EP0287774A3 - Thermionische Haarnadelkathode - Google Patents

Thermionische Haarnadelkathode Download PDF

Info

Publication number
EP0287774A3
EP0287774A3 EP88102556A EP88102556A EP0287774A3 EP 0287774 A3 EP0287774 A3 EP 0287774A3 EP 88102556 A EP88102556 A EP 88102556A EP 88102556 A EP88102556 A EP 88102556A EP 0287774 A3 EP0287774 A3 EP 0287774A3
Authority
EP
European Patent Office
Prior art keywords
thermionic
radiation
hair
increasing
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88102556A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP0287774A2 (de
Inventor
Otto Dr. Dipl.-Ing. Winkler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of EP0287774A2 publication Critical patent/EP0287774A2/de
Publication of EP0287774A3 publication Critical patent/EP0287774A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/16—Cathodes heated directly by an electric current characterised by the shape

Landscapes

  • Solid Thermionic Cathode (AREA)
  • Electron Sources, Ion Sources (AREA)
EP88102556A 1987-04-24 1988-02-22 Thermionische Haarnadelkathode Withdrawn EP0287774A3 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH1582/87 1987-04-24
CH158287 1987-04-24

Publications (2)

Publication Number Publication Date
EP0287774A2 EP0287774A2 (de) 1988-10-26
EP0287774A3 true EP0287774A3 (de) 1990-03-07

Family

ID=4213784

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88102556A Withdrawn EP0287774A3 (de) 1987-04-24 1988-02-22 Thermionische Haarnadelkathode

Country Status (3)

Country Link
US (1) US4899078A (ja)
EP (1) EP0287774A3 (ja)
JP (1) JPS63308853A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1622184B1 (en) * 2004-07-28 2011-05-18 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Emitter for an ion source and method of producing same
US7544523B2 (en) * 2005-12-23 2009-06-09 Fei Company Method of fabricating nanodevices

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1377544A (en) * 1971-02-13 1974-12-18 Philips Electronic Associated Thermionic cathode

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1144418B (de) * 1961-07-20 1963-02-28 Siemens Planiawerke A G Fuer K Verfahren zur Herstellung einer Kontaktschicht auf einem silizium-haltigen Werkstoff
US3356887A (en) * 1965-07-30 1967-12-05 Frederick C W Heil Fe cathode redesign
US3817592A (en) * 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
CA1141420A (fr) * 1980-06-20 1983-02-15 Stephen Lhotsky Filament, procede d'affutage electrolytique et appareil permettant la mise en oeuvre du procede

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1377544A (en) * 1971-02-13 1974-12-18 Philips Electronic Associated Thermionic cathode

Also Published As

Publication number Publication date
US4899078A (en) 1990-02-06
EP0287774A2 (de) 1988-10-26
JPS63308853A (ja) 1988-12-16

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