EP0598715B1 - Ultrasonic transducer - Google Patents

Ultrasonic transducer Download PDF

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Publication number
EP0598715B1
EP0598715B1 EP91908273A EP91908273A EP0598715B1 EP 0598715 B1 EP0598715 B1 EP 0598715B1 EP 91908273 A EP91908273 A EP 91908273A EP 91908273 A EP91908273 A EP 91908273A EP 0598715 B1 EP0598715 B1 EP 0598715B1
Authority
EP
European Patent Office
Prior art keywords
transducer
foil
segments
piezoelectric
curved segments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP91908273A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0598715A1 (en
EP0598715A4 (en
Inventor
Barry John Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Scientific and Industrial Research Organization CSIRO
AGL Consultancy Pty Ltd
Original Assignee
Commonwealth Scientific and Industrial Research Organization CSIRO
AGL Consultancy Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Scientific and Industrial Research Organization CSIRO, AGL Consultancy Pty Ltd filed Critical Commonwealth Scientific and Industrial Research Organization CSIRO
Publication of EP0598715A4 publication Critical patent/EP0598715A4/en
Publication of EP0598715A1 publication Critical patent/EP0598715A1/en
Application granted granted Critical
Publication of EP0598715B1 publication Critical patent/EP0598715B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/32—Sound-focusing or directing, e.g. scanning characterised by the shape of the source

