a cutting device, such as a laser beam device or cut-off machine, isolated. The piezo actuators are expediently separated from the piezoceramic plate before the adhesive connection apart from a connecting web.
  • the piezoceramic plate serves as an assembly aid and prevents incorrect polarity.
  • the metal oxide layer on the glass plate represents the common electrode for the piezo actuators.
  • a conductive adhesive is required in order for there to be a secure contact between the one side of the piezo actuators and the metal oxide layer.
  • Metal layers on glass substrates are known to have poor adhesion. Since the joint between the metallized glass membrane and the piezo actuators is subject to strong mechanical loads due to the periodic vibrations, the metal layer can become detached from the glass and the print module can fail.
  • the purpose of the invention is to simplify the manufacture of ink printheads with regard to the part of piezo actuators.
  • the invention has for its object to provide an arrangement and a manufacturing method for plate-shaped piezo actuators for ink printheads of the type mentioned, with which an assembly without special adjustment effort, a secure electrode and piezo actuator attachment without touching ink and a simple contact is made possible . High temperature processes and conductive adhesives should be avoided. The choice of material for the membrane plate should be independent of the piezo actuators. According to the invention we solved this problem according to the claims.
  • the proposed solution offers a number of advantages. Because both electrodes are accessible from the same side are, contacting with connecting lines is possible in the simplest way and in only one joining direction. In addition to bonding and soldering, there is even the possibility of simple pressure contacting.
  • the design of the piezo actuator plate allows the use of appropriately assembled ribbon cables for control with a connection module. Depending on whether a larger number of piezo actuators or only a few are to be installed, simple assembly without complicated adjustment is possible due to the common connection via the active area. The additional space requirement is irrelevant, especially since a finished structuring and assembly of the piezo actuators is also possible before application to the membrane.
  • both the electrodes and the adhesive connection need not be corrosion-resistant to the ink. It is preferably oriented towards a silver alloy. There is no need for a complicated electrode guide from inside the module.
  • the solution according to the invention also allows the use of already coated and polarized piezo plates. It is then only necessary to subsequently metallize one end face and to carry out the structuring, although there is also extensive technological freedom.
  • each piezo actuator 1 covered on both sides with electrodes 13, 14 has an active region 11 and an inactive region 12, an electrode 14 extending over an end face 15 of the piezo actuator 1 into the inactive region 12 of the opposite side.
  • a plurality of piezo actuators 8 x 1 and 2 x 8 x 1 have a common inactive region 12, into which a common electrode 14 extends from the opposite side.
  • the piezo actuators 1 can be arranged like a comb according to FIG. 2 or like a bar - like a chocolate bar - according to FIG. 3. In any case, they are all built identically.
  • the electrodes 13.1, 13.2 to 13.8 and 14 or 13.01, 13.02 to 13.16 and 14 are in direct contact with connecting lines 21 to 28 and 20 or 210 to 226 and 200 of a ribbon cable 2 for the control. As can be seen in FIG.
  • the ribbon cable 2 can be provided with a connection module 3 which has a recess 31 above the separation area between the active and inactive areas.
  • the connection module 3 is placed on the piezo actuator plate 1 and the membrane plate 4 via adjustment holes 32.
  • the piezo actuator plate 1 is seated so on the membrane plate 4 that the piezo actuators 1 are in areas above not shown ink pressure chambers.
  • ink droplets are sprayed out of the nozzles 51 of a nozzle plate 5.
  • the ink pressure chambers, ink channels and nozzles are molded into the nozzle plate 5 in a manner that is not visible.
  • a second piezo actuator plate 1 with likewise 8 piezo actuators 1 on the underside is coupled accordingly to the nozzle plate 5 via a membrane plate 6.
  • the number of nozzles 51 is 16 according to 2 x 8 piezo actuators.
  • a corresponding mask cover is used.
  • the now metallized plate 1 is polarized in the usual way by applying a polarization voltage.
  • the polarized plate 1 with its continuously metallized broadside is attached to a membrane plate 6 in a layer thickness of 1 to 5 ⁇ m by means of a suitable adhesive, such as a low-viscosity epoxy resin adhesive or a UV-curable adhesive.
  • a suitable adhesive such as a low-viscosity epoxy resin adhesive or a UV-curable adhesive.
  • the plate 1 is then structured using a suitable method in such a way that a desired pattern of individual piezo actuators nx 1, see also FIGS. 2 and 3, is present.
  • the structured plate 1 with its electrodes 13, 13.01 to 13.n, 14 in a suitable manner, such as bonding, soldering or pressing, via a connection module 3, contacted with associated connecting lines 20 to 2n of a ribbon cable 2.
  • a modification of the method described above is possible in such a way that the plate 1 is first structured after the metallization, then glued polarized onto the membrane plate 6 and finally contacted.
  • Another variant consists in first polarizing a piezoplate 1 which has already been metallized on the broad sides - prefabricated component. Then the structuring takes place according to the desired pattern. In addition, the end face is metallized, which lies parallel to the dividing line between the active and passive areas, so that the electrode 14 is thereby extended into the inactive area of the opposite side. Finally, the plate 1 is glued to the membrane plate with the continuously metallized broadside as before, and then the electrodes 13, 13.01 to 13n, 14 are contacted with the associated connecting lines of the ribbon cable 2.
  • the metallization can be carried out by means of galvanization, sputtering, vapor deposition or screen printing.
  • a silver alloy is preferably used as the material.
  • Aluminum alloys are by no means excluded.
  • the structuring can be carried out by sawing, etching, laser etching or sandblasting.

Abstract

Each actuator (1) has electrodes (13,14) applied to both sides. One electrode is divided into eight parallel segments (13.1,13.8) overlying an active region (11). The other electrode (14) extends without interruption over the underside and part of the topside of an inactive region (12). The electrodes of identically constructed actuators are contacted directly by the conductors of a ribbon cable for control purposes. In mfr. there are several possible sequences of structuring and attachment to the diaphragm plate after metallisation and polarisation of the piezoelectric (pref. PZT) slab.

Description

Die Erfindung betrifft eine Anordnung sowie ein Herstellungsverfahren für plattenförmige Piezoaktoren, insbesondere für Tintendruckköpfe, die aus Tintendruckmodulen in Stapelbauweise zusammengesetzt sind.The invention relates to an arrangement and a manufacturing method for plate-shaped piezo actuators, in particular for ink printheads, which are composed of ink printing modules in a stacked construction.

