EP0517666A1 - Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode - Google Patents

Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode Download PDF

Info

Publication number
EP0517666A1
EP0517666A1 EP92810414A EP92810414A EP0517666A1 EP 0517666 A1 EP0517666 A1 EP 0517666A1 EP 92810414 A EP92810414 A EP 92810414A EP 92810414 A EP92810414 A EP 92810414A EP 0517666 A1 EP0517666 A1 EP 0517666A1
Authority
EP
European Patent Office
Prior art keywords
resonator
shape
zero
resonator according
angles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP92810414A
Other languages
English (en)
French (fr)
Other versions
EP0517666B1 (de
Inventor
Jean Hermann
Claude Bourgeois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre Suisse dElectronique et Microtechnique SA CSEM
Original Assignee
Centre Suisse dElectronique et Microtechnique SA CSEM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Suisse dElectronique et Microtechnique SA CSEM filed Critical Centre Suisse dElectronique et Microtechnique SA CSEM
Publication of EP0517666A1 publication Critical patent/EP0517666A1/de
Application granted granted Critical
Publication of EP0517666B1 publication Critical patent/EP0517666B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02023—Characteristics of piezoelectric layers, e.g. cutting angles consisting of quartz

Definitions

  • the present invention relates to quartz resonators and relates more particularly to resonators of this type having good thermal properties, having a relatively low resonant frequency, vibrating according to a fundamental mode of torsion and capable of being produced in series by techniques. chemical attack.
  • the three references above relate to resonators using a coupling between two vibration modes in order to improve the thermal properties.
  • the first two references relate to a vibrating tuning fork according to a mode of bending coupled to a mode of torsion
  • the third reference relates to a vibrating resonator according to a mode of elongation coupled to a mode of bending.
  • the three examples described are characterized by the use of a relatively tight coupling between the modes of vibration.
  • tight coupling is meant a relative difference in low frequency ( ⁇ 2%) between the non-coupled modes.
  • One consequence of this tight coupling is that the thermal properties which result therefrom depend critically on certain geometric dimensions; which considerably reduces the manufacturing yield of such resonators and limits their practical interest.
  • an object of the invention is a quartz resonator having good thermal properties, capable of being produced in series and not having the drawbacks of the examples of the prior art described above.
  • Another object of the invention is a quartz resonator whose thermal properties do not critically depend on its geometric dimensions.
  • Another object of the invention is a quartz resonator capable of being embedded.
  • the variation of the frequency of the resonator as a function of the temperature does not depend, as a first approximation, either on the dimensional ratio of the base rectangle, nor on its thickness.
  • the use of a vibration outside the plane of the resonator results in a relatively low vibration frequency; for example of the order of 0.5 MHz for a miniature resonator that can be housed in a cylindrical encapsulation with an outside diameter of 2 mm.
  • the resonator is a thin plate 1 of square or rectangular shape.
  • Figure 1 shows nodal lines (places of the points without movement) 10.a and 10.b in the extension of which the resonator can be fixed by means of one or more fixing arms 11. It would also be possible to fix the resonator by means of a fixing wire welded at the crossing point of the nodal lines.
  • FIG. 2 shows the resonator 1 of FIG. 1 fixed to a frame 2 by four arms 11 situated in the extension of the nodal lines. Another possible solution would be to make only two fixing arms; these being arranged at opposite ends of the same nodal line.
  • the frame 2 is preferably also made of quartz, it is possible to simultaneously manufacture the resonator, the arms and the frame.
  • FIG. 3 shows the cutting angles of a first variant of a resonator according to the invention.
  • the X, Y and Z axes of the reference system correspond to the electrical, mechanical and optical axes of the quartz crystal, respectively.
  • the resonator 1 is obtained by a first rotation of angle ⁇ around the axis X, followed by a second rotation of angle ⁇ around the normal.
