EP0464703A2 - Filtre pour une lampe à vapeur de mercure sous basse pression - Google Patents

Filtre pour une lampe à vapeur de mercure sous basse pression Download PDF

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Publication number
EP0464703A2
EP0464703A2 EP91110745A EP91110745A EP0464703A2 EP 0464703 A2 EP0464703 A2 EP 0464703A2 EP 91110745 A EP91110745 A EP 91110745A EP 91110745 A EP91110745 A EP 91110745A EP 0464703 A2 EP0464703 A2 EP 0464703A2
Authority
EP
European Patent Office
Prior art keywords
filter
ozone
lamp
gas
mercury vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP91110745A
Other languages
German (de)
English (en)
Other versions
EP0464703A3 (en
Inventor
Katsuya Okumura
Kazuo Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Toshiba Corp
Original Assignee
Ebara Corp
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Toshiba Corp filed Critical Ebara Corp
Publication of EP0464703A2 publication Critical patent/EP0464703A2/fr
Publication of EP0464703A3 publication Critical patent/EP0464703A3/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/38—Devices for influencing the colour or wavelength of the light
    • H01J61/40—Devices for influencing the colour or wavelength of the light by light filters; by coloured coatings in or on the envelope

Definitions

  • the present invention relates to a filter for a low-pressure mercury vapor lamp.
  • Such lamps have emission lines of 185 and 254 nm in wave-length and, when only radiation of 185 nm should be used for particular applications in a photo-CVD, photo etching, etc. filters coated with a dielectric layer have been used for filtering 254 nm radiation.
  • filters since such filters have limitations with respect to their size originating from limitations related to the coating installation, large- size filters are hardly available. Even though large- size filters are available through special coating installation, they are extremely expensive. Further, they have a drawback in that they quickly deteriorate since they absorb ultraviolet radiation.
  • An object of the present invention is therefore, to solve the above-mentioned problems by providing a filter for low-pressure mercury vapor lamps which is simple in construction, can be made relatively large without any size limitation, and further will not deteriorate.
  • the present invention provides a gas filter for a low-pressure mercury vapor lamp which comprises means for providing an ozone-containing gas layer between the low-pressure mercury vapor lamp and an object to be illuminated.
  • an enclosed space is formed by using quartz plates, ozone is introduced into the space, and the space is so positioned that it interrupts radiation from the low-pressure mercury vapor lamp.
  • the radiation from the mercury vapor lamp passes through the ozone layer, where 254 nm radiation is absorbed, so that only 185 nm radiation can be obtained.
  • ozone (0 3 ) absorbs ultraviolet radiation within a range of from 200 to 300 nm, it dissociates as follows:
  • the absorption peak is at or near 255 nm and the absorption coefficient reaches as high as 140 atm -1 ⁇ cm -1 .
  • the ozone layer is of 10% concentration (90% 0 2 ) and is 2 mm in thickness and at atmospheric pressure, then radiation of 250 nm will, after passing through such ozone layer, have an intensity which is expressed as follows: where I represents the intensity of the radiation after the passage;
  • mercury vapor lamps can provide only a less quantity of photons per unit surface area as compared with excimer lasers, they are capable of providing continuous illumination whereas the excimer lasers are only capable of providing pulsing illumination.
  • mercury vapor lamps have a great merit in that the wavelength is by 8 nm shorter than that of ArF, 193 nm.
  • radiation of 185 nm has an efficiency which is 1,000 times higher than radiation of 193 nm. This is because 193 nm radiation has an absorption coefficient of 10- 3 atm-' * cm- 1 for 0 2 whereas 185 nm radiation has a value of 1 atm -1 ⁇ cm -1 .
  • Fig. 1 is a cross sectional view showing an embodiment of the gas filter according to the present invention.
  • Fig. 2 is a longitudinal cross sectional view taken along lines A - A' of Fig. 1.
  • Fig. 1 designates an ordinary bar-shaped mercury vapor lamp available on the market.
  • 3 designates a transparent quartz glass vessel having an inner diameter larger than the outer diameter of the lamp 1, and having a gas inlet 4 and an outlet 5.
  • 2 designates an annular space formed between the lamp 1 and the glass vessel 3.
  • Ozone of a suitable concentration is introduced through the gas inlet 4, whereby the space 2 is filled with ozone. Radiation from the mercury vapor lamp 1 is emitted out of the quartz tube 3 through this ozone layer 2, where most of 254 nm radiation is absorbed by the ozone layer. Thus, only 185 nm radiation, which is not absorbed by this layer, is emitted out of the quartz tube 3.
  • Fig. 3 is a plan view showing an example requiring a large-area gas filter according to the present invention.
  • Fig. 4 is a sectional view taken along lines A - A' in Fig. 3.
  • Figs. 3 and 4 designates U-shaped mercury vapor lamps arranged in a row and 3 designates transparent quartz plates having a suitable thickness.
  • An enclosed space 2 of arbitrarily selected thickness, separated from ambient air, may be provided between the two opposite quartz plates 3 by interposing spacers 6 of uniform thickness between the two quartz plates 3 along the periphery thereof and providing a seal between the spacers 6 and the quartz plates 3 with a sealant or the like.
  • Ozone is introduced into the space 2 using a gas inlet 4 and an outlet 5 attached to the peripheral spacers at suitable positions.
  • Fig. 5 is a plan view of an ozone producing apparatus formed by using the large-area gas filter of Fig. 2 embodiment.
  • Fig. 6 is a sectional view taken along lines A - A' in Fig. 5.
  • Figs. 5 and 6, 1 designates U-shaped mercury vapor lamps arranged in a row and 3 designates transparent quartz plates having a suitable thickness.
  • a first enclosed space 2 of an arbitrarily selected thickness, separated from ambient air, may be provided between the opposite two quartz plates 3 by interposing spacers 6 of uniform thickness between the two quartz plates 3 along the periphery thereof and providing a seal between the spacers 6 and the quartz plates 3 with a sealant or the like.
  • Ozone is introduced into the space 2 using a gas inlet 4 and an outlet 5 attached to the spacers at suitable peripheral positions.
  • a box-shaped vessel which is made of a suitable material such as a synthetic resin and is arranged outside of one of said two quartz plates which is remote from the mercury vapor lamps 1.
  • a second enclosed space 10, separated from ambient air, may be formed by providing a seal between the periphery of the box-shaped vessel 9 and the quartz plates 3 using a sealant or the like. Oxygen or air is introduced into the space 10 using an inlet 7 for a raw material gas and an outlet 8 for the reaction gas, which are attached to the vessel at suitable positions.
  • oxygen or air in the space 10 is irradiated with only 185 nm radiation which is useful for producing ozone from oxygen or air.
  • Ozone so produced is clean, not containing dust or the like, because it is produced without involving the phenomenon of electric discharge associated with prior art ozone producing apparatus.
  • Such clean ozone may be preferably used in a semiconductor producing process or the like in which such dust should be precluded.
  • the filter of the invention makes it possible to effectively obtain only radiation of a short wavelength, 185 nm, in the vacuum ultraviolet range from low-pressure mercury vapor lamps.
  • the obtainable radiation is a monochromatic radiation of wavelength shorter than that of ArF excimer laser radiation (193 nm), various applications in fields of photo-CVD, photochemical synthesis, photoetching, etc., is possible.

