EP0268152B1 - Internal diameter cutting wheel - Google Patents

Internal diameter cutting wheel Download PDF

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Publication number
EP0268152B1
EP0268152B1 EP87116283A EP87116283A EP0268152B1 EP 0268152 B1 EP0268152 B1 EP 0268152B1 EP 87116283 A EP87116283 A EP 87116283A EP 87116283 A EP87116283 A EP 87116283A EP 0268152 B1 EP0268152 B1 EP 0268152B1
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EP
European Patent Office
Prior art keywords
blade
internal diameter
cutting wheel
diamond coating
diameter cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP87116283A
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German (de)
French (fr)
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EP0268152A3 (en
EP0268152A2 (en
Inventor
Jürgen Balck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Diamantwerkzeuge GmbH and Co KG
Original Assignee
Ernst Winter and Sohn Diamantwekzeuge GmbH and Co
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Publication of EP0268152A2 publication Critical patent/EP0268152A2/en
Publication of EP0268152A3 publication Critical patent/EP0268152A3/en
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Publication of EP0268152B1 publication Critical patent/EP0268152B1/en
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Expired - Lifetime legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D5/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting only by their periphery; Bushings or mountings therefor
    • B24D5/12—Cut-off wheels
    • B24D5/126—Cut-off wheels having an internal cutting edge

Definitions

  • the invention relates to an inner hole saw, in particular for separating thin slices from a monocrystalline silicon rod, consisting of a thin sheet provided in the middle with an inner hole, which has a coating in the edge region of the inner hole, which consists of diamond or boron nitride grains which are in a Glavanic Binding are held, the covering covering the inner cylindrical peripheral surface of the inner hole and the adjacent edge portions on the two outer sides of the sheet.
  • Internal hole saws of this type are known from FR-A 2,072,515. They are used, for example, to cut extremely thin slices from a rod made of monocrystalline silicon for the manufacture of so-called chips in the electronics industry.
  • a corresponding The internal hole saw has a core sheet for this purpose, which has a thickness of 0.12 mm or 120 ⁇ m, for example.
  • This sheet has an inner hole, the edge of which is provided all around with a galvanically applied diamond coating, which is usually thickened like a bead on the immediate inner edge.
  • the blade has a diamond coating of approx. 2 mm width on both sides at the two edge regions adjoining the hole.
  • the thin blade is clamped in a clamping ring in order to bring about high rigidity.
  • This clamping ring is placed in a machine and set in rotation. The distance from the inner edge of the inner hole to the clamping ring allows a rod of appropriate diameter to be cut.
  • Such a saw is particularly advantageous when it comes to cutting a very expensive material, such as monocrystalline silicon, because the effective cutting width and thus the resulting waste are only small.
  • a problem with the use of internal hole saws for cutting extremely thin panes arises from the fact that a pane can bend during the cutting process. This is due to the fact that there is a system-dependent separation process stable side on the side of the rod to be sawn and an unstable side on the side of the disc to be cut off. In this context, one speaks of the stable side, because even relatively large forces on this side do not cause any elastic or plastic deformation. On the unstable side, however, relatively small forces, in particular depending on the thickness of the pane to be separated, can cause elastic but also plastic deformations due to crystal destruction on the surface. In an unfavorable case, such deformations lead to the disc to be separated coming close to the blade of the internal hole saw or even to contact with the internal hole saw.
  • the object of the invention is to provide an internal hole saw, which leads to a reduced scrap rate on separate discs and saw material while still having a narrow cutting width of the saw.
  • the thickness of the diamond coating on one side is greater than on the other side of the sheet, the so-called stable side. This has the advantage that the distance between the blade of the hole saw and the side of the disc to be separated facing it is greater than before, so that the risk of contact is reduced, while on the other hand the effective cutting width is only slightly increased.
  • the fact is taken into account that with two layers of diamond material of different thickness on the edge of the core, the saw blade can bend when it is tensioned. If the saw blade is tightly tensioned during commissioning, the diameter of the inner hole is expanded. As a result of such an expansion, the covering in the edge region of the inner hole can lead to a lateral deflection, in particular if it is arranged in different thicknesses on both outer sides of the sheet. This is due to the fact that the differently thick layers of material on the core produce different counter-forces during tensioning and, as a result, a balance of forces occurs by tilting the stronger to the weaker side, so that there is an increase in the cutting width.
  • the proposed solutions have the advantage that, while maintaining the usual cutting widths, the functional reliability of the internal hole saw is improved by a lateral displacement of the covering projections and a material scrap on cut-off panes is reduced.
  • FIG. 1 shows a rod 1 made of monocrystalline silicon, from which extremely thin slices 2 are to be separated.
  • an inner hole saw is provided, which consists of a thin metal sheet 3, which is provided with an inner hole 4 in the middle.
  • the sheet 3, which can consist of a chrome-nickel steel, has a thickness of only 0.12 mm.
  • the edge area of the inner hole 4 is surrounded by a diamond coating 5.
  • the single ones Diamond grains are held in a metallic bond.
  • the diamond coating 5 surrounds the cylindrical inner edge of the inner hole 4 and the adjoining edge section on both sides of the sheet 3.
  • the rod 1 is inserted into the inner hole 4.
  • a disc 2 is separated from the rod 1 with the sheet 3 and its inner hole 4.
  • the diamond coating 5 is more strongly formed on the side of the disk 2, that is to say the so-called unstable side, in particular in the head region 9 than on the opposite side 7, which is the stable side. This reduces the risk of the disk 2 touching the sheet 3.
  • the larger covering overhang of the diamond layer 5 on the outside of the sheet 3 is designated in FIG. 1 as in FIG. 2 by "X2".
  • the lower covering overhang on the stable side 7 is labeled "X1".
  • FIG. 2 shows the size relationships of the edge area at the inner hole of a blade 3 of an inner hole saw in terms of size.
  • the edge region has a width of 2.0 mm on the unstable side and a length "L2" of 2.5 mm on the stable side.
  • the total covering thickness in the head area is 270 ⁇ m.
  • the length L 1 of the covering 5 is less than the covering length L 2 on the opposite side.
  • the coating on the unstable side 6 is made stronger, so that there is a total of the same proportion of diamond coating on both sides of the axis of the blade 3.
  • the diamond coating thickness is greater in the head region on the unstable side than on the stable side 7.
  • the lengths in the edge region are the same on both sides.
  • the covering 5 on side 6 is thinner than on side 7.
  • the invention is not restricted to the use of an internal hole saw for cutting a monocrystalline silicon rod, but can also be used for the processing of polycrystalline materials and materials other than silicon, such as for example germanium.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Description

