EP0222079B1 - Printed circuit boards optical testing method - Google Patents

Printed circuit boards optical testing method Download PDF

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Publication number
EP0222079B1
EP0222079B1 EP86111299A EP86111299A EP0222079B1 EP 0222079 B1 EP0222079 B1 EP 0222079B1 EP 86111299 A EP86111299 A EP 86111299A EP 86111299 A EP86111299 A EP 86111299A EP 0222079 B1 EP0222079 B1 EP 0222079B1
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EP
European Patent Office
Prior art keywords
window
circuit board
conductive tracks
windows
point
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EP86111299A
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German (de)
French (fr)
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EP0222079A2 (en
EP0222079A3 (en
Inventor
Hubert Dipl.-Phys. Driller
Paul Mang
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OFFERTA DI LICENZA AL PUBBLICO
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Mania Elektronik Automatisation Entwicklung und Geraetebau GmbH
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Priority to AT86111299T priority Critical patent/ATE76522T1/en
Publication of EP0222079A2 publication Critical patent/EP0222079A2/en
Publication of EP0222079A3 publication Critical patent/EP0222079A3/en
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • G06T7/001Industrial image inspection using an image reference approach
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10056Microscopic image
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30141Printed circuit board [PCB]

Definitions

  • the invention relates to a method for the optical testing of printed circuit boards according to the preamble of claim 1.
  • Such a method is known, in which a so-called "design rule” test is carried out, in which conductor tracks and the distances between two conductor tracks are checked for their dimensions in the microscopic range.
  • the minimum widths of the conductor tracks and distances to be determined are entered by the user of the machine performing the test. More precisely, the machine scans the printed circuit boards presented to it in order to check the dimensions mentioned, without a comparison being made with a master or reference printed circuit board or with any storage values. Only local configurations of the circuit board are checked with regard to compliance with the specified minimum widths. However, the position of the conductor tracks plays no role in such a "design rule" test.
  • the check is carried out by a scanning process in which the image is broken down into individual pixels.
  • the video information supplied line by line or array by line by a video camera is analogized and processed, whereby undesired side effects are eliminated.
  • the black and white information obtained in this way is used for comparison with the specified minimum widths.
  • Another disadvantage of the known method mentioned is that it fails in situations in which a Errors in the manufacturing process of printed circuit boards lead to a pattern that corresponds to the given design rules (minimum distance, minimum width). For example, unwanted interruptions of conductor tracks can be recognized as correct by this method, the dimensions of which correspond to the predetermined and permitted conductor track spacings. If such errors are not recognized, the further use of such defective printed circuit boards can result in considerable costs. These can be attributed, for example, to the loss of components during assembly and to the faulty functioning of printed circuit boards of this type.
  • EP-A-0 032 592 discloses a method in which an image of a test object, which is, for example, a tile or the like, is generated, digitized and combined in one with a television camera Memory is saved. The digitized image is then divided into small areas. A pictorial comparison with the corresponding surfaces of a reference object then follows.
  • EP-A-0 149 852 discloses a method for optoelectronic checking of a surface pattern on an object, in which a macro check is also carried out by combining recorded pixels in image fields, which is reduced to a single characteristic image information. This is then compared with the corresponding image information of a reference image.
  • Patent + Abstracts of Japan, Volume 8, No. 23 (P-251) (1460), January 31, 1984 and JP-A-5817934.3 (Nippon Denki KK) October 20, 1983 describes a method in which one of the methods described in US Pat investigating circuit board is divided into a plurality of windows. Then it is examined for each of these windows whether the same number of conductor track elements is present as in the corresponding window of a reference plate. To be more precise, it is checked for the conformity of the shapes of the conductor track elements.
  • the object of the present invention is to provide a method for the optical inspection of printed circuit boards, as mentioned in the introduction, which operates in the microscopic range and thereby carries out the "design rule" test explained above, to be improved in such a way that it becomes so intelligent that a test in the macroscopic range is possible with a considerable reduction in the data to be stored and processed.
