EP0646283B1 - Elektronenstrahlaustrittsfenster - Google Patents

Elektronenstrahlaustrittsfenster Download PDF

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Publication number
EP0646283B1
EP0646283B1 EP93911733A EP93911733A EP0646283B1 EP 0646283 B1 EP0646283 B1 EP 0646283B1 EP 93911733 A EP93911733 A EP 93911733A EP 93911733 A EP93911733 A EP 93911733A EP 0646283 B1 EP0646283 B1 EP 0646283B1
Authority
EP
European Patent Office
Prior art keywords
frame
metal foil
electron beam
fibre bundles
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP93911733A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0646283A1 (de
Inventor
Olaf Roeder
Ulf Seyfert
Siegfried Panzer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP0646283A1 publication Critical patent/EP0646283A1/de
Application granted granted Critical
Publication of EP0646283B1 publication Critical patent/EP0646283B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/18—Windows permeable to X-rays, gamma-rays, or particles

Definitions

  • the invention relates to an electron beam exit window through which the electron beam generated in an evacuated electron beam is led out into a room of higher pressure, preferably at atmospheric pressure.
  • beam exit windows also called Lenard windows
  • Such beam exit windows are mainly used in electron beam systems with which an electron beam process, such as. B. an electron beam polymerization takes place in a room at atmospheric pressure.
  • the electron beam can be generated both as an axial beam and moved over the beam exit window by means of a scanner, and can also be guided through the beam exit window as a band-shaped or flat-shaped electron beam.
  • the simplest versions consist of a thin, gas-impermeable film, which separates the jet generation chamber from the free atmosphere in a vacuum-tight manner.
  • These foils are preferably made of aluminum, titanium or beryllium alloys. When the electron beam passes through, the film is heated due to the inevitable interaction between the electron beam and the film material.
  • the foils have to withstand the pressure difference, but must not be too thick, on the one hand to limit the energy losses of the electron beam to be discharged and on the other hand to limit the amount of power loss that has to be dissipated from the foil, so that the foil heating remains within a temperature tolerable by the foil material ( US-A-3,222,558).
  • a gas flow is used for heat dissipation.
  • the invention has for its object to provide an electron beam exit window of the type mentioned, which does not require a massive water-cooled support structure, has a low power absorption, is particularly suitable for electron beams of relatively low acceleration voltage and is easy to manufacture.
  • the support of the metal foil by the support grid formed from high-temperature fiber bundles and the loading of the fiber bundle on tensile stress allow a cross-sectional minimization of the support grid construction and thus a substantial reduction in beam losses in the beam exit window.
  • the use of carbon fiber bundles for the support grid is particularly advantageous because of the low elastic expansion and the low coefficient of thermal expansion. Ensuring an approximately circular cross-section of the fiber bundle under load takes place, for. B. by twisting the filaments.
  • the use of fiber bundles made of a highly heat-resistant material enables the maintenance of a high temperature gradient over the support grid in the beam direction as well the dissipation of a substantial part of the beam power absorbed in the support grid by heat radiation.
  • a metal foil made of titanium and carbon fiber bundles as a support grid
  • a similar barrier layer can also be expedient on the pressure side of the foil in order to avoid the undesired diffusion of the gaseous contact partners of the metal foil.
  • the fiber bundles form an angle not equal to 90 ° with the fastening frame. Appropriate adaptation of this angle to the window width, the spacing of the fiber bundles from one another and the power density distribution of the electron beam improve the irradiation homogeneity on the moving material to be irradiated.
  • the metal foil can also be cooled on the pressure side in a known manner by a gas flow, preferably in the direction of the fiber bundle.
  • the radiation exit window according to the invention is particularly suitable for relatively low-energy electron beams and a short distance between the beam exit window and the material to be irradiated.
  • the frame 1 and 2 consists of the frame 1 with the opening 2 for the beam exit, the area of which is covered by a support grid 3 consisting of fiber bundles 4 made of carbon.
  • the fiber bundles 4 are firmly anchored in grooves 5 by filling in casting resin 6.
  • On the Frame 1 is glued to the support grid 3 of metal foil 7 made of titanium.
  • the fiber bundles 4 of the support grid 3 are arranged to improve the homogeneity of the radiation at an angle ⁇ ⁇ 90 ° to the leg of the frame 1.
  • the frame 1 has, on the opposite side of the support grid 3, a sealing surface 8 which bears against the electron beam generator (not shown) in a vacuum-tight manner. To limit the tensile stress in the fiber bundles 4, these have a sag h. Under the effect of the applied pressure difference, the metal foil 7 lies against the support grid 3. To ensure an approximately circular shape of the fiber bundles 4, even under the load from the metal foil 7, the fiber bundles 4 are twisted.
  • a barrier layer 12 made of titanium oxide is applied to the metal foil 7 on both sides in order to reduce chemical reactions between the support grid material and the gaseous reaction partners and the metal foil.

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Laminated Bodies (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
EP93911733A 1992-06-15 1993-05-03 Elektronenstrahlaustrittsfenster Expired - Lifetime EP0646283B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4219562 1992-06-15
DE4219562A DE4219562C1 (zh) 1992-06-15 1992-06-15
PCT/DE1993/000402 WO1993026032A1 (de) 1992-06-15 1993-05-03 Elektronenstrahlaustrittsfenster

Publications (2)

Publication Number Publication Date
EP0646283A1 EP0646283A1 (de) 1995-04-05
EP0646283B1 true EP0646283B1 (de) 1997-01-22

Family

ID=6461054

Family Applications (1)

Application Number Title Priority Date Filing Date
EP93911733A Expired - Lifetime EP0646283B1 (de) 1992-06-15 1993-05-03 Elektronenstrahlaustrittsfenster

Country Status (5)

