EP0603201A1 - Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe. - Google Patents
Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe.Info
- Publication number
- EP0603201A1 EP0603201A1 EP92916327A EP92916327A EP0603201A1 EP 0603201 A1 EP0603201 A1 EP 0603201A1 EP 92916327 A EP92916327 A EP 92916327A EP 92916327 A EP92916327 A EP 92916327A EP 0603201 A1 EP0603201 A1 EP 0603201A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- pump body
- fluid
- pump according
- micro diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims abstract description 63
- 239000012530 fluid Substances 0.000 claims abstract description 56
- 239000004065 semiconductor Substances 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 5
- 239000007788 liquid Substances 0.000 claims description 32
- 241000446313 Lamella Species 0.000 claims description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 8
- 230000005684 electric field Effects 0.000 claims description 5
- 238000013459 approach Methods 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims description 3
- 230000001154 acute effect Effects 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000005686 electrostatic field Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 230000000737 periodic effect Effects 0.000 description 4
- 238000004026 adhesive bonding Methods 0.000 description 3
- 230000002706 hydrostatic effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005429 filling process Methods 0.000 description 1
- 238000011089 mechanical engineering Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/1055—Flap valves the valve being formed by one or more flexible elements more than two flexible elements oscillating around a fixed point
Definitions
- the present invention relates to a microminiaturized, electrostatically operated micromembrane pump according to the preamble of claims 1 and 2.
- thermopneumatically driven micromembrane pump A number of microminiaturized diaphragm pumps are already known.
- F.CM. van de Pol, H.T.G. van Lintel, M. Elwsenspoek and J.H.J. Fluitman "A Thermo-Pneumatic Micropump Based on Micro-Engineering Techniques", Sensors and Actuators, A21-A23 (1990) pp. 198-202 describes a thermopneumatically driven micromembrane pump. The implementation of such a drive is very complex.
- Piezoelectrically driven diaphragm pumps are described in the specialist publications F.CM. van de Pol, HTG van Lintel, S. Bouwstra, "A Piezoelectric Micropump Based on Micromachining of Silicon", Sensors and Actuators, 19 (1988) pp. 153-167 and M.Esashi, S.Shoji and A.Nakano, " Normally close Microvalve and Micropump 11 , Sensors and Actuators, 20 (1989), 163-169.
- the realization of these drives contains manufacturing steps that do not belong to the standard technological steps of semiconductor technology, such as the gluing on of a piezofile or a piezostack, so that the manufacturing costs are high.
- a microminiaturizable membrane pump which has an outer membrane which is deformable by a piezo element.
- An inner one The pump chamber of the micropump is divided by a partition, within which valve structures are arranged.
- the valve structures are part of stops which limit the movement of the diaphragm with respect to the partition or with respect to the rest of the pump body in order to determine a constant pump quantity per pump cycle.
- micropump is known from WO 90/15929, which largely corresponds to the structure of the micropump that has just been recognized.
- DE 40 06 152 A1 discloses a micropump with a first pump body and a second pump body having a membrane area, each of which has electrically conductive electrode areas which can be connected to a voltage source and are electrically insulated from one another, the two pump bodies being connected to the membrane area Define adjacent pump room with each other, known.
- the pumping capacity of this micropump is not always satisfactory.
- the application of an electric field to the liquid to be pumped is undesirable in some cases.
- the invention has for its object to provide a microminiaturized micromembrane pump of the type specified in the preamble of claim 1, in which the liquid to be pumped is not or only to a small extent subjected to an electrical field.
- the invention is also based on the object of creating a microminiaturized micromembrane pump of the type specified in the preamble of claim 2, which is simple and inexpensive to manufacture and is high Has pump power.
- a novel electrostatic drive principle for microminiaturized diaphragm pumps is specified, which is characterized by an extremely simple structure and can be implemented using the conventional methods of semiconductor technology.
- the medium to be pumped is exposed to the action of the electrostatic field required for the drive, so that the micromembrane pump according to the invention can also be used for dosing medicaments which dissociate under the influence of electrostatic fields.
- the micromembrane pump is able to transport liquids and / or gases as well as to generate a hydrostatic pressure when the flow rate disappears.
