EP0359336A3 - Device for microwave transmission - Google Patents

Device for microwave transmission Download PDF

Info

Publication number
EP0359336A3
EP0359336A3 EP19890202301 EP89202301A EP0359336A3 EP 0359336 A3 EP0359336 A3 EP 0359336A3 EP 19890202301 EP19890202301 EP 19890202301 EP 89202301 A EP89202301 A EP 89202301A EP 0359336 A3 EP0359336 A3 EP 0359336A3
Authority
EP
European Patent Office
Prior art keywords
waveguide
microwave transmission
areas
decoupling
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19890202301
Other languages
German (de)
French (fr)
Other versions
EP0359336A2 (en
EP0359336B1 (en
Inventor
Georg Dr. Gärtner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Intellectual Property and Standards GmbH
Koninklijke Philips NV
Original Assignee
Philips Patentverwaltung GmbH
Philips Gloeilampenfabrieken NV
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Patentverwaltung GmbH, Philips Gloeilampenfabrieken NV, Koninklijke Philips Electronics NV filed Critical Philips Patentverwaltung GmbH
Publication of EP0359336A2 publication Critical patent/EP0359336A2/en
Publication of EP0359336A3 publication Critical patent/EP0359336A3/en
Application granted granted Critical
Publication of EP0359336B1 publication Critical patent/EP0359336B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/30—Auxiliary devices for compensation of, or protection against, temperature or moisture effects ; for improving power handling capability

Landscapes

  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Waveguide Connection Structure (AREA)
  • Other Liquid Machine Or Engine Such As Wave Power Use (AREA)

Abstract

Die Mikrowellenübertragung zwischen Hohlleiterbereichen (a, b) verschiedenen Innengasdrucks und/oder unterschiedlicher Füllgaszusammensetzung, d.h. das Ein- oder Auskoppeln von Mikrowellen von einem derartigen Hohlleiterbereich in einen anderen, wird dadurch verbessert, daß zwischen den Hohlleiterbereichen (a, b) mindestens eine Pumpstufe (6, 7, 8, 9) angeordnet ist. Ein Hohlleiter (1) zwischen Hohlleiterbereichen (a, b), ist vorzugsweise über die Mikrowellenleistung praktisch nicht auskoppelnde Schlitze (2, 3, 4, 5) mit den Pumpstufen (6, 7, 8, 9) verbunden. Microwave transmission between waveguide areas (a, b) different internal gas pressure and / or different filling gas composition, i.e. the one or Decoupling microwaves from such Waveguide area into another, this will improves that between the waveguide areas (a, b) at least one pump stage (6, 7, 8, 9) is arranged. A Waveguide (1) between waveguide regions (a, b), is preferably about microwave power practically not decoupling Slots (2, 3, 4, 5) connected to the pump stages (6, 7, 8, 9).

EP89202301A 1988-09-16 1989-09-13 Device for microwave transmission Expired - Lifetime EP0359336B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3831453A DE3831453A1 (en) 1988-09-16 1988-09-16 DEVICE FOR MICROWAVE TRANSMISSION
DE3831453 1988-09-16

Publications (3)

Publication Number Publication Date
EP0359336A2 EP0359336A2 (en) 1990-03-21
EP0359336A3 true EP0359336A3 (en) 1991-03-27
EP0359336B1 EP0359336B1 (en) 1995-12-06

Family

ID=6363043

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89202301A Expired - Lifetime EP0359336B1 (en) 1988-09-16 1989-09-13 Device for microwave transmission

Country Status (4)

Country Link
US (1) US5028897A (en)
EP (1) EP0359336B1 (en)
JP (1) JPH02147847A (en)
DE (2) DE3831453A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19529760C1 (en) * 1995-08-12 1996-11-14 Alcatel Kabel Ag High frequency signal communication mast
EP1087458A3 (en) * 1999-09-17 2002-08-07 Spinner GmbH Elektrotechnische Fabrik Bandpass filter
JP4636663B2 (en) * 2000-10-11 2011-02-23 四国計測工業株式会社 Microwave supply device for chemical reaction promotion to high temperature and high pressure vessel
DE102011111884B3 (en) 2011-08-31 2012-08-30 Martin Weisgerber Device for generating thermodynamic cold plasma by microwaves, has resonance chambers distributed in evacuated, electrically conductive anode, where plasma is generated by microwaves under standard atmospheric conditions
DE102012204447B4 (en) 2012-03-20 2013-10-31 Forschungsverbund Berlin E.V. Apparatus and method for generating a plasma
US9928993B2 (en) 2015-01-07 2018-03-27 Applied Materials, Inc. Workpiece processing chamber having a rotary microwave plasma antenna with slotted spiral waveguide

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2407069A (en) * 1942-09-15 1946-09-03 Gen Electric Dielectric wave guide system
GB644749A (en) * 1948-09-08 1950-10-18 Standard Telephones Cables Ltd Improvements in or relating to electromagnetic wave guides
DE1031383B (en) * 1956-04-19 1958-06-04 Philips Nv Device for ventilating a waveguide system
US4688007A (en) * 1985-09-03 1987-08-18 The Johns Hopkins University Air inlet for internal cooling of overmoded waveguide
EP0252548A1 (en) * 1986-07-05 1988-01-13 Philips Patentverwaltung GmbH Process for the production of electrically conductive moulded articles by the plasma-activated chemical gas phase precipitation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3287674A (en) * 1964-07-16 1966-11-22 Jr George H Stiegler Pressurized waveguide shut-off
US3778799A (en) * 1972-03-28 1973-12-11 Cables De Lyon Geoffroy Delore Safety device for pipe lines under gas pressure
US4286240A (en) * 1979-12-03 1981-08-25 Varian Associates, Inc. Circular electric mode microwave window
JPS60244102A (en) * 1984-05-18 1985-12-04 Mitsubishi Electric Corp Waveguide pressing device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2407069A (en) * 1942-09-15 1946-09-03 Gen Electric Dielectric wave guide system
GB644749A (en) * 1948-09-08 1950-10-18 Standard Telephones Cables Ltd Improvements in or relating to electromagnetic wave guides
DE1031383B (en) * 1956-04-19 1958-06-04 Philips Nv Device for ventilating a waveguide system
US4688007A (en) * 1985-09-03 1987-08-18 The Johns Hopkins University Air inlet for internal cooling of overmoded waveguide
EP0252548A1 (en) * 1986-07-05 1988-01-13 Philips Patentverwaltung GmbH Process for the production of electrically conductive moulded articles by the plasma-activated chemical gas phase precipitation

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
INSTRUMENTS AND CONTROL SYSTEMS. vol. 38, no. 9, September 1965, RADNOR US Seiten 135 - 139; H.D.BAUMANN: "Why limit outlet velocities in reducing valves? " *
PATENT ABSTRACTS OF JAPAN vol. 10, no. 104 (E-397)(2161) 19 April 1986, & JP-A-60 244102 (MITSUBISHI DENKI K.K.) 04 Dezember 1985, *

Also Published As

Publication number Publication date
DE58909526D1 (en) 1996-01-18
DE3831453A1 (en) 1990-03-22
EP0359336A2 (en) 1990-03-21
EP0359336B1 (en) 1995-12-06
JPH02147847A (en) 1990-06-06
US5028897A (en) 1991-07-02

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