EP0347473B1 - Kryogene kondensationspumpe - Google Patents

Kryogene kondensationspumpe Download PDF

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Publication number
EP0347473B1
EP0347473B1 EP89901554A EP89901554A EP0347473B1 EP 0347473 B1 EP0347473 B1 EP 0347473B1 EP 89901554 A EP89901554 A EP 89901554A EP 89901554 A EP89901554 A EP 89901554A EP 0347473 B1 EP0347473 B1 EP 0347473B1
Authority
EP
European Patent Office
Prior art keywords
pump
housing
out element
vessel
radiation shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP89901554A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0347473A4 (de
EP0347473A1 (de
Inventor
Marxen Petrovich Larin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Original Assignee
NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR filed Critical NAUCHNO-TEKHNICHESKOE OBIEDINENIE AKADEMII NAUK SSSR
Publication of EP0347473A1 publication Critical patent/EP0347473A1/de
Publication of EP0347473A4 publication Critical patent/EP0347473A4/de
Application granted granted Critical
Publication of EP0347473B1 publication Critical patent/EP0347473B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to vacuum technology and in particular to the construction of cryogenic condensation vacuum pumps.
  • the invention can be used in vacuum technology which is widely used in the electronics and radio frequency industries and in other industries, as well as in scientific research where it is necessary to have an extra pure, completely oil-free vacuum in a range of operating pressures 1.10 ⁇ 4 to 1.10 ⁇ 10 Pa to generate and maintain for a long time.
  • Cryogenic condensation pumps are currently being perfected by optimizing their designs in terms of reducing weight and metal expenditure, simplifying the assembly and disassembly of pumps and increasing their cost-effectiveness.
  • a cryogenic condensation pump with a housing in the interior of which a radiation shield containing, connected to one another, a cryogenic agent vessel, a heat-conducting frame and an arrow umbrella, and a pumping element designed as a vessel are arranged.
  • the cryogenic agent vessel of the radiation shield and the drainage element are provided with hanging tubes which serve for filling the cryogenic agents, liquid nitrogen or liquid helium, into the said vessels, and for fastening these vessels in the housing (magazine of the USSR Academy of Sciences "Pribory i tekhnika experimenta” , No. 2, 1982, Moscow, MPLarin "Vysokovakuumnye agregaty s kriogennum i magnitozaryadnym nasosami").
  • a cryogenic condensation pump with a housing in the interior of which a radiation shield, which, connected to one another, contains a cryogenic agent vessel, a heat-conducting frame and an arrow umbrella, and a pumping element in the form of a vessel are arranged (SU, A, 1017817).
  • the pump-off element is designed as a vessel and is accommodated in a cavity which is formed by the bottom of the cryogenic agent vessel of the radiation shield, the surface of the heat-conducting frame and the arrow shield.
  • the cryogenic agent vessel of the radiation shield and the pumping-off element are provided with hanging tubes which serve for the liquid nitrogen or the liquid helium to enter the said vessels and for fastening these vessels in the housing.
  • the latter is designed as a corrugated metal tube with a spiral profile of the beads.
  • the suspension tubes are connected to the cryogenic center vessel of the radiation shield or to the pumping element by welding.
  • To connect the suspension tubes to the housing their upper end faces are welded to the upper end faces of the housing connecting piece, in which the suspension tubes are inserted.
  • the housing of the pump and the suspension tubes are made of stainless steel and elements of the radiation shield - the cryogenic agent vessel, the heat-conducting frame and the arrow shield - and the pumping element are made of copper.
  • a disadvantage of this pump is complicated assembly and disassembly, for example when repairing the cryogenic agent vessel of the radiation shield or the pumping element.
  • one has to cut off the upper end faces of the welded suspension tubes and housing sockets and after a repair and the subsequent assembly of the pump, a high-quality re-welding of these Ensure elements.
  • These operations are labor intensive, they require special conditions and take a lot of time.
  • the design of the pump elements made of stainless steel and copper means that they are heavy and require a lot of metal. This causes greater stress on the pump elements and their welded joints and entails the risk of their destruction, in particular when transporting pumps.
  • the pump described is insufficiently economical due to a rather large consumption of the cryogenic agents - liquid nitrogen and helium - due to their evaporation, which is due to the greater heat input into the pumping element and into the cryogenic agent vessel of the radiation shield.
  • the invention has for its object to provide a cryogenic condensation pump containing a housing, in the interior of which a radiation shield with a cryogenic agent vessel and a pumping element in the form of a vessel are accommodated, which are provided with suspension tubes, in which a connection of the suspension tubes to the housing and the vessel of the radiation shield is designed and the housing, the radiation shield and the pumping element are made of such a material that an assembly or disassembly of the pump while reducing the weight and reducing the metal expenditure of the pump and ensuring the reliable vacuum-tight connection of the pump elements can be facilitated and simplified.