  • the graph in FIG. 4, representing the locations of the zero values of the first-order temperature coefficient or coefficient ⁇ makes it possible to define the possible values of the cutting angles ⁇ and ⁇ for which the resonator will have good thermal properties, namely: a first order temperature coefficient ⁇ zero and a second order temperature coefficient, or coefficient ⁇ , zero or of very low value.
  • FIG. 5 shows the cutting angles of a second variant of a resonator according to the invention.
  • the resonator is obtained by a first rotation of angle ⁇ around the axis Y, followed by a second rotation of angle ⁇ around the normal.
  • the graph in FIG. 6, similar to the graph in FIG. 4, shows the possible values of the cutting angles ⁇ and ⁇ for which the first order coefficient ⁇ is zero.
  • FIG. 7 shows a preferred embodiment of the invention.
  • the resonator 1 (FIG. 7.a) is fixed to a frame 2 by four arms 11; which ensures the best possible impact resistance.
  • the frame can be itself fixed, by welding or gluing, on a cylindrical base (not shown) provided with insulated electrical connections.
  • the resonator and cylindrical base assembly is then closed under vacuum by a cylindrical metal cover crimped tightly on the base.
  • Two distinct metallization systems are shown in FIG. 7.
  • the first system comprises metallization zones 12.a, located on the two faces of the resonator and in each of the corners of the rectangular plate, which are not connected to the outside .
  • the role of this first metallization system is to allow, after manufacture, an adjustment of the frequency of the resonator by selective vaporization of the metal using a laser beam. This operation, necessary taking into account the manufacturing tolerances, makes it possible to obtain the set frequency. A rough adjustment can be made directly on the substrate and the fine adjustment when the resonator is mounted on its base.
  • the second metallization system comprises, on each face, a set of bipolar electrodes 12.b which makes it possible to obtain the piezoelectric coupling necessary for the excitation of the torsional vibration mode.
  • the electrodes 12.b are produced in the central part of the resonator, they are aligned on a straight line whose inclination depends on the chosen crystallographic section.
  • the section in Figure 7.b shows the reverse polarity of the electrodes 12.b on both sides of the resonator.
  • the electrodes 12.b are connected to the electrical connections of the mounting base via metallized tracks 12.c on the outer frame and the bonding / welding area.
  • the simple square or rectangular geometry is not the only geometry which allows the implementation of the characteristic torsion mode of the invention.
  • Such changes can significantly affect thermal properties, particularly the second order thermal coefficient.
  • These modifications may also, depending on the case, involve a variation of the crystallographic cutting angles of a few degrees.
  • the coupling electrodes can be modified by incorporating, for example, non-straight parts. The shape of the electrodes depends on the shape chosen for the resonator.
  • the different resonator variants shown each show two pairs of opposite resonator-frame link arms. However, as mentioned previously, it is possible to remove one of the two couples to reduce the disturbing effect of the external frame on the central resonator. In this case, less resistance to impact will ensue. In addition, notches can be provided between the frame and the actual mounting area in order to increase the quality factor and reduce the influence of the mounting on the base of the resonator.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP92810414A 1991-06-04 1992-05-29 Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode Expired - Lifetime EP0517666B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1654/91A CH683050A5 (fr) 1991-06-04 1991-06-04 Résonateur à quartz vibrant selon un mode fondamental de torsion.
CH1654/91 1991-06-04

Publications (2)

Publication Number Publication Date
EP0517666A1 true EP0517666A1 (de) 1992-12-09
EP0517666B1 EP0517666B1 (de) 1998-02-04

Family

ID=4215517

Family Applications (1)

Application Number Title Priority Date Filing Date
EP92810414A Expired - Lifetime EP0517666B1 (de) 1991-06-04 1992-05-29 Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode

Country Status (6)

