EP0695641B1 - Arrangement for plate-like piezoelectric actuators and method of manufacturing - Google Patents

Arrangement for plate-like piezoelectric actuators and method of manufacturing Download PDF

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EP0695641B1
EP0695641B1 EP19950250165 EP95250165A EP0695641B1 EP 0695641 B1 EP0695641 B1 EP 0695641B1 EP 19950250165 EP19950250165 EP 19950250165 EP 95250165 A EP95250165 A EP 95250165A EP 0695641 B1 EP0695641 B1 EP 0695641B1
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plate
means
piezoactuators
piezoactuator
electrodes
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EP0695641A2 (en
EP0695641A3 (en
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Wolfgang Dr. Thiel
Junming Dr. Zhang
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Francotyp-Postalia GmbH
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1623Production of nozzles manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14201Structure of print heads with piezoelectric elements
    • B41J2/14233Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1607Production of print heads with piezoelectric elements
    • B41J2/161Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1626Production of nozzles manufacturing processes etching
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1632Production of nozzles manufacturing processes machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/1632Production of nozzles manufacturing processes machining
    • B41J2/1634Production of nozzles manufacturing processes machining laser machining
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1642Production of nozzles manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1643Production of nozzles manufacturing processes thin film formation thin film formation by plating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1645Production of nozzles manufacturing processes thin film formation thin film formation by spincoating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Production of nozzles manufacturing processes
    • B41J2/164Production of nozzles manufacturing processes thin film formation
    • B41J2/1646Production of nozzles manufacturing processes thin film formation thin film formation by sputtering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14379Edge shooter
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14491Electrical connection

Description

Die Erfindung betrifft eine Anordnung sowie ein Herstellungsverfahren für eine Piezoaktorenplatte, die insbesondere für Tintendruckköpfe vorgesehen ist, die aus Tintendruckmodulen in Stapelbauweise zusammengesetzt sind. The invention relates to an arrangement and a manufacturing method for a piezoelectric actuator plate which is intended especially for ink print heads composed of ink print modules in stack design.
Derartige Tintendruckköpfe werden in kleinen schnellen Druckern eingesetzt, die wiederum Bestandteil von modernen Maschinen zum Frankieren von Postgut oder zum Drucken von Adressen sind. Such ink printheads are used in small quick printers, in turn, are part of modern machines for franking of mail or for printing addresses. Im Unterschied zum üblichen Bürodrucker mit zeilenweisem Abdruck erfolgt der Druck bei diesen Maschinen als einmaliger Frankierabdruck in einem Durchlauf des Postgutes. In contrast to the usual office printer with print zeilenweisem the printing is done on these machines as a single franking in a single pass of the mail. Entsprechend dieser wesentlich größeren Druckbreite - ungefähr 25,4 mm beziehungsweise ein Inch - ist die Anzahl untereinander anzuordnender Tintendüsen und damit auch die Anzahl der Piezoaktoren in einem Tintendruckkopf erheblich größer als bei Tintendruckköpfen für Bürodrucker. According to this substantially greater printing width - about 25.4 mm or one inch - is the number of mutually locatable ink nozzles and thus also the number of the piezoelectric actuators in an ink print head considerably larger than at the ink print heads for office printers.
Um den modernen Komfort - Klischees mit Wort- und Bildzeichen - für Frankiermaschinen mit guter Druckqualität zu erfüllen, sind Druckauflösungen von annähernd 200 dpi (dots per inch) erforderlich, das bedeutet Tintendruckköpfe mit mindestens derselben Düsen- beziehungsweise Piezoaktorenzahl je nach Druckkopfeinbaulage bei einer Druckbreite von 25,4mm - einem Inch -. To the modern comforts - clichés with trade names and logos - to meet for franking machines with good print quality, print resolutions of approximately 200 dpi (dots per inch) is required, which means ink printheads with at least the same nozzle or piezo actuators number depending on the print head mounting position at a printing width of 25,4mm - one inch -.
Zwangsläufig werden derartige Tintendruckköpfe in Planar- beziehungsweise Stapelbauweise ausgeführt, einerseits aus Gründen der zulässigen Dimensionen und damit der zu erzielenden Packungsdichte und andererseits aus Gründen einer ökonomischen Fertigung, vergleiche auch DE 42 25 799 A1. Inevitably, such ink print heads are designed in planar or stacked construction, on the one hand for reasons of allowable dimensions and thus the packing density to be achieved and on the other hand for reasons of economic production, compare also DE 42 25 799 A1.