Derartige Tintendruckköpfe sind für den Einsatz in kleinen schnellen Druckern vorgesehen, die wiederum Bestandteil von modernen Maschinen zum Frankieren von Postgut oder zum Drucken von Adressen sind. Im Unterschied zum üblichen Bürodrucker mit zeilenweisem Abdruck erfolgt der Druck bei diesen Maschinen als einmaliger Frankierabdruck in einem Durchlauf des Postgutes. Entsprechend dieser wesentlich größeren Druckbreite - ungefähr ein Inch - ist die Anzahl untereinander anzuordnender Tintendüsen und damit auch die Anzahl der Piezoaktoren in einem Tintendruckkopf erheblich größer als bei Tintendruckköpfen für Bürodrucker. Um den modernen Komfort - Klischees mit Wort- und Bildzeichen - für Frankiermaschinen mit guter Druckqualität zu erfüllen, sind Druckauflösungen von annähernd 200 dpi erforderlich, das bedeutet Tintendruckköpfe mit derselben Düsen- und Piezoaktorenzahl bei einer Druckbreite von einem Inch. Zwangsläufig werden derartige Tintendruckköpfe in Planar- beziehungsweise Stapelbauweise ausgeführt, einerseits aus Gründen der zulässigen Dimensionen und damit der zu erzielenden Packungsdichte und andererseits aus Gründen einer ökonomischen Fertigung, vergleiche auch DE 42 25 799 A1.Such ink printheads are intended for use in small, fast printers, which in turn are part of modern machines for franking mail or for printing addresses. In contrast to the conventional office printer with line-by-line printing, these machines print as a single franking imprint in one pass of the mail. Corresponding to this substantially larger print width - approximately one inch - the number of ink nozzles to be arranged one below the other and thus also the number of piezo actuators in an ink print head is considerably larger than in the case of ink print heads for office printers. For modern convenience - clichés with word and picture symbols - for franking machines with good print quality print resolutions of approximately 200 dpi are required, which means ink printheads with the same number of nozzles and piezo actuators with a print width of one inch. Such ink print heads are inevitably designed in planar or stacked construction, on the one hand for reasons of the permissible dimensions and thus the packing density to be achieved and on the other hand for reasons of economical production, see also DE 42 25 799 A1.

Überlicherweise werden hierbei als Piezoaktoren Flächenschwinger eingesetzt, bei denen zwischen zwei Metallelektroden ein piezoelektrisches Material, zum Beispiel Blei-Zirkonat-Titanat (PZT), angeordnet ist. Die Trägerplatte - zugleich Membranplatte über den Tintendruckkammern - für die Piezoaktoren kann aus Glas, Keramik, Plast oder Metall bestehen. Im letzten Fall könnte eine Elektrode entfallen, allerdings ist dann ein leitfähiger Kleber erforderlich. Die Art und Weise der Anordnung, Aufbringung und Kontaktierung der Piezoaktoren ist dabei ein wesentliches Problem.
Es ist ein Planartintendruckkopf bekannt, vergleiche DE 37 10 654 A1, der aus Metallplatten zusammengesetzt ist. Eine der Platten ist eine Membranplatte aus Nickel mit einer Plattendicke von 0,03 mm, auf der entsprechend der Anzahl der Düsen Piezoplättchen von einem Durchmesser von ungefähr 1 mm als Antriebselemente für die Druckkammern angeordnet sind. An die Membranplatte schließt sich eine Druckkammerplatte aus Nickel mit einer Plattendicke von 0,2 mm an; das entspricht der gewünschten Höhe der Druckkammern.
Die Piezoplättchen werden einzeln in den Bereichen über den Druckkammern auf die Membranplatte aufgeklebt oder aufgelötet. Der Montage- und Justieraufwand ist hierfür beträchtlich.
Analog sind auch die Verhältnisse bei einer anderen bekannten Lösung für einen Tintendruckkopf, vergleiche US 4,703,333. Hier werden die von der Membranplatte abgewandten Beläge der Piezoaktoren mit den Anschlüssen eines Bandleiters kontaktiert.Surface oscillators are usually used as piezo actuators in which a piezoelectric material, for example lead zirconate titanate (PZT), is arranged between two metal electrodes. The carrier plate - at the same time membrane plate over the ink pressure chambers - for the piezo actuators can consist of glass, ceramic, plastic or metal. In the latter case, an electrode could be omitted, but then a conductive adhesive is required. The way the arrangement, application and contacting of the piezo actuators is a major problem.
A planar ink print head is known, compare DE 37 10 654 A1, which is composed of metal plates. One of the plates is a membrane plate made of nickel with a plate thickness of 0.03 mm, on which, according to the number of nozzles, piezo plates with a diameter of approximately 1 mm are arranged as drive elements for the pressure chambers. A pressure chamber plate made of nickel with a plate thickness of 0.2 mm adjoins the membrane plate; this corresponds to the desired height of the pressure chambers.
The piezoplates are individually glued or soldered onto the membrane plate in the areas above the pressure chambers. The assembly and adjustment effort is considerable for this.
The situation is similar in the case of another known solution for an ink print head, compare US 4,703,333. Here, the coatings on the piezo actuators facing away from the membrane plate are contacted with the connections of a strip conductor.

Weiterhin ist ein piezoelektrischer Tintendruckkopf mit einem monolithischen Piezokeramikkörper bekannt, vergleiche DE 38 05 279 A1, der parallel nebeneinander angeordnete Wandler hat. Jeder Wandler weist ein planares, piezoelektrisches Antriebselement, eine Druckkammer, einen Tintenkanal und eine Düse auf. Die Druckkammern, die Tintenkanäle und die Düsen sind als Hohlräume in einem Piezokeramikkörper ausgebildet. Jedes Antriebselement weist eine äußere Elektrode, eine innere Elektrode und eine zwischen den Elektroden angeordnete aktive Piezokeramikschicht auf. Die Antriebselemente sind durch Einschnitte in der aktiven Piezokeramikschicht akustisch voneinander separiert. Mit anderen Worten, die Einschnitte sollen das Übersprechen zwischen den einzelnen Antriebselementen verhindern. Zur Herstellung des monolithischen Piezokeramikkörpers werden Piezokeramikrohfolien, übereinander gestapelt, unter Vakuum gepreßt und gesintert. Eine Piezokeramikrohfolie ist durch Ätzen strukturiert; die dabei entstandenen Hohlräume entsprechen der Form der Druckkammern, der Druckkammerausgänge sowie der Tintenkanäle. Das Ätzen erfolgt mittels Sprühätzen oder Laserätzen. Auf die strukturierte Piezokeramikrohfolie wird eine Zwischenrohfolie aus Piezokeramik gelegt, die einseitig metallisiert ist. Nach dem Sintern bildet die Piezokeramik der Zwischenrohfolie die Druckkammerwände, wobei die Metallisierung auf der von den Druckkammern abgewandten Seite liegt. Die Metallisierung wird durch Bedrucken der Zwischenrohfolie mit einer Metallpaste hergestellt. Sie bildet nach dem Sintern die miteinander verbundenen inneren Elektroden. Auf der Zwischenrohfolie ist eine obere Piezokeramikrohfolie angeordnet, aus der nach dem Sintern die aktiven Piezokeramikschichten entstehen.Furthermore, a piezoelectric ink print head with a monolithic piezoceramic body is known, compare DE 38 05 279 A1, which has transducers arranged parallel to one another. Each transducer has a planar, piezoelectric drive element, a pressure chamber, an ink channel and a nozzle. The pressure chambers, the ink channels and the nozzles are designed as cavities in a piezoceramic body. Each drive element has an outer electrode, an inner electrode and an active piezoceramic layer arranged between the electrodes. The drive elements are acoustically separated from one another by cuts in the active piezoceramic layer. In other words, the incisions are intended to prevent crosstalk between the individual drive elements. To manufacture the monolithic piezoceramic body, piezoceramic raw foils are stacked on top of one another, pressed under vacuum and sintered. A piezoceramic raw foil is structured by etching; the resulting cavities correspond to the shape of the pressure chambers, the pressure chamber exits and the ink channels. The etching is done by spray etching or laser etching. An intermediate raw foil made of piezoceramic, which is metallized on one side, is placed on the structured piezoceramic raw foil. After sintering, the piezoceramic of the intermediate raw film forms the pressure chamber walls, the metallization being on the side facing away from the pressure chambers. The metallization is produced by printing the intermediate raw film with a metal paste. After sintering, it forms the interconnected inner electrodes. An upper piezoceramic raw film is arranged on the intermediate raw film, from which the active piezoceramic layers are formed after sintering.