Country Link
US (1) US5274297A (de)
EP (1) EP0517666B1 (de)
JP (1) JPH05152886A (de)
AT (1) ATE163111T1 (de)
CH (1) CH683050A5 (de)
DE (1) DE69224325D1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4322144C2 (de) * 1992-07-03 1997-06-05 Murata Manufacturing Co Vibratoreinheit
DE4419085C2 (de) * 1993-05-31 1999-09-02 Murata Manufacturing Co Chipförmiger Baustein mit piezoelektrischer Resonanz
US5621263A (en) * 1993-08-09 1997-04-15 Murata Manufacturing Co., Ltd. Piezoelectric resonance component
US5648746A (en) * 1993-08-17 1997-07-15 Murata Manufacturing Co., Ltd. Stacked diezoelectric resonator ladder-type filter with at least one width expansion mode resonator
DE4429132C2 (de) * 1993-08-17 1998-06-04 Murata Manufacturing Co Abzweigfilter
US5414322A (en) * 1994-04-19 1995-05-09 The United States Of America As Represented By The Secretary Of The Army Crystal resonator with multiple segmented lateral-field excitation electrodes
JP3114526B2 (ja) * 1994-10-17 2000-12-04 株式会社村田製作所 チップ型圧電共振部品
US6150703A (en) * 1998-06-29 2000-11-21 Trw Inc. Lateral mode suppression in semiconductor bulk acoustic resonator (SBAR) devices using tapered electrodes, and electrodes edge damping materials
US6172443B1 (en) * 1998-11-24 2001-01-09 Cts Corporation Quartz crystal resonator with improved temperature performance and method therefor
US6215375B1 (en) * 1999-03-30 2001-04-10 Agilent Technologies, Inc. Bulk acoustic wave resonator with improved lateral mode suppression
US20040097996A1 (en) 1999-10-05 2004-05-20 Omnisonics Medical Technologies, Inc. Apparatus and method of removing occlusions using an ultrasonic medical device operating in a transverse mode
JP3373840B2 (ja) * 2000-11-17 2003-02-04 有限会社ピエデック技術研究所 ラーメモード水晶振動子
US6714102B2 (en) * 2001-03-01 2004-03-30 Agilent Technologies, Inc. Method of fabricating thin film bulk acoustic resonator (FBAR) and FBAR structure embodying the method
JP3969224B2 (ja) * 2002-01-08 2007-09-05 株式会社村田製作所 圧電共振子及びそれを用いた圧電フィルタ・デュプレクサ・通信装置
US6707351B2 (en) * 2002-03-27 2004-03-16 Motorola, Inc. Tunable MEMS resonator and method for tuning
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
US7794414B2 (en) 2004-02-09 2010-09-14 Emigrant Bank, N.A. Apparatus and method for an ultrasonic medical device operating in torsional and transverse modes
JP4728242B2 (ja) * 2004-08-05 2011-07-20 パナソニック株式会社 捩り共振器およびこれを用いたフィルタ
TW201238244A (en) * 2011-02-23 2012-09-16 Nihon Dempa Kogyo Co GT-cut quartz crystal resonator
US11070191B2 (en) 2019-08-22 2021-07-20 Statek Corporation Torsional mode quartz crystal device
US11070192B2 (en) 2019-08-22 2021-07-20 Statek Corporation Torsional mode quartz crystal device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2435855A1 (fr) * 1978-09-08 1980-04-04 Centre Electron Horloger Resonateur piezo-electrique
GB2124022A (en) * 1982-07-14 1984-02-08 Centre Electron Horloger Quartz resonator of tuning fork type

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4320320A (en) * 1978-12-01 1982-03-16 Kabushiki Kaisha Suwa Seikosha Coupled mode tuning fork type quartz crystal vibrator
JPS5748819A (en) * 1980-09-08 1982-03-20 Seiko Epson Corp Coupling tuning fork type quartz oscillator
US4633124A (en) * 1982-03-16 1986-12-30 Kabushiki Kaisha Daini Seikosha Mount for quartz crystal resonator
JPH0754891B2 (ja) * 1987-06-02 1995-06-07 セイコー電子部品株式会社 縦水晶振動子
EP0516400B1 (de) * 1991-05-27 1997-07-30 Seiko Electronic Components Ltd. Drehschwingender Quarzkristallresonator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2435855A1 (fr) * 1978-09-08 1980-04-04 Centre Electron Horloger Resonateur piezo-electrique
GB2124022A (en) * 1982-07-14 1984-02-08 Centre Electron Horloger Quartz resonator of tuning fork type