  • each suspension tube with at the opposite End arranged assemblies for connection to the housing and to the cryogenic agent vessel of the radiation shield or to the pumping element is provided, wherein the assembly for connecting the suspension tube to the housing contains a socket accommodated in the bore of a housing flange, which has one end on the suspension tube is attached airtight, and at the other end of this neck a collar is made with an annular projection facing the housing, whereupon an annular counterstop is carried out, a sealing metallic insert being placed between said annular projections and in the central part of said Stutzen a ring flange is fixed, in which stop bolts are arranged, which come
  • each suspension tube By equipping each suspension tube with assemblies for connection to the housing and the cryogenic agent vessel of the radiation shield or to the pumping element and by said design of these assemblies, the assembly and disassembly of the pump are facilitated and simplified when a repair of the cryogenic agent vessel, the radiation shield or the pumping element, for example for repeated vapor deposition of their surfaces with aluminum is required.
  • the pump is disassembled, only the assemblies for connecting the suspension tubes to the housing are taken apart, after which all internal assemblies of the pump are removed from the housing. When assembling, the assemblies of the pump are assembled in reverse order.
  • connection assemblies which are designed in the manner described, make it possible to manufacture the pump housing, the radiation shield and the pumping element out of metals with a small specific weight, namely the housing made of titanium, the radiation shield and the pumping element out of aluminum, which makes it possible the weight and the metal expenditure of the pump can be reduced.
  • connection assemblies ensures a vacuum-tight connection of a pump housing made of titanium and, made of aluminum, a radiation shield and a pumping element with hanging tubes made of stainless steel.
  • connection assemblies are tightened, ring-shaped projections and a sealing insert between them, which are made of a soft metal, e.g. Aluminum is made, are present, a vacuum-tight connection of the housing made of titanium with a suspension tube made of stainless steel and the aluminum-made cryogen vessel of the radiation shield or the pumping element is achieved with a suspension tube also made of stainless steel.
  • contact surfaces of the bearing bush and the annular element are made conical. This design of the contact surfaces facilitates the removal process of the pumping element when the pump is disassembled and ensures better thermal contact of the middle part of the suspension tube with the cryogenic agent vessel of the radiation shield after its assembly.
  • suspension tube of the pumping element is provided on the side facing the pumping element with a coaxially arranged screen which has thermal contact with the suspension tube in the vicinity of its assembly for connection to the pumping element.
  • Said shield reduces radiation heat from the cryogenic center vessel of the radiation shield into the assembly for connecting the suspension tube to the pumping element, which is at the liquid helium temperature, and into the lower part of the suspension tube, the temperature of which is close to that of the liquid helium.
  • the supply of heat is reduced by the thermal conductivity in the pumping element itself from the suspension tube and its assembly for connection and the pumping element, as a result of which liquid helium evaporation in the pumping element is reduced and the economy of the pump is thus increased.
  • cryogenic center vessel of the radiation shield is provided with an additional shield, which is arranged between the housing and the said vessel with a gap with respect to these.
  • the additional screen reduces the supply of heat due to radiation from the pump housing into the cryogen container, which reduces evaporation of the cryogen (liquid nitrogen) and thus increases the economy of the pump.
  • a socket is arranged in the axis thereof, in the opposite ends of which coaxial blind holes are made and in the arrow screen there is a hole which is coaxial with the holes in the socket.
  • Said bushing with holes enables the pumping element to be rigidly fixed in the pump housing with the aid of rods inserted and locked in these holes, which ensures the integrity of the pump elements and assemblies and their welded connections when the pump is being transported.
  • the cryogenic condensation pump contains a housing 1 (FIG. 1) with a lid 2, in the interior of which is connected to one another, a vessel 3 for the cryogen (liquid nitrogen), a heat-conducting frame 4 and an arrow screen 5, which together form a radiation screen 3, 4 , 5 form, and a pumping element 6 are housed.
  • the cryogenic agent vessel 3 has a lid 7 and a bottom 8.
