CH620801A5 - - Google Patents
Download PDFInfo
- Publication number
- CH620801A5 CH620801A5 CH797377A CH797377A CH620801A5 CH 620801 A5 CH620801 A5 CH 620801A5 CH 797377 A CH797377 A CH 797377A CH 797377 A CH797377 A CH 797377A CH 620801 A5 CH620801 A5 CH 620801A5
- Authority
- CH
- Switzerland
- Prior art keywords
- bar
- thickness
- multiple resonator
- energy trapping
- width
- Prior art date
Links
- 239000010453 quartz Substances 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 15
- 238000005452 bending Methods 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000001902 propagating effect Effects 0.000 claims 1
- 238000001228 spectrum Methods 0.000 description 5
- 238000013016 damping Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 230000003071 parasitic effect Effects 0.000 description 3
- 238000010008 shearing Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 230000009102 absorption Effects 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
- H03H9/56—Monolithic crystal filters
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/749,559 US4076987A (en) | 1976-12-10 | 1976-12-10 | Multiple resonator or filter vibrating in a coupled mode |
Publications (1)
Publication Number | Publication Date |
---|---|
CH620801A5 true CH620801A5 (de) | 1980-12-15 |
Family
ID=25014243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH797377A CH620801A5 (de) | 1976-12-10 | 1977-06-29 |
Country Status (7)
Country | Link |
---|---|
US (1) | US4076987A (de) |
JP (1) | JPS5372436A (de) |
CH (1) | CH620801A5 (de) |
DE (1) | DE2713672C2 (de) |
FR (1) | FR2373918A1 (de) |
GB (1) | GB1553343A (de) |
NL (1) | NL7705248A (de) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5479581A (en) * | 1977-12-07 | 1979-06-25 | Seiko Instr & Electronics Ltd | Thickness-width slide crystal vibrator |
NL7900811A (nl) * | 1978-02-16 | 1979-08-20 | Suisse Horlogerie | Inrichting met een piezo-elektrische resonator. |
FR2426338A1 (fr) * | 1978-05-19 | 1979-12-14 | Seiko Instr & Electronics | Resonateur a quartz rectangulaire en coupe at |
NL7810583A (nl) * | 1978-10-24 | 1980-04-28 | Philips Nv | Piezoelektrische triller. |
US4320320A (en) * | 1978-12-01 | 1982-03-16 | Kabushiki Kaisha Suwa Seikosha | Coupled mode tuning fork type quartz crystal vibrator |
NL8000297A (nl) * | 1980-01-17 | 1981-08-17 | Philips Nv | Piezoelektrische triller. |
US4498025A (en) * | 1980-12-12 | 1985-02-05 | Seiko Instruments & Electronics Ltd. | Tuning fork |
GB2124021A (en) * | 1982-07-16 | 1984-02-08 | Philips Electronic Associated | Piezo-electric resonator or filter |
US4525647A (en) * | 1983-12-02 | 1985-06-25 | Motorola, Inc. | Dual frequency, dual mode quartz resonator |
US6469423B2 (en) * | 1993-10-18 | 2002-10-22 | Seiko Epson Corporation | Rectangular at-cut quartz element, quartz resonator, quartz resonator unit and quartz oscillator, and method of producing quartz element |
US8816567B2 (en) | 2011-07-19 | 2014-08-26 | Qualcomm Mems Technologies, Inc. | Piezoelectric laterally vibrating resonator structure geometries for spurious frequency suppression |
US9099986B2 (en) | 2011-09-30 | 2015-08-04 | Qualcomm Mems Technologies, Inc. | Cross-sectional dilation mode resonators |
US9791503B1 (en) * | 2015-09-30 | 2017-10-17 | Integrated Device Technology, Inc. | Packaged oscillators with built-in self-test circuits that support resonator testing with reduced pin count |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2306909A (en) * | 1939-06-09 | 1942-12-29 | Bell Telephone Labor Inc | Piezoelectric crystal apparatus |
US3222622A (en) * | 1962-08-14 | 1965-12-07 | Clevite Corp | Wave filter comprising piezoelectric wafer electroded to define a plurality of resonant regions independently operable without significant electro-mechanical interaction |
US3564463A (en) * | 1966-04-11 | 1971-02-16 | Bell Telephone Labor Inc | Monolithic piezoelectric filter having mass loaded electrodes for resonation regions acoustically coupled together |
SE333170B (sv) * | 1967-08-04 | 1971-03-08 | Western Electric Co | Frekvensdiskriminator |
US3614483A (en) * | 1970-06-24 | 1971-10-19 | Clevite Corp | Width flexural resonator and coupled mode filter |
US3676805A (en) * | 1970-10-12 | 1972-07-11 | Bell Telephone Labor Inc | Monolithic crystal filter with auxiliary filter shorting tabs |
US3704433A (en) * | 1971-05-27 | 1972-11-28 | Bell Telephone Labor Inc | Band-elimination filter |
JPS51102445A (ja) * | 1975-03-05 | 1976-09-09 | Murata Manufacturing Co | Atsudenjikirohaki |
US4071797A (en) * | 1976-01-20 | 1978-01-31 | Societe Suisse Pour L'industrie Horlogere Management Services S.A. | Quartz piezo-electric element vibrating in a coupled mode |
-
1976
- 1976-12-10 US US05/749,559 patent/US4076987A/en not_active Expired - Lifetime
-
1977
- 1977-03-23 GB GB12226/77A patent/GB1553343A/en not_active Expired
- 1977-03-28 DE DE2713672A patent/DE2713672C2/de not_active Expired
- 1977-05-12 NL NL7705248A patent/NL7705248A/xx not_active Application Discontinuation
- 1977-05-13 JP JP5446777A patent/JPS5372436A/ja active Pending
- 1977-06-29 CH CH797377A patent/CH620801A5/fr not_active IP Right Cessation
- 1977-07-06 FR FR7722147A patent/FR2373918A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
NL7705248A (nl) | 1977-11-14 |
FR2373918A1 (fr) | 1978-07-07 |
GB1553343A (en) | 1979-09-26 |
DE2713672A1 (de) | 1978-08-31 |
US4076987A (en) | 1978-02-28 |
FR2373918B1 (de) | 1981-09-18 |
DE2713672C2 (de) | 1985-06-05 |
JPS5372436A (en) | 1978-06-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2301150B1 (de) | Hbar resonator mit erhöhter temperatur-stabilität | |
EP1222735B1 (de) | Akustisches grenzflächenwellenfilter insbesondere für drahtlose übertragungssysteme | |
CH620801A5 (de) | ||
FR2974691B1 (fr) | Dispositif electromecanique a ondes acoustiques comprenant une zone de transduction et une cavite etendue | |
EP2909932B1 (de) | Wandler mit durch synchrone anregungsstrukturen geführten volumenwellen | |
FR2484735A1 (fr) | Resonateur a ondes acoustiques de surface | |
CH619335B5 (de) | ||
FR2905208A1 (fr) | Filtre a resonateurs a ondes de lamb couples. | |
EP2351214B1 (de) | Transversal gekoppelte filterelemente auf volumenwellenresonanzstrukturen mit mehrfachen harmonischen resonanzen | |
EP0998037B1 (de) | Verlustarmes Oberflächenwellenfilter auf einem schnittoptimierten Quarzsubstrat | |
FR3079668A1 (fr) | Dispositif d'onde acoustique de surface sur substrat composite | |
EP1704396B1 (de) | Aus der ferne testbarer temperatursensor | |
EP2291911B1 (de) | Hbar-resonator mit hohem integrationsgrad | |
CH683050A5 (fr) | Résonateur à quartz vibrant selon un mode fondamental de torsion. | |
FR3079667A1 (fr) | Dispositif d'onde acoustique de surface sur substrat composite | |
CH623690A5 (de) | ||
FR2970827A1 (fr) | Capteur de temperature comportant un resonateur a ondes de volumes a modes harmoniques elevees | |
EP2509221B1 (de) | Schaltung mit Resonator Filters | |
FR3079101A1 (fr) | Structure de transducteur pour suppression de source dans les dispositifs de filtres a ondes acoustiques de surface | |
WO2004102796A1 (fr) | Resonateurs integres et base de temps incorporant de tels resonateurs | |
EP2324516B1 (de) | Akustisches grenzflächenwellenelement | |
WO2023222282A1 (fr) | Dispositif a ondes acoustiques de surface integrant une couche mince de materiau metallique | |
WO2003010888A1 (fr) | Dispositif a ondes acoustiques de surface a faibles pertes avec couche dielectrique de forte permittivite | |
US20240195386A1 (en) | ADDITION OF BORON TO AlN AND AlScN PIEZOELECTRIC MATERIALS | |
CH683578A5 (fr) | Résonateur piézoélectrique. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUE | Assignment |
Owner name: DRYAN-FORDAHL TECHNOLOGIES S.A. |
|
PUE | Assignment |
Owner name: VIBRO-METER S.A. |
|
PL | Patent ceased |