Nach dem Sintern der gestapelten und gepreßten Piezokeramikrohfolien werden die Öffnungen der Tintenkanäle durch Materialabtrag bei mechanischer Bearbeitung freigelegt. Die äußeren Elektroden werden auf die äußere Seite der aktiven Piezokeramikschichten durch Sputtern unter Verwendung einer Maske oder durch Siebdrucken aufgebracht. Anschließend erfolgt das Polarisieren der Wandler und das Separieren der Antriebselemente. Der so entstandene Piezokeramikkörper wird mit Anschlüssen eines Anschlußbandes kontaktiert und in ein Gehäuse oder einen Halterahmen eingesetzt.After sintering the stacked and pressed piezoceramic raw foils, the openings of the ink channels are exposed by material removal during mechanical processing. The outer electrodes are applied to the outer side of the active piezoceramic layers by sputtering using a mask or by screen printing. The converters are then polarized and the drive elements separated. The resulting piezoceramic body is contacted with connections of a connecting tape and inserted into a housing or a holding frame.

Wie aus einem anderen bekannten Verfahren zur Herstellung eines Piezokeramik-Elementes für Tintenstrahlschreiber hervorgeht, vergleiche DE 37 33 109 A1, und das gleichfalls auf der Sinterung von Piezokeramikrohfolien beruht, sind Sintertemperaturen von 1100 bis 1300o C in Sauerstoffatmosphäre erforderlich. Als Elektrodenmaterial, daß für den Sinterprozeß geeignet ist, werden Platin oder Metalle der Platingruppe eingesetzt. Beide letztgenannte Lösungen haben den Nachteil, daß zeit- und energieaufwendige Hochtemperaturprozesse und teures Elektrodenmaterial erforderlich sind. Hinzu kommt, daß erst der fertige monolithische Piezokeramikkörper polarisiert werden kann. Das Elektrodenmaterial muß gegenüber der Tinte korrosionsbeständig sein, da eine Elektrode im Tintenraum untergebracht ist.As can be seen from another known method for producing a piezoceramic element for inkjet recorders, compare DE 37 33 109 A1, and this is also based on the sintering of piezoceramic raw foils, sintering temperatures of 1100 to 1300 ° C. in an oxygen atmosphere are required. Platinum or platinum group metals are used as the electrode material that is suitable for the sintering process. Both of the latter solutions have the disadvantage that time-consuming and energy-consuming high-temperature processes and expensive electrode material are required. In addition, the finished monolithic piezoceramic body can only be polarized. The electrode material must be corrosion-resistant to the ink because an electrode is housed in the ink chamber.

Schließlich ist noch ein Verfahren zum Bestücken eines Tintenstrahldurckkopfes mit Piezoaktoren bekannt, vergleiche DE 38 04 165 A1, bei dem zunächst eine Piezokeramikplatte mit einer Membranplatte fest verbunden wird und danach erst eine Trennung der Piezoaktoren von der Piezokeramikplatte erfolgt. Die Membranplatte besteht aus Glas und ist auf der der Piezokeramikplatte zugewandten Seite mit einer Zink- oder Nickeloxydschicht versehen. Beide Platten sind mittels eines Klebers verbunden. Die Piezoaktoren werden mittels einer Trennvorrichtung, wie Laserstrahlvorrichtung oder Trennschleifmaschine, vereinzelt. Zweckmäßigerweise werden die Piezoaktoren von der Piezokeramikplatte schon vor der Klebeverbindung bis auf einen Verbindungssteg getrennt. Die Piezokeramikplatte dient auf diese Weise als Montagehilfe und verhindert eine Falschpolung. Die Metalloxydschicht auf der Glasplatte stellt die gemeinsame Elektrode für die Piezoaktoren dar. Damit ein sicherer Kontakt zwischen der einen Seite der Piezoaktoren und der Metalloxydschicht besteht, ist ein leitfähiger Kleber erforderlich. Metallschichten auf Glassubstrat haben bekanntermaßen eine schlechte Haftung. Da die Fügeverbindung zwischen der metallisierten Glasmembran und den Piezoaktoren aufgrund der periodischen Schwingungen starken mechanischen Belastungen unterliegt, kann es zu Ablösungen der Metallschicht vom Glas und damit zum Ausfall des Druckmoduls kommen.
Zweck der Erfindung ist eine Vereinfachung der Herstellung von Tintendruckköpfen bezüglich des Teils Piezoaktoren.
Der Erfindung liegt die Aufgabe zugrunde, eine Anordnung und ein Herstellungsverfahren für plattenförmige Piezoaktoren für Tintendruckköpfe der eingangs genannten Art zu schaffen, mit der/dem eine Montage ohne besonderen Justieraufwand, eine sichere Elektroden- und Piezoaktorenbefestigung ohne Berührung mit Tinte und eine einfache Kontaktierung ermöglicht wird. Auf Hochtemperaturprozesse und leitfähige Kleber soll dabei verzichtet werden. Die Wahl des Werkstoffes für die Membranplatte soll unabhängig von den Piezoaktoren sein.
Erfindungsgemäß wir diese Aufgabe gemäß den Patentansprüchen gelöst.Finally, a method for equipping an ink jet print head with piezo actuators is known, compare DE 38 04 165 A1, in which a piezoceramic plate is first firmly connected to a membrane plate and only then is the piezo actuators separated from the piezoceramic plate. The membrane plate is made of glass and is provided with a zinc or nickel oxide layer on the side facing the piezoceramic plate. Both plates are connected with an adhesive. The piezo actuators are by means of a cutting device, such as a laser beam device or cut-off machine, isolated. The piezo actuators are expediently separated from the piezoceramic plate before the adhesive connection apart from a connecting web. In this way, the piezoceramic plate serves as an assembly aid and prevents incorrect polarity. The metal oxide layer on the glass plate represents the common electrode for the piezo actuators. In order for there to be a secure contact between the one side of the piezo actuators and the metal oxide layer, a conductive adhesive is required. Metal layers on glass substrates are known to have poor adhesion. Since the joint between the metallized glass membrane and the piezo actuators is subject to strong mechanical loads due to the periodic vibrations, the metal layer can become detached from the glass and the print module can fail.
The purpose of the invention is to simplify the manufacture of ink printheads with regard to the part of piezo actuators.
The invention has for its object to provide an arrangement and a manufacturing method for plate-shaped piezo actuators for ink printheads of the type mentioned, with which an assembly without special adjustment effort, a secure electrode and piezo actuator attachment without touching ink and a simple contact is made possible . High temperature processes and conductive adhesives should be avoided. The choice of material for the membrane plate should be independent of the piezo actuators.
According to the invention we solved this problem according to the claims.

