EP0368040B1 - Taster für Koordinatenmessgeräte - Google Patents

Taster für Koordinatenmessgeräte Download PDF

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Publication number
EP0368040B1
EP0368040B1 EP89119244A EP89119244A EP0368040B1 EP 0368040 B1 EP0368040 B1 EP 0368040B1 EP 89119244 A EP89119244 A EP 89119244A EP 89119244 A EP89119244 A EP 89119244A EP 0368040 B1 EP0368040 B1 EP 0368040B1
Authority
EP
European Patent Office
Prior art keywords
probe
fact
temperature
measuring
temperature sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89119244A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0368040A2 (de
EP0368040A3 (en
Inventor
Karl-Hermann Dr. Breyer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss AG
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss AG filed Critical Carl Zeiss SMT GmbH
Publication of EP0368040A2 publication Critical patent/EP0368040A2/de
Publication of EP0368040A3 publication Critical patent/EP0368040A3/de
Application granted granted Critical
Publication of EP0368040B1 publication Critical patent/EP0368040B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Definitions

  • the invention relates to a button for coordinate measuring machines with an interchangeable surface of the button on the coordinate measuring machine serving changing surface, which has electrical contacts.
  • a button is known for example from WO-A-87/01798.
  • These known buttons contain fixed resistors, which are connected to the contacts on the exchange surface and allow identification of the button connected to the coordinate measuring machine via the resistance value.
  • coordinate measuring machines have been used more and more in the direct production area and, for example, linked to the processing machines of a flexible production system.
  • buttons must be recalibrated again and again at relatively short intervals. Because even slight deviations from the reference temperature, for which a calibration has been carried out once, lead to unacceptable measuring errors due to the thermal linear expansion of the probe. For example, an aluminum button with a length of 100 mm expands by 2.5 ⁇ m when the temperature increases by 1.1 ° C. This error can already exceed the permissible measurement uncertainty of the coordinate measuring machine used.
  • DE-A1-34 25 476 describes a length measuring device in which the displacement of the feeler lever is measured by a laser interferometer.
  • the length measuring device also contains a device for temperature stabilization of the laser diode consisting of a measuring resistor and a Peltier element. The temperature of the feeler lever itself is not measured.
  • a coordinate measuring machine is known from DE-A1-36 20 118, the scales of which are provided with temperature sensors. These temperature sensors are hard-wired to the control computer of the coordinate measuring machine and allow the correction of thermally induced changes in length of the scale material.
  • DE-A1-22 34 146 describes a length measuring device which contains temperature guides for determining the temperature of the length measuring device. However, it is not specified on which components of the length measuring device the temperature is measured.
  • buttons according to the present invention With the buttons according to the present invention, a thermal linear expansion is thus permitted and the measurement results are subsequently corrected on the basis of the temperature values which the sensor integrated in the button reports to corresponding evaluation electronics in the coordinate measuring machines via the contacts on the exchange surface.
  • This makes it possible to use pre-calibrated styli under changing ambient temperatures. Since the sensors are constantly in thermal contact with the button, they assume its temperature with high precision. The query of the button temperature can therefore take place in a fraction of a second without any time delay.
  • the probe the temperature of which is detected, can either be a passive rigid stylus or a complete probe.
  • the only thing that is essential is that the length measurement of all components between the interchangeable surface and the probe element, i.e. the probe ball is detected.
  • the probe and stylus are made of a material with good thermal conductivity, e.g. Steel or aluminum, then it may be sufficient to insert the sensor into the plate-shaped holder, which is provided with the interchangeable surface and is used to fasten the probe or stylus. Because of the thermal conductivity, the entire unit to be replaced, consisting of holder, probe and stylus, then takes on the same temperature.
  • a material with good thermal conductivity e.g. Steel or aluminum
  • the button can also be a non-contact optical probe.
  • the temperature inside the housing influences the relative position of different components of the probe to one another and thus the accuracy of the distance measurement. There the temperature sensor is then expediently inserted into the housing of the probe.
  • the temperature sensors can be measuring resistors, which are preferably connected using four-wire technology. With such sensors, the temperatures of other components of a coordinate measuring machine, e.g. that of the scales.
  • the circuitry outlay can then be kept low, since the temperatures of the various measuring points (scale, workpiece, probe) can be queried and evaluated by a processor in multiplex operation.