Üblicherweise werden hierbei als Piezoaktoren Flächenschwinger eingesetzt, bei denen zwischen zwei Metallelektroden ein piezoelektrisches Material, zum Beispiel Blei-Zirkonat-Titanat (PZT), angeordnet ist. Usually, in this case as piezoelectric actuators surface vibrator used in which (PZT), is arranged between two metal electrodes, a piezoelectric material, for example lead zirconate titanate. Die Trägerplatte - zugleich Membranplatte über den Tintendruckkammern - für die Piezoaktoren kann aus Glas, Keramik, Plast oder Metall bestehen. The carrier plate - at the same time the membrane plate over ink pressure chambers - of the piezoelectric actuators may be made of glass, ceramic, plastic or metal. Im letzten Fall könnte eine Elektrode entfallen, allerdings ist dann ein leitfähiger Kleber erforderlich. In the latter case, an electrode could be omitted, but a conductive adhesive is required.
Die Art und Weise der Anordnung, Aufbringung und Kontaktierung der Piezoaktoren ist dabei ein wesentliches Problem. The way the arrangement, application and contacting the piezoelectric actuators is a significant problem.

Es ist ein eine Anordnung für plattenförmige Piezoaktoren für Tintendruckköpfe bekannt, siehe DE 36 28 346 A1, bei der die Piezoaktoren beidseitig mit Elektroden belegt und auf einer Membranplatte über Tintendruckkammern aufgebracht sind. It is a an arrangement for disc-shaped piezoelectric actuators for known ink jet print heads, see DE 36 28 346 A1, are in which the piezo actuators on both sides with electrodes and applied on a membrane plate over ink pressure chambers. Jeder Piezoaktor hat einen aktiven und einen inaktiven Bereich, wobei eine Elektrode vom aktiven bis in den inaktiven Bereich der Gegenseite erstreckt ist. Each piezoelectric actuator has an active and an inactive area, wherein an electrode is extended from the active to the inactive to the area of ​​the opposite side.
Diese Anordnung ist für die Verwendung in Tintendruckköpfen in Stapelbauweise geeignet. This arrangement is suitable for use in ink jet print heads in stack design.

Es ist ferner ein Tintendruckkopf in Planartechnik bekannt, siehe Patent Abstracts of Japan vol. It is also an ink print head in planar known, see Patent Abstracts of Japan vol. 014, no. 291, 22.06.1990 & JP 02 092 644 A, 03.04.1990, bei dem eine piezokeramische Platte eine Kammstruktur aufweist, deren die Zinken die Piezoaktoren bilden. 014, no. 291, 22.06.1990 & JP 02092644 A, 03.04.1990, in which a piezoceramic plate has a comb structure, of which the prongs constitute the piezoelectric actuators.

Es ist auch ein Planartintendruckkopf bekannt, der aus Metallplatten zusammengesetzt ist, vergleiche DE 37 10 654 A1. It is also a Planartintendruckkopf known, which is composed of metal plates, see DE 37 10 654 A1.
Eine der Platten ist eine Membranplatte aus Nickel mit einer Plattendicke von 0,03 mm, auf der entsprechend der Anzahl der Düsen Piezoplättchen von einem Durchmesser von ungefähr 1 mm als Antriebselemente für die Druckkammern angeordnet sind. One of the plates is a diaphragm plate of nickel having a plate thickness of 0.03 mm, on the piezo plate are arranged with a diameter of about 1 mm as drive elements for the pressure chambers corresponding to the number of the nozzles. An die Membranplatte schließt sich eine Druckkammerplatte aus Nickel mit einer Plattendicke von 0,2 mm an; On the diaphragm plate, a pressure chamber plate of nickel connects with a plate thickness of 0.2 mm; das entspricht der gewünschten Höhe der Druckkammern. corresponding to the desired height of the pressure chambers. Die Piezoplättchen werden einzeln in den Bereichen über den Druckkammern auf die Membranplatte aufgeklebt oder aufgelötet. The piezo wafers are individually glued in the areas of the pressure chambers on the diaphragm plate or soldered. Der Montage- und Justieraufwand hierfür ist beträchtlich. The assembly and adjustment of this is considerable.

Analog sind auch die Verhältnisse bei einer anderen bekannten Lösung für einen Tintendruckkopf, vergleiche US 4,703,333. Analogously, also the conditions in another known solution for an ink print head, see US 4,703,333. Hier werden die von der Membranplatte abgewandten Beläge der Piezoaktoren mit den Anschlüssen eines Bandleiters kontaktiert. Here, the coverings of the piezoelectric actuators facing away from the membrane plate are contacted with the terminals of a strip conductor.