Auf Grund der vorgeschlagenen Lösung ergeben sich eine Reihe von Vorteilen.
Da beide Elektroden von derselben Seite zugänglich sind, ist eine Kontaktierung mit Anschlußleitungen auf die einfachste Weise und in nur einer Fügerichtung möglich. Neben Bonden und Löten besteht sogar die Möglichkeit der einfachen Druckkontaktierung.
Die Gestaltung der Piezoaktorenplatte läßt die Verwendung entsprechend konfektionierter Bandkabel für die Steuerung mit Anschlußmodul zu.
Je nachdem, ob eine größere Anzahl von Piezoaktoren oder nur einzelne aufzubringen sind, ist durch die gemeinsame Verbindung über den aktiven Bereich eine einfache Montage ohne komplizierte Justage möglich. Der zusätzliche Platzbedarf ist dabei unerheblich, zumal eine fertige Strukturierung und Konfektionierung der Piezoaktoren vor dem Aufbringen auf die Membran gleichfalls möglich ist. Da die Elektroden unmittelbar auf die Piezokeramik aufgebracht sind, wird eine Verbindung mit guter Haftwirkung erreicht und auf leitfähigen Kleber kann verzichtet werden. Dafür besteht die Möglichkeit, den Kleber so zu wählen, daß eine sichere Haftverbindung zwischen Piezoaktor- und Membranplatte erzielt wird. Da die Piezoaktoren von den Tintenkammern durch die Membranplatte getrennt sind, brauchen sowohl die Elektroden als auch die Klebeverbindung nicht korrosionsbeständig gegen die Tinte zu sein. Es wird vorzugsweise auf eine Silberlegierung orientiert. Eine komplizierte Elektrodenführung aus dem Modulinneren enfällt.The proposed solution offers a number of advantages.
Because both electrodes are accessible from the same side are, contacting with connecting lines is possible in the simplest way and in only one joining direction. In addition to bonding and soldering, there is even the possibility of simple pressure contacting.
The design of the piezo actuator plate allows the use of appropriately assembled ribbon cables for control with a connection module.
Depending on whether a larger number of piezo actuators or only a few are to be installed, simple assembly without complicated adjustment is possible due to the common connection via the active area. The additional space requirement is irrelevant, especially since a finished structuring and assembly of the piezo actuators is also possible before application to the membrane. Since the electrodes are applied directly to the piezoceramic, a connection with a good adhesive effect is achieved and conductive glue can be dispensed with. It is possible to choose the adhesive so that a secure adhesive connection between the piezo actuator and membrane plate is achieved. Since the piezo actuators are separated from the ink chambers by the membrane plate, both the electrodes and the adhesive connection need not be corrosion-resistant to the ink. It is preferably oriented towards a silver alloy. There is no need for a complicated electrode guide from inside the module.

Die erfindungsgemäße Lösung gestattet auch den Einsatz bereits mit Elektroden beschichteter und polarisierter Piezoplatten. Es brauchen dann nur noch eine Stirnseite nachträglich metallisiert und die Strukturierung vorgenommen zu werden, wobei dafür auch weitgehend technologische Freiheiten bestehen.The solution according to the invention also allows the use of already coated and polarized piezo plates. It is then only necessary to subsequently metallize one end face and to carry out the structuring, although there is also extensive technological freedom.

Die Erfindung wird nachstehend am Ausführungsbeispiel näher erläutert.The invention is explained in more detail below using the exemplary embodiment.

Es zeigen:

Fig. 1
Eine perspektivische Ansicht eines Piezoaktors,
Fig. 2
eine perspektivische Ansicht einer Piezoaktorenplatte mit kammartiger Struktur,
Fig. 3
eine perspektivische Ansicht einer Piezoaktorenplatte mit riegelförmiger Struktur,
Fig. 4
eine perspektivische Ansicht eines Tintendruckmoduls mit aufgesetzten Piezoaktoren und dem zugehörigen Anschlußmodul in Explosivdarstellung,
Fig. 5
eine schematische Darstellung der Entwicklung einer Piezoaktorenplatte.
Show it:
Fig. 1
A perspective view of a piezo actuator,
Fig. 2
1 shows a perspective view of a piezo actuator plate with a comb-like structure,
Fig. 3
1 shows a perspective view of a piezo actuator plate with a bar-shaped structure,
Fig. 4
1 shows a perspective view of an ink printing module with attached piezo actuators and the associated connection module in an exploded view,
Fig. 5
a schematic representation of the development of a piezo actuator plate.

Gemäß Fig. 1 hat jeder beidseitig mit Elektroden 13, 14 belegte Piezoaktor 1 einen aktiven Bereich 11 und einen inaktiven Bereich 12, wobei eine Elektrode 14 über eine Stirnfläche 15 des Piezoaktors 1 bis in den inaktiven Bereich 12 der Gegenseite erstreckt ist.1, each piezo actuator 1 covered on both sides with electrodes 13, 14 has an active region 11 and an inactive region 12, an electrode 14 extending over an end face 15 of the piezo actuator 1 into the inactive region 12 of the opposite side.

Wie Fig. 2 und 3 zeigen, haben mehrere Piezoaktoren 8 x 1 beziehungsweise 2 x 8 x 1 einen gemeinsamen inaktiven Bereich 12, in den von der Gegenseite her eine gemeinsame Elektrode 14 erstreckt ist.
Die Piezoaktoren 1 können kammartig gemäß Fig. 2 oder riegelartig - wie bei einer Schokoladentafel - gemäß Fig. 3 angeordnet sein. Auf jeden Fall sind sie alle identisch aufgebaut.
Die Elektroden 13.1, 13.2 bis 13.8 und 14 beziehungsweise 13.01, 13.02 bis 13.16 und 14 sind unmittelbar mit Anschlußleitungen 21 bis 28 und 20 beziehungsweise 210 bis 226 und 200 eines Bandkabels 2 für die Ansteuerung kontaktiert.
Wie Fig. 4 entnehmbar ist, kann das Bandkabel 2 mit einem Anschlußmodul 3 versehen sein, das eine Ausnehmung 31 über dem Trennbereich zwischen aktiven und inaktiven Bereich besitzt. Das Anschlußmodul 3 wird über Justierbohrungen 32 auf die Piezoaktorenplatte 1 und die Membranplatte 4 aufgesetzt. Die Piezoaktorenplatte 1 sitzt so auf der Membranplatte 4 auf, daß die Piezoaktoren 1 in Bereichen über nicht näher dargestellten Tintendruckkammern liegen. Bei Anregung eines Piezoaktors 1 werden Tintentröpfchen aus den Düsen 51 einer Düsenplatte 5 herausgespritzt. Die Tintendruckkammern, Tintenkanäle und Düsen sind in diesem Fall in nicht sichtbarer Weise in die Düsenplatte 5 eingeformt. Bei der hier gezeigten Variante ist eine zweite Piezoaktorenplatte 1 mit gleichfalls 8 Piezoaktoren 1 auf der Unterseite entsprechend versetzt über eine Membranplatte 6 an die Düsenplatte 5 angekoppelt. Die Anzahl der Düsen 51 ist 16 gemäß 2 x 8 Piezoaktoren.2 and 3 show, a plurality of piezo actuators 8 x 1 and 2 x 8 x 1 have a common inactive region 12, into which a common electrode 14 extends from the opposite side.
The piezo actuators 1 can be arranged like a comb according to FIG. 2 or like a bar - like a chocolate bar - according to FIG. 3. In any case, they are all built identically.
The electrodes 13.1, 13.2 to 13.8 and 14 or 13.01, 13.02 to 13.16 and 14 are in direct contact with connecting lines 21 to 28 and 20 or 210 to 226 and 200 of a ribbon cable 2 for the control.
As can be seen in FIG. 4, the ribbon cable 2 can be provided with a connection module 3 which has a recess 31 above the separation area between the active and inactive areas. The connection module 3 is placed on the piezo actuator plate 1 and the membrane plate 4 via adjustment holes 32. The piezo actuator plate 1 is seated so on the membrane plate 4 that the piezo actuators 1 are in areas above not shown ink pressure chambers. When a piezo actuator 1 is excited, ink droplets are sprayed out of the nozzles 51 of a nozzle plate 5. In this case, the ink pressure chambers, ink channels and nozzles are molded into the nozzle plate 5 in a manner that is not visible. In the variant shown here, a second piezo actuator plate 1 with likewise 8 piezo actuators 1 on the underside is coupled accordingly to the nozzle plate 5 via a membrane plate 6. The number of nozzles 51 is 16 according to 2 x 8 piezo actuators.