  • a stylus which can be exchanged automatically, for example via the changing device described in US Pat. No. 4,637,119, from a magazine constructed at the edge of the measuring range of the coordinate measuring machine in question.
  • a change plate (1) is provided, on the top of which three cylinder bodies are arranged offset by 120 °. With these cylinder bodies, of which only one cylinder body, the cylinder body (9a) can be seen in the illustration according to FIG. 1, the changeable plate (1) reproducibly rests on a corresponding counter bearing on the underside of the probe on the coordinate measuring machine.
  • the changeable plate (1) has a mounting cube (3) on its underside, on which up to five styli or stylus combinations can be screwed on all sides.
  • a stylus (4) is attached to the underside of the mounting cube (3).
  • the plate-shaped holder (1) is also provided with a circumferential groove (2).
  • a fork-shaped carrier of the magazine (not shown) engages in this groove, in which the button is placed.
  • a sensor (7) in the form of a platinum resistor is inserted in the plate-shaped holder (1).
  • This sensor (7) is in good thermal contact with the stylus (4) and the other stylus attachable to the mounting cube (3) due to the good thermal conductivity of the metallic material from which the parts (1,3,4) are made.
  • the ends of the measuring resistor (7) are placed on contact pins (5) on the top of the adapter plate (1). In this way, the voltage drop across the measuring resistor is transmitted to corresponding counter contacts in the probe, and can be evaluated by a downstream measuring electronics.
  • This measuring electronics thus determines the temperature of the inserted stylus combination after each probe change and reports this on to the control computer of the coordinate measuring machine.
  • the linear expansion to be corrected is calculated from the determined difference to the temperature at which the stylus combination in question was calibrated, and taking into account the stylus lengths (LX or LZ) and the expansion coefficient of the stylus material. It is assumed here that the inserted stylus combination expands linearly in all axial directions and the angular position of the stylus combination is constantly reproduced by the changing process. It is therefore not necessary to recalibrate the button.
  • the complete probe (14) with the resiliently mounted stylus (18) is attached via an extension piece (12) to the plate-shaped holder (11) which carries the exchange surface for an automatic exchange on the measuring arm of a coordinate measuring machine.
  • the housing of the probe (14), the extension (12) and the change plate (11) as well as the union nuts (13a and 13b) connecting the parts are made of aluminum and are due to the good thermal conductivity of the material same temperature.
  • a temperature sensor (17) is integrated in the changeable plate, which, however, is not visible in the top view according to FIG. 2.
  • the temperature sensor (17) is also a measuring resistor that is operated using four-wire technology.
  • an optical probe head that can be exchanged for the mechanical button from FIG. 2 is shown.
  • This is a so-called triangulation button, the structure of which is outlined in a simplified manner in FIG. 3b. It has a laser diode (28), from which a measuring point is projected onto the object to be measured, and an optical system (29), which images the projected measuring point onto a row of diodes (30). The distance to the object is determined from the displacement of the measuring point on the diode row.
  • buttons of this type the linear thermal linear expansion or the distance from the probe to the adapter plate (21) attached directly to the housing (24) of the button only plays a subordinate role.
  • the mutual adjustments of the optoelectronic components to one another can change, among other things, due to the heat loss generated in the button itself, which results in errors in the distance measurement.
  • a temperature sensor in the form of a measuring resistor (27) is housed in the housing (24), the connections of which are placed on four of the contacts (25) in the adapter plate (21).
  • the temperature-dependent correction of the Length measurements of the button (24) take place here such that, for example, the drift of the zero point of the measurement range is measured for different temperatures and is stored in a memory table in the computer of the coordinate measuring machine.
  • the voltage drop across the measuring resistor (27) and thus the current temperature of the triangulation button (24) are then queried at regular intervals and the distance measured values are corrected by the values stored in the table.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP89119244A 1988-11-05 1989-10-17 Taster für Koordinatenmessgeräte Expired - Lifetime EP0368040B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE8813875U 1988-11-05
DE8813875U DE8813875U1 (de) 1988-11-05 1988-11-05 Taster für Koordinatenmeßgeräte

Publications (3)

Publication Number Publication Date
EP0368040A2 EP0368040A2 (de) 1990-05-16
EP0368040A3 EP0368040A3 (en) 1990-11-07
EP0368040B1 true EP0368040B1 (de) 1993-02-10

Family

ID=6829584

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89119244A Expired - Lifetime EP0368040B1 (de) 1988-11-05 1989-10-17 Taster für Koordinatenmessgeräte

Country Status (4)