Die Erfindung betrifft eine Innenlochsäge, insbesondere zum Abtrennen dünner Scheiben von einem monokristalllinen Siliziumstab, bestehend aus einem dünnen in seiner Mitte mit einem Innenloch versehenen Blatt, das im Randbereich des Innenloches einen Belag trägt, der aus Diamant - oder Bornitridkörnern besteht, die in einer glavanischen Bindung gehalten sind, wobei der Belag die innenliegende, zylindrische Umfangsfläche des Innenloches sowie die daran angrenzenden Randabschnitte auf den beiden Außenseiten des Blattes bedeckt.The invention relates to an inner hole saw, in particular for separating thin slices from a monocrystalline silicon rod, consisting of a thin sheet provided in the middle with an inner hole, which has a coating in the edge region of the inner hole, which consists of diamond or boron nitride grains which are in a Glavanic Binding are held, the covering covering the inner cylindrical peripheral surface of the inner hole and the adjacent edge portions on the two outer sides of the sheet.

Derartige Innenlochsägen sind bekannt nach der FR - A 2,072,515. Sie finden Anwendung beispielsweise zum Abtrennen von extrem dünnen Scheiben von einem Stab aus monokristallinem Silizium für die Herstellung sogenannter Chips der Elektronikindustrie. Eine entsprechende Innenlochsäge besitzt dafür ein Kernblech, das eine Dicke aufweist von beispielsweise 0,12 mm bzw. 120 ym. Dieses Blech weist ein Innenloch auf, dessen Kante rundherum mit einem galvanisch aufgetragenen Diamantbelag versehen ist, der an der unmittelbaren Innenkante normalerweise wulstartig verdickt ist. Zusätzlich zu diesem Belag auf der zylinderförmigen Lochinnenseite trägt das Blatt auf seinen beiden Seiten an den beiden an das Loch anschließenden Randbereichen einen Diamantbelag von ca. 2 mm Breite.Internal hole saws of this type are known from FR-A 2,072,515. They are used, for example, to cut extremely thin slices from a rod made of monocrystalline silicon for the manufacture of so-called chips in the electronics industry. A corresponding The internal hole saw has a core sheet for this purpose, which has a thickness of 0.12 mm or 120 μm, for example. This sheet has an inner hole, the edge of which is provided all around with a galvanically applied diamond coating, which is usually thickened like a bead on the immediate inner edge. In addition to this coating on the inside of the cylindrical hole, the blade has a diamond coating of approx. 2 mm width on both sides at the two edge regions adjoining the hole.

Bei der Benutzung einer derartigen Innenlochsäge wird das dünne Blatt in einem Spannring eingespannt, um eine hohe Steifigkeit hervorzurufen. Dieser Spannring wird in einer Maschine angeordnet und in Rotation versetzt. Dabei erlaubt es der Abstand vom Innenrand des Innenloches bis zum Spannring einen Stab von entsprechender Durchmessergörße schneiden zu können. Eine solche Säge ist besonders vorteilhaft, wenn es sich darum handelt ein sehr kostspieliges Material wie monokristallines Silizium zu schneiden, weil die wirksame Schnittbreite und damit der hervorgerufene Verschnitt nur gering sind.When using such an internal hole saw, the thin blade is clamped in a clamping ring in order to bring about high rigidity. This clamping ring is placed in a machine and set in rotation. The distance from the inner edge of the inner hole to the clamping ring allows a rod of appropriate diameter to be cut. Such a saw is particularly advantageous when it comes to cutting a very expensive material, such as monocrystalline silicon, because the effective cutting width and thus the resulting waste are only small.

