EP0415315A1 - Vakuumhauptpumpe - Google Patents

Vakuumhauptpumpe Download PDF

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Publication number
EP0415315A1
EP0415315A1 EP90116376A EP90116376A EP0415315A1 EP 0415315 A1 EP0415315 A1 EP 0415315A1 EP 90116376 A EP90116376 A EP 90116376A EP 90116376 A EP90116376 A EP 90116376A EP 0415315 A1 EP0415315 A1 EP 0415315A1
Authority
EP
European Patent Office
Prior art keywords
stator
rotor
clearance
vacuum pump
primary vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP90116376A
Other languages
English (en)
French (fr)
Inventor
Jean-Marie Crinquette
Jacques Long
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of EP0415315A1 publication Critical patent/EP0415315A1/de
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F04C28/265—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels being obtained by displacing a lateral sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/102—Adjustment of the interstices between moving and fixed parts of the machine by means other than fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/052—Axially shiftable rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/642—Mounting; Assembling; Disassembling of axial pumps by adjusting the clearances between rotary and stationary parts

Definitions

  • the present invention relates to a primary vacuum pump, comprising a stator and at least one rotor rotating in the stator while retaining a predetermined leakage relative to the latter.
  • Primary vacuum pumps are capable of creating total pressures of approximately 10 ⁇ 3 to 10 ⁇ 4 mbar by driving against atmospheric pressure.
  • the oxygen and nitrogen molecules are entrained in such a pump in a viscous and / or turbulent regime.
  • the flow / volume S / pressure P characteristic of such a pump is essentially a function of the clearance j existing between the rotor and the stator. This function is shown in Figure 1 attached, taking the pressure p in mbar as the abscissa and the flow rate S in m3 / h on the ordinate.
  • Each of the five curves shown in solid lines corresponds to a given clearance, the clearance increasing from one curve to another in the direction of the arrow j.
  • gases such as hydrogen, propane, pentane, etc.
  • gases have absolute viscosities 10 times lower than air.
  • Internal mass leaks are therefore much greater than with air, and therefore, the volume flow / pressure characteristic, at constant clearance, is significantly lower than with air. It is therefore advantageous to be able to adapt the play as a function of the viscosity of the pure gas or of the pumped mixture.
  • the object of the invention is to design a pump which makes it possible to achieve a very small clearance and a rapid modification of the characteristic, even during pumping, in order to be able to optimize the pressure variation as a function of time in an enclosure at which the pump is associated with.
  • this object is achieved by the fact that the clearance between stator and rotor is made variable during pumping.
  • the invention thus relates to a primary vacuum pump comprising a stator and a rotor rotating in the stator while retaining a predetermined leakage with respect to the latter, characterized in that the rotor (21, 25) and the stator (22, 26) being frustoconical or hemispherical, the clearance (24) is variable during pumping thanks to a relative axial displacement of the rotor relative to the stator and that this displacement is obtained by a control means.
  • the displacement of the rotor in the stator can be obtained by any suitable means of action, such as electromagnets, fluid pressures, an electromotor or a purely mechanical control system.
  • This principle is not limited to a frustoconical shape, but also applies to other shapes, such as those represented in FIG. 3. It is here a hemispherical shape, the rotor turning in the stator 26 around its axis 27 of symmetry. We see by this example that it is not absolutely necessary to uniformly reduce the clearance in question, and that it suffices to act on this clearance in areas where gas leaks are particularly significant.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
EP90116376A 1989-08-28 1990-08-27 Vakuumhauptpumpe Withdrawn EP0415315A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8911302 1989-08-28
FR8911302A FR2651280A1 (fr) 1989-08-28 1989-08-28 Pompe a vide primaire.

Publications (1)

Publication Number Publication Date
EP0415315A1 true EP0415315A1 (de) 1991-03-06

Family

ID=9384945

Family Applications (1)

Application Number Title Priority Date Filing Date
EP90116376A Withdrawn EP0415315A1 (de) 1989-08-28 1990-08-27 Vakuumhauptpumpe

Country Status (3)

Country Link
EP (1) EP0415315A1 (de)
JP (1) JPH0388997A (de)
FR (1) FR2651280A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19609308A1 (de) * 1995-03-31 1996-10-02 Japan Atomic Energy Res Inst Vakuumpumpe mit Gewindekanal

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19708954A1 (de) * 1997-03-05 1998-09-17 Busch Gmbh K Seitenkanalverdichter mit modifiziertem Kanalauslaß
US8555799B2 (en) 2011-02-04 2013-10-15 Yamaha Hatsudoki Kabushiki Kaisha Personal watercraft

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR556556A (fr) * 1922-09-26 1923-07-23 Hardoll Soc Pompe rotative
US2134153A (en) * 1936-02-05 1938-10-25 S H Johnston Gear pump
DE848441C (de) * 1948-11-30 1952-09-04 Ernst Dr Schnabel Dichtung
FR2157353A5 (de) * 1971-10-14 1973-06-01 Atlas Copco Ab
FR2290133A6 (fr) * 1973-02-09 1976-05-28 Materiel Processing Internal Pompe centrifuge

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3168870A (en) * 1962-12-12 1965-02-09 Ingersoll Rand Co Centrifugal pump with adjustable capacity
DE2555595C2 (de) * 1974-12-13 1986-01-23 Nippon Piston Ring K.K., Tokio/Tokyo Flügelzellenpumpe
DE2922835C2 (de) * 1979-06-06 1985-06-05 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Umfangsspaltdichtung an Axialströmungsmaschinen
DE3119568A1 (de) * 1981-05-16 1982-12-02 Big Dutchman (International) AG, 8090 Wezep Exzenterschneckenpumpe
JPS63154891A (ja) * 1986-12-18 1988-06-28 Osaka Shinku Kiki Seisakusho:Kk ねじ溝式真空ポンプ
FR2641582B1 (fr) * 1989-01-09 1991-03-22 Cit Alcatel Pompe a vide du type a canal de gaede

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR556556A (fr) * 1922-09-26 1923-07-23 Hardoll Soc Pompe rotative
US2134153A (en) * 1936-02-05 1938-10-25 S H Johnston Gear pump
DE848441C (de) * 1948-11-30 1952-09-04 Ernst Dr Schnabel Dichtung
FR2157353A5 (de) * 1971-10-14 1973-06-01 Atlas Copco Ab
FR2290133A6 (fr) * 1973-02-09 1976-05-28 Materiel Processing Internal Pompe centrifuge

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19609308A1 (de) * 1995-03-31 1996-10-02 Japan Atomic Energy Res Inst Vakuumpumpe mit Gewindekanal
DE19609308C2 (de) * 1995-03-31 2002-01-17 Japan Atomic Energy Res Inst T Vakuumpumpe mit Gewindekanal

Also Published As

Publication number Publication date
JPH0388997A (ja) 1991-04-15
FR2651280A1 (fr) 1991-03-01

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