Definitions

  • This invention relates to ultrasonic piezoelectric transducers, processes of constructing an ultrasonic piezoelectric transducer, a system for transmitting ultrasonic vibrations, a system for detecting ultrasonic vibrations, systems for transmitting and detecting ultrasonic vibrations, a method for transmitting ultrasonic vibrations, a method for detecting ultrasonic vibrations and methods for transmitting and detecting ultrasonic vibrations.
  • United States patent no. 3,816,774 describes a curved piezoelectric element which is exemplified by a number of embodiments described with reference to the Figures.
  • the exemplified embodiments fall generally into two classes: those who are clamped at one end and free at the other, and those which are clamped at more than one position and not in a cantilever state.
  • a transducer of different character which is arranged in a spiral shape and is intended for use as a direct current voltmeter.
  • US 3,816,774 does not describe a piezoelectric transducer which operates at ultrasonic frequencies.
  • United States patent no. 4,056,742 describes an "electromechanical transducer" comprising a piezoelectric film having a plurality of curved segments wherein each curved segment has an opposite sign of curvature to an adjacent curved segment.
  • the film has surface electrodes deposited thereon, which are separated between adjacent curved segments providing at leat one electrode for each segment.
  • the film is supported by a frame and is also fixed to a series of ribs between each adjacent curved segment. Because of the manner in which the film of the transducer described in US 4,056,742 is fixed to the ribs, the foil is incapable of the large deflection necessary to provide high acoustic output.
  • a piezoelectric material having an appropriate profile can be driven in a mode that is referred to in the specification and claims as a dilational mode which is alternatively referred to as a quasi-longitudinal mode.
  • a tentative explanation of what is meant by a transducer being driven in a dilational mode is as follows. When a piezoelectric material having a curved profile is driven it will bulge out when it is lengthened and contract in when it is shortened. Where it is not curved no transverse motion results. Thus, if the material is gently curved but contains no point of inflection and thus no change in the sign of its curvature, it will undergo transverse vibration of the same phase along its whole length.
  • the curve includes a point of inflection the transverse displacement changes in phase at this point. If this curvature having the point of inflection also possesses the appropriate radiation geometry there is a resultant effective coupling of piezoelectric excitation to transverse displacements whereby the out of phase transverse vibrations constructively interfere to give high output and when this occurs the piezoelectric material is being driven in a dilational mode. In this way a transducer possessing a high effective radiating area can be designed for ultrasonic frequencies having wavelengths which are of the order of a few millimetres.
  • the transducer may be operable in a dilational mode in which the effective coupling of piezoelectric excitation to transverse displacement in the foil causes out-of-phase transverse vibrations to interfere constructively to give high output.
  • the foil may comprise any material which is capable of transmitting and/or receiving ultrasonic vibrations.
  • materials include piezoelectric polymeric materials, plastics and rubber.
  • the piezoelectric material comprises a poled polyvinylidene polymer, PVDF, or a copolymer of vinylidene fluoride and trifluoroethylene which may be in the form of a sheet, foil, film or other appropriate piezoelectric form.
  • d 1 10mm.
  • h r is about the same (within 0.5mm) or is the same as h l and h 2r is about the same (within 0.5mm) or is the same as h 2l .
  • the foil may have at least two electrodes located thereon, typically one electrode on each side of the foil.
  • the electrodes may be the same or different material, typically the same material.
  • Examples of electrode materials are metals such as Au, Pd, Pt, Ti, Zn, Al, Ag, Cu, Sn, Ga, In, Ni, conducting polymers which require doping with doping agents such as iodine, fluorine, alkali metals and their salts, metal carbonates and arsenic halides, include polyacetylene, polyacetylene copolymers, polypyrroles, polyacrylonitriles, polyaromatics, polyanilines, polythiophenes, polycarbazoles, polybetadiketone and polydipropargylamine, polyacenaphthene/N-vinyl heterocyclics with Lewis acids, poly(heteroaromatic vinylenes), polyphthalocyanines, polymer reacted with 1,9-disubstituted
  • the width of the foil is 1mm - 3500mm, advantageously lmm - 500mm, typically 3mm - 100mm, more typically 4mm - 40mm, preferably 5mm - 20mm and even more preferably 10mm.
  • the following describes the construction of an ultrasonic piezoelectric transducer designed to operate at around 100 kHz.
  • the output of this transducer is relatively high (at around 1 Pa/V at 10cm for its working area of 1cm 2 ) and, compared to most other piezoelectric transducers, it has a broad bandwidth (around 30 kHz between 3dB points).
  • the reception sensitivity will depend on the type of amplifier applied to the transducer, as will the system noise (i.e. using a high input-impedance voltage amplifier will give different characteristics to a low input-impedance transconductance amplifier).
  • a thin PVDF foil 10 with evaporated electrodes 11 and 12 is caused to bend over a forming block 13 having screw holes 25 (left screw hole shown only), by adjustable crossbar 14 - typically of thin, stiff wire - as per Fig. 1.
  • Dimensions of block 13 are shown in mm in Figs. 5(a) and (b).
  • the diameter of bend 15 in foil 10 is governed by the height of crossbar 14 above block 13.
  • the diameter of bend 15 affects the frequency of operation (about 3mm at 100 kHz) as does foil width 16 (about 1cm at 100 kHz). Both of these dimensions also affect the amplitude of vibration (i.e. the transmission and receptive sensitivities).