Ein Problem bei der Benutzung von Innenlochsägen zum Abtrennen von extrem dünnen Scheiben ergibt sich aus dem Umstand, daß sich während des Trennvorganges eine Scheibe durchbiegen kann. Das ist darauf zurückzuführen, daß sich beim Trennvorgang systembedingt eine stabile Seite auf der Seite des zu sägenden Stabes und eine instabile Seite auf der Seite der abzutrennenden Scheibe einstellt. Man spricht in diesem Zusammenhang von der stabilen Seite, weil selbst relativ große Kräfte auf dieser Seite keine elastische oder plastische Verformung hervorrufen. Auf der instabilen Seite hingegen können bereits relativ kleine Kräfte, insbesondere in Abhängigkeit von der Dicke der abzutrennenden Scheibe elastische aber auch plastische Verformungen durch Kristallzerstörung auf der Oberfläche hervorrufen. Derartige Verformungen führen in einem ungünstigen Fall zu einer starken Annäherung der abzutrennenden Scheibe an das Blatt der Innenlochsäge oder gar zu einer Berührung mit der Innenlochsäge. Infolge der dabei auftretenden Reibung führt eine solche Annäherung der abzutrennenden Scheibe an das Sägeblatt zu einer Zerstörung der Scheibe wie auch gegebenenfalls der Innenlochsäge selber, da eine Verformung des Materials ihres Kernes eintritt und dadurch ein Stabilitätsverlust durch hervorgerufene Spannungsänderungen im Kernmaterial eintritt. Dem läßt sich zwar in einem gewissen Umfang grundsätzlich abhelfen durch einen dickeren Diamantbelag an beiden Seiten des Sägeblattes. Würde man jedoch den wulstförmigen Diamantbelag zu beiden Seiten des Sägeblattes wesentlich verstärken, so würde sich eine erheblich größere Schnittbreite ergeben, die wiederum unvorteilhaft ist mit Rücksicht auf den damit verbundenen hohen Verlust an kostbarem Material.A problem with the use of internal hole saws for cutting extremely thin panes arises from the fact that a pane can bend during the cutting process. This is due to the fact that there is a system-dependent separation process stable side on the side of the rod to be sawn and an unstable side on the side of the disc to be cut off. In this context, one speaks of the stable side, because even relatively large forces on this side do not cause any elastic or plastic deformation. On the unstable side, however, relatively small forces, in particular depending on the thickness of the pane to be separated, can cause elastic but also plastic deformations due to crystal destruction on the surface. In an unfavorable case, such deformations lead to the disc to be separated coming close to the blade of the internal hole saw or even to contact with the internal hole saw. As a result of the friction that occurs, such an approach of the disc to be separated to the saw blade leads to destruction of the disc and, if appropriate, of the internal hole saw itself, since a deformation of the material of its core occurs and, as a result, a loss of stability due to stress changes in the core material. To a certain extent, this can generally be remedied by a thicker diamond coating on both sides of the saw blade. However, if the bead-shaped diamond coating on both sides of the saw blade were to be significantly strengthened, a considerably larger cutting width would result, which in turn is disadvantageous in view of the associated high loss of valuable material.

