EP0676772B1 - Méthode de fabrication de fenêtres pour rayons X - Google Patents

Méthode de fabrication de fenêtres pour rayons X Download PDF

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Publication number
EP0676772B1
EP0676772B1 EP95301965A EP95301965A EP0676772B1 EP 0676772 B1 EP0676772 B1 EP 0676772B1 EP 95301965 A EP95301965 A EP 95301965A EP 95301965 A EP95301965 A EP 95301965A EP 0676772 B1 EP0676772 B1 EP 0676772B1
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EP
European Patent Office
Prior art keywords
diamond
layer
substrate
reaction chamber
array
Prior art date
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Expired - Lifetime
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EP95301965A
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German (de)
English (en)
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EP0676772A1 (fr
Inventor
Paul Raymond Chalker
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Ricardo AEA Ltd
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AEA Technology PLC
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    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/10—Scattering devices; Absorbing devices; Ionising radiation filters

Definitions

  • the present invention relates to X-ray windows and more specifically, to such windows made out of diamond.
  • X-ray windows as their name implies are thin, that is to say less than 10 ⁇ m, more specifically less than 1 ⁇ m, lamina which are transparent to X-rays and form part of X-ray apparatus. Often, as for example in connection with X-ray spectrometers, they need to be able to withstand pressure differentials of an atmosphere or greater.
  • a material which is particularly suitable for use as an X-ray window is diamond.
  • diamond in thin lamina form it is weak mechanically and needs to be supported on a substrate.
  • Existing practice is to grow the diamond from the vapour phase upon a relatively thick silicon substrate.
  • silicon is a relatively heavy absorber of X-rays so that diamond on silicon X-ray windows have low X-ray transmissions.
  • EP 0 476 827 discloses a method of manufacturing an X-ray window consisting of a layer of diamond having a supporting structure consisting of an array of diamond ribs formed upon one surface of the diamond layer.
  • the ribs are formed by depositing a layer of diamond upon a silicon substrate, forming a patterned metal mask upon the exposed surface of the layer of diamond, depositing further diamond on the mask and exposed regions of the diamond layer, removing the mask, and finally removing the silicon substrate.
  • the above process has the disadvantage that the substrate and original diamond layer have to be removed from the vacuum chamber in which the diamond deposition is done in order that the mask can be deposited on the coated substrate, and returned to the vacuum chamber for the deposition of the further diamond. Not only is this time consuming, but there is no guarantee that the further deposited diamond will be epitaxial with the original diamond layer.
  • the supporting ribs may not be truly integral with the original diamond layer, which could be a source of weakness in the final X-ray window.
  • diamond is a difficult material to etch, so that the removal of the mask without effecting the diamond ribs is a difficult operation.
  • an X-ray window comprising a membrane of diamond having an array of integral supporting ribs, wherein there included is the operations of
  • Diamond may be removed from the selected areas of the exposed surface of the layer of diamond by a chemical etching process, ion beam thinning or by ablation.
  • the ablation can be carried out by means of a laser which produces radiation having wavelengths in the regions of 190 to 250 nm, where diamond absorbs strongly.
  • the substrate is made of silicon.
  • diamond includes the material known as diamond-like carbon which has many of the properties of diamond but does not have the regular crystalline structure of diamond.
  • an X-ray window embodying the invention consists of a circular membrane 1 made of diamond.
  • the membrane 1 has a plane surface 2 and a second surface 3 in which is formed an array of hexagonal depressions 4.
  • the lands between the depressions 4 form a series of ribs 5 between the depressions 4.
  • an annulus 6 is left around the edges of the membrane 1.
  • the depressions may have shapes other than hexagonal, for example, they may be square-shape.
  • a process for producing an X-ray window such as that shown in Figure 1 includes the operations of

Claims (5)

  1. Procédé de fabrication d'une fenêtre pour rayons X comprenant une membrane de diamant ayant un arrangement de nervures de support qui en sont solidaires, le procédé comprenant les opérations suivantes :
    a) le dépôt d'une couche (1) de diamant sur un matériau de substrat,
    b) l'extraction du matériau de régions choisies (4) de la surface exposée (3) de la couche (1) de diamant pour la formation de l'arrangement des nervures de support (5) qui en sont solidaires, et
    c) l'extraction du matériau du substrat afin qu'une membrane de diamant ayant un arrangement de nervures de support qui en sont solidaires soit réalisée.
  2. Procédé selon la revendication 1, qui comprend des opérations d'interposition d'un masque protecteur entre la surface exposée (3) de la couche (1) de diamant et une source d'un rayonnement laser, le masque étant destiné à délimiter les régions (4) de la surface exposée (3) de la couche (1) de diamant dont le matériau doit être extrait, et l'exposition de la couche (1) de diamant audit rayonnement jusqu'à ce que l'épaisseur de la couche de diamant dans les régions choisies soit réduite à une valeur prédéterminée.
  3. Procédé selon la revendication 2, dans lequel le rayonnement laser est produit par un laser à fluorure d'argon ou à fluorure de krypton.
  4. Procédé selon l'une quelconque des revendications précédentes, dans lequel le diamant est déposé par préparation d'une surface du substrat afin qu'elle forme des sites de nucléation qui facilitent la croissance du diamant sur ladite surface du substrat, par disposition du substrat dans une chambre de réaction, par évacuation de la chambre de réaction, par admission d'un mélange d'hydrogène et de méthane dans la chambre de réaction, la concentration du méthane dans l'oxygène étant comprise entre 0,5 et 1,5 % en volume en débit, par établissement d'un plasma dans le mélange d'hydrogène et de méthane dans la chambre de réaction, par maintien d'une pression totale du gaz dans la chambre de réaction entre 20 et 50 mbar, par maintien de la température du substrat à une température constante comprise dans la plage allant de 500 à 900 °C, et par interruption de la réaction lorsqu'une épaisseur prédéterminée de diamant s'est déposée.
  5. Procédé selon l'une quelconque des revendications précédentes, dans lequel l'épaisseur initiale de la couche (1) de diamant est d'environ 10 µm et l'épaisseur finale des régions choisies (4) de la couche de diamant (1) est d'environ 1 µm.
EP95301965A 1994-04-09 1995-03-24 Méthode de fabrication de fenêtres pour rayons X Expired - Lifetime EP0676772B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9407073A GB9407073D0 (en) 1994-04-09 1994-04-09 X-Ray windows
GB9407073 1994-04-09