  • the pumping element is designed as a vessel which receives a cryogenic agent (liquid helium) and is accommodated in a cavity which is through the bottom 8 of the cryogenic agent vessel 3, the heat-conducting frame 4 and the arrow screen 5 is formed.
  • the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 and the pumping element 6 are provided with associated suspension tubes 9 and 10.
  • the suspension tube 9 contains assemblies 11a and 12a arranged at its opposite ends for connection to the housing 1 and the cryogen container 3, respectively.
  • the suspension tube 10 also contains assemblies 11-b and 12-b arranged at its opposite ends for connection to the housing 1 and 12, respectively the pumping element 6.
  • the assembly 11-a for connecting the suspension tube 9 to the housing 1 contains a connection piece 13 (FIG. 2) which is accommodated in a bore 14 in a flange 15 of the housing 1.
  • the flange 15 is inside a connecting piece 16 of the cover 2 of the housing 1 arranged and rigidly connected to the socket 16 and consequently to the housing.
  • One end 17 of the connecting piece 13 is attached to the suspension tube 9 in an airtight manner and at its other end a collar 18 is designed with an annular shoulder 19 which faces the flange 15 of the housing 1, whereupon an annular counter-shoulder 20 is executed.
  • a sealing insert 21 is attached, which is made of soft metal, e.g. Aluminum is made.
  • an annular flange 22 is arranged on a thread, which has threaded bores, in which stop bolts 23 are inserted.
  • the assembly 11-b for connecting the suspension tube 10 to the housing 1 is similar to the assembly 11-a for connecting the suspension tube 9 to the housing 1 with the only difference that the flange 15 is attached directly to the bottom 2 of the housing 1 (the flange is not shown in detail so that the drawings remain clear).
  • the assembly 12-a for connecting the hanging tube 9 to the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 contains a connection piece 24 (FIG. 3), which is connected to a neck 26 of the cryogenic agent vessel 3 in an airtight manner, with an end face sealing collar 25.
  • the assembly 12-a also contains two flanges 27 and 28 which face each other with end faces 29 and 30 and are connected to one another by means of clamping screws 31.
  • the flange 27 is airtightly attached to one end of the suspension tube 9 and the flange 28 is at the end of the neck 24 arranged.
  • the flanges 27 and 28 are provided on their end faces 29 and 30 with annular projections 32 and 33 and between them is the said sealing collar 25.
  • the assembly 12-a for connecting the suspension tube 9 to the cryogen container 3 is provided with a shield 34 with a collar 35.
  • the screen 34 reduces the supply of heat by radiation from the housing 1 to the assembly 12-a.
  • the assembly 12-b for connecting the suspension tube 10 to the pumping-out element 6 is similar to the assembly 12-a for connecting the suspension tube 9 to the cryogenic agent vessel 3 and is shown in FIG. 4, in which the elements of the same name have the same designations as in FIG are designated.
  • the hanging tube 10 of the pumping element 6 runs through the cryogenic agent vessel 3 of the radiation shield 3, 4, 5 inside a cylinder 36 which is arranged in the axis of the cryogenic agent vessel 3 and is fastened in the lid 7 and in the bottom 8 of the said vessel.
  • the suspension tube 10 is provided with a bearing bush 37 which is screwed onto a spiral profile of the beads of the suspension tube 10 and an annular element 38 is fastened in the cover 7 of the cryogenic agent vessel 3 and comes into contact with the bearing bush 37.
  • Contact surfaces of the bearing bush 37 and the ring member 38 are tapered. This design of the contact surfaces of the bearing bush 37 and the ring element 38 facilitates the insertion or Removal of the pumping element 6 during assembly or disassembly of the pump. In addition, this ensures better thermal contact between the suspension tube 10 and the cryogen container 3 to reduce the heat input due to thermal conductivity via the upper part of the suspension tube 10 from the housing 1 of the pump.
  • the cryogenic agent vessel 3 is provided with an additional screen 39, which is arranged between the housing 1 and the cryogenic agent vessel 3 with a gap 10 opposite them.
  • the screen 39 is suspended from the collar 35 of the screen 34 (FIG. 3). This screen reduces the supply of heat by radiation from the housing 1 of the pump to the cryogen container 3, as a result of which evaporation of the cryogen (liquid nitrogen) is reduced and the economy of the pump is increased.
  • the suspension tube 10 of the pumping element 6 is provided on the side facing the pumping element with a coaxially arranged screen (FIG. 4), which consists of two parts, namely an upper part 41, which covers the surface of the suspension tube 10 on one half encloses its length, and a lower part 42, which protects the assembly 12-b for connecting the suspension tube 10 to the pumping element 6.
  • the upper 41 and the lower 42 screen part are connected by a thread 43.
  • the shield has a thermal contact with the hanging tube 10 in the vicinity of its assembly for connection to the pumping element 3 correctly: pumping element 6. The contact is achieved with the aid of a collar 44, which is embodied on the lower shield part 42 and engages with the bead spiral of the hanging tube 10.