Aufgabe der Erfindung ist es, eine Innenlochsäge zu schaffen, die zu einer verminderten Ausschußrate an getrennten Scheiben und Sägenmaterial führt bei weiterhin nur geringer Schnittbreite der Säge. Gemäß der Erfindung ist dafür vorgesehen, daß die Dicke des Diamantbelages auf der einen Seite größer ist als auf der anderen Seite des Blattes, der sogenannten stabilen Seite. Damit ist der Vorteil verbunden, daß der Abstand zwischen dem Blatt der Lochsäge und der ihm zugewandten Seite der abzutrennenden Scheibe größer als zuvor ist, so daß die Gefahr einer Berührung vermindert wird, während andererseits die wirksame Schnittbreite nur geringfügig vergrößert wird.The object of the invention is to provide an internal hole saw, which leads to a reduced scrap rate on separate discs and saw material while still having a narrow cutting width of the saw. According to the invention it is provided that the thickness of the diamond coating on one side is greater than on the other side of the sheet, the so-called stable side. This has the advantage that the distance between the blade of the hole saw and the side of the disc to be separated facing it is greater than before, so that the risk of contact is reduced, while on the other hand the effective cutting width is only slightly increased.

Bei einer Ausführungsform der Erfindung wird dem Umstand Rechnung getragen, daß bei zwei unterschiedlich dicken Diamantmaterialschichten auf dem Rand des Kernes ein Ausbiegen des Sägeblattes bei seinem Spannen eintreten kann. Wird nämlich bei einer Inbetriebnahme das Sägeblatt stark gespannt, so wird der Durchmesser des Innenloches gedehnt. Infolge einer solchen Dehung kann der Belag im Kantenbereich des Innenloches zu einer seitlichen Auslenkung führen und zwar insbesondere sofern er auf beiden Außenseiten des Blatte in unterschiedlicher Stärke angeordnet ist. Das beruht darauf, daß die unterschiedlich starken Materialschichten auf dem Kern beim Spannen unterschiedliche Gegenkräfte hervorrufen und als Folge ein Kräfteausgleich auftritt durch ein Kippen der stärkeren zur schwächeren Seite, so daß sich eine Schnittbreitenvergrößerung ergibt.In one embodiment of the invention, the fact is taken into account that with two layers of diamond material of different thickness on the edge of the core, the saw blade can bend when it is tensioned. If the saw blade is tightly tensioned during commissioning, the diameter of the inner hole is expanded. As a result of such an expansion, the covering in the edge region of the inner hole can lead to a lateral deflection, in particular if it is arranged in different thicknesses on both outer sides of the sheet. This is due to the fact that the differently thick layers of material on the core produce different counter-forces during tensioning and, as a result, a balance of forces occurs by tilting the stronger to the weaker side, so that there is an increase in the cutting width.