Publications (2)

Publication Number Publication Date
EP0676772A1 EP0676772A1 (fr) 1995-10-11
EP0676772B1 true EP0676772B1 (fr) 1997-10-29

Family

ID=10753296

Family Applications (1)

Application Number Title Priority Date Filing Date
EP95301965A Expired - Lifetime EP0676772B1 (fr) 1994-04-09 1995-03-24 Méthode de fabrication de fenêtres pour rayons X

Country Status (4)

Country Link
EP (1) EP0676772B1 (fr)
JP (1) JPH07294700A (fr)
DE (1) DE69500941T2 (fr)
GB (1) GB9407073D0 (fr)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8761344B2 (en) 2011-12-29 2014-06-24 Moxtek, Inc. Small x-ray tube with electron beam control optics
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8948345B2 (en) 2010-09-24 2015-02-03 Moxtek, Inc. X-ray tube high voltage sensing resistor
US8964943B2 (en) 2010-10-07 2015-02-24 Moxtek, Inc. Polymer layer on X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19934987B4 (de) * 1999-07-26 2004-11-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Röntgenanode und ihre Verwendung
JP4797252B2 (ja) * 2001-02-09 2011-10-19 住友電気工業株式会社 Ｘ線光学素子およびその製造方法
JP4792639B2 (ja) * 2001-02-14 2011-10-12 住友電気工業株式会社 窓材、光学用窓、および窓材の製造方法
JP4248248B2 (ja) * 2001-03-20 2009-04-02 アドバンスト・エレクトロン・ビームズ・インコーポレーテッド Ｘ線照射装置
JP4969851B2 (ja) * 2003-09-16 2012-07-04 浜松ホトニクス株式会社 Ｘ線管
DE102004013620B4 (de) 2004-03-19 2008-12-04 GE Homeland Protection, Inc., Newark Elektronenfenster für eine Flüssigmetallanode, Flüssigmetallanode, Röntgenstrahler und Verfahren zum Betrieb eines solchen Röntgenstrahlers
DE102004015590B4 (de) 2004-03-30 2008-10-09 GE Homeland Protection, Inc., Newark Anodenmodul für eine Flüssigmetallanoden-Röntgenquelle sowie Röntgenstrahler mit einem Anodenmodul
JP4912743B2 (ja) * 2006-05-18 2012-04-11 浜松ホトニクス株式会社 Ｘ線管及びそれを用いたｘ線照射装置
EP2105944A1 (fr) 2008-03-28 2009-09-30 FEI Company "Cellule environnementale" pour appareil optique à particules chargées
JP2010185665A (ja) * 2009-02-10 2010-08-26 Kobe Steel Ltd Ｘ線透過窓材及びその窓材を備えたｘ線透過窓
JP5580843B2 (ja) * 2012-03-05 2014-08-27 双葉電子工業株式会社 Ｘ線管

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02208601A (ja) * 1989-02-08 1990-08-20 Seiko Instr Inc 光学用窓材及びその製造方法
JP3026284B2 (ja) * 1990-09-18 2000-03-27 住友電気工業株式会社 Ｘ線窓材とその製造方法
US5146481A (en) * 1991-06-25 1992-09-08 Diwakar Garg Diamond membranes for X-ray lithography

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US8247971B1 (en) 2009-03-19 2012-08-21 Moxtek, Inc. Resistively heated small planar filament
US8948345B2 (en) 2010-09-24 2015-02-03 Moxtek, Inc. X-ray tube high voltage sensing resistor
US8964943B2 (en) 2010-10-07 2015-02-24 Moxtek, Inc. Polymer layer on X-ray window
US8804910B1 (en) 2011-01-24 2014-08-12 Moxtek, Inc. Reduced power consumption X-ray source
US8750458B1 (en) 2011-02-17 2014-06-10 Moxtek, Inc. Cold electron number amplifier
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US8761344B2 (en) 2011-12-29 2014-06-24 Moxtek, Inc. Small x-ray tube with electron beam control optics
US9173623B2 (en) 2013-04-19 2015-11-03 Samuel Soonho Lee X-ray tube and receiver inside mouth

Also Published As

Publication number Publication date
EP0676772A1 (fr) 1995-10-11
JPH07294700A (ja) 1995-11-10
GB9407073D0 (en) 1994-06-01
DE69500941D1 (de) 1997-12-04
DE69500941T2 (de) 1998-03-05

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