  • One end of the suspension tube 10 is directly connected (welded) to the flange 27 of the assembly 12-b for its connection to the pumping element 6 and therefore has a temperature which is close to the liquid helium temperature in the pumping element 6 (4.2K). Thanks to the thermal contact of the hanging tube 10 with the lower screen part 42, a temperature is maintained along the screen that is close to the liquid helium temperature. The temperature of the hanging tube 10 changes from its end, which connects to the pumping element 6, to the middle of the length from 4.5 to 50 K.
  • This screen reduces the supply of heat by radiation from the vessel 3 of the radiation screen 3, 4, 5 into the assembly 12-b of the suspension tube 10 with the pumping element 6 and the lower part of the suspension tube 10. Consequently, the heat supply by heat conduction into the pumping element 6 from the suspension tube 10 and reduced by the assembly 12-b for connection to the pumping element 6, thereby reducing the evaporation of liquid helium and therefore increasing the economy of the pump.
  • the pump is equipped with flanges 45, 46, 47 for connection to an auxiliary pump for high vacuum evacuation e.g. an ion atomizing pump, to a pump for pre-evacuation, e.g. an adsorption pump, and to a working chamber (not shown so that the drawings remain clear) and provided with a stopper flange 48 with a bottom 49 which serves to transport the pump and test it "on itself".
  • an auxiliary pump for high vacuum evacuation e.g. an ion atomizing pump
  • a pump for pre-evacuation e.g. an adsorption pump
  • a working chamber not shown so that the drawings remain clear
  • a bushing 51 is fastened in its axis, in the opposite ends of which blind holes 52, 53 are made, and in the arrow screen 5 there is a hole 54 which is coaxial with the holes 52, 53.
  • a rod is inserted into the bore 52, which rod is lowered within the suspension tube 10 and fastened to the socket 13.
  • a rod is inserted into the bore 53, which is passed through the bore 54 in the arrow screen 5 and fastened in the bottom 49 of the plug flange 48 (the rods are not shown, so that the drawings remain clear).
  • the bush 51 with the bores 52, 53 ensures rigid attachment of the pumping element 6 by means of rods, as a result of which the integrity of the elements and the components of the pump is ensured when the pump is transported.
  • the housing 1 of the pump is made of titanium, the radiation shield (the cryogen container 3, the heat-conducting frame 4, the arrow shield 5) and the pumping element 6 made of aluminum produced. This makes it possible to reduce the weight and the metal expenditure of the pump.
  • the cryogenic condensation pump works as follows.
  • the plug flange 48 is removed, the lower rod is removed and a copper or aluminum plug is screwed into the bore 54.
  • the pump with the flange 47 is placed on a counter flange of the working chamber and connected to one another in a vacuum-tight manner. You take out the top bar.
  • the plugs are then removed from the flanges 45 and 46 and the ion atomizing pump is connected to the flange 45 and a valve with a metal seal is connected to the flange 46. Via this valve, a system for pre-evacuation is connected to the pump, which consists of a mechanical pre-vacuum pump and an adsorption pump.
  • the mechanical fore-vacuum pump is used to evacuate the volume of the pump according to the invention and the working chamber to a pressure of 100 ... 40 Pa and then with the aid of an adsorption pump to a pressure of 1.10 1.12 ... 1.10 ⁇ 4 Pa .
  • liquid nitrogen is poured into the cryogen container 3 via one of the suspension tubes 9.
  • the ion atomizing pump is switched on and the pressure in the pump is reduced by one or two orders of magnitude.
  • the pumping element 6 is cooled with a small amount of liquid nitrogen (1 to 2 liters) to a temperature of 80 ... 100 K, which is filled in via the hanging tube 10. You can control the temperature with the help of a thermocouple, which is lowered via the hanging tube 10 to the bottom of the pumping element.
  • the cavity of the pumping element 6 is to be evacuated to a pressure of 100 to 40 Pa with the aid of the mechanical backing pump, filled with gaseous helium and then the pumping element 6 is filled with liquid helium. Then the pressure in the working chamber will generally drop to 1.10 ⁇ 7 ... 1.10 ⁇ 9 Pa and below. Then the connector 13 is connected to a system for collecting the gaseous helium. With the help of the pump prepared in this way, the working chamber is evacuated to the required pressure.
  • the invention can be used in vacuum technology that is widely used in the electron and radio frequency industries and other industries, as well as in scientific research where it is necessary to have an extra pure, completely oil-free vacuum in a range of operating pressures 1.10 ⁇ 4 ... 1.10 ⁇ 10 Pa.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Containers, Films, And Cooling For Superconductive Devices (AREA)
EP89901554A 1988-01-08 1988-12-07 Kryogene kondensationspumpe Expired - Lifetime EP0347473B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SU436045 1988-01-08
SU884360458A SU1698482A1 (ru) 1988-01-08 1988-01-08 Криогенный конденсационный насос
PCT/SU1988/000254 WO1989006317A1 (en) 1988-01-08 1988-12-07 Cryogenic condensation pump