Weiterhin ist ein piezoelektrischer Tintendruckkopf mit einem monolithischen Piezokeramikkörper bekannt, vergleiche DE 38 05 279 A1, der parallel nebeneinander angeordnete Wandler hat. Furthermore, a piezoelectric inkjet print head with a monolithic piezoceramic body is known, see DE 38 05 279 A1, which has parallel juxtaposed converter. Jeder Wandler weist ein planares, piezoelektrisches Antriebselement, eine Druckkammer, einen Tintenkanal und eine Düse auf. Each transducer comprises a planar piezoelectric actuator element, a pressure chamber, an ink channel, and a nozzle. Die Druckkammern, die Tintenkanäle und die Düsen sind als Hohlräume in einem Piezokeramikkörper ausgebildet. The pressure chambers, ink channels and the nozzles are formed as cavities in a piezoelectric ceramic body. Jedes Antriebselement weist eine äußere Elektrode, eine innere Elektrode und eine zwischen den Elektroden angeordnete aktive Piezokeramikschicht auf. Each drive member has an outer electrode, an inner electrode and an active electrode arranged between the piezoceramic layer. Die Antriebselemente sind durch Einschnitte in der aktiven Piezokeramikschicht akustisch voneinander separiert. The drive elements are separated by incisions in the active piezoceramic layer acoustically from each other. Mit anderen Worten, die Einschnitte sollen das Übersprechen zwischen den einzelnen Antriebselementen verhindern. In other words, the cuts are to prevent crosstalk between the individual drive elements.
Zur Herstellung des monolithischen Piezokeramikkörpers werden Piezokeramikrohfolien übereinander gestapelt, unter Vakuum gepreßt und gesintert. For the preparation of the monolithic piezoceramic body Piezokeramikrohfolien are stacked, pressed under vacuum and sintered. Eine Piezokeramikrohfolie ist durch Ätzen strukturiert; A Piezokeramikrohfolie is structured by etching; die dabei entstandenen Hohlräume entsprechen der Form der Druckkammern, der Druckkammerausgänge sowie der Tintenkanäle. the cavities thereby formed corresponding to the shape of the pressure chambers, the pressure chamber outlets and the ink passages. Das Ätzen erfolgt mittels Sprühätzen oder Laserätzen. The etching is carried out by means of sputter etching or laser etching. Auf die strukturierte Piezokeramikrohfolie wird eine Zwischenrohfolie aus Piezokeramik gelegt, die einseitig metallisiert ist. a Zwischenrohfolie is placed of piezoceramic on the structured Piezokeramikrohfolie which is metallised on one side. Nach dem Sintern bildet die Piezokeramik der Zwischenrohfolie die Druckkammerwände, wobei die Metallisierung auf der von den Druckkammern abgewandten Seite liegt. After sintering, the piezoelectric ceramic of the Zwischenrohfolie forms the pressure chamber walls, wherein the metallisation is on the opposite side from the pressure chambers. Die Metallisierung wird durch Bedrucken der Zwischenrohfolie mit einer Metallpaste hergestellt. The metallization is produced by printing the Zwischenrohfolie with a metal paste. Sie bildet nach dem Sintern die miteinander verbundenen inneren Elektroden. It forms the inner electrodes connected to one another by sintering. Auf der Zwischenrohfolie ist eine obere Piezokeramikrohfolie angeordnet, aus der nach dem Sintern die aktiven Piezokeramikschichten entstehen. On the Zwischenrohfolie an upper Piezokeramikrohfolie is disposed, from which after sintering, the active piezo-ceramic layers are formed.
Nach dem Sintern der gestapelten und gepreßten Piezokeramikrohfolien werden die Öffnungen der Tintenkanäle durch Materialabtrag bei mechanischer Bearbeitung freigelegt. After sintering, the stacked and pressed Piezokeramikrohfolien the openings of the ink channels are exposed through removal of material during mechanical machining. Die äußeren Elektroden werden auf die äußere Seite der aktiven Piezokeramikschichten durch Sputtern unter Verwendung einer Maske oder durch Siebdrucken aufgebracht. The outer electrodes are applied to the outer side of the active piezoelectric ceramic layers by sputtering using a mask or by screen printing. Anschließend erfolgt das Polarisieren der Wandler und das Separieren der Antriebselemente. Subsequently, the polarization of the transducer and the separation of the drive elements is performed. Der so entstandene Piezokeramikkörper wird mit Anschlüssen eines Anschlußbandes kontaktiert und in ein Gehäuse oder einen Halterahmen eingesetzt. The resulting piezoelectric ceramic body is contacted with terminals of a terminal strip and inserted into a housing or a support frame.

Wie aus einem anderen bekannten Verfahren zur Herstellung eines Piezokeramik-Elementes für Tintenstrahlschreiber hervorgeht, vergleiche DE 37 33 109 A1, und das gleichfalls auf der Sinterung von Piezokeramikrohfolien beruht, sind Sintertemperaturen von 1100 bis 1300° C in Sauerstoffatmosphäre erforderlich. As seen from another known method for producing a piezoceramic element for ink jet printers, see DE 37 33 109 A1, and also due to the sintering of Piezokeramikrohfolien, sintering temperatures are required from 1100 to 1300 ° C in oxygen atmosphere. Als Elektrodenmaterial, das für den Sinterprozeß geeignet ist, werden Platin oder Metalle der Platingruppe eingesetzt. As the electrode material which is suitable for the sintering process, platinum or platinum group metals can be used. Beide letztgenannte Lösungen haben den Nachteil, daß zeit- und energieaufwendige Hochtemperaturprozesse und teures Elektrodenmaterial erforderlich sind. Both latter solutions have the disadvantage that time- and energy-consuming high-temperature processes and expensive electrode material are required. Hinzu kommt, daß erst der fertige monolithische Piezokeramikkörper polarisiert werden kann. In addition, only the finished monolithic piezoceramic body can be polarized. Das Elektrodenmaterial muß gegenüber der Tinte korrosionsbeständig sein, da eine Elektrode im Tintenraum untergebracht ist. The electrode material must be corrosion resistant to the ink, since an electrode is housed in the ink space.

Schließlich ist noch ein Verfahren zum Bestücken eines Tintenstrahldurckkopfes mit Piezoaktoren bekannt, vergleiche DE 38 04 165 A1, bei dem zunächst eine Piezokeramikplatte mit einer Membranplatte fest verbunden wird und danach erst eine Trennung der Piezoaktoren von der Piezokeramikplatte erfolgt. Finally, a method for assembling a Tintenstrahldurckkopfes with piezo actuators is also known, see DE 38 04 165 A1, in which first a piezoelectric ceramic plate having a diaphragm plate is fixedly connected, and then be necessary to first separate the piezoelectric actuators of the piezoelectric ceramic plate. Die Membranplatte besteht aus Glas und ist auf der der Piezokeramikplatte zugewandten Seite mit einer Zink- oder Nickeloxydschicht versehen. The diaphragm plate is made of glass and is provided on the side facing the piezoelectric ceramic plate side with a zinc or nickel oxide. Beide Platten sind mittels eines Klebers verbunden. Both plates are connected by means of an adhesive. Die Piezoaktoren werden mittels einer Trennvorrichtung, wie Laserstrahlvorrichtung oder Trennschleifmaschine, vereinzelt. The piezoelectric actuators are separated by a separating device such as laser beam apparatus, or cutting machine. Zweckmäßigerweise werden die Piezoaktoren von der Piezokeramikplatte schon vor der Klebeverbindung bis auf einen Verbindungssteg getrennt. Conveniently, the piezoelectric actuators of the piezoceramic plate are separated before the adhesive bond to a connecting web. Die Piezokeramikplatte dient auf diese Weise als Montagehilfe und verhindert eine Falschpolung. The piezoceramic plate thus serves as a mounting aid and prevents incorrect polarity. Die Metalloxydschicht auf der Glasplatte stellt die gemeinsame Elektrode für die Piezoaktoren dar. Damit ein sicherer Kontakt zwischen der einen Seite der Piezoaktoren und der Metalloxydschicht besteht, ist ein leitfähiger Kleber erforderlich. The metal oxide layer on the glass plate is the common electrode for the piezoelectric actuators. Thus, there is a secure contact between the one side of the piezoelectric actuators and the metal oxide layer, a conductive adhesive is required.
Metallschichten auf Glassubstrat haben bekanntermaßen eine schlechte Haftung. Metal layers on glass substrate known to have poor adhesion. Da die Fügeverbindung zwischen der metallisierten Glasmembran und den Piezoaktoren aufgrund der periodischen Schwingungen starken mechanischen Belastungen unterliegt, kann es zu Ablösungen der Metallschicht vom Glas und damit zum Ausfall des Druckmoduls kommen. Since the joint between the metallized glass membrane and the piezo actuators is subject to due to the periodic oscillations severe mechanical stresses, may lead to detachment of the metal layer from the glass, resulting in failure of the print module.

Zweck der Erfindung ist eine Vereinfachung der Herstellung von Tintendruckköpfen bezüglich des Teils Piezoaktoren. Purpose of the invention is to simplify the manufacture of ink jet print heads with respect to the portion of piezoelectric actuators.

Der Erfindung liegt die Aufgabe zugrunde, eine Anordnung und ein Herstellungsverfahren für eine Piezoaktorenplatte für Tintendruckköpfe der eingangs genannten Art zu schaffen, mit der/dem eine Montage ohne besonderen Justieraufwand, eine sichere Elektroden- und Piezoaktorenbefestigung ohne Berührung mit Tinte und eine einfache Kontaktierung ermöglicht wird. The object of the invention is based is to provide a system and a method for manufacturing a piezoelectric actuators plate for ink jet print heads of the type mentioned, with the / the installation without special adjustment effort, a safe electrode and piezoelectric actuators mounting without contact with ink and a simple contact is made possible , Auf Hochtemperaturprozesse und leitfähige Kleber soll dabei verzichtet werden. is intended to be dispensed with high-temperature processes and conductive adhesive. Die Wahl des Werkstoffes für die Membranplatte soll unabhängig von den Piezoaktoren sein. The choice of material for the diaphragm plate should be independent of the piezo actuators.