Country Link
US (2) US5014444A (enrdf_load_stackoverflow)
EP (1) EP0368040B1 (enrdf_load_stackoverflow)
JP (1) JPH0729450Y2 (enrdf_load_stackoverflow)
DE (2) DE8813875U1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10254105B2 (en) 2016-12-05 2019-04-09 Quality Vision International, Inc. Exchangeable lens module system for probes of optical measuring machines

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US5276976A (en) * 1992-09-15 1994-01-11 Hawkes Hollis D Indicator tip turret
DE9422043U1 (de) * 1993-02-23 1997-10-09 Faro Technologies, Inc., Lake Mary, Fla. Koordinatenmeßmaschine zum Messen von dreidimensionalen Koordinaten
US5410817A (en) * 1993-05-18 1995-05-02 Budd Co Measuring tool with concentric point
US5341574A (en) * 1993-06-29 1994-08-30 The United States Of America As Represented By The Department Of Energy Coordinate measuring machine test standard apparatus and method
GB9401692D0 (en) 1994-01-28 1994-03-23 Renishaw Plc Performing measurement or calibration on positioning machines
GB9413194D0 (en) * 1994-06-30 1994-08-24 Renishaw Plc Probe head
IT1279210B1 (it) * 1995-05-16 1997-12-04 Dea Spa Dispositivo e metodo di visione per la misura tridimensionale senza contatto.
DE19915012A1 (de) * 1999-04-01 2000-10-05 Metronom Indvermessung Gmbh Prüfkörper
US6941669B2 (en) * 2000-06-30 2005-09-13 Magus Gmbh Method for determining effective coefficient of thermal expansion
DE10138138A1 (de) 2001-08-09 2003-02-20 Zeiss Carl Korrektur des Temperaturfehlers bei einer Messung mit einem Koordinatenmessgerät
US7077643B2 (en) * 2001-11-07 2006-07-18 Battelle Memorial Institute Microcombustors, microreformers, and methods for combusting and for reforming fluids
JP2004117161A (ja) * 2002-09-26 2004-04-15 Sharp Corp 光学式変位センサ
JP4873613B2 (ja) * 2002-10-07 2012-02-08 アイノーラ テクノロジーズ インコーポレイテッド 空間参照システム
JP2008524565A (ja) * 2004-12-16 2008-07-10 ベルス・メステヒニーク・ゲーエムベーハー 座標測定装置ならびに座標測定装置を用いて測定する方法
US8141264B2 (en) * 2007-05-31 2012-03-27 Brunson Instrument Company Length reference bar system and method
WO2009089219A1 (en) * 2008-01-07 2009-07-16 Mark David Osterstock Coordinate measuring apparatus
US8832953B2 (en) * 2008-01-07 2014-09-16 Q-Mark Manufacturing, Inc. Coordinate measuring apparatus
DE102009060784A1 (de) * 2009-12-22 2011-06-30 Carl Zeiss 3D Automation GmbH, 73447 Taststift und Tastkopf für ein Koordinatenmessgerät
IT1402715B1 (it) * 2010-10-29 2013-09-18 Marposs Spa Sonda di tastaggio
CN102175146B (zh) * 2010-12-31 2012-06-27 南京工业大学 基于具有触觉功能测量笔的自动三维视觉测量系统
PL3259096T3 (pl) * 2015-02-19 2020-05-18 Kuka Systems Gmbh Instalacja do wytwarzania oraz sposób wytwarzania
JP2024129692A (ja) * 2023-03-13 2024-09-27 株式会社東京精密 測定装置

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US3332153A (en) * 1964-08-31 1967-07-25 Bausch & Lomb Temperature compensating system
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US3775655A (en) * 1972-09-15 1973-11-27 Xerox Corp Method and apparatus for transducer temperature compensation
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DE3348472C2 (de) * 1983-06-03 1994-09-29 Zeiss Carl Fa Taststiftwechselhalter
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10254105B2 (en) 2016-12-05 2019-04-09 Quality Vision International, Inc. Exchangeable lens module system for probes of optical measuring machines
US10444003B2 (en) 2016-12-05 2019-10-15 Quality Vision International, Inc. Exchangeable lens module system for probes of interferometric optical measuring machines

Also Published As

Publication number Publication date
DE58903523D1 (de) 1993-03-25
JPH0327305U (enrdf_load_stackoverflow) 1991-03-19
US5065526A (en) 1991-11-19
EP0368040A2 (de) 1990-05-16
US5014444A (en) 1991-05-14
EP0368040A3 (en) 1990-11-07
DE8813875U1 (de) 1988-12-22
JPH0729450Y2 (ja) 1995-07-05

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