Für die Herstellung der erfindungsgemäßen Anordnung sind meherere Verfahren mit Abwandlungen möglich. Der prinzipielle Verfahrensweg ist in Fig. 5 schematisch dargestellt. Eine Platte 01 aus piezoelektrischem Material, wie vorzugsweise Blei-Zirkonat-Titanat, wird mittels eines geeigneten Verfahrens mindestens an ihren Breitseiten und einer Stirnseite 15 metallisiert, wobei die Metallisierung auf einer Breitseite parallel zur metallisierten Stirnseite 15 durchgehend unterbrochen ist. Hilfsweise wird dabei eine entsprechende Maskenabdeckung verwendet.
Anschließend wird die nun metallisierte Platte 1 durch Anlegen einer Polarisationsspannung in üblicher Weise polarisiert.
Die polarisierte Platte 1 wird mit ihrer durchgehend metallisierten Breitseite mittels eines geeigneten Klebers, wie ein dünnflüssiger Epoxydharzkleber oder ein UV-aushärtbarer Kleber, in einer Schichtdicke von 1 bis 5 µm auf einer Membranplatte 6 befestigt.
Die Platte 1 wird dann mittels geeigneter Verfahren so strukturiert, daß ein gewünschtes Muster von Einzelpiezoaktoren n x 1, siehe auch Fig. 2 und 3, vorliegt.
Anschließend wird die strukturierte Platte 1 mit ihren Elektroden 13, 13.01 bis 13.n, 14 in geeigneter Weise, wie Bonden, Löten oder Andrücken über ein Anschlußmodul 3, mit zugeordneten Anschlußleitungen 20 bis 2n eines Bandkabels 2 kontaktiert.Several methods with modifications are possible for the manufacture of the arrangement according to the invention. The basic procedure is shown schematically in FIG. 5. A plate 01 made of piezoelectric material, such as preferably lead zirconate titanate, is metallized at least on its broad sides and an end face 15 by means of a suitable method, the metallization being continuously interrupted on a broad side parallel to the metallized end face 15. In the alternative, a corresponding mask cover is used.
Then the now metallized plate 1 is polarized in the usual way by applying a polarization voltage.
The polarized plate 1 with its continuously metallized broadside is attached to a membrane plate 6 in a layer thickness of 1 to 5 μm by means of a suitable adhesive, such as a low-viscosity epoxy resin adhesive or a UV-curable adhesive.
The plate 1 is then structured using a suitable method in such a way that a desired pattern of individual piezo actuators nx 1, see also FIGS. 2 and 3, is present.
Subsequently, the structured plate 1 with its electrodes 13, 13.01 to 13.n, 14 in a suitable manner, such as bonding, soldering or pressing, via a connection module 3, contacted with associated connecting lines 20 to 2n of a ribbon cable 2.

Eine Abwandlung des vorstehend beschriebenen Verfahrens ist in der Weise möglich, daß die Platte 1 nach der Metallisierung zunächst strukturiert, dann polarisiert auf die Membranplatte 6 geklebt und abschließend kontaktiert wird.
Eine weitere Variante besteht darin, daß eine bereits an den Breitseiten metallisierte Piezoplatte 1 - vorkonfektioniertes Bauelement - zunächst polarisiert wird.
Anschließend erfolgt die Strukturierung entsprechend dem gewünschten Muster.
Im weiteren wird die Stirnseite metallisiert, die zur Trennlinie zwischen aktiven und passiven Bereich parallel liegt, so daß dadurch die Elektrode 14 in den inaktiven Bereich der Gegenseite erstreckt wird.
Schließlich wird die Platte 1 wie vorher mit der durchgehend metallisierten Breitseite auf die Membranplatte geklebt und anschließend werden die Elektroden 13, 13.01 bis 13n, 14 mit den zugeordneten Anschlußleitungen des Bandkabels 2 kontaktiert.
Die Metallisierung kann mittels Galvanisierung, Sputtern, Aufdampfen oder Siebdruck erfolgen. Als Material wird vorzugsweise eine Silberlegierung verwendet. Aluminiumlegierungen sind aber keineswegs ausgeschlossen. Die Strukturierung kann mittels Sägen, Ätzen, Laserätzen oder Sandstrahlen vorgenommen werden.A modification of the method described above is possible in such a way that the plate 1 is first structured after the metallization, then glued polarized onto the membrane plate 6 and finally contacted.
Another variant consists in first polarizing a piezoplate 1 which has already been metallized on the broad sides - prefabricated component.
Then the structuring takes place according to the desired pattern.
In addition, the end face is metallized, which lies parallel to the dividing line between the active and passive areas, so that the electrode 14 is thereby extended into the inactive area of the opposite side.
Finally, the plate 1 is glued to the membrane plate with the continuously metallized broadside as before, and then the electrodes 13, 13.01 to 13n, 14 are contacted with the associated connecting lines of the ribbon cable 2.
The metallization can be carried out by means of galvanization, sputtering, vapor deposition or screen printing. A silver alloy is preferably used as the material. Aluminum alloys are by no means excluded. The structuring can be carried out by sawing, etching, laser etching or sandblasting.

