EP0480192A1 - Pompe à double membrane - Google Patents

Pompe à double membrane Download PDF

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Publication number
EP0480192A1
EP0480192A1 EP19910115450 EP91115450A EP0480192A1 EP 0480192 A1 EP0480192 A1 EP 0480192A1 EP 19910115450 EP19910115450 EP 19910115450 EP 91115450 A EP91115450 A EP 91115450A EP 0480192 A1 EP0480192 A1 EP 0480192A1
Authority
EP
European Patent Office
Prior art keywords
control slide
actuating element
magnets
diaphragm pump
double diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19910115450
Other languages
German (de)
English (en)
Other versions
EP0480192B1 (fr
Inventor
Dirk Budde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PSG Germany GmbH
Original Assignee
Almatec Technische Innovationen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Almatec Technische Innovationen GmbH filed Critical Almatec Technische Innovationen GmbH
Publication of EP0480192A1 publication Critical patent/EP0480192A1/fr
Application granted granted Critical
Publication of EP0480192B1 publication Critical patent/EP0480192B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L25/00—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means
    • F01L25/08—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means by electric or magnetic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86622—Motor-operated

Definitions

  • the invention relates to a double diaphragm pump with diaphragms connected by a coupling rod and dividing two diaphragm chambers, a control slide which can be displaced as a function of the diaphragms and an actuating element which is dependent on the diaphragm movement.
  • the actuating element consists of an axially displaceable actuating rod, which protrudes from the control slide housing and is arranged coaxially in the control slide.
  • This actuating rod acts in both directions via a compression spring on the control slide, which is held in its end positions by spring-loaded detent balls until the force of the spring arranged coaxially on the actuating rod exceeds the detent force.
  • the control slide driven by spring force, moves into the opposite control position and reverses the diaphragm movement. In this way, the control slide is moved back and forth between two stable end positions.
  • control slide Since the movement of the control slide is mechanically controlled by the membranes rigidly connected to one another via a coupling rod, and a snap device moves the control slide between its two end positions by utilizing potential spring energy, the disadvantage arises that the control slide has a very low pump output tends to get caught in an intermediate position and with very high pump output due to fluttering in the spring mechanism, no exact valve control is possible. Furthermore, a large number of moving individual parts are required which slide on one another and therefore require appropriate lubrication.
  • the spring on the operating rod is heavily loaded and usually has to be made of stainless steel. Nevertheless, it has a limited service life, so that there is a relatively high repair effort. In addition, the assembly effort is relatively high.
  • This design has the disadvantage that a large number of sealing surfaces with corresponding friction and leakage losses are required, and that there is also a risk of a non-functioning central position, which can lead to a standstill.
  • a minimum pressure of the propellant is also required to switch the control slide, so that operation with pressures below 2 bar is not possible, particularly in the case of small double diaphragm pumps.
  • it is necessary to make a compromise between low pressure medium losses, but the associated stiffness or, conversely, ease of movement and the associated pressure medium losses.
  • This double diaphragm pump also places high demands on manufacturing accuracy, requires a large amount of assembly work due to the large number of individual parts, and has to be predominantly made of metal.
  • the invention has for its object to provide a double diaphragm pump, which consists of a few parts, does not result in significant internal frictional forces, can be operated easily from low power to maximum performance and causes the lowest possible pressure medium losses.
  • the actuating element can be coupled to the control slide by mutually repelling single-pole magnets. Likewise, the actuating element can also be coupled to the control slide by means of oppositely polarized magnets or a magnet and a ferromagnetic part, which attract each other.
  • one magnet or ferromagnetic part can be arranged on each membrane and at least one magnet or ferromagnetic part can be arranged in the control slide.
  • At least one magnet is arranged on the actuating element and one on the control slide so that, in the opposite end positions, the same poles face each other and repel each other.
  • the magnets can advantageously be designed as ring magnets.
  • Permanent magnets are preferably used which are strong enough to exert the actuating forces and which do not require any connection to the outside.
  • the actuating element can consist of a rod arranged coaxially in the control slide hen.
  • This rod can be the coupling rod itself or can consist of an axially displaceable actuating rod which extends from the control slide and extends parallel to the coupling rod.
  • two magnets can be arranged at a distance from one another on the actuating element and in the control slide with mutually facing poles of the same name if the facing poles of the same name on the actuating element and in the control slide are polarized in the same way.
  • This tandem arrangement of the magnet pairs results in a precise, load-independent switching point with double switching force and stable end positions of the control slide, based on an axial magnetization direction.