  • the forming block 13a is preferably formed from an insulator.
  • the height of crossbar 14a can be adjusted by hand which can take a few seconds, and, given the simplicity of the component parts, the entire assembly is inexpensive to produce.
  • system 400 is located in an atmospheric environment in which ultrasonic waves are required to be transmitted.
  • Ultrasonic electrical signals which are applied to transducer 401 by square/sine wave generator 402 or pulse generator 403 cause transducer 401 to vibrate ultrasonically causing ultrasonic vibrations to be transmitted into the surrounding air or other gases.
  • Fig. 4 depicts schematically, in block diagram form, a system 500 for detecting and transmitting ultrasonic vibrations.
  • System 500 has an ultrasonic piezoelectric transducer 501 of Fig. 1 or 7 and an amplifier 502 linked electrically to transducer 501 via switch 505.
  • Amplifier 502 is linked, also electrically, to filter 503 which in turn is linked electrically to cathode ray oscilloscope 504.
  • System 500 has an ultrasonic square/sine wave generator 506 or ultrasonic pulse generator 507 linked electrically to transducer 501 via switch 505.
  • system 500 is located in an atmospheric environment in which ultrasonic waves are required to be detected. Ultrasonic vibrations in the air or other gases cause transducer 501 to vibrate ultrasonically and are converted to ultrasonic electrical signals by transducer 501.
  • the electrical signals pass to amplifier 502 via switch 505 which links transducer 501 and amplifier 502 when system 500 is in the detection mode.
  • the ultrasonic electrical signals are amplified by amplifier 502, filtered by filter 503 and displayed on cathode ray oscilloscope 504.
  • ultrasonic electrical signals which are applied to transducer 501 by square/sine wave generator 506 or pulse generator 507 via switch 505 which links transducer 501 and generator 506 or 507, cause transducer 501 to vibrate ultrasonically causing ultrasonic vibrations to be transmitted into the surrounding air or other gases and can pass to reflecting surface 508 from which they are reflected and detected by system 500 in the detection mode.
  • Two systems 500 each having transducers according to Fig. 1 or 7 as described immediately above may be placed at a distance from one another to alternatively transmit and receive ultrasonic signals to make measurements such as gas flow rate.
  • a piezoelectric material of the invention has a curvature having three points of inflection and it is thought that provided the curvature also possesses the appropriate radiation geometry there is a resultant effective coupling of piezoelectric excitation to transverse displacements whereby the out of phase transverse vibrations constructively interfere to give high output and when this occurs that the transducer is being driven in a quasi-longitudinal/dilational mode, that is, generating surface motions parallel to the surface of the piezoelectric material.
  • the function of the curvature of the transducer of the invention function is complex in three ways.
  • Figure 9(c) illustrates the combining of these features in a 25 ⁇ m thick PVDF piezoelectric material about 10mm wide and 20-30mm in length used for gas velocity measurements in domestic gas.
  • the optimum foil to use is the uni-directional one cut with the active direction across the strip since this suppresses the existence of a strong dilational mode in the length direction (however, a bidirectional PVDF could also be used). Were this present it would cause an additional response peak below the desired one giving low frequency undulations to the output.
  • the foil is driven in the width direction at frequencies at and below the first width resonance. This vibration forces a corresponding periodic dilatation along the foil, via Poisson coupling, which is every where in phase.
  • the foil was curved into the shape shown via clamps at each end and a retaining wire across the middle giving an effective radiating area of about 100 mm 2 .
  • the two high curvature mounds possess enhanced transverse motion and are in phase. In the depression between them the transverse motion is in opposite phase.
  • FIG. 9(d) A second configuration is shown in Figure 9(d), suitable for lower frequency piezoelectric materials, 20 - 50 kHz.
  • a strip of the uni-directional foil was cut along the active direction and the strong dilational resonance along the foil was used as the basis for the piezoelectric material.
  • the foil is clamped in a simple inverted "U” shape and then the curved front of the inverted "U” was slightly flattened with a retaining wire.
  • the optimum output is obtained when the foil is pushed in until the radiating surface was just shon of being flat. At this point the whole radiating surface vibrates in phase. If the foil is made exactly flat a region in the middle appears having reverse phase which destroys the response.
  • the operating frequency was determined by the length of the foil and second, by the final complex curve and the results are illustrated in Fig. 9(e).
  • a secondary effect of the retaining wire was to broaden the frequency response.
  • the effect of the electrode mass on the transducer output was to decrease the amplitude i.e. the higher the molecular weight/density of the film and the thicker the electrode thickness, the lower is the amplitude of vibration and the output of the transducer, e.g. from Al - Ti - Ag - Au there is a drop off of dB in output.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Surgical Instruments (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Dental Tools And Instruments Or Auxiliary Dental Instruments (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Steroid Compounds (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Saccharide Compounds (AREA)
  • Medicines Containing Plant Substances (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
EP91908273A 1990-04-27 1991-04-24 Ultrasonic transducer Expired - Lifetime EP0598715B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AU9873/90 1990-04-27
AUPJ987390 1990-04-27
PCT/AU1991/000157 WO1991017637A1 (en) 1990-04-27 1991-04-24 Ultrasonic transducer