Verwendete BezugszeichenReference symbols used

0101
Platte aus piezoelektrischem MaterialPiezoelectric material plate
11
Piezoaktor, PiezoaktorenplattePiezo actuator, piezo actuator plate
1111
aktiver Bereich des Piezoaktors 1active area of the piezo actuator 1
1212th
inaktiver Bereich des Piezoaktors 1inactive area of the piezo actuator 1
1313
Elektrode nur über dem aktiven Bereich 11Electrode only over the active area 11
13.01 bis 13.n13.01 to 13.n
Elektroden über den aktiven Bereichen der Einzelpiezoaktoren bzw. TeilpiezoaktorenElectrodes over the active areas of the individual piezo actuators or partial piezo actuators
1414
Elektrode vom aktiven Bereich 11 bis in den inaktiven Bereich 12, gemeinsame ElektrodeElectrode from active area 11 to inactive area 12, common electrode
1515
beschichtete Stirnseite des Piezoaktors 1coated end face of the piezo actuator 1
22nd
BandkabelRibbon cable
20 bis 2120 to 21
Anschlußleitungen des Bandkabels 2Connecting cables of the ribbon cable 2
200 bis 2n200 to 2n
Anschlußleitungen des Bandkabels 2Connecting cables of the ribbon cable 2
33rd
AnschlußmodulConnection module
3131
Ausnehmung im Anschlußmodul 3Recess in the connection module 3
3232
JustierbohrungAdjustment hole
44th
Deckplatte, MembranplatteCover plate, membrane plate
55
DüsenplatteNozzle plate
5151
DüsenNozzles
66
Deckplatte, MembranplatteCover plate, membrane plate
nn
Anzahl der EinzelpiezoaktorenNumber of single piezo actuators

Claims (21)