  • This version is particularly suitable for relatively small reversing valves. However, if there is more space for larger magnets, radial magnetization is possible. this is cheaper since the actuating forces are greater in this case.
  • the outer surfaces of the magnets on the actuating element have the same polarity as the inner surfaces of the magnets in the control slide.
  • the double diaphragm pump according to the invention can be produced particularly easily if the distances between the magnets on the actuating element and in the control slide are the same and are dimensioned with respect to their distances from housing stops such that the actuating element and the control slide strike against opposite housing stops and when the actuating element is actuated according to a predetermined one Reverse the actuation path in the opposite position.
  • the switching forces at the closest approximation can be significantly increased if three magnets are arranged at a distance from each other on the actuating element and in the control slide with poles of the same name facing each other and the poles facing each other in the end positions on the actuating element and in the control slide are each of the same name.
  • the distances between the magnets on the actuating element and in the control slide can be the same.
  • the magnets can be arranged such that the actuating element and the control slide abut opposite housing attachments and two pairs of magnets each lie in a plane perpendicular to the axis of the actuating element, so that when the actuating element is actuated in a predetermined actuation path jump around the opposite end position in opposite directions.
  • This arrangement there is a better distribution of force over the entire switching path of the control slide and a power reserve even when the drive air is contaminated.
  • the attractive interaction of the central magnets on the actuating element and in the control slide with external magnets in the end positions results in a very stable, vibration-proof end position of the control slide and the actuating element.
  • Three radially magnetized magnets can also be arranged at a distance from one another on the actuating element and in the control slide.
  • the outer magnets are polarized in the same way and face each other with the same poles, while the middle magnets are polarized in opposite directions but also face each other with the same poles.
  • adjacent magnets on the actuating element and in the control slide are then polarized in opposite directions and attract each other, while the magnets on the actuating element and in the control slide, which are opposite each other, repel each other.
  • poles of the same name face each other with each magnet pair, so that in this position the actuating element and the control slide suddenly change over to the opposite end position.
  • the ring-shaped permanent magnets arranged on the actuating rod moved by the diaphragms pass under the ring-shaped permanent magnets arranged in the concentric control slide and repel them after exceeding the point of greatest proximity in the opposite direction, so that the control slide moves suddenly into its opposite working position.
  • the control spool and the actuating rod each require only two moving sealing surfaces and only one closely tolerated counter surface for the control spool. Friction only occurs on these four sealing surfaces. Apart from the control spool and the operating rod, there are no moving parts; in addition, there is no friction between the actuating rod and the control slide, since these slide into one another without contact. Furthermore, there are no pressure medium losses and no pressure medium profile as in a control slide controlled by a pilot valve, and the changeover force has a constant variable that is independent of the pressure of the pressure medium.
  • a pressure down to 0.3 bar is sufficient to operate the double diaphragm pump if the pressure medium consists of compressed air.
  • the double diaphragm pump starts very easily and has a significantly higher efficiency than pilot valve controlled double diaphragm pumps, especially in the important part-load range.
  • the double diaphragm pump according to the invention is also less susceptible to contamination, can work without lubrication and fatigue and accordingly has reduced wear.
  • control slide and the actuating rod can be produced in a particularly simple manner if they consist of plastic and the magnets and other metal parts are encapsulated with plastic. This manufacturing method requires practically no post-processing.
  • the control spool housing can also be manufactured as a plastic injection molded part. so that the double diaphragm pump according to the invention consists in its essential, in particular the moving parts, of plastic and is metal-free in this respect, which is particularly important for use in the semiconductor industry.
  • a control slide housing 1 with control channels 2, 3, 4, 5, 6 is shown in FIG. 1 by a double diaphragm pump. These control channels lead into a reversing block 9.
  • the control channel 2 is connected to a pressure source, the control channel 3 with a propellant chamber, not shown, the control channel 5 with the other propellant chamber, not shown, the control channel 4 with a propellant outlet and the control channel 6 also with a propellant outlet . Compressed air is usually used as the blowing agent.
  • the control channels 2, 3, 4, 5, 6 are sealed to one another and to the outside by means of O-ring seals and fixed in the reversing block 9 by means of snap rings 8. Furthermore, there are 1 further O-ring in the lid areas of the control slide housing, which acts as a damping element for the reciprocating control slide 12.