Erfindungsgemäß wird diese Aufgabe gemäß den Patentansprüchen gelöst. According to the invention this object is achieved according to the claims.

Auf Grund der vorgeschlagenen Lösung ergeben sich eine Reihe von Vorteilen. Due to the proposed solution, a number of advantages.
Da beide Elektroden von derselben Seite zugänglich sind, ist eine Kontaktierung mit Anschlußleitungen auf die einfachste Weise und in nur einer Fügerichtung möglich. Since both electrodes are accessible from the same side, making contact with connecting lines in the simplest way and in only one joining direction is possible. Neben Bonden und Löten besteht sogar die Möglichkeit der einfachen Druckkontaktierung. In addition to bonding, and soldering is even the possibility of simple pressure contact.
Die grabenförmige Vertiefung zwischen dem aktiven und dem inaktiven Bereich bewirkt eine gute akustische Entkopplung zwischen den Piezoaktoren. The grave-shaped recess between the active and the inactive region provides good acoustic decoupling between the piezoelectric actuators.
Die Gestaltung der Piezoaktorenplatte läßt die Verwendung entsprechend konfektionierter Bandkabel für die Steuerung mit Anschlußmodul zu. The design of the piezoelectric actuators plate allows for the use of correspondingly assembled cable for control with connection module.
Je nachdem, ob eine größere Anzahl von Piezoaktoren oder nur einzelne Piezoaktoren aufzubringen sind, ist durch die gemeinsame Verbindung über den aktiven Bereich eine einfache Montage ohne komplizierte Justage möglich. Depending on whether a greater number of piezoelectric actuators or only individual piezoelectric actuators are to be applied, a simple installation without complicated adjustment is possible due to the common connection via the active region. Der zusätzliche Platzbedarf ist dabei unerheblich, zumal eine fertige Strukturierung und Konfektionierung der Piezoaktoren vor dem Aufbringen auf die Membran gleichfalls möglich ist. The additional space required is irrelevant here, especially as a finished structure and assembly of the piezoelectric actuators to the membrane is also possible prior to application.
Da die Elektroden unmittelbar auf die Piezokeramik aufgebracht sind, wird eine Verbindung mit guter Haftwirkung erreicht und auf leitfähigen Kleber kann verzichtet werden. Since the electrodes are applied directly to the piezoelectric ceramic, a compound having good adhesion is achieved, and on the conductive adhesive can be dispensed with. Dafür besteht die Möglichkeit, den Kleber so zu wählen, daß eine sichere Haftverbindung zwischen Piezoaktor- und Membranplatte erzielt wird. For this, it is possible to choose the glue so that a secure adhesion between Piezoaktor- and diaphragm plate is achieved. Da die Piezoaktoren von den Tintenkammern durch die Membranplatte getrennt sind, brauchen sowohl die Elektroden als auch die Klebeverbindung nicht korrosionsbeständig gegen die Tinte zu sein. Since the actuators are separated from the ink chambers through the diaphragm plate, both the electrodes and the adhesive bond do not need to be corrosion resistant to the ink. Es wird vorzugsweise auf eine Silberlegierung orientiert. It is preferably oriented on a silver alloy. Eine komplizierte Elektrodenführung aus dem Modulinneren entfällt. A complicated electrode guide out of the module inside eliminated.
Die erfindungsgemäße Lösung gestattet auch den Einsatz bereits mit Elektroden beschichteter und polarisierter Piezoplatten. The inventive solution also allows the use of already having electrodes coated and polarized piezoelectric plates. Es brauchen dann nur noch eine Stirnseite nachträglich metallisiert und die Strukturierung vorgenommen zu werden, wobei dafür auch weitgehend technologische Freiheiten bestehen. It then only need a front page subsequently metallized and made the structuring to be, and it consist largely technological freedoms.

Die Erfindung wird nachstehend am Ausführungsbeispiel näher erläutert. The invention is explained in more detail below on the embodiment.
Es zeigen: Show it:

Fig. 1 Fig. 1
eine perspektivische Ansicht einer Piezoaktorenplatte mit riegelförmiger Struktur, a perspective view of a piezo actuators plate with bar-shaped structure,