Anordnung für plattenförmige Piezoaktoren für Tintendruckköpfe, die aus Tintendruckmodulen in Stapelbauweise zusammengesetzt sind, wobei die Piezoaktoren beidseitig mit Elektroden belegt und auf eine Membranplatte über Tintendruckkammern aufgebracht sind, dadurch gekennzeichnet, daß jeder Piezoaktor (1) einen aktiven Bereich (11) und einen inaktiven Bereich (12) hat und eine Elektrode (14) über eine Stirnfläche (15) des Piezoaktors (1) bis in den inaktiven Bereich (12) der Gegenseite erstreckt ist.Arrangement for plate-shaped piezo actuators for ink printheads, which are composed of ink printing modules in a stacked construction, the piezo actuators being coated on both sides with electrodes and applied to a membrane plate above ink pressure chambers, characterized in that each piezo actuator (1) has an active area (11) and an inactive area (12) and an electrode (14) extends over an end face (15) of the piezo actuator (1) into the inactive area (12) of the opposite side. Anordnung nach Anspruch 1, dadurch gekennzeichnet, daß mehrere Piezoaktoren (n x 1) einen gemeinsamen inaktiven Bereich (12) haben, in den von der Gegenseite her eine gemeinsame Elektrode (14) erstreckt ist.Arrangement according to claim 1, characterized in that a plurality of piezo actuators (nx 1) have a common inactive region (12) into which a common electrode (14) extends from the opposite side. Anordnung nach Anspruch 1 und 2, dadurch gekennzeichnet, daß die Elektroden (13,14) der identisch aufgebauten Piezoaktoren (n x 1) unmittelbar mit Anschlußleitungen (20,21,22 bis 2n) eines Bandkabels (2) für die Ansteuerung kontaktiert sind.Arrangement according to claims 1 and 2, characterized in that the electrodes (13, 14) of the identically constructed piezo actuators (nx 1) are contacted directly with connection lines (20, 21, 22 to 2n) of a ribbon cable (2) for the control. Anordnung nach Anspruch 1 und 2, dadurch gekennzeichnet, daß die Elektroden (13,14) der Piezoaktoren (n x 1) mittelbar über ein Anschlußmodul (3) mit Anschlußleitungen (20,21,22 bis 2n) eines entsprechend konfektionierten Bandkabels (2) für die Ansteuerung kontaktiert sind.Arrangement according to Claims 1 and 2, characterized in that the electrodes (13, 14) of the piezo actuators (nx 1) are connected indirectly via a connection module (3) with connection lines (20, 21, 22 to 2n) for a suitably assembled ribbon cable (2) the controls are contacted. Verfahren zur Herstellung plattenförmiger Piezoaktoren für Tintendruckköpfe, die aus Tintendruckmodulen in Stapelbauweise zusammengesetzt sind, wobei die Piezoaktoren beidseitig mit Elektroden belegt sind, gekennzeichnet durch folgende Schritte: • Eine Platte (01) aus piezoelektrischem Material wird mittels eines geeigneten Verfahrens mindestens an ihren Breitseiten und einer Stirnseite (15) metallisiert, wobei die Metallisierung auf einer Breitseite parallel zur metallisierten Stirnseite durchgehend unterbrochen ist; hilfsweise wird zu diesem Zweck eine entsprechende Maskenabdeckung vorgenommen, • die metallisierte Platte (1) wird durch Anlegen einer Polarisationsspannung polarisiert, • die polarisierte Platte (1) wird mit ihrer durchgehend metallisierten Breitseite mittels eines geeigneten Klebers auf einer Membranplatte (6) befestigt, • die Platte (1) wird mittels geeigneter Verfahren so strukturiert, daß ein gewünschtes Muster von Einzelpiezoaktoren (n x 1) vorliegt, • die strukturierte Platte (1) wird mit ihren Elektroden (13, 13.01 bis 13.n; 14) in geeigneter Weise mit zugeordneten Anschlußleitungen (20 bis 2n) eines Bandkabels (2) kontaktiert. Method for producing plate-shaped piezo actuators for ink print heads, which are composed of ink print modules in a stacked construction, the piezo actuators being coated with electrodes on both sides, characterized by the following steps: • A plate (01) made of piezoelectric material is metallized at least on its broad sides and one end face (15) by means of a suitable method, the metallization being interrupted continuously on a broad side parallel to the metallized end face; in the alternative, appropriate masking is carried out for this purpose, The metallized plate (1) is polarized by applying a polarization voltage, The polarized plate (1) is attached with its continuously metallized broad side to a membrane plate (6) using a suitable adhesive, The plate (1) is structured using a suitable method in such a way that a desired pattern of individual piezo actuators (nx 1) is present, • The structured plate (1) is contacted with its electrodes (13, 13.01 to 13.n; 14) in a suitable manner with associated connecting lines (20 to 2n) of a ribbon cable (2). Verfahren zur Herstellung plattenförmiger Piezoaktoren für Tintendruckköpfe, die aus Tintendruckmodulen in Stapelbauweise zusammengesetzt sind, wobei die Piezoaktoren beidseitig mit Elektroden belegt sind, gekennzeichnet durch folgende Schritte: • Eine Platte (01) aus piezoelektrischem Material wird mittels eines geeigneten Verfahren mindestens an ihren Breitseiten und einer Stirnseite (15) metallisiert, wobei die Metallisierung auf einer Breitseite parallel zu metallisierten Stirnseite (15) durchgehend unterbrochen ist; hilfsweise wird zu diesem Zweck eine entsprechende Maskenabdeckung vorgenommen, • die Platte (1) wird mittels geeigneter Verfahren so strukturiert, daß ein gewünschtes Muster von Einzelpiezoaktoren (n x 1) vorliegt, • die strukturierte Platte (1) wird durch Anlegen einer Polarisationsspannung polarisiert, • die polarisierte strukturierte Platte (1) wird mit ihrer durchgehend metallisierten Breitseite mittels eines geeigneten Klebers auf einer Membranplatte (6) befestigt, • die strukturierte Platte (1) wird mit ihren Elektroden (13, 13.01 bis 13.n; 14) in geeigneter Weise mit zugeordneten Anschlußleitungen (20 bis 2n) eines Bandkabels (2) kontaktiert. Method for producing plate-shaped piezo actuators for ink print heads, which are composed of ink print modules in a stacked construction, the piezo actuators being coated with electrodes on both sides, characterized by the following steps: • A plate (01) made of piezoelectric material is metallized at least on its broad sides and an end face (15) by means of a suitable method, the metallization being interrupted continuously on a broad side parallel to the metallized end face (15); in the alternative, appropriate masking is carried out for this purpose, The plate (1) is structured using a suitable method in such a way that a desired pattern of individual piezo actuators (nx 1) is present, The structured plate (1) is polarized by applying a polarization voltage, The polarized structured plate (1) is attached with its continuously metallized broad side to a membrane plate (6) by means of a suitable adhesive, • The structured plate (1) is contacted with its electrodes (13, 13.01 to 13.n; 14) in a suitable manner with associated connecting lines (20 to 2n) of a ribbon cable (2). Verfahren zur Herstellung plattenförmiger Piezoaktoren für Tintendruckköpfe, die aus Tintendruckmodulen in Stapelbauweise zusammengesetzt sind, wobei die Piezoaktoren beidseitig mit Elektroden belegt sind, gekennzeichnet durch folgende Schritte: • Eine an ihren beiden Breitseiten mit Elektroden (13, 14) versehene Platte (1) aus piezoelektrischem Material wird mittels einer Polarisationsspannung polarisiert, • die Platte wird mittels geeigneter Verfahren so strukturiert, daß diese in einen aktiven Bereich (11) und in einen inaktiven Bereich (12) aufgeteilt wird und daß im aktiven Bereich ein gewünschtes Muster von Einzelpiezoaktoren (n x 1) vorliegt, • die zur Trennlinie zwischen aktiven und inaktiven Bereich parallel und benachbart liegende Stirnseite wird mittels eines geeigneten Verfahrens metallisiert, so daß auf diese Weise die eine Elektrode (14) in den inaktiven Bereich der Gegenseite erstreckt wird, • die Platte (1) wird mit ihrer durchgehend metallisierten Breitseite mittels eines geeigneten Klebers auf einer Membranplatte (6) befestigt, • die Platte (1) wird mit ihren Elektroden (13, 13.01 bis 13.n, 14) in geeigneter Weise mit zugeordneten Anschlußleitungen (20 bis 2n) eines Bandkabels (2) kontaktiert. Method for producing plate-shaped piezo actuators for ink print heads, which are composed of ink print modules in a stacked construction, the piezo actuators being coated with electrodes on both sides, characterized by the following steps: A plate (1) made of piezoelectric material and provided on both broad sides with electrodes (13, 14) is polarized by means of a polarization voltage, The plate is structured by means of suitable methods such that it is divided into an active area (11) and an inactive area (12) and that a desired pattern of individual piezo actuators (nx 1) is present in the active area, The end face lying parallel and adjacent to the dividing line between the active and inactive area is metallized by means of a suitable method, so that in this way the one electrode (14) is extended into the inactive area on the opposite side, The plate (1) is fastened with its continuously metallized broadside to a membrane plate (6) using a suitable adhesive, • The plate (1) is contacted with its electrodes (13, 13.01 to 13.n, 14) in a suitable manner with associated connecting lines (20 to 2n) of a ribbon cable (2). Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß als piezoelektrisches Material Blei-Zirkonat-Titanat verwendet wird.Process according to claims 5 to 7, characterized in that lead-zirconate-titanate is used as the piezoelectric material. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Metallisierung mittels Galvanisieren erfolgt.Process according to claims 5 to 7, characterized in that the metallization is carried out by means of electroplating. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Metallisierung mittels Sputtern erfolgt.Process according to claims 5 to 7, characterized in that the metallization takes place by means of sputtering. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Metallisierung mittels Aufdampfen erfolgt.Process according to claims 5 to 7, characterized in that the metallization is carried out by vapor deposition. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Metallisierung mittels Siebdruck einer Metallpaste erfolgt.Process according to claims 5 to 7, characterized in that the metallization is carried out by screen printing a metal paste. Verfahren nach den Ansprüchen 5 bis 12, dadurch gekennzeichnet, daß zur Metallisierung eine Silberlegierung verwendet wird.Process according to claims 5 to 12, characterized in that a silver alloy is used for the metallization. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Strukturierung mittels Sägen erfolgt.Process according to claims 5 to 7, characterized in that the structuring takes place by means of saws. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Strukturierung mittels Ätzen erfolgt.Process according to claims 5 to 7, characterized in that the structuring takes place by means of etching. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Strukturierung mittels Laserätzen erfolgt.Method according to claims 5 to 7, characterized in that the structuring takes place by means of laser etching. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Strukturierung mittels Sandstrahlen erfolgt.Process according to claims 5 to 7, characterized in that the structuring takes place by means of sandblasting. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß als Kleber ein dünnflüssiger Epoxydharzkleber verwendet wird, der in einer Dicke von 1 bis 5 µm aufgetragen wird.Process according to claims 5 to 7, characterized in that a low-viscosity epoxy resin adhesive is used as the adhesive, which is applied in a thickness of 1 to 5 µm. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß als Kleber ein mittels UV-Bestrahlung aushärtbarer Kleber verwendet wird.Process according to claims 5 to 7, characterized in that an adhesive which can be hardened by means of UV radiation is used as the adhesive. Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Anschlußleitungen (20 bis 2n) mittels Bonden mit den zugeorneten Elektroden (13,14) der Platte (1) kontaktiert sind.Method according to claims 5 to 7, characterized in that the connecting lines (20 to 2n) are contacted by means of bonding with the associated electrodes (13, 14) of the plate (1). Verfahren nach den Ansprüchen 5 bis 7, dadurch gekennzeichnet, daß die Anschlußleitungen (20 bis 2n) des Bandkabels (2) mechanisch gegen die zugeordneten Elektroden (13,14) der Platte (1) mittels eines Anschlußmoduls (3) gepreßt werden.Method according to claims 5 to 7, characterized in that the connecting lines (20 to 2n) of the ribbon cable (2) are pressed mechanically against the associated electrodes (13, 14) of the plate (1) by means of a connecting module (3).
EP95250165A 1994-08-03 1995-07-06 Arrangement for plate-like piezoelectric actuators and method of manufacturing Expired - Lifetime EP0695641B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0931651A1 (en) * 1997-06-27 1999-07-28 Seiko Epson Corporation Piezoelectric vibrator unit, method for manufacturing the same, and ink-jet recording head