  • the O-rings 10 and the end faces 21 each form stop faces.
  • a control slide 12 is arranged axially displaceably in the housing 1. Radially projecting closure members 13 with sliding seals 14 are arranged in the end regions of the control slide 12.
  • control slide 12 In the position shown in FIG. 1, there is a connection to the pressure medium supply via the channels 5, 2 for one propellant chamber and a connection to a pressure medium relief via the channels 3, 4 for the other propellant chamber. If the control slide 12 moves to the left, reversely acted upon or relieved of the propellant chambers.
  • the control slide 12 is made of plastic and has annular permanent magnets 15 which are encapsulated with plastic.
  • the ring magnets 15 are spaced from each other so that their poles of the same name are adjacent, for example north poles on the left and south poles on the right.
  • an actuating rod 16 with end pins 17 of smaller diameter is also axially displaceable and guided in a sealed manner by means of sliding seals 11.
  • the actuating rod 16 consists of a plastic injection molded part, in which ring magnets 18 are also embedded. These ring magnets 18 are arranged at the same distance as the ring magnets 15 and also face each other with poles of the same name, in the same way as the ring magnets 15, i.e. North poles on the left and south poles on the right.
  • the axial residual force in the end positions can be influenced by changing the axial distance between the two ring magnet pairs while maintaining the paths for the control slide and the actuating rod. If the distance is reduced, there is an attractive resulting force between the control slide and the actuating rod, and if the distance is enlarged, a repulsive force results. These can either be used to secure the end positions (repulsive) or as braking force for reversing (attractive).
  • the spool housing 1 with the spool 12 are constructed in the same way as in Fig. 1, so that the same reference numerals apply.
  • the coupling rod 22 serves here as an actuating rod. Accordingly, the control slide housing 1 and the control slide 12 are arranged coaxially to the coupling rod 22.
  • the coupling rod 22 is also made of plastic. Ring magnets 18 are accordingly encapsulated with plastic as in FIG. 1.
  • Overmolded sleeves 28 are arranged in the end regions of the coupling rod 22, which are used to fasten one membrane 25 each by means of an embedded membrane core 24.
  • the outer surfaces 26 of the control slide housing 1 form stop surfaces for inner surfaces 27 of the diaphragms 25; they therefore serve as a stroke limitation. If the left diaphragm 25 moves with the coupling rod 22 to the right, the control slide 12 remains in the position shown until the ring magnets 18 reach the area of the ring magnets 15. At this moment, the repulsive effect of the ring magnets 15 and 18 causes the control slide 12 to jump suddenly to the left. As already described, a reversal of movement is hereby initiated. The process is thus repeated at the end of the path of the coupling rod 22.
  • an opposite movement of the control slide 12 and the actuating rod 16 or the coupling rod 22 can be achieved by arranging a ring magnet in the control slide 12 and a ferromagnetic part in the actuating rod 16 or the coupling rod 22 reach.
  • a further ring magnet can be arranged in the actuating rod 16 or the coupling rod 22 if its polarity is opposite to that of the ring magnet in the control slide 12.
  • FIG. 3 corresponds to the embodiment of FIG. 1, but with radially magnetized inner and outer magnets.
  • This version is particularly suitable for larger control valves, since, based on the same magnetic mass, the actuating force is higher here than with axial magnetization.
  • the reversing of the control slide can also take place according to FIG. 4 by correspondingly strong axially acting end magnets 30 at the ends of the control slide 12, which interact directly with a ferromagnetic membrane core or membrane plate 25 and trigger the reversal when tightening a membrane.
  • the actuating rod is then also omitted.
  • the side wall of the spool housing is then as thin as possible.
  • the coupling rod 22 is also provided with two seals 29 on both sides of the control channel 2.
  • the course of the control channel 2 allows cooling of the coupling rod, which is preferably guided in a plastic block 9.
  • the distances between the magnets 15, 31 in the control slide 12 and the magnets 18, 32 on the actuating element 16, 17 are each the same.
  • the magnets 15, 31 are arranged with respect to their distances from the housing stops 10 so that the actuating element 16, 17 and the control slide 12 bear against opposite housing stops 10, two pairs of magnets 15, 32; 31, 18 lie in a plane perpendicular to the axis of the actuating element 16, 17 and, when the actuating element 16, 17 is actuated, jump in opposite directions into the opposite end position after a predetermined actuation path.
  • the magnets 15, 31; 18, 32 can also be radially magnetized, as shown in FIG. 3.
  • the middle magnets 31, 32 are polarized in opposite directions to the outer magnets 15, 18, so that in the end positions magnets 15, 32 and 31, 18 with opposite polarity lie opposite each other and thereby define a stable end position, while switching over in the middle position the magnets 15, 18, 31, 32 and again 15, 18 are opposite each other, poles of the same name face each other and cause an immediate change in the opposite end position.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
EP19910115450 1990-10-08 1991-09-12 Pompe à double membrane Expired - Lifetime EP0480192B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE4031872 1990-10-08
DE4031872 1990-10-08
DE4106180 1991-02-27
DE19914106180 DE4106180A1 (de) 1990-10-08 1991-02-27 Doppel-membranpumpe