Publications (3)

Publication Number Publication Date
EP0598715A4 EP0598715A4 (en) 1993-06-08
EP0598715A1 EP0598715A1 (en) 1994-06-01
EP0598715B1 true EP0598715B1 (en) 1997-11-05

Family

ID=3774626

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91908273A Expired - Lifetime EP0598715B1 (en) 1990-04-27 1991-04-24 Ultrasonic transducer

Country Status (19)

Country Link
EP (1) EP0598715B1 (zh)
JP (1) JPH05507183A (zh)
KR (1) KR960012986B1 (zh)
CN (1) CN1039867C (zh)
AT (1) ATE160069T1 (zh)
AU (1) AU660610B2 (zh)
CA (1) CA2081472A1 (zh)
DE (1) DE69128155T2 (zh)
DK (1) DK0598715T3 (zh)
ES (1) ES2109267T3 (zh)
FI (1) FI924849A0 (zh)
GR (1) GR3025648T3 (zh)
HU (1) HUT64672A (zh)
IE (1) IE80771B1 (zh)
IN (1) IN177551B (zh)
NO (1) NO306530B1 (zh)
NZ (1) NZ237971A (zh)
SG (1) SG46263A1 (zh)
WO (1) WO1991017637A1 (zh)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0557780A1 (de) * 1992-02-25 1993-09-01 Siemens Aktiengesellschaft Ultraschallwandler mit piezoelektrischer Polymerfolie
CN102437658A (zh) * 2011-12-27 2012-05-02 东南大学 一种基于压电陶瓷的超声波无线输电装置
CN104054984A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054981A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054987A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054983A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104056809A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054991A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054979A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054988A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054985A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104055196A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104056808A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054996A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104055197A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054986A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054989A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104056805A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054977A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054997A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054976A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054978A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054980A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054990A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104056807A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054995A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054994A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054993A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN104054992A (zh) * 2013-03-21 2014-09-24 谭燕 一种净化装置
CN110323964B (zh) * 2019-07-02 2024-07-12 西安工程大学 一种基于杠杆原理的压电陶瓷位移放大装置及其驱动方法
RU2722534C1 (ru) * 2019-12-02 2020-06-01 Общество с ограниченной ответственностью Торгово-промышленная компания "Чистон и К" Широкополосный ультразвуковой электроакустический преобразователь с круговой диаграммой направленности для устройств отпугивания грызунов

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3115588A (en) * 1958-02-05 1963-12-24 Raytheon Co Electroacoustical apparatus
US3816774A (en) * 1972-01-28 1974-06-11 Victor Company Of Japan Curved piezoelectric elements
US4056742A (en) * 1976-04-30 1977-11-01 Tibbetts Industries, Inc. Transducer having piezoelectric film arranged with alternating curvatures
NL7703836A (nl) * 1977-04-07 1977-06-30 Philips Nv Een membraan bestaande uit tenminste een folie van een piezoelektrisch polymeermateriaal.
FR2409654B1 (fr) * 1977-11-17 1985-10-04 Thomson Csf Dispositif transducteur piezoelectrique et son procede de fabrication
JPS59174096A (ja) * 1983-03-23 1984-10-02 Kaitou Seisakusho:Kk 圧電型トランスジユ−サ

Also Published As

Publication number Publication date
IE911425A1 (en) 1991-11-06
FI924849A (fi) 1992-10-26
DE69128155D1 (de) 1997-12-11
NZ237971A (en) 1994-11-25
ES2109267T3 (es) 1998-01-16
HUT64672A (en) 1994-01-28
KR960012986B1 (ko) 1996-09-25
HU9203367D0 (en) 1993-03-01
NO924136L (no) 1992-12-23
IN177551B (zh) 1997-02-08
DE69128155T2 (de) 1998-03-05
CN1039867C (zh) 1998-09-16
IE80771B1 (en) 1999-02-10
DK0598715T3 (da) 1998-08-10
CN1056267A (zh) 1991-11-20
WO1991017637A1 (en) 1991-11-14
GR3025648T3 (en) 1998-03-31
AU7741391A (en) 1991-11-27
FI924849A0 (fi) 1992-10-26
EP0598715A1 (en) 1994-06-01
NO924136D0 (no) 1992-10-26
ATE160069T1 (de) 1997-11-15
SG46263A1 (en) 1998-02-20
NO306530B1 (no) 1999-11-15
EP0598715A4 (en) 1993-06-08
JPH05507183A (ja) 1993-10-14
AU660610B2 (en) 1995-07-06
CA2081472A1 (en) 1991-10-28

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