Wie Fig. 1 zeigt, haben mehrere Piezoaktoren 2 x 8 x 1 einen gemeinsamen inaktiven Bereich 12, in den von der Gegenseite her eine gemeinsame Elektrode 14 um eine Stirnfläche 15 erstreckt ist. Referring to FIG. 1, a plurality of piezoelectric actuators have 2 x 8 x 1, a common electrode is extended to an end surface 15 of a joint 14 in the inactive region 12 of the opposite side.
Die Piezoaktoren sind riegelartig - wie bei einer Schokoladentafel - angeordnet. The actuators are from bars - disposed - as for a chocolate bar. Auf jeden Fall sind sie alle identisch aufgebaut. In any case, they are all identical.
Die Elektroden 13.01, 13.02 bis 13.16 und 14 können unmittelbar mit Anschlußleitungen eines nicht näher gezeigten Bandkabels für die Ansteuerung kontaktiert sein. The electrodes 13:01, 13:02 to 13:16 and 14 may be directly contacted with connecting lines of a flat cable not shown in detail for the control.
Das Bandkabel kann dabei mit einem Anschlußmodul versehen sein, das eine entsprechende Ausnehmung über dem Trennbereich zwischen aktiven Bereich 11 und inaktiven Bereich 12 sowie dem aktiven Bereich 11 besitzt. The ribbon cable may be provided with a terminal module having a corresponding recess on the separation region between active region 11 and the inactive region 12 and the active region. 11
Die Piezoaktorenplatte 1 sitzt so auf der Membranplatte des Tintendruckmoduls auf, daß die Piezoaktoren in Bereichen über dessen Tintendruckkammern liegen. The piezoelectric actuators plate 1 is seated so on on the diaphragm plate of the ink print module, that the piezoelectric actuators are located in areas on the ink pressure chambers.

Bei Anregung eines Piezoaktors werden Tintentröpfchen aus den Düsen hinausgespritzt. Upon excitation of a piezoelectric actuator, ink droplets are squirted out from the nozzles.

Für die Herstellung der erfindungsgemäßen Anordnung sind mehrere Verfahren mit Abwandlungen möglich. Several methods with modifications are possible for the production of the inventive arrangement. Der prinzipielle Verfahrensweg ist wie nachfolgend beschrieben. The basic process route is described below.
Eine Platte aus piezoelektrischem Material, wie vorzugsweise Blei-Zirkonat-Titanat, wird mittels eines geeigneten Verfahrens mindestens an ihren Breitseiten und einer Stirnseite metallisiert, wobei die Metallisierung auf einer Breitseite parallel zur metallisierten Stirnseite durchgehend unterbrochen ist. A plate of piezoelectric material, such as, preferably lead zirconate titanate is metallized at least on its broad sides and one face side by a suitable method, the metallization is interrupted at a wide side parallel with the metallized face side continuous. Hilfsweise wird dabei eine entsprechende Maskenabdeckung verwendet. In the alternative, while a corresponding mask cover is used.
Anschließend wird die nun metallisierte Platte 1 durch Anlegen einer Polarisationsspannung in üblicher Weise polarisiert. Subsequently, the now metallized plate 1 is polarized by applying a polarizing voltage in the usual manner.
Die polarisierte Platte 1 wird mit ihrer durchgehend metallisierten Breitseite mittels eines geeigneten Klebers, wie ein dünnflüssiger Epoxydharzkleber oder ein uv-aushärtbarer Kleber, in einer Schichtdicke von 1 bis 5 µm auf der Membranplatte befestigt. The polarized plate 1 is fixed by its continuous metallized broad side by a suitable adhesive, such as a low-viscosity epoxy resin adhesive, or a UV curable adhesive in a layer thickness of 1 to 5 microns on the diaphragm plate.
Die Platte 1 wird dann mittels geeigneter Verfahren so strukturiert, daß ein gewünschtes Muster von Einzelpiezoaktoren vorliegt. The plate 1 is then patterned so by a suitable means that a desired pattern of individual piezoactuators present.
Anschließend wird die strukturierte Platte 1 mit ihren Elektroden 13.01 bis 13.16, 14 in geeigneter Weise, wie Bonden, Löten oder Andrücken über ein Anschlußmodul mit zugeordneten Anschlußleitungen eines Bandkabels kontaktiert. Subsequently, the pattern plate 1 with its electrodes 13:01 to 13:16, 14 is contacted in a suitable manner, such as bonding, soldering or pressing through a connecting module with assigned connecting lines of a flat cable.

Eine Abwandlung des vorstehend beschriebenen Verfahrens ist in der Weise möglich, daß die Platte 1 nach der Metallisierung zunächst strukturiert, dann polarisiert auf die Membranplatte geklebt und abschließend kontaktiert wird. A modification of the method described above is possible in such a way that the disc 1 after the metallization initially structured, then polarized glued to the diaphragm plate and is contacted exhaustive.

Eine weitere Variante besteht darin, daß eine bereits an den Breitseiten metallisierte Piezoplatte 1 - vorkonfektioniertes Bauelement - zunächst polarisiert wird. Another variant is that an already metallised on the broad sides piezo plate 1 - pre-assembled component - is first polarized. Anschließend erfolgt die Strukturierung entsprechend dem gewünschten Muster. Subsequently, the patterning is performed in accordance with the desired pattern.