Country Link
US (1) US5561342A (zh)
EP (1) EP0646283B1 (zh)
JP (1) JPH08501651A (zh)
DE (2) DE4219562C1 (zh)
WO (1) WO1993026032A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7295015B2 (en) 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
US7768267B2 (en) 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6407492B1 (en) 1997-01-02 2002-06-18 Advanced Electron Beams, Inc. Electron beam accelerator
US5962995A (en) * 1997-01-02 1999-10-05 Applied Advanced Technologies, Inc. Electron beam accelerator
US6545398B1 (en) * 1998-12-10 2003-04-08 Advanced Electron Beams, Inc. Electron accelerator having a wide electron beam that extends further out and is wider than the outer periphery of the device
US7030619B2 (en) * 2004-02-19 2006-04-18 Brooks Automation, Inc. Ionization gauge
DE102007021893A1 (de) 2007-05-10 2008-11-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Durchführen von Elektronenstrahlprozessen
DE102007021897A1 (de) 2007-05-10 2008-11-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung zum Durchführen von thermischen und nicht-thermischen Elektronenstrahlprozessen
US9305735B2 (en) 2007-09-28 2016-04-05 Brigham Young University Reinforced polymer x-ray window
US8498381B2 (en) 2010-10-07 2013-07-30 Moxtek, Inc. Polymer layer on X-ray window
KR101541273B1 (ko) 2007-12-19 2015-08-03 엠케이에스 인스트루먼츠, 인코포레이티드 전자 멀티플라이어 냉 방출 소스를 갖는 이온화 게이지
US8338796B2 (en) * 2008-05-21 2012-12-25 Hitachi Zosen Corporation Electron beam emitter with slotted gun
SE534156C2 (sv) 2009-03-11 2011-05-17 Tetra Laval Holdings & Finance Förfarande för montering av ett fönster för utgående elektroner och en fönsterenhet för utgående elektroner
US9437389B2 (en) * 2010-02-08 2016-09-06 Tetra Laval Holdings & Finance S.A. Assembly and method for reducing foil wrinkles
BR112012019759B1 (pt) * 2010-02-08 2022-02-08 Tetra Laval Holdings & Finance Sa Montagem de uma placa de suporte, e, método para reduzir rugas em uma lâmina
CN106409637A (zh) * 2010-12-02 2017-02-15 利乐拉瓦尔集团及财务有限公司 电子出射窗箔
US8929515B2 (en) 2011-02-23 2015-01-06 Moxtek, Inc. Multiple-size support for X-ray window
US8989354B2 (en) 2011-05-16 2015-03-24 Brigham Young University Carbon composite support structure
US9076628B2 (en) 2011-05-16 2015-07-07 Brigham Young University Variable radius taper x-ray window support structure
US9174412B2 (en) 2011-05-16 2015-11-03 Brigham Young University High strength carbon fiber composite wafers for microfabrication
US9502206B2 (en) 2012-06-05 2016-11-22 Brigham Young University Corrosion-resistant, strong x-ray window
US20140301530A1 (en) * 2013-04-08 2014-10-09 James L. Failla, JR. Protective shield for x-ray fluorescence (xrf) system
US20140301531A1 (en) * 2013-04-08 2014-10-09 James L. Failla, JR. Protective shield for x-ray fluorescence (xrf) system
IL268283B1 (en) 2017-01-26 2024-04-01 Canadian Light Source Inc An electron beam exit window in isotope production
CN108901117A (zh) * 2018-09-11 2018-11-27 中国科学院高能物理研究所 一种束流窗口设备
CN111586959B (zh) * 2020-05-26 2022-08-30 浙江中烟工业有限责任公司 一种电子帘加速器双窗引出辐照装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102511C (zh) *
DE207521C (zh) *
US3222558A (en) * 1961-05-22 1965-12-07 Gen Electric Vanadium window for an atomic particle and radiation emitting device
US3162749A (en) * 1962-12-31 1964-12-22 United Aircraft Corp Jet valve pressure staging device
US3607680A (en) * 1967-10-03 1971-09-21 Matsushita Electric Ind Co Ltd Methof for producing a device for transmitting an electron beam
FR2006152A1 (en) * 1968-04-12 1969-12-19 Nuclear Chicago Corp Cooled exit window for intense beams of high energy - atomic particles
DD102511A1 (zh) * 1972-12-27 1973-12-12
DE2501885A1 (de) * 1975-01-18 1976-07-22 Licentia Gmbh Elektronendurchlaessiges fenster und verfahren zu dessen herstellung
US4324980A (en) * 1980-07-21 1982-04-13 Siemens Medical Laboratories, Inc. Electron exit window assembly for a linear accelerator
DD207521A1 (de) * 1982-06-03 1984-03-07 Hans Johne Lagerung von farbkaesten
US4494036A (en) * 1982-11-22 1985-01-15 Hewlett-Packard Company Electron beam window
US4591756A (en) * 1985-02-25 1986-05-27 Energy Sciences, Inc. High power window and support structure for electron beam processors
NL8701222A (nl) * 1987-05-22 1988-12-16 Philips Nv Roentgenbeeldversterkerbuis met verbeterd ingangsvenster.
JPH052100A (ja) * 1990-10-12 1993-01-08 Toshiba Corp 電子ビーム照射装置および電子ビーム透過膜の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7295015B2 (en) 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
US7768267B2 (en) 2007-07-11 2010-08-03 Brooks Automation, Inc. Ionization gauge with a cold electron source

Also Published As

Publication number Publication date
DE59305276D1 (de) 1997-03-06
DE4219562C1 (zh) 1993-07-15
WO1993026032A1 (de) 1993-12-23
EP0646283A1 (de) 1995-04-05
JPH08501651A (ja) 1996-02-20
US5561342A (en) 1996-10-01

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