Also Published As

Publication number Publication date
EP0517666B1 (de) 1998-02-04
ATE163111T1 (de) 1998-02-15
DE69224325D1 (de) 1998-03-12
JPH05152886A (ja) 1993-06-18
US5274297A (en) 1993-12-28
CH683050A5 (fr) 1993-12-31

Similar Documents

Publication Publication Date Title
EP0517666B1 (de) Quarz-Resonator schwingend in einem fundementalen Drehschwingungsmode
EP1222735B1 (de) Akustisches grenzflächenwellenfilter insbesondere für drahtlose übertragungssysteme
CH631855B5 (fr) Resonateur pour instrument horometrique, procede de fabrication de celui-ci.
EP2909932B1 (de) Wandler mit durch synchrone anregungsstrukturen geführten volumenwellen
FR2460565A1 (fr) Composants electroniques comportant au moins un resonateur piezoelectrique, et leur procede de fabrication
EP2351214B1 (de) Transversal gekoppelte filterelemente auf volumenwellenresonanzstrukturen mit mehrfachen harmonischen resonanzen
FR2477803A1 (fr) Resonateur a quartz du type diapason a couplage de modes
EP0086739B1 (de) Einbaufähiger piezoelektrischer Resonator
CH623690A5 (de)
FR2785473A1 (fr) Filtre faibles pertes a ondes acoustiques de surface sur substrat de quartz de coupe optimisee
EP1500191B1 (de) Bauelement mit grenzflächenschallwellen aus lithiumtantalat
EP0350443B1 (de) Piezoelektrischer Resonator
WO2009156667A1 (fr) Resonateur hbar a integration elevee
CH620801A5 (de)
WO2010112594A1 (fr) Elément vibrant sur deux modes découplés et application à un gyromètre vibrant
EP1625659B1 (de) Integrierte resonatoren und zeitbasis mit solchen resonatoren
EP0319475B1 (de) Piezoelektrischer Resonator
EP2957031B1 (de) Flache struktur eines mechanischen resonators welcher durch biege- und dehnungsschwingungen entkoppelt ist
EP0451089B1 (de) Hochfrequenter piezoelektrischer Schwinger
EP0085599A2 (de) Verfahren für die Massenfertigung piezoelektrischer Wandler, nach diesem Verfahren hergestellte Wandler und Anwendung dieses Verfahrens
FR2883370A1 (fr) Procede de fabrication d'un resonateur mecanique en etoile pour dispositif de mesure gyrometrique

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU MC NL PT SE

17P Request for examination filed

Effective date: 19930521

17Q First examination report despatched

Effective date: 19950714

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH DE DK ES FR GB GR IT LI LU MC NL PT SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19980204

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT;WARNING: LAPSES OF ITALIAN PATENTS WITH EFFECTIVE DATE BEFORE 2007 MAY HAVE OCCURRED AT ANY TIME BEFORE 2007. THE CORRECT EFFECTIVE DATE MAY BE DIFFERENT FROM THE ONE RECORDED.

Effective date: 19980204

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19980204

Ref country code: ES

Free format text: THE PATENT HAS BEEN ANNULLED BY A DECISION OF A NATIONAL AUTHORITY

Effective date: 19980204

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19980204

REF Corresponds to:

Ref document number: 163111

Country of ref document: AT

Date of ref document: 19980215

Kind code of ref document: T

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REF Corresponds to:

Ref document number: 69224325

Country of ref document: DE

Date of ref document: 19980312

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19980504

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19980504

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19980504

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 19980505

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 19980505

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19980529

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19980531

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
BERE Be: lapsed

Owner name: CENTRE SUISSE D' ELECTRONIQUE ET DE MICROTECHNIQUE

Effective date: 19980531

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 19981130

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 19990518

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 19990526

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 19990715

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20000529

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20000531

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20000531

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20000529

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20010131

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST