EP0251272B1 - Electrodeposition device, particularly for aluminium - Google Patents

Electrodeposition device, particularly for aluminium Download PDF

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Publication number
EP0251272B1
EP0251272B1 EP87109321A EP87109321A EP0251272B1 EP 0251272 B1 EP0251272 B1 EP 0251272B1 EP 87109321 A EP87109321 A EP 87109321A EP 87109321 A EP87109321 A EP 87109321A EP 0251272 B1 EP0251272 B1 EP 0251272B1
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EP
European Patent Office
Prior art keywords
lock
vacuum
lock chamber
electroplating
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP87109321A
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German (de)
French (fr)
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EP0251272A1 (en
Inventor
Siegfried Dr. Birkle
Joahnn Gehring
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AlumiPlate Inc
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Siemens AG
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Priority to AT87109321T priority Critical patent/ATE44166T1/en
Publication of EP0251272A1 publication Critical patent/EP0251272A1/en
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/04—Removal of gases or vapours ; Gas or pressure control
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/004—Sealing devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/08—Rinsing
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/42—Electroplating: Baths therefor from solutions of light metals
    • C25D3/44—Aluminium

Definitions

  • Aluminum deposited from aprotic, oxygen and water-free organoaluminum electrolytes is characterized by its ductility, low pore density, corrosion resistance and anodizing ability. Since the entry of air through reaction with atmospheric oxygen and air humidity causes a considerable reduction in the conductivity and the service life of these electrolytes, the electroplating must be carried out in an air-tight treatment facility. So that the entry of air can also be prevented when loading and unloading the goods, charging and decharging locks are required, which are designed as gas locks, as liquid locks and as combined gas-liquid locks and are equipped with conveying means for the goods to pass through.
  • DE-A-2 719 680 discloses a galvanizing device for the electrodeposition of aluminum from aprotic, oxygen-free and water-free organoaluminum electrolytes, in which a lock chamber floodable with inert gas and one which is also floodable with inert gas for introducing and removing the goods to be galvanized Antechamber are provided.
  • the lock designed as a gas lock, is equipped with a total of three lock doors due to the division into the actual lock chamber and an antechamber. So that no disruptive gases or air humidity can enter the inert atmosphere from outside, the actual lock chamber is preferably operated with excess pressure.
  • the lock design described above is not suitable for keeping air and moisture to a sufficient extent away from the electrolyte and thus precluding its slow destruction.
  • the goods to be electroplated are placed on goods racks with the help of an endless conveyor belt from the prechamber floodable with inert gas, through the liquid lock into the electroplating trough and, after electroplating, are removed in the opposite direction using the same conveyor belt.
  • an endless conveyor belt from the prechamber floodable with inert gas, through the liquid lock into the electroplating trough and, after electroplating, are removed in the opposite direction using the same conveyor belt.
  • there is a considerable carryover of the electrolyte from the electroplating trough into the liquid lock Due to the continuous contamination of the lock fluid with the electrolyte and the unavoidable reaction with traces of air and moisture in the prechamber flooded with inert gas, it cannot be prevented that reaction products settle on the cleaned goods during charging and the subsequent separation of technically usable aluminum coatings prevent.
  • the invention has for its object to provide a galvanizing device which is suitable for the electrodeposition of aluminum from aprotic, aluminum-organic electrolytes and ensures practically oxygen and water-free operation to further increase the life of the electrolyte.
  • This object is achieved in a generic electroplating device in that the lock is designed as a vacuum lock with an evacuable lock chamber.
  • the invention is based on the finding that small gas pressures can be generated in the lock chamber closed by the inner lock door and the outer lock door, which are substantially lower than the atmospheric pressure and in particular cause drying and degassing of the goods brought in. Water and oxygen are therefore not partially displaced by an inert gas or an inert liquid, as in the lock systems previously used, but actively removed by creating a vacuum, the amount of residual water and residual oxygen being reduced to extremely low values by selecting a correspondingly low gas pressure can. In addition to a considerable increase in the life of the Elek Trolytes and the cost-effectiveness of galvanic metal deposition can also achieve a number of other advantages by using vacuum locks.
  • the vacuum lock is formed exclusively by the lock chamber which can be evacuated.
  • the extremely high sealing effect of a vacuum lock means that there is no need for upstream or downstream lock chambers.
  • the vacuum lock can also serve as a charging and decharging lock, whereby in contrast to the known liquid locks there is no risk of contamination of the goods to be brought in.
  • the lock chamber can be evacuated with the aid of a vacuum pump.
  • a condensation device is then preferably arranged between the vacuum pump and the lock chamber. Solvent vapors drawn off from the lock chamber can then be condensed in this condensation device, collected in the liquid state and used again. It is particularly expedient if the condensate accumulating in the condensation device can be conveyed with the aid of a liquid pump into the electroplating trough or another bath container of the electroplating device that can be charged with inert gas.
  • a spray device for spraying a rinsing liquid is arranged in the lock chamber.
  • cleaning measures can be carried out both before and after the electroplating within the lock chamber. If the rinsing liquid is sprayed before the lock chamber is evacuated, the subsequent generation of the vacuum also simultaneously dries the goods.
  • the lock chamber can also be flooded with ambient air.
  • the evacuated lock chamber is then flooded with ambient air before opening the outer lock door in order to reduce the inert gas consumption during decharging.
  • the invention also provides an expedient method for operating a galvanizing device equipped with a vacuum lock. It is provided that for charging the goods to be electroplated are first introduced into the lock chamber, that the outer lock door is then closed and a vacuum is created in the lock chamber and that after the vacuum has been created, the lock chamber is flooded with an inert gas, whereupon the inner one The lock door is opened and the goods to be electroplated are conveyed into the electroplating tank. By creating a vacuum and the subsequent flooding with an inert gas, the penetration of atmospheric oxygen and air humidity into the electroplating trough can be reduced to extremely small amounts that are absolutely harmless to the electrolyte.
  • the procedure is advantageously such that the finished galvanized goods are first introduced into the lock chamber for decharging, that the inner lock door is then closed and a vacuum is created in the lock chamber, and that after the vacuum has been created, the lock chamber is flooded with ambient air is what the outer lock door is opened and the goods are removed. In this way, the emission of harmful solvent vapors to the environment can be ruled out.
  • the galvanized goods are sprayed with a rinsing liquid before the vacuum is generated, the cleaned goods are dried by the subsequent evacuation.
  • the release of vapors from the rinsing liquid to the environment can be ruled out.
  • the electroplating device according to the invention equipped with at least one vacuum lock, was developed for use in the electrodeposition of aluminum from aprotic, oxygen-free and water-free aluminum-organic electrolytes.
  • application is generally recommended in all cases in which electrodeposition of organophilic metals from non-aqueous electrolytes that are to be protected against the entry of air and moisture is carried out.
  • the hermetic sealing of the electrolyte also gives greater flexibility than previously for the selection of the appropriate solvents. So toxic solvents such as e.g. B. benzene can be used.
  • FIG. 1 shows a highly simplified schematic representation of an electroplating trough Gw in which there is an aprotic, oxygen-free and water-free aluminum-organic electrolyte E.
  • the electroplating trough Gw which is hermetically sealed at the top by a hood H, is charged with an inert gas Ig, which is, for example, nitrogen, above the electrolyte E.
  • An inert gas space designated as Ir is thus formed between the electrolyte mirror and the hood H.
  • the hood H and the inert gas space Ir also extend over the lock chamber Sk of a vacuum lock Vs.
  • the lock chamber Sk has a horizontal inner lock door Sti arranged within the inert gas chamber Ir and a vertical outer lock door Sta arranged below the inert gas chamber Ir.
  • the open positions of the lock doors Sti and Sta are shown in broken lines in FIG. 1 and FIG. 2.
  • Beneath the hood H extend in the inert gas space Ir horizontally aligned rails Ls on which a transport carriage Tw provided with rollers Lr can be moved in the directions of the double arrow Dpf1.
  • a hook Hk which is height-adjustable according to the double arrow Dpf2 and on which a goods rack Wg with the goods W to be aluminized is attached.
  • the lock chamber Sk can be evacuated with the aid of a vacuum pump Vp to a gas pressure of, for example, 10-1 torr (13.3 Pa).
  • a vacuum pump Vp to a gas pressure of, for example, 10-1 torr (13.3 Pa).
  • Solvent vapors, in particular toluene vapors, drawn off from the lock chamber Sk are condensed in a condensation device Ke arranged between the valve V1 and the vacuum pump Vp, the corresponding cooling system not being shown in more detail in the drawing.
  • the condensate Ko is then conveyed into the electroplating tank Gw with the aid of a liquid pump Fp.
  • the released from the solvent vapors and thus completely harmless gas from the lock chamber Sk is released to the environment, as indicated by the arrow Pf of the vacuum pump Vp on the pressure side.
  • the evacuated lock chamber Sk can either be flooded by opening a valve V2 with inert gas Ig or by opening a valve V3 with ambient air UI.
  • the valve V2 is connected to the inert gas supply line of the inert gas space Ir, whereby the connection to the inert gas space Ir after flooding has the same pressure on both sides of the inner lock door Sti and the inner lock door Sti can be opened easily.
  • a spray device Se Arranged in the lock chamber Sk is a spray device Se, which is only indicated schematically in FIG. 2 and via which a rinsing liquid Sf can be sprayed.
  • the supply of the rinsing liquid Sf and its outflow can be shut off by valves V4 or V5.
  • the electroplating trough Gw contains equipment for electroplating the goods W, which is not shown in the drawing.
  • equipment for electroplating the goods W which is not shown in the drawing.
  • an annular design of the electroplating trough Gw with a rotatable contacting and holding device for the goods rack Wg is possible.
  • EP-B-0 072 969 a plurality of individual cells and possibly also aprotic pretreatment and post-treatment baths can be arranged under the hood H. In this case, instead of two vacuum locks, only one vacuum lock can be used for charging and decharging.
  • the galvanizing device according to the invention can of course also be used to aluminize bulk goods, which are then introduced, for example in perforated drums, through the vacuum lock Vs into the electroplating trough Gw and removed in the opposite direction.
  • Vibratory conveyors, spiral conveyors, conveyor belts and the like can also be used as a means of transport for pourable aluminum material.
  • the spray device Se can also be used for the pretreatment or aftertreatment, as required.
  • the rinsing liquid Sf used here is preferably the toluene already present in the electrolyte E.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electrolytic Production Of Metals (AREA)
  • Coating With Molten Metal (AREA)