Im weiteren wird die Stirnseite metallisiert, die zur Trennlinie zwischen aktiven und passiven Bereich parallel liegt, so daß dadurch die Elektrode 14 in den inaktiven Bereich 12 der Gegenseite erstreckt wird. Furthermore, the front side is metallized, which is parallel to the separating line between active and passive region, thereby the electrode is extended in the inactive region 12 of the opposite side 14th
Schließlich wird die Platte 1 wie vorher mit der durchgehend metallisierten Breitseite auf die Membranplatte geklebt und anschließend werden die Elektroden 13.01 bis 13.16, 14 mit den zugeordneten Anschlußleitungen des Bandkabels kontaktiert. Finally, the disk 1 is as previously adhered to the continuous metallized broad side to the membrane plate, and then the electrodes are 13:01 to 13:16, 14 contacted with the assigned connecting lines of the ribbon cable.
Die Metallisierung kann mittels Galvanisierung, Sputtern, Aufdampfen oder Siebdruck erfolgen. The metallization can be performed by electroplating, sputtering, vapor deposition or screen printing. Als Material wird vorzugsweise eine Silberlegierung verwendet. As the material of a silver alloy is preferably used. Aluminiumlegierungen sind aber keineswegs ausgeschlossen. Aluminum alloys are by no means excluded. Die Strukturierung kann mittels Sägen, Ätzen, Laserätzen oder Sandstrahlen vorgenommen werden. The structuring can be made by sawing, etching, laser etching or sandblasting.

Verwendete Bezugszeichen Reference numbers used

1 1
Piezoaktor, Piezoaktorenplatte Piezoelectric actuator, piezoelectric actuators plate
11 11
aktiver Bereich der Piezoaktorenplatte 1 active area of ​​the piezoelectric actuators plate 1
12 12
inaktiver Bereich der Piezoaktorenplatte 1 inactive area of ​​the piezoelectric actuators plate 1
13, 13.01 bis 13.16 13, 13:01 to 13:16
Elektroden über den aktiven Bereichen der Einzelpiezoaktoren bzw. Teilpiezoaktoren Electrodes over the active regions of the individual piezoelectric actuators or part of piezoelectric actuators
14 14
Elektrode vom aktiven Bereich 11 bis in den inaktiven Bereich 12, gemeinsame Elektrode Electrode from the active region 11 in the inactive to the region 12, common electrode
15 15
Stirnfläche der Piezoaktorenplatte End face of the piezoelectric actuators plate

Claims (20)