Publications (2)

Publication Number Publication Date
EP0480192A1 true EP0480192A1 (fr) 1992-04-15
EP0480192B1 EP0480192B1 (fr) 1994-07-13

Family

ID=25897542

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910115450 Expired - Lifetime EP0480192B1 (fr) 1990-10-08 1991-09-12 Pompe à double membrane

Country Status (7)

Country Link
US (1) US5222876A (fr)
EP (1) EP0480192B1 (fr)
JP (1) JPH086693B2 (fr)
AT (1) ATE108518T1 (fr)
DE (1) DE4106180A1 (fr)
DK (1) DK0480192T3 (fr)
ES (1) ES2056543T3 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0595116A1 (fr) * 1992-10-29 1994-05-04 Nordson Corporation Dispositif pour moteur à piston commandé par la pression d'un fluide
WO1996008130A3 (fr) * 1994-08-08 1996-10-17 Ralf Huewel Pompe a piston et/ou a membrane, a actionnement hydraulique ou pneumatique

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NL1001954C2 (nl) 1995-12-21 1997-06-24 Verder Holding B V Stuurklep en pomp voorzien van stuurklep.
TW539918B (en) * 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
DE19738779C2 (de) 1997-09-04 2003-06-12 Almatec Maschb Gmbh Umsteuersystem für eine druckgetriebene Membranpumpe
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AU4902201A (en) * 1999-11-02 2001-07-03 Tokyo Electron Limited Method and apparatus for supercritical processing of a workpiece
US6561774B2 (en) 2000-06-02 2003-05-13 Tokyo Electron Limited Dual diaphragm pump
EP1303870A2 (fr) 2000-07-26 2003-04-23 Tokyo Electron Limited Chambre de traitement haute pression pour substrat semi-conducteur
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
WO2003071173A1 (fr) * 2002-02-15 2003-08-28 Supercritical Systems Inc. Robinet a membrane supportant des pressions superieures
US7387868B2 (en) 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US6722642B1 (en) 2002-11-06 2004-04-20 Tokyo Electron Limited High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism
US7021635B2 (en) * 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7225820B2 (en) * 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7077917B2 (en) * 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7163380B2 (en) 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US20050035514A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Vacuum chuck apparatus and method for holding a wafer during high pressure processing
US20050034660A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Alignment means for chamber closure to reduce wear on surfaces
US20050067002A1 (en) * 2003-09-25 2005-03-31 Supercritical Systems, Inc. Processing chamber including a circulation loop integrally formed in a chamber housing
US7186093B2 (en) * 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US20060135047A1 (en) * 2004-12-22 2006-06-22 Alexei Sheydayi Method and apparatus for clamping a substrate in a high pressure processing system
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US20060134332A1 (en) * 2004-12-22 2006-06-22 Darko Babic Precompressed coating of internal members in a supercritical fluid processing system
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7380984B2 (en) * 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
DE202010004957U1 (de) * 2010-04-12 2011-08-26 Timmer-Pneumatik Gmbh Fluid-Steuerventilsystem für eine Pumpensteuerung
US8622720B2 (en) * 2010-09-09 2014-01-07 Tom M. Simmons Reciprocating fluid pumps including magnets and related methods
IT201800004121A1 (it) * 2018-03-30 2019-09-30 Miro Capitanio Sistema valvolare antistallo bistabile
EP3921639A4 (fr) * 2019-02-06 2022-03-16 Siemens Healthcare Diagnostics, Inc. Ensemble, appareil et procédés de capteurs de liquides
EP3730786B1 (fr) * 2019-04-19 2022-12-28 White Knight Fluid Handling Inc. Pompes à fluide alternatives comprenant des aimants et ensembles, systèmes et procédés associés
DE102021104548A1 (de) * 2021-02-25 2022-08-25 Lutz Pumpen Gmbh Mehrfachmembranpumpe
US11746771B2 (en) * 2021-04-16 2023-09-05 Teryair Equipment Pvt. Ltd. Actuator valve of an air operated double diaphragm pump