Abstract

An electroplating apparatus having electroplating tank which is closable air-tight and charged with an inert gas above the electrolyte and also includes one vacuum lock for charging and discharging goods to be electroplated. The lock chamber of the vacuum lock is equipped with an inner lock door and an outer lock door and is preferably evacuated with the assistance of a vacuum pump so that solvent vapors can be condensed during evacuation in a condenser. The apparatus increases the useful life of the electrolyte, particularly an aprotic, aluminum-organic electrolyte which is used in aluminum plating in comparison to previously known locks which use gas and liquid locks.

Description

Die Erfindung betrifft eine Galvanisiereinrichtung, insbesondere zum galvanischen Abscheiden von Aluminium aus aprotischen, sauerstoff- und wasserfreien aluminiumorganischen Elektrolyten, mit

  • - einer luftdicht verschließbaren und oberhalb des Elektrolyten mit einem Inertgas beaufschlagbaren Galvanisierwanne,
  • - mindestens einer Schleuse zum Ein- und/oder Ausbringen der zu galvanisierenden Waren und
  • - mindestens einer mit einer inneren Schleusentür und einer äußeren Schleusentür ausgerüsteten und mit einem Inertgas flutbaren Schleusenkammer der Schleuse.
The invention relates to a galvanizing device, in particular for the electrodeposition of aluminum from aprotic, oxygen-free and water-free aluminum-organic electrolytes
  • an airtight sealable electroplating trough that can be charged with an inert gas above the electrolyte,
  • - At least one lock for inserting and / or removing the goods to be electroplated and
  • - At least one of the lock chamber equipped with an inner lock door and an outer lock door and floodable with an inert gas.

Aus aprotischen, sauerstoff- und wasserfreien aluminiumorganischen Elektrolyten abgeschiedenes Aluminium zeichnet sich durch seine Duktilität, Porenarmut, Korrosionsfestigkeit und Eloxierfähigkeit aus. Da der Zutritt von Luft durch Reaktion mit Luftsauerstoff und Luftfeuchtigkeit eine erhebliche Verringerung der Leitfähigkeit und der Lebensdauer dieser Elektrolyte bewirkt, muß das Galvanisieren in einer unter Luftabschluß arbeitenden Behandlungseinrichtung vorgenommen werden. Damit auch beim Einbringen und Ausbringen der Waren der Zutritt von Luft verhindert werden kann, sind Chargier- und Dechargierschleusen erforderlich, die als Gasschleusen, als Flüssigkeitsschleusen und als kombinierte Gas-Flüssigkeitsschleusen ausgebildet und mit Fördermitteln zum Durchschleusen der Waren ausgerüstet sind. Aus der DE-A- 2 719 680 ist eine Galvanisiereinrichtung zum Galvanischen Abscheiden von Aluminium aus aprotischen, sauerstoff- und wasserfreien aluminiumorganischen Elektrolyten bekannt, bei welcher zum Ein-und Ausbringen der zu galvanisierenden Waren eine mit Inertgas flutbare Schleusenkammer und eine ebenfalls mit Inertgas flutbare Vorkammer vorgesehen sind. Die als Gasschleuse ausgebildete Schleuse ist dabei aufgrund der Aufteilung in die eigentliche Schleusenkammer und eine Vorkammer mit insgesamt drei Schleusentüren ausgerüstet. Damit in die inerte Atmosphäre von außerhalb keine störenden Gase oder Luftfeuchtigkeit eindringen können, wird die eigentliche Schleusenkammer vorzugsweise mit Überdruck gefahren.Aluminum deposited from aprotic, oxygen and water-free organoaluminum electrolytes is characterized by its ductility, low pore density, corrosion resistance and anodizing ability. Since the entry of air through reaction with atmospheric oxygen and air humidity causes a considerable reduction in the conductivity and the service life of these electrolytes, the electroplating must be carried out in an air-tight treatment facility. So that the entry of air can also be prevented when loading and unloading the goods, charging and decharging locks are required, which are designed as gas locks, as liquid locks and as combined gas-liquid locks and are equipped with conveying means for the goods to pass through. DE-A-2 719 680 discloses a galvanizing device for the electrodeposition of aluminum from aprotic, oxygen-free and water-free organoaluminum electrolytes, in which a lock chamber floodable with inert gas and one which is also floodable with inert gas for introducing and removing the goods to be galvanized Antechamber are provided. The lock, designed as a gas lock, is equipped with a total of three lock doors due to the division into the actual lock chamber and an antechamber. So that no disruptive gases or air humidity can enter the inert atmosphere from outside, the actual lock chamber is preferably operated with excess pressure.

Die vorstehend geschilderte Schleusenkonzeption ist nicht dazu geeignet, Luft und Feuchtigkeit in einem ausreichenden Maße vom Elektrolyten fern zu halten und somit die langsame Zerstörung desselben auszuschließen.The lock design described above is not suitable for keeping air and moisture to a sufficient extent away from the electrolyte and thus precluding its slow destruction.

Aus der EP-A- 0 013 874 ist eine Einrichtung zum galvanischen Abscheiden von Aluminium bekanntgeworden, bei der zum Ein- und Ausbringen der zu galvanisierenden Waren ein Schleusensystem mit einer Flüssigkeitsschleuse verwendet wird. Dieser Flüssigkeitsschleuse ist eine mit einer äußeren Schleusentür versehene und mit Inertgas flutbare Vorkammer vorgeschaltet. Mit einem solchen Schleusensystem kann gegenüber reinen Gasschleusen ein Eindringen von Luftsauerstoff und Luftfeuchtigkeit erheblich verringert werden.From EP-A-0 013 874 a device for the galvanic deposition of aluminum has become known, in which a lock system with a liquid lock is used for the introduction and removal of the goods to be galvanized. This liquid lock is preceded by a prechamber provided with an outer lock door and floodable with inert gas. With such a lock system, the penetration of atmospheric oxygen and humidity can be significantly reduced compared to pure gas locks.

Bei der vorstehend geschilderten Galvanisiereinrichtung werden die zu galvanisierenden Waren auf Warengestellen mit Hilfe eines endlosen Transportbandes von der mit Inertgas flutbaren Vorkammer, durch die Flüssigkeitsschleuse in die Galvanisierwanne eingeführt und nach dem Galvanisieren mit Hilfe desselben Transportbandes in umgekehrter Richtung wieder herausgeschleust. Dabei er gibt sich jedoch eine erhebliche Verschleppung des Elektroylten aus der Galvanisierwanne in die Flüssigkeitsschleuse. Durch die fortlaufende Kontamination der Schleusenflüssigkeit mit dem Eiektrolyten und der nicht zu vermeidenden Reaktion mit Luft- und Feuchtigkeitsspuren in der mit Inertgas gefluteten Vorkammer läßt sich nicht verhindern, daß sich beim Chargieren Reaktionsprodukte auf den gereinigten Waren absetzen und die nachfol-gende Abscheidung technisch brauchbarer Aluminiumüberzüge verhindern.In the above-described electroplating device, the goods to be electroplated are placed on goods racks with the help of an endless conveyor belt from the prechamber floodable with inert gas, through the liquid lock into the electroplating trough and, after electroplating, are removed in the opposite direction using the same conveyor belt. However, there is a considerable carryover of the electrolyte from the electroplating trough into the liquid lock. Due to the continuous contamination of the lock fluid with the electrolyte and the unavoidable reaction with traces of air and moisture in the prechamber flooded with inert gas, it cannot be prevented that reaction products settle on the cleaned goods during charging and the subsequent separation of technically usable aluminum coatings prevent.

Bei einer aus der EP-B- 0 053 676 bekannten Einrichtung zum galvanischen Abscheiden von Aluminium wird eine Kontamination der vorbehandelten und zu galvanisierenden Waren in der Flüssigkeitsschleuse dadurch verhindert, daß an der Galvanisierwanne eine aus Vorkammer, Flüssigkeitsschleuse und Hauptkammer bestehende Chargierschleuse und eine separate, ebenfalls aus Vorkammer, Flüssigkeitsschleuse und Hauptkammer bestehende Dechargierschleuse angeordnet sind.In a device for the galvanic deposition of aluminum known from EP-B-0 053 676, contamination of the pretreated and to be galvanized goods in the liquid lock is prevented by a charging lock consisting of a prechamber, liquid lock and main chamber and a separate, Dechargierschleuse consisting of pre-chamber, liquid lock and main chamber are also arranged.

Es hat sich in der Praxis herausgestellt, daß selbst bei aus Vorkammer, Flüssigkeitsschleuse und Hauptkammer bestehenden Schleusen gewisse Mengen an Luftsauerstoff und Luftfeuchtigkeit insbesondere mit den Waren in den Elektrolyten eingeschleppt werden und zum Teil auch durch das stetige Öffnen der Schleusentüren in die Galvanisierwanne gelangen. Als Folge ergibt sich dann auch hier eine gewisse Verringerung der Leitfähigkeit und der Lebensdauer des Elektrolyten.It has been found in practice that even with locks consisting of the prechamber, liquid lock and main chamber, certain amounts of atmospheric oxygen and air humidity are entrained, in particular with the goods, in the electrolytes and, in part, also get into the electroplating trough by continuously opening the lock doors. As a result, there is a certain reduction in the conductivity and the lifespan of the electrolyte.

Der Erfindung liegt die Aufgabe zugrunde, eine Galvanisiereinrichtung zu schaffen, die für das galvanische Abscheiden von Aluminium aus aprotischen, aluminiumorganischen Elektrolyten geeignet ist und zur weiteren Steigerung der Lebensdauer des Elektrolyten einen praktisch sauerstoff- und wasserfreien Betrieb gewährleistet.The invention has for its object to provide a galvanizing device which is suitable for the electrodeposition of aluminum from aprotic, aluminum-organic electrolytes and ensures practically oxygen and water-free operation to further increase the life of the electrolyte.

Diese Aufgabe wird bei einer gattungsgemäßen Galvanisiereinrichtung dadurch gelöst, daß die Schleuse als Vakuumschleuse mit einer evakuierbaren Schleusenkammer ausgebildet ist.This object is achieved in a generic electroplating device in that the lock is designed as a vacuum lock with an evacuable lock chamber.

Der Erfindung liegt die Erkenntnis zugrunde, daß in der durch die innere Schleusentür und die äußere Schleusentür geschlossenen Schleusenkammer kleine Gasdrücke erzeugt werden können, die wesentlich geringer sind als der Atmosphärendruck und insbesondere eine Trocknung und Entgasung der eingebrachten Waren bewirken. Wasser und Sauerstoff werden also nicht wie bei den bisher verwendeten Schleusensystemen durch ein Inertgas oder eine Inertflüssigkeit teilweise verdrängt, sondern durch die Erzeugung eines Vakuums aktiv entfernt, wobei die Menge an Restwasser und Restsauerstoff durch die Wahl eines entsprechend niedrigen Gasdruckes auf extrem niedrige Werte reduziert werden kann. Neben einer beträchtlichen Erhöhung der Lebensdauer des verwendeten Elektrolyten und der Wirtschaftlichkeit der galvanischen Metallabscheidung können durch den Einsatz von Vakuumschleusen auch eine Reihe weiterer Vorteile erzielt werden. So können wesentliche Schritte der Vorbehandlung oder auch der Nachbehandlung der Waren, wie beispielsweise eine Entwässerung, Trocknung oder Spülung in die evakuierbare Schleusenkammer der Vakuumschleuse verlegt werden. Eine einzige Vakuumschleuse kann dann auch als Chargier- und Dechargierschleuse eingesetzt werden, da die Gefahr einer Kontamination der vorbehandelten Waren beim Chargieren ausgeschlossen werden kann. Schließlich ist auch noch hervorzuheben, daß durch den hermetischen Abschluß des Elektrolyten eine Abgabe schädlicher Lösungsmitteldämpfe, wie z. B. Toluoldämpfe, an die Umwelt vollständig ausgeschlossen werden kann.The invention is based on the finding that small gas pressures can be generated in the lock chamber closed by the inner lock door and the outer lock door, which are substantially lower than the atmospheric pressure and in particular cause drying and degassing of the goods brought in. Water and oxygen are therefore not partially displaced by an inert gas or an inert liquid, as in the lock systems previously used, but actively removed by creating a vacuum, the amount of residual water and residual oxygen being reduced to extremely low values by selecting a correspondingly low gas pressure can. In addition to a considerable increase in the life of the Elek Trolytes and the cost-effectiveness of galvanic metal deposition can also achieve a number of other advantages by using vacuum locks. In this way, essential steps of the pretreatment or post-treatment of the goods, such as dewatering, drying or rinsing, can be moved into the evacuable lock chamber of the vacuum lock. A single vacuum lock can then also be used as a charging and decharging lock, since the risk of contamination of the pretreated goods during charging can be excluded. Finally, it should also be emphasized that the hermetic sealing of the electrolyte releases harmful solvent vapors, such as e.g. B. toluene vapors to the environment can be completely excluded.

Gemäß einer bevorzugten Ausgestaltung der Erfindung ist die Vakuumschleuse ausschließlich durch die evakuierbare Schleusenkammer gebildet. Durch die extrem hohe Dichtungswirkung einer Vakuumschleuse kann also auf vor-oder nachgeschaltete Schleusenkammern verzichtet werden.According to a preferred embodiment of the invention, the vacuum lock is formed exclusively by the lock chamber which can be evacuated. The extremely high sealing effect of a vacuum lock means that there is no need for upstream or downstream lock chambers.

Wie bereits erwähnt wurde, kann die Vakuumschleuse auch als Chargier- und Dechargierschleuse dienen, wobei hier im Gegensatz zu den bekannten Flüssigkeitsschleusen die Gefahr einer Kontamination der einzubringenden Waren nicht besteht.As already mentioned, the vacuum lock can also serve as a charging and decharging lock, whereby in contrast to the known liquid locks there is no risk of contamination of the goods to be brought in.

Gegenüber anderen Verfahren der Vakuumerzeugung ist es besonders zweckmäßig, wenn die Schleusenkammer mit Hilfe einer Vakuumpumpe evakuierbar ist. Zwischen der Vakuum- pumpe und der Schleusenkammer ist dann vorzugsweise eine Kondensationseinrichtung angeordnet. In dieser Kondensationseinrichtung können dann aus der Schleusenkammer abgezogene Lösungsmitteldämpfe kondensiert, im flüssigen Zustand gesammelt und wieder verwendet werden. Dabei ist es besonders zweckmäßig, wenn das in der Kondensationseinrichtung anfallende Kondensat mit Hilfe einer Flüssigkeitspumpe in die Galvanisierwanne oder einen anderen mit Inertgas beaufschlagbaren Badbehälter der Galvanisiereinrichtung beförderbar ist.Compared to other methods of vacuum generation, it is particularly expedient if the lock chamber can be evacuated with the aid of a vacuum pump. A condensation device is then preferably arranged between the vacuum pump and the lock chamber. Solvent vapors drawn off from the lock chamber can then be condensed in this condensation device, collected in the liquid state and used again. It is particularly expedient if the condensate accumulating in the condensation device can be conveyed with the aid of a liquid pump into the electroplating trough or another bath container of the electroplating device that can be charged with inert gas.

Gemäß einer weiteren besonders bevorzugten Ausgestaltung der Erfindung ist in der Schleusenkammer eine Sprüheinrichtung zum Versprühen einer Spülflüssigkeit angeordnet. Hierdurch können sowohl vor als auch nach dem Galvanisieren innerhalb der Schleusenkammer Reinigungsmaßnahmen durchgeführt werden. Wird dabei die Spülflüssigkeit vor dem Evakuieren der Schleusenkammer versprüht, so wird durch die nachfolgende Erzeugung des Vakuums auch gleichzeitig eine Trocknung der Waren bewirkt.According to a further particularly preferred embodiment of the invention, a spray device for spraying a rinsing liquid is arranged in the lock chamber. In this way, cleaning measures can be carried out both before and after the electroplating within the lock chamber. If the rinsing liquid is sprayed before the lock chamber is evacuated, the subsequent generation of the vacuum also simultaneously dries the goods.

Schließlich ist es besonders vorteilhaft, wenn die Schleusenkammer auch mit Umgebungsluft flutbar ist. In diesem Fall wird dann zur Reduzierung des Inertgasverbrauchs beim Dechargieren die evakuierte Schleusenkammer vor dem Öffnen der äußeren Schleusentür mit Umgebungsluft geflutet.Finally, it is particularly advantageous if the lock chamber can also be flooded with ambient air. In this case, the evacuated lock chamber is then flooded with ambient air before opening the outer lock door in order to reduce the inert gas consumption during decharging.

Die Erfindung gibt auch ein zweckmäßiges Verfahren zum Betrieb einer mit einer Vakuumschleuse ausgerüsteten Galvanisiereinrichtung an. Dabei ist vorgesehen, daß zum Chargieren die zu galvanisierenden Waren zunächst in die Schleusenkammer eingebracht werden, daß dann die äußere Schleusentür geschlossen und in der Schleusenkammer ein Vakuum erzeugt wird und daß nach dem Erzeugen des Vakuums die Schleusenkammer mit einem Inertgas geflutet wird, worauf die innere Schleusentür geöffnet wird und die zu galvanisierenden Waren in die Galvanisierwanne befördert werden. Durch die Erzeugung eines Vakuums und die nachfolgende Flutung mit einem Inertgas kann ein Eindringen von Luftsauerstoff und Luftfeuchtigkeit in die Galvanisierwanne auf extrem kleine und für den Elektrolyten absolut unschädliche Mengen reduziert werden.The invention also provides an expedient method for operating a galvanizing device equipped with a vacuum lock. It is provided that for charging the goods to be electroplated are first introduced into the lock chamber, that the outer lock door is then closed and a vacuum is created in the lock chamber and that after the vacuum has been created, the lock chamber is flooded with an inert gas, whereupon the inner one The lock door is opened and the goods to be electroplated are conveyed into the electroplating tank. By creating a vacuum and the subsequent flooding with an inert gas, the penetration of atmospheric oxygen and air humidity into the electroplating trough can be reduced to extremely small amounts that are absolutely harmless to the electrolyte.

Nach dem Galvanisieren wird dann vorteilhafterweise so vorgegangen, daß zum Dechargieren die fertig galvanisierten Waren zunächst in die Schleusenkammer eingebracht werden, daß dann die innere Schleusentür geschlossen und in der Schleusenkammer ein Vakuum erzeugt wird, und daß nach dem Erzeugen des Vakuums die Schleusenkammer mit Umgebungsluft geflutet wird, worauf die äußere Schleusentür geöffnet wird und die Waren entnommen werden. Bei einem derartigen Vorgehen kann eine Abgabe schädlicher Lösungsmitteldämpfe an die Umwelt ausgeschlossen werden.After electroplating, the procedure is advantageously such that the finished galvanized goods are first introduced into the lock chamber for decharging, that the inner lock door is then closed and a vacuum is created in the lock chamber, and that after the vacuum has been created, the lock chamber is flooded with ambient air is what the outer lock door is opened and the goods are removed. In this way, the emission of harmful solvent vapors to the environment can be ruled out.

Werden die galvanisierten Waren vor dem Erzeugen des Vakuums mit einer Spülflüssigkeit besprüht, so wird durch das nachfolgende Evakuieren eine Trocknung der gereinigten Waren bewirkt. Auch hier kann dann eine Abgabe von Dämpfen der Spülflüssigkeit an die Umwelt ausgeschlossen werden.If the galvanized goods are sprayed with a rinsing liquid before the vacuum is generated, the cleaned goods are dried by the subsequent evacuation. Here, too, the release of vapors from the rinsing liquid to the environment can be ruled out.

Beim Betrieb der Galvanisiereinrichtung hat es sich als besonders zweckmäßig erwiesen, wenn in der Schleusenkammer ein Vakuum mit einem Gasdruck zwischen 1 und 10-2 Torr (133.3 to 1.3 Pa) erzeugt wird. Bei dem genannten Bereich des Gasdruckes wird einerseits bereits ein praktisch hermetischer Abschluß des Elektrolyten bewirkt, während andererseits der bauliche Aufwand zur Versteifung der durch den Atmosphärendruck beanspruchten Schleusenkammer noch relativ gering ist.During operation of the electroplating apparatus, it has proven to be particularly expedient if (to 1.3 Pa 133.3) is generated in the lock chamber a vacuum with a gas pressure of between 1 and 10- 2 Torr. In the mentioned range of gas pressure, on the one hand, a practically hermetic sealing of the electrolyte is effected, while, on the other hand, the structural effort to stiffen the lock chamber, which is stressed by atmospheric pressure, is still relatively low.

Die erfindungsgemäß mit mindestens einer Vakuumschleuse ausgestattete Galvanisiereinrichtung wurde für den Einsatz beim galvanischen Abscheiden von Aluminium aus aprotischen, sauerstoff-und wasserfreien aluminiumorganischen Elektrolyten entwickelt. Eine Anwendung ist jedoch grundsätzlich in sämtlichen Fällen zu empfehlen, in denen eine galvanische Abscheidung organophiler Metalle aus nichtwässrigen und vor dem Zutritt von Luft und Feuchtigkeit zu schützenden Elektrolyten vorgenommen wird. Durch den hermetischen Abschluß des Elektrolyten ergibt sich auch für die Auswahl der entsprechenden Lösungsmittel eine größere Flexibilität als bisher. So können ohne Risiko auch toxische Lösungsmittel wie z. B. Benzol eingesetzt werden.The electroplating device according to the invention, equipped with at least one vacuum lock, was developed for use in the electrodeposition of aluminum from aprotic, oxygen-free and water-free aluminum-organic electrolytes. However, application is generally recommended in all cases in which electrodeposition of organophilic metals from non-aqueous electrolytes that are to be protected against the entry of air and moisture is carried out. The hermetic sealing of the electrolyte also gives greater flexibility than previously for the selection of the appropriate solvents. So toxic solvents such as e.g. B. benzene can be used.