  1. An arrangement for a piezoactuator plate for ink print heads composed of ink print modules with a membrane plate in a stacked construction, wherein the individual piezoactuators of piezoactuator plate (1) are covered on both sides with electrodes (13.01 to 13.16, 14) and are arranged on a membrane plate over ink pressure chambers; wherein the individual piezoactuators form an active area (11) of the piezoactuator plate (1), while the remaining part of the piezoactuator plate (1) forms an inactive area (12); wherein one of the electrodes (14), that at the same time is a common electrode of all individual piezoactuators, extends over one face area (15) of piezoactuator plate (1) up to the opposite side, wherein a ditch-shaped impression is provided in piezoactuator plate (1) between the active area (11) and the inactive area (12).
  2. An arrangement according to Claim 1, characterised in that the electrodes (13.01 to 13.16, 14) of the piezoactuators are directly contacted with connecting lines of a flat cable for driving the piezoactuators.
  3. An arrangement according to Claim 1, characterised in that the electrodes (13.01 to 13.16, 14) of the piezoactuators are indirectly contacted, through a connecting module, with the connecting lines of a respectively ready-made flat cable for driving the piezoactuators.
  4. A method for the production of a piezoactuator plate for ink print heads composed of ink print modules with a membrane plate in a stacked construction, wherein the individual piezoactuators of piezoactuator plate (1) are covered on both sides with electrodes (13.01 to 13.16, 14) and are arranged on a membrane plate over ink pressure chambers; wherein the individual piezoactuators form an active area (11) of piezoactuator plate (1), while the remaining part of piezoactuator plate (1) forms an inactive area (12); and wherein one of the electrodes (14), that at the same time is a common electrode of all individual piezoactuators, extends over one face area (15) of piezoactuator plate (1) up to the opposite side, the method comprising the following steps:
    a plate made of piezoelectric material is metallized at least on its broad sides and one face side (15) by means of a suitable method, the metallization on one of the broad sides being interrupted throughout in parallel with the metallized face side (15); a respective mask covering can be applied for that purpose;
    the metallized plate is polarised by means of applying a polarisation voltage;
    the polarised plate is fixed with its completely metallized broad side to the membrane plate by means of a suitable glue;
    by means of suitable processes, the plate is structured in such manner that it shows a desired pattern of individual piezoactuators (n x 1);
    with its electrodes (13.01 to 13.16, 14), the structured plate (1) is contacted with the assigned connecting lines of a flat cable in a suitable manner.
  5. A method for the production of a piezoactuator plate for ink print heads composed of ink print modules with a membrane plate in a stacked construction, wherein the individual piezoactuators of piezoactuator plate (1) are covered on both sides with electrodes (13.01 to 13.16, 14) and are arranged on a membrane plate over ink pressure chambers; wherein the individual piezoactuators form an active area (11) of piezoactuator plate (1), while the remaining part of piezoactuator plate (1) forms an inactive area (12); and wherein one of the electrodes (14), that at the same time is a common electrode of all individual piezoactuators, extends over one face area (15) of piezoactuator plate (1) up to the opposite side, the method comprising the following steps:
    a plate made of piezoelectric material is metallized at least on its broad sides and one face side (15) by means of a suitable method, the metallization on one of the broad sides being interrupted throughout in parallel with the metallized face side (15); a respective mask covering can be applied for that purpose;
    by means of suitable processes, the plate is structured in such manner that it shows a desired pattern of individual piezoactuators (n x 1);
    the structured plate is polarised by means of applying a polarisation voltage;
    the polarised structured plate (1) is fixed with its completely metallized broad side to the membrane plate by means of a suitable glue;
    with its electrodes (13.01 to 13.16, 14), the structured plate (1) is contacted with the assigned connecting lines of a flat cable in a suitable manner.
  6. A method for the production of a piezoactuator plate for ink print heads composed of ink print modules with a membrane plate in a stacked construction, wherein the individual piezoactuators of piezoactuator plate (1) are covered on both sides with electrodes (13.01 to 13.16, 14) and are arranged on a membrane plate over ink pressure chambers, wherein the individual piezoactuators form an active area (11) of piezoactuator plate (1), while the remaining part of piezoactuator plate (1) forms an inactive area (12), wherein one of the electrodes (14), that at the same time is a common electrode of all individual piezoactuators, extends over one face area (15) of piezoactuator plate (1) up to the opposite side, the method comprising the following steps:
    a plate made of piezoelectric material provided with electrodes (13, 14) on both of its broad sides is polarised by means of applying a polarisation voltage;
    by means of suitable methods, the plate is structured in such a manner that it is divided into an active area (11) and an inactive area (12) and the active area shows a desired pattern of individual piezoactuators (n x 1);
    the face side (15) located in parallel with and adjacent to the separating line between active and inactive area is metallized by means of a suitable process so as to extend the one electrode (14) into the inactive area on the opposite side that way;
    plate (1) is fixed with its completely metallized broad side to the membrane plate by means of a suitable glue;
    with its electrodes (13.01 to 13.16, 14), plate (1) is contacted with the assigned connecting lines of a flat cable in a suitable manner.
  7. A method according to Claims 4 to 6, characterised by using lead-zirconate-titanate as piezoelectric material.
  8. A method according to Claims 4 to 6, characterised in that the metallization is made by means of galvanization.
  9. A method according to Claims 4 to 6, characterised in that the metallization is made by means of sputtering.
  10. A method according to Claims 4 to 6, characterised in that the metallization is made by means of vacuum metallization.
  11. A method according to Claims 4 to 6, characterised in that the metallization is made by means of screen printing a metal paste.
  12. A method according to Claims 4 to 11, characterised in that a silver alloy is used for the metallization.
  13. A method according to Claims 4 to 6, characterised in that the structuring is made by means of sawing.
  14. A method according to Claims 4 to 6, characterised in that the structuring is made by means of etching.
  15. A method according to Claims 4 to 6, characterised in that the structuring is made by means of laser etching.
  16. A method according to Claims 4 to 6, characterised in that the structuring is made by means of sandblasting.
  17. A method according to Claims 4 to 6, characterised in that the glue used is a fluid epoxy resin glue applied with a thickness of 1 to 5 µm.
  18. A method according to Claims 4 to 6, characterised in that the glue used is a glue curing under UV radiation.
  19. A method according to Claims 4 to 6, characterised in that the electrodes (13.01 to 13.16, 14) of plate (1) are contacted with the assigned connecting lines by means of bonding.
  20. A method according to Claims 4 to 6, characterised in that the connecting lines of the flat cable are mechanically pressed against the assigned electrodes (13.01 to 13.16, 14) of plate (1) by means of a connecting module.
EP19950250165 1994-08-03 1995-07-06 Arrangement for plate-like piezoelectric actuators and method of manufacturing Expired - Lifetime EP0695641B1 (en)

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US5729263A (en) 1998-03-17
EP0695641A2 (en) 1996-02-07
EP0695641A3 (en) 1997-03-12
US5883651A (en) 1999-03-16

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