- micromembrane pump according to the invention can be produced with the known methods of semiconductor technology, which is a great advantage. Another advantage of the micromembrane pump according to the invention is that it can be used to convey fluids of any conductivity.
- the micromembrane pump comprises a cavity which is defined by the two pump bodies and adjoins the membrane area which is filled with a fluid medium which is spatially separated from the fluid to be pumped.
- the cavity preferably has at least one opening through which this medium can exit.
- the micro-diaphragm pump comprises a cavity which is defined by the two pump bodies and which adjoins the diaphragm area and which is filled with a fluid medium which is spatially separated from the fluid to be pumped and which has a relative dielectric tricity constant that is greater than 1.
- the cavity preferably has at least one opening through which this medium can exit.
- the medium which can also be referred to as a reinforcing liquid or gas, preferably has the highest possible relative dielectric constant in order to bring about as great a force as possible, which acts on the diaphragm area by applying a voltage to the two pump bodies.
- the fluid can be enclosed in the housing of the micromembrane pump and thus does not necessarily come into contact with the surroundings.
- enclosing the fluid in the housing it should be noted that when a liquid is used, due to its vanishing compressibility, it must not fill the entire cavity in the housing, since otherwise the liquid would escape from the space between the first and the second pump body (membrane area / counter electrode body) is no longer possible and the membrane would no longer move due to the back pressure built up by the liquid.
- the micromembrane pump according to the invention is not completely filled with the reinforcing liquid
- embodiments are also possible in which the cavity is completely filled with the reinforcing liquid, but in this case the opening of the Cavity with a extremely flexible further membrane, which can be formed, for example, by a rubber skin, is sealed off from the ambient atmosphere.
- the pump can also be operated with a booster gas with a dielectric constant that is greater than 1.
- One or more through openings in the counterelectrode body ensure that when a liquid is used for the reinforcement, it can flow into and out of the space between the first and the second pump body (membrane region / counterelectrode body) without great resistance.
- An increased pumping frequency of the electrostatic micromembrane pump according to the invention can be brought about in that the drainage of the reinforcing liquid is facilitated by channel structures in the membrane or the pump body opposite the membrane in the direction of the passage opening.
- dielectrics with a large relative dielectric constant in a capacitor displace the dielectrics with a smaller dielectric constant ensures that the liquid automatically separates the space between the first and the second pump body (membrane / counterelectrode). fills if only one of the passage openings mentioned above is in contact with the liquid filling.
- This filling process can be additionally facilitated by a suitable surface coating of the first and the second pump body, at least in the parts of the membrane region coming into contact with the liquid, and of the third pump body as a counter electrode.
- Figure 1 is a schematic sectional view for explaining the principle of operation of an electrostatic micro diaphragm pump according to the invention.
- FIG. 2 shows a schematic representation of a cross section through a first embodiment of an electrostatically operated micromembrane pump according to the invention
- 3a shows a sectional illustration of a third pump body composed of two partial pump bodies which are formed with valves
- FIG. 3b shows a sectional illustration of an alternative embodiment to the pump body structure according to FIG. 3a;
- FIG. 5 shows a schematic sectional illustration of another embodiment of an electrostatic micromembrane pump according to the invention.
- FIG. 6 shows a schematic sectional illustration of a further embodiment of an electrostatic micromembrane pump according to the invention.
- FIG. 7 shows a modification of the embodiment according to FIG. 1;
- FIG. 8 shows a graphical representation of the relationship between the flow rate and the pressure difference for the valves used in the embodiment according to FIG. 3b.
- 1 shows a partial unit, generally designated 1, of a microminiaturized diaphragm pump with an electrostatic drive according to the invention.
- a first pump body 2, which serves as a counter electrode, is arranged above a second pump body 3 and is firmly connected to the latter.
- Both pump bodies 2 and 3 preferably consist of semiconductor materials of different charge carrier types.
- the first pump body 2 can consist of p-type silicon, the second pump body 3 then being made of n-type silicon.
- the second pump body 3 is coated with a dielectric layer on the surface facing the first pump body 2.
- the second pump body 3 On its side facing away from the first pump body 2, the second pump body 3 has a truncated pyramid-shaped recess 7, through which a thin, elastic membrane region 6 with a small thickness dimension is created.