Landscapes

  • Filtering Materials (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Optical Filters (AREA)
EP19910110745 1990-06-28 1991-06-28 Filter for a low-pressure mercury vapor lamp Withdrawn EP0464703A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2168511A JPH0458202A (ja) 1990-06-28 1990-06-28 低圧水銀ランプ用ガスフィルター
JP168511/90 1990-06-28

Publications (2)

Publication Number Publication Date
EP0464703A2 true EP0464703A2 (fr) 1992-01-08
EP0464703A3 EP0464703A3 (en) 1992-10-28

Family

ID=15869404

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19910110745 Withdrawn EP0464703A3 (en) 1990-06-28 1991-06-28 Filter for a low-pressure mercury vapor lamp

Country Status (3)

Country Link
EP (1) EP0464703A3 (fr)
JP (1) JPH0458202A (fr)
KR (1) KR920001615A (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR792615A (fr) * 1934-08-28 1936-01-07 Philips Nv Dispositif comportant une source de lumière ultra-violette et un filtre
US4049987A (en) * 1976-06-04 1977-09-20 The Perkin-Elmer Corporation Ozone absorbance controller
US4054812A (en) * 1976-05-19 1977-10-18 Baxter Travenol Laboratories, Inc. Integrally focused low ozone illuminator
JPS56125207A (en) * 1980-03-05 1981-10-01 Toshiba Corp Ozonizer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR792615A (fr) * 1934-08-28 1936-01-07 Philips Nv Dispositif comportant une source de lumière ultra-violette et un filtre
US4054812A (en) * 1976-05-19 1977-10-18 Baxter Travenol Laboratories, Inc. Integrally focused low ozone illuminator
US4049987A (en) * 1976-06-04 1977-09-20 The Perkin-Elmer Corporation Ozone absorbance controller
JPS56125207A (en) * 1980-03-05 1981-10-01 Toshiba Corp Ozonizer

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 5, no. 204 (C-085)24 December 1981 & JP-A-56 125 207 ( TOSHIBA CORP ) 1 October 1981 *

Also Published As

Publication number Publication date
EP0464703A3 (en) 1992-10-28
JPH0458202A (ja) 1992-02-25
KR920001615A (ko) 1992-01-30

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