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GB2003976A (en) * 1977-09-09 1979-03-21 Kaelle Eur Control Hydraulic operated displacement pump
DE3310131A1 (de) * 1983-03-21 1984-09-27 DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf Umsteuerventileinsatz fuer eine druckluftgetriebene doppelmembranpumpe
US4509402A (en) * 1983-06-08 1985-04-09 Economics Laboratory, Inc. Magnetic reversing mechanism
FR2553149A1 (fr) * 1983-10-07 1985-04-12 Lagrandiere Marc De Moteur a piston actionne hydrauliquement ou pneumatiquement et applications
WO1989010485A1 (fr) * 1988-04-18 1989-11-02 Dominator Maskin Ab Soupape pneumatique, destinee en particulier a la commande de pompes a membrane fonctionnant a l'air comprime
US4889035A (en) * 1985-07-16 1989-12-26 Thermo Electron Web Systems, Inc. Magnetically actuated valve for cyclically operating piston-cylinder actuator

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DE3150976A1 (de) * 1981-12-23 1983-06-30 DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf Druckluftgetriebene doppelmembranpumpe
DE3112434A1 (de) * 1981-03-28 1982-10-07 Depa GmbH, 4000 Düsseldorf Druckluftgetriebene doppelmembran-pumpe
DE3900718A1 (de) * 1989-01-12 1990-07-26 Depa Ges Fuer Verfahrenstechni Verfahren und vorrichtung zur steuerung einer druckluftbetriebenen doppelmembranpumpe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2003976A (en) * 1977-09-09 1979-03-21 Kaelle Eur Control Hydraulic operated displacement pump
DE3310131A1 (de) * 1983-03-21 1984-09-27 DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf Umsteuerventileinsatz fuer eine druckluftgetriebene doppelmembranpumpe
US4509402A (en) * 1983-06-08 1985-04-09 Economics Laboratory, Inc. Magnetic reversing mechanism
FR2553149A1 (fr) * 1983-10-07 1985-04-12 Lagrandiere Marc De Moteur a piston actionne hydrauliquement ou pneumatiquement et applications
US4889035A (en) * 1985-07-16 1989-12-26 Thermo Electron Web Systems, Inc. Magnetically actuated valve for cyclically operating piston-cylinder actuator
WO1989010485A1 (fr) * 1988-04-18 1989-11-02 Dominator Maskin Ab Soupape pneumatique, destinee en particulier a la commande de pompes a membrane fonctionnant a l'air comprime

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0595116A1 (fr) * 1992-10-29 1994-05-04 Nordson Corporation Dispositif pour moteur à piston commandé par la pression d'un fluide
WO1996008130A3 (fr) * 1994-08-08 1996-10-17 Ralf Huewel Pompe a piston et/ou a membrane, a actionnement hydraulique ou pneumatique

Also Published As

Publication number Publication date
ES2056543T3 (es) 1994-10-01
DE4106180C2 (fr) 1992-09-10
DE4106180A1 (de) 1992-04-09
JPH04234582A (ja) 1992-08-24
ATE108518T1 (de) 1994-07-15
DK0480192T3 (da) 1994-08-15
US5222876A (en) 1993-06-29
JPH086693B2 (ja) 1996-01-29
EP0480192B1 (fr) 1994-07-13

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