- the recess 7 can be produced by photolithographically fixing a rear etching opening and then anisotropically etching.
- the first pump body 2 has two through openings 4 and 5 which extend in the direction of its thickness dimension and pass through it. These two passage openings 4 taper in the direction of the second pump body 3.
- the first and the second pump bodies 2 and 3 are connected to one another in a sealing manner in their edge region via a connecting layer 9, forming a space 10.
- the connection layer 9 can consist, for example, of Pyrex glass.
- the connection can be made by anodic bonding or by gluing.
- the distance dl between the two mutually facing surfaces of the first and the second pump body 2 and 3 should be approximately in the range of 1 to 20 microns.
- the space 10 between the first and the second pump bodies 2 and 3 is filled with a liquid medium with a suitably high dielectric constant to such an extent that the liquid extends into the passage openings 4 and 5 or beyond them.
- the first pump body 2 or both pump bodies 2 and 3 could also be coated with a passivating dielectric layer 8 with a total thickness d2 and the relative dielectric constant e 2 , for example in order to cause electrical breakdowns prevent.
- the dielectric can also fulfill the function of making the surface tension of the two pump bodies 2 and 3 favorable on the surfaces facing one another for a specific liquid.
- the first pump body 2 On its surface, the first pump body 2 is provided with an ohmic contact 11 and the third pump body 3 is provided with an ohmic contact 11 '. These two contacts 11 and 11 r are connected to the terminals of a voltage source U.
- e t is the relative dielectric constant of the medium in the space between the membrane area 6 of the second pump body 3 and the first pump body 2 and e 2 is the dielectric constant of a possible passivation layer 8.
- the generally liquid medium in the region between the membrane region 6 and the second pump body 3 is generally different from the medium to be pumped and, above all, must meet a further condition with regard to its conductivity. If the specific resistance of the medium is too low, the electrostatic field between the membrane region and the first pump body used as counter electrode is rapidly reduced within the characteristic time T, with
- the passage openings 4 and 5 formed in the first pump body 2 ensure that the liquid can flow away freely from the space between the membrane area 6 of the second pump body 3 and the first pump body 2 and thus does not exert any counterpressure on the membrane area 6 would prevent movement of the membrane area 6 due to the electrostatically generated pressure. It can also be seen from equation (1) that the thickness d 2 of a possible passivation layer 8 should not exceed a certain size (e * ⁇ d 2 ⁇ e 2 d 1 ).
- the pressure generated electrostatically on the membrane area is practically stored in the membrane due to its deformation and, after switching off the voltage U, causes the membrane to return to its original position.
- a periodic electrical voltage (preferably in the form of rectangular pulses) to the first pump body 2 as the counter electrode and the second pump body 3 with its membrane region 6, the maximum frequency of which is determined by the passage characteristics of the valves on the membrane pump, which will be described later, a periodic displacement of a certain stroke volume is achieved, which is the main characteristic of a diaphragm pump.
- a great advantage in the metering of small amounts of liquid is a stroke volume of the pump which, if possible, does not depend or only very little depends on the back pressure to be overcome for the liquid.
- the properties of the electrostatic diaphragm pump according to the invention explained below bring about a constant stroke volume in a very elegant manner.
- the capacitance C 1 can be regarded as a series connection of two or more capacitances C 1, C 2 . This can be seen if, in FIG. 1, the interface between the insulation layer 8 and the cavity 10 filled with the liquid is considered as a fictitious capacitor plate.
- the capacitance C 2 is represented by the insulation layer 8, the capacitance C by the liquid medium in the cavity 10. The following equation applies:
- Fig. 2 shows a schematic representation of a cross section through a first particularly simple embodiment of an electrostatically operating diaphragm pump according to the invention.
- This diaphragm pump comprises the sub-unit 1 described in connection with FIG. 1 with its first and second pump bodies 2 and 3 and additionally a third pump body 12 which is connected to the second pump body 3 in an electrically conductive and sealing manner.
- This connection can be made, for example, by soldering or eutectic bonding or gluing.
- the third pump body 12 preferably also consists of a semiconductor material of the same type as that of the second pump body 3, for example of n-type silicon.
- the first and the third pump bodies 2 and 12 each have an ohmic contact 13 and 14 on their outer surface, each of which is connected to a connection of a voltage source U.
- the third pump body 12 has two through openings 15 and 16, of which the through opening 15 serves as a fluid inlet and the through opening 16 serves as a fluid outlet. Both through openings 15 and 16 taper in the direction of flow of the fluid.
- check valve On the surface of the third pump body 12 facing the second pump body 3, a check valve is provided, which is formed by the passage opening 15 and the flap 17. On the free surface of the third A further check valve is provided in the pump body 12 and is formed by the passage opening 16 and the flap 18.
- the term check valve generally refers to a device which is characterized by different flow behavior for different directions.
- the third pump body 12 covers the recess 7 in the second pump body to form a cavity 19, the pump chamber.
- a hose 20 is attached to the passage opening 15 for supplying a fluid, and a hose 21 for discharging a fluid is attached to the passage opening 16.
- a suitable fluid line could also be attached in each case.
- the periodic deflection of the membrane or the membrane area 6 described in connection with FIG. 1 leads to a periodic change in the pump chamber volume, which is compensated for by a liquid flow through the check valves 15, 16, 17, 18. Since the check valves 15, 16, 17, 18 each have a different flow characteristic in the flow or blocking direction, this leads to a pumping action in a defined direction.
- the check valve 17 is opened and fluid flows into the pump chamber.
- the check valve 18 remains closed.
- the check valve 18 is opened and the check valve 17 is closed, so that a certain volume of fluid now flows out of the pump chamber.
- the check valves in the third pump body 12 can be formed by passage openings which are formed by a membrane-like thin one Layer are spanned, which in turn has passage openings which are spaced from the passage opening by the pump body chip.
- Such a structure can be produced, for example, by means of sacrificial layer technology.
- These check valves can either be realized together on one pump body chip or on two separate pump body chips that are bonded to one another.
- the membranes that span the passage openings can also be set back by surface recesses relative to the surface of the third pump body 12 and thus better protected.
- FIG. 3a Another embodiment of the check valves in the context of the invention is shown in Fig. 3a.
- the third pump body 12 of the diaphragm pump shown in FIG. 2 is formed by two identical sub-bodies 22a and 22b, which are connected head to head only in their edge area and middle area facing one another via a thin connecting layer 23.
- the mutually facing surfaces of the two partial bodies 22a and 22b are spaced apart from one another.
- connection layer 23 can be omitted.
- the partial bodies 22a, 22b are glued to one another on their end faces.
- Each of the two partial bodies 22a and 22b is provided with a passage opening 24a and 24b, which are designed similarly to the passage openings 15 and 16 of the third pump body 12. Furthermore, each of the two sub-bodies 22a and 22b is provided with a further passage opening 25a and 25b, which is particularly designed.
- the further passage openings 25a and 25b are formed in the same way, so that only the description of one of the passage openings 25a is required.
- the passage opening 25a comprises a truncated pyramid-shaped recess 26, preferably with a rectangular cross-section, which tapers in the direction of the free surface of the partial body 22a.
- the partial body 22a On the side facing away from the partial body 22b, the partial body 22a has a total of four thin elastic connecting webs 27, only two of which are shown in section, which are formed in one piece with the partial body 22a and extend into the recess 26. These connecting webs 27 have a thickness dimension of approximately 0.5-30 ⁇ m.
- a pressure difference across the two partial bodies 22a and 22b causes the lamella sections 28 to deflect in a direction essentially perpendicular to the main surface of the partial body 22a and 22b. If the lamella sections 28 of one of the passage openings 25a or 25a are pressed against the surface of the partial body 22a or 22b opposite their end faces 28, the flow resistance is increased or the flow is possibly interrupted, while in the other passage opening 25b or 25a a passage ⁇ flow takes place.
- the electrical connection of the entire diaphragm pump can generally by bonding or the housing on the top of the first pump body and - because of the electrically conductive connection of the second and third pump body - on the underside of the third pump body.
- the entire inside of the pump chamber 19 can be metallized and grounded via the contact on the third pump body. " This means that the medium to be pumped is not exposed to any electrostatic field during passage through the pump chamber 19. This can be important in medical applications.
- valve flaps 28a, 28b are each integrally connected to the partial bodies 22a, 22b and arranged on the sides of these partial bodies 22a, 22b facing one another.
- the partial bodies 22a, 22b can thus be etched together with the valve flaps 28a, 28b, wherein these valve structures can consist of identical semiconductor chips which are bonded head to head.
- Each chip therefore has an area in which it is thinly etched to form the flap 28a, 28b with a typical flap thickness of 1 ⁇ m to 20 ⁇ m, and an area in which the opening 24a, 24b is etched through.
- a flap of one chip is arranged above an opening of the other chip.
- Typical lateral dimensions of the flaps 28a, 28b are 1 by 1 mm.
- a typical opening size on the smaller side is 400 ⁇ m by 400 ⁇ m.
- FIG. 8 shows a graphical representation of the flow rate of the pump body valve structure according to FIG. 3b as a function of the pressure difference. It can be seen that the valve structure according to FIG. 3b is characterized by a very high forward to backward ratio. This characteristic of the valve structure is particularly clear in the case of the flow-pressure difference dependency for small flow quantities shown on a different scale, which is inserted in FIG. 8.
- FIG. 4 shows a further embodiment which is similar to the illustration shown in FIG. 1. Identical parts are identified by the same reference numerals.
- the stroke volume of the membrane depends on the net pressure on the membrane area.
- the electrostatically generated pressure and thus the operating voltage U are involved, on the other hand, the hydrostatic pressure difference ⁇ p that has to be overcome for the fluid to be pumped plays a role.
- the stroke volume of the membrane or of the membrane area is therefore primarily dependent on ⁇ p at a fixed operating voltage, which is not desirable for many applications.
- insulating elements 30 can be provided on the surface of the first pump body 2 acting as counterelectrode 2 which faces the membrane region 6 of the second pump body 3.
- FIG Another embodiment of an electrostatic diaphragm pump according to the invention is shown in FIG in contrast to the diaphragm pump shown in FIG. 2, the fluid inlet opening and the fluid outlet opening are located on opposite sides of the diaphragm pump.
- the diaphragm pump in FIG. 5 is generally designated 31 and has a first, a second and a third pump body 32, 33 and 34, respectively.
- the first and second pump bodies 32 and 33 and the second and third pump bodies 33 and 34 are each connected to one another in their edge region via a connecting layer 35 and 36, respectively.
- the distance between the respective pump bodies is determined by the thickness of the connecting layer 35 or 36.
- the connection layer can consist, for example, of Pyrex glass or a solder.
- the first pump body 32 is formed with an ohmic contact 37 and the third pump body with an ohmic contact 38 for connection to a voltage source.
- the first pump body 32 has three through openings 39, 40 and 41, of which the first two correspond to the through openings 5 and 4 in the diaphragm pump in FIG. 2 and are designed in the same way.
- the third passage opening 41 is also frustum-shaped and tapers in the direction of the second pump body 33.
- a connecting layer area 42 which serves to delimit a chamber 43 for a dielectric fluid from the passage opening 41.
- the second pump body 33 has a recess 44 on the side facing the third pump body 34, which corresponds to the recess 7 in the second pump body 3 in FIG. 2.
- a thin, elastic membrane area 45 is defined by the recess 44.
- the second pump body 33 is formed with a passage opening 46, which from of the recess 44 and is aligned with the passage opening 41 in the first pump body 32.
- the passage opening 46 has the shape of a truncated pyramid and tapers in the direction of the first pump body 33.
- the third pump body 34 has a passage opening 47 which is formed in the shape of a truncated pyramid and tapers in the direction of the second pump body 33.
- the passage opening 47 is aligned with the passage opening 46 in the second pump body 33.
- a rear recess 44 in the second pump body 33 and the surface of the third pump body 34 facing the second pump body 33 define a pump chamber 48.
- a recess is formed in the third pump body 34 on the side of the pump chamber 48 adjacent to the passage opening 46, as a result of which a connecting channel 49 is defined between the pump chamber 48 and the region of the passage opening 46.
- This connecting channel 49 serves to facilitate the passage of the fluid to be pumped from the pump chamber 48 to the region of the passage opening 46 during pumping.
- a feed hose 50 is fastened to the passage opening 47 serving as the fluid inlet opening.
- a discharge hose 51 is attached to the passage opening 41 serving as the fluid outlet opening.
- the passage opening 47 in the third pump body 34 is provided with a check valve 52.
- the passage opening 46 in the second pump body 33 is provided with a check valve 53.
- the first pump body 32 which acts as a counter electrode, preferably consists of a semiconductor substrate of the p-type polished on one side
- the second pump body 33 consists of a semiconductor substrate of the n-type and polished on both sides the third pump body 34 made of a single-sided polished n-type semiconductor substrate.
- the diaphragm pump according to FIG. 6 is generally designated by reference numeral 60 and comprises a first and second pump body 61, 62 and a cover plate 63.
- the first pump body 61 has two through openings 64, 65 for the fluid to be pumped and two Passage openings 66, 67 for the reinforcing fluid with the high dielectric constant, the latter connecting to the cavity 68.
- Below the cavity 68 is a membrane area 69 of the second pump body 62.
- the two pump bodies 61, 62 are connected to one another both at their peripheral areas and at edge areas of the cavity 68 by a connecting layer 70.
- the second pump body 62 together with the cover plate 63, defines a pump chamber 71 which on the one hand extends to the membrane area 69 and on the other hand merges into passage openings 72, 73.
- the first pump body 61 carries in the region of its second passage opening 65 a first valve flap which, together with the passage opening 65, forms a check valve.
- the second pump body carries a second valve flap 75 which, together with its second passage opening 73, forms a further check valve.
- the two fluid connections 76, 77 connect to the first and second passage openings 64, 65 of the first pump body 61.
- FIG. 7 shows a modification of the embodiments according to FIG. 1.
- Parts of the embodiment according to FIG. 7 which correspond to FIG. 1 are again identified by the same reference numerals.
- the embodiment according to FIG. 7 differs essentially from that according to FIG. 1 in that the membrane region 6 of the second pump body 3 and the opposite counter-electrode region 11 of the first pump body 2 are structured in a rib-like or comb-like manner in cross section.
- the membrane pump has a liquid in the cavity, which is acted upon as a fluid medium by the electric field, and pumps a liquid, a gas, such as e.g. Air, and / or a gas to be pumped instead of the liquid to be pumped.
- a liquid such as e.g. Air
- a gas such as e.g. Air
- the cavity can be filled with a fluid medium whose relative dielectric constant is 1 or less than 1 . Air is considered as a fluid medium.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Description
Claims
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4130211 | 1991-09-11 | ||
DE4130211 | 1991-09-11 | ||
DE4135655 | 1991-10-29 | ||
DE4135655A DE4135655A1 (de) | 1991-09-11 | 1991-10-29 | Mikrominiaturisierte, elektrostatisch betriebene membranpumpe |
PCT/DE1992/000630 WO1993005295A1 (de) | 1991-09-11 | 1992-07-28 | Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0603201A1 true EP0603201A1 (de) | 1994-06-29 |
EP0603201B1 EP0603201B1 (de) | 1995-11-15 |
Family
ID=25907199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92916327A Expired - Lifetime EP0603201B1 (de) | 1991-09-11 | 1992-07-28 | Mikrominiaturisierte, elektrostatisch betriebene mikromembranpumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US5529465A (de) |
EP (1) | EP0603201B1 (de) |
KR (1) | KR0119362B1 (de) |
DE (3) | DE4143343C2 (de) |
WO (1) | WO1993005295A1 (de) |
Families Citing this family (177)
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DE4135655C2 (de) | 1993-08-05 |
DE4143343C2 (de) | 1994-09-22 |
DE59204373D1 (de) | 1995-12-21 |
US5529465A (en) | 1996-06-25 |
EP0603201B1 (de) | 1995-11-15 |
WO1993005295A1 (de) | 1993-03-18 |
KR0119362B1 (ko) | 1997-09-30 |
DE4135655A1 (de) | 1993-03-18 |
DE4143343A1 (de) | 1993-03-25 |
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