Vorteilhafterweise wird dem dadurch abgeholfen, daß zusätzlich zu den unterschiedlichen Dicken des Diamantbelages auf den beiden Außenseiten des Blattes Vorsorge dafür getroffen ist, daß die Gesamtanteile des Diamantbelages auf beiden Seiten des Blattes gleich groß sind. Dafür kann der Randbereich des Diamantbelages auf einer Außenseite des Blattes breiter sein als auf der anderen Außenseite, welche sich auf der instabilen Seite befindet. Stattdessen können bei gleicher Breite der beiden sich gegenüberliegenden Randbereiche ihre Dicken unterschiedlich sein im Kopfbereich und im Randbereich.This is advantageously remedied in that, in addition to the different thicknesses of the diamond coating on the two outer sides of the blade, provision is made for the total proportions of the diamond coating to be of the same size on both sides of the blade. For this purpose, the edge area of the diamond coating on one outside of the blade can be wider than on the other outside, which is on the unstable side. Instead, with the same width of the two opposite edge areas, their thicknesses can be different in the head area and in the edge area.

Allgemein haftet den vorgeschlagenen Lösungen der Vorteil an, daß sie unter Beibehaltung der üblichen Schnittbreiten durch eine seitliche Verschiebung der Belagüberstände die Funktionssicherheit der Innenlochsäge verbessern und einen Materialausschuß an abgetrennten Scheiben vermindern.In general, the proposed solutions have the advantage that, while maintaining the usual cutting widths, the functional reliability of the internal hole saw is improved by a lateral displacement of the covering projections and a material scrap on cut-off panes is reduced.

Ausführungsbeispiele der Erfindung sind nachstehend unter bezugnahme auf eine Zeichnung erläutert.Embodiments of the invention are explained below with reference to a drawing.

In der Zeichnung zeigen:

Figur 1:
eine Innenlochsäge im Betriebszustand bei schematischer Darstellung;
Figur 2:
den Randabschnitt des Innenloches einer Säge in stark vergrößertem Maßstab und
Figur 3:
eine weitere Ausführungsform einer Innenlochsäge.
The drawing shows:
Figure 1:
an internal hole saw in the operating state in a schematic representation;
Figure 2:
the edge section of the inner hole of a saw in a greatly enlarged scale and
Figure 3:
a further embodiment of an internal hole saw.

In der Figur 1 ist ein Stab 1 aus einem monokristallinen Silizium dargestellt, von dem extrem dünne Scheiben 2 abzutrennen sind. Dafür ist eine Innenlochsäge vorgesehen, die aus einem dünnen Metallblech 3 besteht, das in seiner Mitte mit einem Innenloch 4 versehen ist. Das Blech 3, das aus einem Chrom-Nickel-Stahl bestehen kann, hat nur eine Dicke von 0,12 mm.FIG. 1 shows a rod 1 made of monocrystalline silicon, from which extremely thin slices 2 are to be separated. For this purpose, an inner hole saw is provided, which consists of a thin metal sheet 3, which is provided with an inner hole 4 in the middle. The sheet 3, which can consist of a chrome-nickel steel, has a thickness of only 0.12 mm.

Der Randbereich des Innenloches 4 ist von einem Diamantbelag 5 umgeben. Die einzelnen Diamantkörner sind in einer metallischen Bindung gehalten. Der Diamantbelag 5 umgibt den zylindrischen Innenrand des Innenloches 4 sowie den angrenzenden Randabschnitt auf beiden Seiten des Blattes 3. Zum Abtrennen einer Scheibe 2 wird der Stab 1 in das Innenloch 4 hineingeführt. Anschließend wird mit dem Blatt 3 und seinem Innenloch 4 eine Scheibe 2 vom Stab 1 abgetrennt. Grundsätzlich ergibt sich dabei die Gefahr einer Durchbiegung einer Scheibe 2 entsprechend dem Pfeil 8 und damit seiner Berührung mit dem Blatt 3 bei fortschreitender Schnitttiefe. Um dem abzuhelfen ist der Diamantbelag 5 auf der Seite der Scheibe 2, das heißt der sogenannten instabilen Seite stärker ausgebildet und zwar insbesondere im Kopfbereich 9 als auf der gegenüberliegenden Seite 7, bei der es sich um die stabile Seite handelt. Dadurch wird die Gefahr einer Berührung der Scheibe 2 mit dem Blatt 3 vermindert.The edge area of the inner hole 4 is surrounded by a diamond coating 5. The single ones Diamond grains are held in a metallic bond. The diamond coating 5 surrounds the cylindrical inner edge of the inner hole 4 and the adjoining edge section on both sides of the sheet 3. In order to separate a disc 2, the rod 1 is inserted into the inner hole 4. Then a disc 2 is separated from the rod 1 with the sheet 3 and its inner hole 4. Basically, there is a risk of a disc 2 bending in accordance with arrow 8 and thus its contact with blade 3 as the depth of cut progresses. In order to remedy this, the diamond coating 5 is more strongly formed on the side of the disk 2, that is to say the so-called unstable side, in particular in the head region 9 than on the opposite side 7, which is the stable side. This reduces the risk of the disk 2 touching the sheet 3.

Der größere Belagüberstand der Diamantschicht 5 über die Außenseite des Blattes 3 ist in der Figur 1 wie auch in der Figur 2 mit "X₂" bezeichnet. Der geringere Belagüberstand auf der stabilen Seite 7 ist mit "X₁" bezeichnet.The larger covering overhang of the diamond layer 5 on the outside of the sheet 3 is designated in FIG. 1 as in FIG. 2 by "X₂". The lower covering overhang on the stable side 7 is labeled "X₁".

In der Figur 2 sind die Größenverhältnisse des Randbereiches am Innenloch eines Blattes 3 einer Innenlochsäge in Größenangaben dargestellt. Bei dieser Ausführungsform hat der Randbereich auf der instabilen Seite eine Breite von 2,0 mm und auf der stabilen Seite eine Länge "L₂" von 2,5 mm. Auf der instabilen Seite 6 beträgt die Diamantbelagdicke im Kopfbereich 90 µm = X₂ und die Belagstärke auf der stabilen Seite 7 im Kopfbereich 60 µm = X₁. Die gesamte Belagstärke im Kopfbereich beträgt 270 µm.FIG. 2 shows the size relationships of the edge area at the inner hole of a blade 3 of an inner hole saw in terms of size. In this embodiment, the edge region has a width of 2.0 mm on the unstable side and a length "L₂" of 2.5 mm on the stable side. On the unstable side 6, the diamond coating thickness in the head area is 90 µm = X₂ and the coating thickness on the stable side 7 in the head area is 60 µm = X₁. The total covering thickness in the head area is 270 µm.

Auf der instabilen Seite 6 ist die Länge L₁ des Belages 5 zwar geringer als auf der gegenüberliegenden Seite die Belaglänge L₂. Dafür ist der Belag auf der instabilen Seite 6 stärker ausgebildet, so daß sich insgesamt zu beiden Seiten der Achse des Blattes 3 ein gleich großer Diamantbelaganteil findet.On the unstable side 6, the length L 1 of the covering 5 is less than the covering length L 2 on the opposite side. For this purpose, the coating on the unstable side 6 is made stronger, so that there is a total of the same proportion of diamond coating on both sides of the axis of the blade 3.

Gleiches gilt sinngemäß auch für eine Anordnung entsprechend der Ausführung nach Figur 3. Dort ist im Kopfbereich auf der instabilen Seite die Diamantbelagdicke größer, als auf der stabilen Seite 7. Die Längen im Randbereich sind auf beiden Seiten gleich. Um einen Materialausgleich und damit einen Spannungsausgleich zu erzielen ist jedoch der Belag 5 auf der Seite 6 dünner als auf der Seite 7.The same applies mutatis mutandis to an arrangement corresponding to the embodiment according to FIG. 3. The diamond coating thickness is greater in the head region on the unstable side than on the stable side 7. The lengths in the edge region are the same on both sides. In order to achieve material compensation and thus tension compensation, however, the covering 5 on side 6 is thinner than on side 7.

Es versteht sich, daß die Erfindung nicht beschränkt ist auf die Verwendung einer Innenlochsäge zum Trennen eines monokristallinen Siliziumstabes, sondern ebenso Anwendung finden kann für die Bearbeitung polykristalliner Materialien und anderer Stoffe als Silizium wie beispielsweise auch Germanium.It goes without saying that the invention is not restricted to the use of an internal hole saw for cutting a monocrystalline silicon rod, but can also be used for the processing of polycrystalline materials and materials other than silicon, such as for example germanium.

Claims (5)

  1. Internal diameter cutting wheel, especially for cutting off thin slices of a monocrystalin silicium barre constituted by a thin blade with an internal hole in its middle which carries in its edge area of the internal hole a coating which is constituted by diamond or boron nitride grains which are fixed in a galvanic bond, the coating covering the inner cylindrical peripheral side of the internal hole as well as the adjacent edge portions on both external sides of the blade, characterized in that the thickness of the diamond coating (5) is more important on the one side (6) than on the other side of the blade (3).
  2. Internal diameter cutting wheel according to claim 1, characterized in that the total proportions of the diamond coating (5) are equal on both sides of the blade (3).
  3. Internal diameter cutting wheel according to claim 1, characterized in that the different thicknesses are in a widened head area (9) of the diamond coating (5).
  4. Internal diameter cutting wheel according to claim 1, characterized in that the edge area of the diamond coating (5) is wider on an external side (7) of the blade than on the other external side (6) of the blade.
  5. Internal diameter cutting wheel according to claim 1, characterized in that the different thicknesses are in the edge area of the diamond coating (5).
EP87116283A 1986-11-20 1987-11-05 Internal diameter cutting wheel Expired - Lifetime EP0268152B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19863639700 DE3639700A1 (en) 1986-11-20 1986-11-20 INSIDE HOLE SAW
DE3639700 1986-11-20

Publications (3)

Publication Number Publication Date
EP0268152A2 EP0268152A2 (en) 1988-05-25
EP0268152A3 EP0268152A3 (en) 1990-01-17
EP0268152B1 true EP0268152B1 (en) 1992-05-06

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EP87116283A Expired - Lifetime EP0268152B1 (en) 1986-11-20 1987-11-05 Internal diameter cutting wheel

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US (1) US4850331A (en)
EP (1) EP0268152B1 (en)
JP (1) JPS63200971A (en)
DE (2) DE3639700A1 (en)

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US5218948A (en) * 1988-03-11 1993-06-15 Mitsubishi Kinzoku Kabushiki Kaisha Inside diameter blade
DE3836587A1 (en) * 1988-10-27 1990-05-03 Winter & Sohn Ernst INSIDE HOLE SAW
EP0424953B1 (en) * 1989-10-27 1995-06-14 Sumitomo Electric Industries, Ltd. Inner peripheral type thin plate blade: method of producing the same
US5218947A (en) * 1991-08-09 1993-06-15 Ajamian Hrant K Annular cutting disc
US6203416B1 (en) 1998-09-10 2001-03-20 Atock Co., Ltd. Outer-diameter blade, inner-diameter blade, core drill and processing machines using same ones
US20070023026A1 (en) * 2005-07-28 2007-02-01 Broyles Michelle Dicing blade
ITPD20120405A1 (en) * 2012-12-21 2014-06-22 Freni Brembo Spa METHOD TO BUILD A BRAKE DISC AND BRAKE DISC FOR DISC BRAKES

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DE669364C (en) * 1936-12-09 1938-12-23 Gustav Thome Stone saw
US3205624A (en) * 1964-07-20 1965-09-14 Shirley I Weiss Annular cutting wheels
US3526999A (en) * 1968-08-08 1970-09-08 Leopold Jagers Cutting blades
GB1208408A (en) * 1968-11-29 1970-10-14 Hinmar Associates Inc Abrasive cutting tool and method
BE759534A (en) * 1969-11-28 1971-04-30 Kayex Corp ABRASIVE CUTTING ELEMENT
JPS4913981U (en) * 1972-05-08 1974-02-05
JPS50119381A (en) * 1974-03-06 1975-09-18

Also Published As

Publication number Publication date
JPS63200971A (en) 1988-08-19
EP0268152A3 (en) 1990-01-17
EP0268152A2 (en) 1988-05-25
DE3639700A1 (en) 1988-06-01
DE3778832D1 (en) 1992-06-11
US4850331A (en) 1989-07-25

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