Publications (3)

Publication Number Publication Date
EP0347473A1 EP0347473A1 (de) 1989-12-27
EP0347473A4 EP0347473A4 (de) 1990-01-08
EP0347473B1 true EP0347473B1 (de) 1992-02-19

Family

ID=21348414

Family Applications (1)

Application Number Title Priority Date Filing Date
EP89901554A Expired - Lifetime EP0347473B1 (de) 1988-01-08 1988-12-07 Kryogene kondensationspumpe

Country Status (8)

Country Link
US (1) US4976111A (hu)
EP (1) EP0347473B1 (hu)
JP (1) JPH02502936A (hu)
AU (2) AU618786B2 (hu)
DE (1) DE3868509D1 (hu)
PL (1) PL160317B1 (hu)
SU (1) SU1698482A1 (hu)
WO (1) WO1989006317A1 (hu)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1682628A1 (ru) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криоадсорбционный насос
AT398849B (de) * 1992-09-08 1995-02-27 Sitte Hellmuth Kammer zur gefriertrocknung durch kryosorption
US5799493A (en) * 1996-09-05 1998-09-01 Helix Technology Corporation Corrosion resistant cryopump
JP5557786B2 (ja) * 2011-04-05 2014-07-23 住友重機械工業株式会社 クライオポンプのための蓋構造、クライオポンプ、クライオポンプの立ち上げ方法、及びクライオポンプの保管方法
US9187799B2 (en) * 2012-08-13 2015-11-17 William R. Jones 20 bar super quench vacuum furnace
CN108547753A (zh) * 2018-03-22 2018-09-18 兰州真空设备有限责任公司 一种大口径液氮-gm型低温泵

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3144200A (en) * 1962-10-17 1964-08-11 Clyde E Taylor Process and device for cryogenic adsorption pumping
US3304731A (en) * 1964-03-13 1967-02-21 Granville Phillips Company High vacuum cold trap
CH419428A (de) * 1964-04-17 1966-08-31 Balzers Patent Beteilig Ag Einrichtung zur Erzeugung bzw. Aufrechterhaltung eines Vakuums in einem Raum
US3256706A (en) * 1965-02-23 1966-06-21 Hughes Aircraft Co Cryopump with regenerative shield
US3485054A (en) * 1966-10-27 1969-12-23 Cryogenic Technology Inc Rapid pump-down vacuum chambers incorporating cryopumps
US3625081A (en) * 1969-04-01 1971-12-07 Marcellus S Merrill Apparatus for detecting unbalance of vehicle wheels
US3625018A (en) * 1969-10-20 1971-12-07 Nasa Cryogenic feedthrough
FR2085400B2 (hu) * 1970-04-17 1974-05-03 Air Liquide
SU620658A1 (ru) * 1976-10-07 1978-08-25 Предприятие П/Я В-8851 Вакуумный сорбционный насос непрерывного действи
US4356701A (en) * 1981-05-22 1982-11-02 Helix Technology Corporation Cryopump
SU1017817A1 (ru) * 1981-07-10 1983-05-15 Ленинградский Ордена Ленина Политехнический Институт Им.М.И.Калинина Криогенный конденсационный насос
SU1232841A1 (ru) * 1984-12-27 1986-05-23 Volodin Sergej N Узел подвески охлаждаемого сосуда крионасоса

Also Published As

Publication number Publication date
SU1698482A1 (ru) 1991-12-15
PL277118A1 (en) 1989-09-04
EP0347473A4 (de) 1990-01-08
AU618786B2 (en) 1992-01-09
WO1989006317A1 (en) 1989-07-13
JPH02502936A (ja) 1990-09-13
US4976111A (en) 1990-12-11
DE3868509D1 (hu) 1992-03-26
EP0347473A1 (de) 1989-12-27
PL160317B1 (pl) 1993-02-26
AU3034189A (en) 1989-08-01

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