Ein Ausführungsbeispiel der Erfindung ist in der Zeichnung dargestellt und wird im folgenden näher beschrieben. Es zeigen

  • Fig. 1 in stark vereinfachter schematischer Darstellung das Funktionsprinzip einer mit einer Vakuumschleuse ausgerüsteten Galvanisiereinrichtung und
  • Fig. 2 eine Draufsicht auf die Vakuumschleuse der in Fig. 1 dargestellten Galvanisiereinrichtung.
An embodiment of the invention is shown in the drawing and will be described in more detail below. Show it
  • Fig. 1 in a highly simplified schematic representation of the principle of operation with a vacuum equipped electroplating device and
  • Fig. 2 is a plan view of the vacuum lock of the electroplating device shown in Fig. 1.

Fig. 1 zeigt in stark vereinfachter schematischer Darstellung eine Galvanisierwanne Gw, in welcher sich ein aprotischer, sauerstoff- und wasserfreier aluminiumorganischer Elektrolyt E befindet. Die oben durch eine Haube H luftdicht verschlossene Galvanisierwanne Gw ist oberhalb des Elektrolyten E mit einem Inertgas lg, bei welchem es sich beispielsweise um Stickstoff handelt, beaufschlagt. Zwischen dem Elektrolytspiegel und der Haube H ist somit ein mit Ir bezeichneter Inertgasraum gebildet. Die Haube H und der Inertgasraum Ir erstrecken sich auch über die Schleusenkammer Sk einer Vakuumschleuse Vs. Wie auch aus Fig. 2 zu ersehen ist, besitzt die Schleusenkammer Sk eine horizontale, innerhalb des Inertgasraums Ir angeordnete, innere Schleusentür Sti und eine vertikale, unterhalb des Inertgasraumes Ir angeordnete, äußere Schleusentür Sta. Die geöffneten Stellungen der Schleusentüren Sti und Sta sind in Fig. 1 bzw. Fig. 2 strichpunktiert dargestellt.1 shows a highly simplified schematic representation of an electroplating trough Gw in which there is an aprotic, oxygen-free and water-free aluminum-organic electrolyte E. The electroplating trough Gw, which is hermetically sealed at the top by a hood H, is charged with an inert gas Ig, which is, for example, nitrogen, above the electrolyte E. An inert gas space designated as Ir is thus formed between the electrolyte mirror and the hood H. The hood H and the inert gas space Ir also extend over the lock chamber Sk of a vacuum lock Vs. As can also be seen from FIG. 2, the lock chamber Sk has a horizontal inner lock door Sti arranged within the inert gas chamber Ir and a vertical outer lock door Sta arranged below the inert gas chamber Ir. The open positions of the lock doors Sti and Sta are shown in broken lines in FIG. 1 and FIG. 2.

Unterhalb der Haube H erstrecken sich im Inertgasraum Ir horizontal ausgerichtete Laufschienen Ls, auf welchen ein mit Laufrollen Lr versehener Transportwagen Tw in den Richtungen des Doppelpfeiles Dpf1 verfahren werden kann. An dem Transportwagen Tw befindet sich ein gemäß dem Doppelpfeil Dpf2 höhenverstellbarer Haken Hk, an welchem ein Warengestell Wg mit den daran befestigten, zu aluminierenden Waren W aufgehängt ist.Beneath the hood H extend in the inert gas space Ir horizontally aligned rails Ls on which a transport carriage Tw provided with rollers Lr can be moved in the directions of the double arrow Dpf1. On the transport carriage Tw there is a hook Hk which is height-adjustable according to the double arrow Dpf2 and on which a goods rack Wg with the goods W to be aluminized is attached.

Die Schleusenkammer Sk kann mit Hilfe einer Vakuumpumpe Vp auf einen Gasdruck von beispielsweise 10-1 Torr (13.3 Pa) evakuiert werden. Dabei befindet sich in der Saugleitung zwischen der Vakuumpumpe Vp und der Schleusenkammer Sk ein Ventil V1, welches nach dem Evakuieren der Schleusenkammmer Sk wieder geschlossen wird. Aus der Schleusenkammer Sk abgezogene Lösungsmitteldämpfe, insbesondere Toluoldämpfe, werden in einer zwischen dem Ventil V1 und der Vakuumpumpe Vp angeordneten Kondensationseinrichtung Ke kondensiert, wobei das entsprechende Kühlsystem in der Zeichnung nicht näher dargestellt ist. Das anfallende Kondensat Ko wird dann mit Hilfe einer Flüssigkeitspumpe Fp in die Galvanisierwanne Gw befördert. Das von den Lösungsmitteldämpfen befreite und somit vollkommen unschädliche Gas aus der Schleusenkammer Sk wird an die Umwelt abgegeben, wie es durch den druckseitigen Pfeil Pf der Vakuumpumpe Vp angedeutet ist.The lock chamber Sk can be evacuated with the aid of a vacuum pump Vp to a gas pressure of, for example, 10-1 torr (13.3 Pa). There is a valve V1 in the suction line between the vacuum pump Vp and the lock chamber Sk, which valve is closed again after the lock chamber Sk has been evacuated. Solvent vapors, in particular toluene vapors, drawn off from the lock chamber Sk are condensed in a condensation device Ke arranged between the valve V1 and the vacuum pump Vp, the corresponding cooling system not being shown in more detail in the drawing. The condensate Ko is then conveyed into the electroplating tank Gw with the aid of a liquid pump Fp. The released from the solvent vapors and thus completely harmless gas from the lock chamber Sk is released to the environment, as indicated by the arrow Pf of the vacuum pump Vp on the pressure side.

Die evakuierte Schleusenkammer Sk kann entweder durch Öffnen eines Ventils V2 mit Inertgas Ig oder durch Öffnen eines Ventils V3 mit Umgebungsluft UI geflutet werden. Das Ventil V2 ist dabei an die Inertgas-Versorgungsleitung des Inertgasraumes Ir angeschlossen, wobei durch die Verbindung mit dem Inertgasraum Ir nach dem Fluten zu beiden Seiten der inneren Schleusentür Sti der gleiche Druck herrscht und die innere Schleusentür Sti leicht geöffnet werden kann.The evacuated lock chamber Sk can either be flooded by opening a valve V2 with inert gas Ig or by opening a valve V3 with ambient air UI. The valve V2 is connected to the inert gas supply line of the inert gas space Ir, whereby the connection to the inert gas space Ir after flooding has the same pressure on both sides of the inner lock door Sti and the inner lock door Sti can be opened easily.

In der Schleusenkammer Sk ist eine in Fig. 2 nur rein schematisch angedeutete Sprüheinrichtung Se angeordnet, über welche eine Spülflüssigkeit Sf versprüht werden kann. Die Zufuhr der Spülflüs- sigkeit Sf und ihr Ablauf können durch Ventile V4 bzw. V5 abgesperrt werden.Arranged in the lock chamber Sk is a spray device Se, which is only indicated schematically in FIG. 2 and via which a rinsing liquid Sf can be sprayed. The supply of the rinsing liquid Sf and its outflow can be shut off by valves V4 or V5.

Die Galvanisierwanne Gw enthält eine in der Zeichnung nicht näher dargestellte Ausstattung zum Galvanisieren der Waren W. So ist beispielsweise entsprechend der EP-B- 0 056 844 eine ringförmige Ausbildung der Galvanisierwanne Gw mit einer drehbaren Kontaktier- und Haltevorrichtung für die Warengestelle Wg möglich. Entsprechend der EP-B- 0 072 969 können unter der Haube H aber auch mehrere Einzelzellen und ggf. auch aprotische Vor- und Nachbehandlungsbäder angeordnet sein. In diesem Fall kann anstelle von zwei Vakuumschleusen auch nur eine Vakuumschleuse zum Chargieren und Dechargieren eingesetzt werden. Anstelle der in den Warengestellen Wg angeordneten Waren W kann mit der erfindungsgemäßen Galvanisiereinrichtung selbstverständlich auch Schüttgut aluminiert werden, welches dann beispielsweise in perforierten Trommeln durch die Vakuumschleuse Vs in die Galvanisierwanne Gw eingebracht und in umgekehrter Richtung wieder entnommen wird. Schwingförderer, Wendelförderer, Förderbänder und dergl. können ebenfalls als Transportmittel für schüttfähiges Aluminiergut eingesetzt werden.The electroplating trough Gw contains equipment for electroplating the goods W, which is not shown in the drawing. For example, in accordance with EP-B-0 056 844, an annular design of the electroplating trough Gw with a rotatable contacting and holding device for the goods rack Wg is possible. According to EP-B-0 072 969, however, a plurality of individual cells and possibly also aprotic pretreatment and post-treatment baths can be arranged under the hood H. In this case, instead of two vacuum locks, only one vacuum lock can be used for charging and decharging. Instead of the goods W arranged in the goods racks Wg, the galvanizing device according to the invention can of course also be used to aluminize bulk goods, which are then introduced, for example in perforated drums, through the vacuum lock Vs into the electroplating trough Gw and removed in the opposite direction. Vibratory conveyors, spiral conveyors, conveyor belts and the like can also be used as a means of transport for pourable aluminum material.

Eine bevorzugte Betriebsweise der vorstehend anhand der Fig. 1 und 2 erläuterten Galvanisiereinrichtung umfaßt folgende Schritte:

  • a. Öffnen der äußeren Schleusentür Sta.
  • b. Einbringen der an einem Warengestell Wg befestigten Waren W in die Schleusenkammer Sk.
  • c. Öffnen des Ventils V1 und Einschalten der Vakuumpumpe Vp.
  • d. Nach dem Erreichen eines Vakuums von 10-1 Torr Schließen des Ventils V1 und Ausschalten der Vakuumpumpe Vp.
  • e. Öffnen des Ventils V2 und Fluten der Schleusenkammer Sk mit Inertgas lg.
  • f. Öffnen der inneren Schleusentür Sti.
  • g. Warengestell Wg an Haken Hk anhängen und mit Transportwagen Tw in Galvanisierwanne Gw einbringen.
  • h. Aluminieren der Waren W.
  • i. Warengestell Wg aus Galvanisierwanne Gw entnehmen und mit Transportwagen Tw in Schleusenkammer Sk einbringen.
  • j. Schließen der inneren Schleusentür Sti und des Ventils V2.
  • k. Öffnen des Ventils V1 und Einschalten der Vakuumpumpe Vp.
  • I. Nach dem Erreichen eines Vakuums von 10-1 Torr Schließen des Ventils V1 und Ausschalten der Vakuumpumpe Vp.
  • m. Öffnen des Ventils V3 und Fluten der Schleusenkammer Sk mit Umgebungsluft Ul.
  • n. Öffnen der äußeren Schleusentür Sta.
  • o. Entnehmen des Warengestells Wg mit den aluminierten Waren W.
A preferred mode of operation of the electroplating device explained above with reference to FIGS. 1 and 2 comprises the following steps:
  • a. Opening the outer lock door Sta.
  • b. Introducing the goods W attached to a goods rack Wg into the lock chamber Sk.
  • c. Open valve V1 and switch on vacuum pump Vp.
  • d. After a vacuum of 10- 1 Torr has been reached, valve V1 is closed and the vacuum pump Vp is switched off.
  • e. Open valve V2 and flood the lock chamber Sk with inert gas lg.
  • f. Opening the inner lock door Sti.
  • G. Attach the goods rack Wg to the hook Hk and bring it into the galvanizing trough Gw with the Tw trolley.
  • H. Aluminizing goods W.
  • i. Remove the goods rack Wg from the electroplating trough Gw and insert it into the lock chamber Sk with the Tw trolley.
  • j. Closing the inner lock door Sti and the valve V2.
  • k. Open valve V1 and switch on vacuum pump Vp.
  • I. After reaching a vacuum of 10-1 torr, close valve V1 and switch off vacuum pump Vp.
  • m. Opening valve V3 and flooding the lock chamber Sk with ambient air Ul.
  • n. Opening the outer lock door Sta.
  • o. Removing the goods rack Wg with the aluminized goods W.

Bei der vorstehend geschilderten Verfahrensweise kann je nach Bedarf zur Vorbehandlung oder Nachbehandlung auch die Sprüheinrichtung Se eingesetzt werden. Als Spülflüs-sigkeit Sf wird hierbei vorzugsweise das ohnehin im Elektrolyten E enthaltene Toluol verwendet.In the procedure described above, the spray device Se can also be used for the pretreatment or aftertreatment, as required. The rinsing liquid Sf used here is preferably the toluene already present in the electrolyte E.

Claims (12)

1. Electroplating equipment, particularly for the electrodeposition of aluminium from aprotic, oxygen- free and anhydrous organoaluminium electrolytes (E), comprising
- an electroplating tank (Gw) which is closable in an air-tight fashion and can be charged with an inert gas (Ig) above the electrolyte (E),
- at least one lock for the introduction and/or removal of the items (W) to be electroplated, and
- at least one lock chamber (Sk) of the lock, which chamber is fitted with an inner lock door (Sti) and an outer lock door (Sta) and can be flooded with an inert gas (lg), characterized in that the lock is constructed as vacuum lock (Vs) with an evacuable lock chamber (Sk).
2. Electroplating equipment according to Claim 1, characterized in that vacuum lock (Vs) is formed entirely by the evacuable lock chamber (Sk).
3. Electroplating equipment according to Claim 1 or 2, characterized in that the vacuum lock (Vs) serves as charging and discharging lock.
4. Electroplating equipment according to one of the preceding claims, characterized in that the lock chamber (Sk) can be evacuated with the aid of a vacuum pump (Vp).
5. Electroplating equipment according to Claim 4, characterized in that a condensing device (Ke) is arranged between the vacuum pump (Vp) and the lock chamber (Sk).
6. Electroplating equipment according to Claim 5, characterized in that the condensate (Ko) formed in the condensing device (Ke) can be conveyed with the aid of a pump for liquids (Fp) into the electroplating tank (Gw) or into another tank container of the electroplating equipment, which container is chargeable with inert gas (Ig).
7. Electroplating equipment according to one of the preceding claims, characterized in that a spraying device (Se) is arranged in the lock chamber (Sk) in order to spray a flushing liquid (Sf).
8. Electroplating equipment according to one of the preceding claims, characterized in that the lock chamber (Sk) can also be flooded with ambient air (UL).
9. Method of operating electroplating equipment according to one of Claims 1 to 8, characterized in that for charging purposes the items (W) to be electroplated are first introduced into the lock chamber (Sk), in that the outer lock door (Sta) is then closed and a vacuum is produced in the lock chamber (Sk), and in that after the production of the vacuum the lock chamber (Sk) is flooded with an inert gas (Ig), whereupon the inner lock door (Sti) is opened and the items (W) to be electroplated are conveyed into the electroplating tank (Gw).
10. Method according to Claim 9, characterized in that for discharging purposes the finished electroplated items (W) are first introducted into the lock chamber (Sk), in that the inner lock door (Sti) is then closed and a vacuum is produced in the lock chamber (Sk) is flooded with ambient air (UL), whereupon the outer lock door (Sta) is opened and the items (W) are removed.
11. Method according to Claim 10, characterized in that before the production of the vacuum the elctroplated items (W) in the lock chamber (Sk) are sprayed with a flushing liquid (Sf).
12. Method according to one of Claims 9 to 11, characterized in that a vacuum with a gas pressure of between 1 and 10-2 Torr (133.3 to 1.3 Pa) is produced in the lock chamber (Sk).
EP87109321A 1986-07-04 1987-06-29 Electrodeposition device, particularly for aluminium Expired EP0251272B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT87109321T ATE44166T1 (en) 1986-07-04 1987-06-29 GALVANIZING EQUIPMENT, ESPECIALLY FOR ELECTROPLATING ALUMINUM.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3622554 1986-07-04
DE3622554 1986-07-04

Publications (2)

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EP0251272A1 EP0251272A1 (en) 1988-01-07
EP0251272B1 true EP0251272B1 (en) 1989-06-21

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JP (1) JPH0686675B2 (en)
AT (1) ATE44166T1 (en)
CA (1) CA1297836C (en)
DE (1) DE3760265D1 (en)
DK (1) DK168304B1 (en)
ES (1) ES2009823B3 (en)
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US5141615A (en) * 1990-07-16 1992-08-25 Nisshin Steel Co., Ltd. Aluminum electroplating apparatus
US20040173468A1 (en) * 2003-03-05 2004-09-09 Global Ionix Electrodeposition of aluminum and refractory metals from non-aromatic organic solvents
EP1510600A1 (en) * 2003-08-26 2005-03-02 Aluminal Oberflächtentechnik GmbH & Co. KG Process and apparatus for the deposition of metal and metal alloys from organometallic electrolytes
DE102004032659B4 (en) * 2004-07-01 2008-10-30 Atotech Deutschland Gmbh Apparatus and method for the chemical or electrolytic treatment of material to be treated and the use of the device
ITBO20090326A1 (en) * 2009-05-19 2010-11-20 Cabro S P A DEVICE AND METHOD FOR THE ELECTRODEPHOSITION OF ALUMINUM ON CONDUCTOR SUBSTRATES
DE102009060676B4 (en) * 2009-12-28 2015-07-23 Atotech Deutschland Gmbh Process and device for wet-chemical treatment of items to be treated

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US2897129A (en) * 1957-03-04 1959-07-28 Titanium Metals Corp Electrode handling and storing apparatus
US3489537A (en) * 1966-11-10 1970-01-13 Gen Electric Aluminiding
DE2537256C3 (en) * 1975-08-21 1979-05-17 Siemens Ag, 1000 Berlin Und 8000 Muenchen Device for the galvanic deposition of aluminum
JPS5339373A (en) * 1976-09-22 1978-04-11 Asahi Chemical Ind Method of jointing of structures
DE2719680A1 (en) * 1977-05-03 1978-11-09 Montblanc Simplo Gmbh Electroplating aluminium using aprotic solvents - and inert gas chamber contg. pretreatment and rinsing tanks
DE2901586A1 (en) * 1979-01-17 1980-07-31 Montblanc Simplo Gmbh ALUMINUM CELL
DE3044975C2 (en) * 1980-11-28 1985-10-31 Siemens AG, 1000 Berlin und 8000 München Device for the galvanic deposition of aluminum
JPS6047505B2 (en) * 1980-12-23 1985-10-22 日本酸素株式会社 Continuous vacuum heating furnace
DE3102021C2 (en) * 1981-01-22 1984-02-23 Siemens AG, 1000 Berlin und 8000 München Device for the galvanic deposition of aluminum
DE3133162C2 (en) * 1981-08-21 1984-08-02 Siemens AG, 1000 Berlin und 8000 München Device for the galvanic deposition of aluminum
DE3223224A1 (en) * 1982-06-22 1983-12-22 Japan Oxygen Co., Ltd., Tokyo Vacuum furnace
JPS6125798A (en) * 1984-07-13 1986-02-04 ヤマザキマザック株式会社 Hand support mechanism

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NO173619B (en) 1993-09-27
ES2009823B3 (en) 1989-10-16
JPS6326399A (en) 1988-02-03
DK339487D0 (en) 1987-07-02
EP0251272A1 (en) 1988-01-07
DE3760265D1 (en) 1989-07-27
US4759831A (en) 1988-07-26
DK339487A (en) 1988-01-05
JPH0686675B2 (en) 1994-11-02
ATE44166T1 (en) 1989-07-15
NO872804D0 (en) 1987-07-03
NO173619C (en) 1994-01-05
DK168304B1 (en) 1994-03-07
NO872804L (en) 1988-01-05
CA1297836C (en) 1992-03-24

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