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3697829B2 (en) * 1997-04-09 2005-09-21 ブラザー工業株式会社 Inkjet head manufacturing method
EP1046506A1 (en) * 1999-04-19 2000-10-25 Océ-Technologies B.V. Inkjet printhead
DE10084495T1 (en) * 1999-04-20 2002-06-06 Seagate Technology Llc Electrode structuring for a differential PZT actuator
US6755511B1 (en) * 1999-10-05 2004-06-29 Spectra, Inc. Piezoelectric ink jet module with seal
US20060222756A1 (en) * 2000-09-29 2006-10-05 Cordis Corporation Medical devices, drug coatings and methods of maintaining the drug coatings thereon
US7261735B2 (en) * 2001-05-07 2007-08-28 Cordis Corporation Local drug delivery devices and methods for maintaining the drug coatings thereon
US8182527B2 (en) 2001-05-07 2012-05-22 Cordis Corporation Heparin barrier coating for controlled drug release
US7195640B2 (en) * 2001-09-25 2007-03-27 Cordis Corporation Coated medical devices for the treatment of vulnerable plaque
AU2003291311A1 (en) * 2002-11-07 2004-06-03 Carbon Medical Technologies, Inc. Biocompatible medical device coatings
US6890067B2 (en) * 2003-07-03 2005-05-10 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US20050206679A1 (en) * 2003-07-03 2005-09-22 Rio Rivas Fluid ejection assembly
US8491076B2 (en) 2004-03-15 2013-07-23 Fujifilm Dimatix, Inc. Fluid droplet ejection devices and methods
US7281778B2 (en) 2004-03-15 2007-10-16 Fujifilm Dimatix, Inc. High frequency droplet ejection device and method
US7420317B2 (en) * 2004-10-15 2008-09-02 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
US7388319B2 (en) * 2004-10-15 2008-06-17 Fujifilm Dimatix, Inc. Forming piezoelectric actuators
WO2006074016A2 (en) 2004-12-30 2006-07-13 Fujifilm Dimatix, Inc. Ink jet printing
US7380914B2 (en) * 2005-04-26 2008-06-03 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7540593B2 (en) * 2005-04-26 2009-06-02 Hewlett-Packard Development Company, L.P. Fluid ejection assembly
US7988247B2 (en) 2007-01-11 2011-08-02 Fujifilm Dimatix, Inc. Ejection of drops having variable drop size from an ink jet printer
US8125120B2 (en) * 2008-02-15 2012-02-28 Nikon Corporation Vibration device, antidust device, camera, vibration device inspection method, method for manufacturing vibration device and vibration method
US9330698B1 (en) 2013-03-18 2016-05-03 Magnecomp Corporation DSA suspension having multi-layer PZT microactuator with active PZT constraining layers
US11205449B2 (en) 2013-03-18 2021-12-21 Magnecomp Corporation Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension
US9741376B1 (en) 2013-03-18 2017-08-22 Magnecomp Corporation Multi-layer PZT microactuator having a poled but inactive PZT constraining layer
US9070394B1 (en) 2013-03-18 2015-06-30 Magnecomp Corporation Suspension microactuator with wrap-around electrode on inactive constraining layer
US10607642B2 (en) 2013-03-18 2020-03-31 Magnecomp Corporation Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension
US9224410B1 (en) * 2013-09-04 2015-12-29 Magnecomp Corporation Suspension having microactuator grounded to opposite side of metal support layer
JP6451306B2 (en) * 2014-12-23 2019-01-16 ブラザー工業株式会社 Liquid ejection device and liquid ejection head
US10128431B1 (en) 2015-06-20 2018-11-13 Magnecomp Corporation Method of manufacturing a multi-layer PZT microactuator using wafer-level processing
JP7310133B2 (en) * 2018-12-26 2023-07-19 セイコーエプソン株式会社 liquid injection unit

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3710654A1 (en) 1987-03-31 1988-10-13 Siemens Ag Ink jet print head of multi-layer construction
DE3733109A1 (en) 1987-09-30 1989-04-13 Siemens Ag Method for producing a piezoceramic element for an ink jet printer
DE3804165A1 (en) 1988-02-11 1989-08-24 Olympia Aeg METHOD FOR EQUIPPING AN INK JET PRINT HEAD WITH PIEZO CRYSTALS
DE3805279A1 (en) 1988-02-19 1989-08-31 Siemens Ag Piezoelectric ink jet print head and method for its manufacture
DE4225799A1 (en) 1992-07-31 1994-02-03 Francotyp Postalia Gmbh Inkjet printhead and process for its manufacture

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551647A (en) * 1983-03-08 1985-11-05 General Electric Company Temperature compensated piezoelectric transducer and lens assembly and method of making the assembly
DE3645017C2 (en) * 1985-09-06 1990-07-12 Fuji Electric Co., Ltd., Kawasaki, Kanagawa, Jp
US4703333A (en) * 1986-01-30 1987-10-27 Pitney Bowes Inc. Impulse ink jet print head with inclined and stacked arrays
DE3628346A1 (en) * 1986-08-21 1988-02-25 Siemens Ag Ink jet print had in thick-layer technology
DE3701470A1 (en) * 1987-01-20 1988-07-28 Siemens Ag Method for producing a transducer element for electroacoustic transducers
DE3725500A1 (en) * 1987-07-31 1989-02-09 Siemens Ag PIEZOELECTRIC INK PRINT HEAD AND METHOD FOR PRODUCING THE SAME
DE3725499A1 (en) * 1987-07-31 1989-02-09 Siemens Ag PIEZOELECTRIC INK PRINT HEAD AND METHOD FOR PRODUCING THE SAME
JPH0292644A (en) * 1988-09-30 1990-04-03 Seiko Epson Corp Ink jet head
ATE130803T1 (en) * 1990-08-03 1995-12-15 Canon Kk COLOR RAY RECORDING HEAD MANUFACTURING METHOD.
DE69127258D1 (en) * 1990-11-13 1997-09-18 Citizen Watch Co Ltd Inkjet printhead
JP2728980B2 (en) * 1991-01-07 1998-03-18 シャープ株式会社 Inkjet head device
US5410341A (en) * 1991-05-28 1995-04-25 Brother Kogyo Kabushiki Kaisha Droplet jet device
JP3144949B2 (en) * 1992-05-27 2001-03-12 日本碍子株式会社 Piezoelectric / electrostrictive actuator
JP3208775B2 (en) * 1992-06-11 2001-09-17 セイコーエプソン株式会社 Ink jet head and method of manufacturing ink jet head
DE9404328U1 (en) * 1994-03-10 1994-05-19 Francotyp Postalia Gmbh Inkjet printhead

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3710654A1 (en) 1987-03-31 1988-10-13 Siemens Ag Ink jet print head of multi-layer construction
DE3733109A1 (en) 1987-09-30 1989-04-13 Siemens Ag Method for producing a piezoceramic element for an ink jet printer
DE3804165A1 (en) 1988-02-11 1989-08-24 Olympia Aeg METHOD FOR EQUIPPING AN INK JET PRINT HEAD WITH PIEZO CRYSTALS
DE3805279A1 (en) 1988-02-19 1989-08-31 Siemens Ag Piezoelectric ink jet print head and method for its manufacture
DE4225799A1 (en) 1992-07-31 1994-02-03 Francotyp Postalia Gmbh Inkjet printhead and process for its manufacture

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0931651A1 (en) * 1997-06-27 1999-07-28 Seiko Epson Corporation Piezoelectric vibrator unit, method for manufacturing the same, and ink-jet recording head
EP0931651A4 (en) * 1997-06-27 2000-10-04 Seiko Epson Corp Piezoelectric vibrator unit, method for manufacturing the same, and ink-jet recording head
US6338549B1 (en) 1997-06-27 2002-01-15 Seiko Epson Corporation Piezoelectric vibrator unit, method for manufacturing the same, and ink-jet recording head
US6408513B1 (en) 1997-06-27 2002-06-25 Seiko Epson Corporation Method for manufacturing a piezoelectric vibrator unit

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