  • a circuit board 1 to be tested with a special conductor pattern is divided into certain cutouts or windows 2 in the manner shown in FIG. 1.
  • These windows 2 are when the conductor tracks are made of copper exist, examined with regard to their copper content. This is done by checking for "copper” or “not copper” or “copper-free” for each window, and by additionally recording the coordinates of the center of gravity of the copper areas or the copper-free areas. For example, copper areas correspond to black dots and copper-free areas correspond to white dots. The respective coordinates of the centers of gravity of the copper areas are preferably determined for the windows 2.
  • the conductor tracks can also consist of other materials in a known manner, since in the present method only the contrast between the conductor track regions and the conductor path-free regions is detected.
  • the size of the window 2 is determined depending on the desired accuracy. In general, it can be said that the larger the window 2, the more precisely the gray value analysis and possibly the center of gravity measurement have to be carried out. This means that if you make the windows too large, you come into an area in which the natural errors in the recording of the measured values are of a magnitude which correspond to the errors to be recorded, for example in the case of a missing conductor track, so that no reasonable measurement result is then obtained. Windows that are too large therefore lead to measurement tolerances that are too large.
  • the evaluation is carried out in detail by the fact that the data resulting during the "design rule" test are given in parallel to a counting device for window-wise gray value and possibly center of gravity determination.
  • the counting device determines the gray value of one Window in that the number of points corresponding to the copper areas and the number of copper-free areas corresponding points are counted.
  • the center of gravity of the copper areas is determined by the coordinate determination of the points corresponding to the copper areas or the copper-free areas in the X and Y directions of the window. In this way, a gray and, if applicable, center of gravity value is determined for each scanned window. These values are compared with the stored gray and possibly center of gravity values of respective windows of a master or reference circuit board.
  • the PCBs to be tested are adjusted with the help of reference points that are programmed when the test machine is set up. For example, four or even eight reference points are specified.
  • the machine measures the position of the reference points and thus determines the actual position of the circuit board, taking length tolerances into account. This position determination is carried out as a preparatory action before the "Design Rule" test and the macroscopic test.
  • the individual windows are then considered, the size of which corresponds, for example, to 0.8 ⁇ 0.8 mm or 32 ⁇ 32 pixels, where a pixel is a bit unit supplied by the camera.
  • the individual windows are delivered by the camera by meandering scanning of the circuit board.
  • any deviation or incorrect change in the printed circuit board 1 in a window 2 leads to a drastic change in the density or the gray value and the position of the center of gravity of the copper areas.
  • Such a change in the macroscopic values can be easily recognized. If, for example, a conductor track is missing in a window, this is recognized immediately because the gray value determined for the window changes significantly. The same also occurs if the position of a conductor track changes significantly compared to the target value because, for example, the center of gravity of the black areas or the copper areas changes significantly.
  • the macroscopic examination can be determined with a high degree of probability that there is a decisive deviation from the target value without the exact position of certain image values being recorded.
  • the production process In the production of conductor tracks, the production process often results in conductor tracks that are enlarged or narrowed in relation to the desired dimensions. However, this can lead to different density changes occurring in one window with the same copper content.
  • the length of all boundary lines between the conductor tracks (copper areas) and the conductor track-free ones can be found in the sample circuit board Determine areas per window. This is done by counting all points in the borderline area and storing the resulting values. Specifically, these are the copper points that adjoin a copper-free area or the points of the copper-free area that adjoins a copper area.
  • the sample circuit board is operated as follows.
  • the points are determined as limit points for which a different value is determined in a surrounding direction than for the point itself.
  • the surrounding directions can be determined arbitrarily, for example in accordance with the four axes of a coordinate system or also more finely divided.
  • the sum of these points is then determined.
  • the area shown in FIG. 2 for each boundary line by the dashed lines For each conductor track, in the manner also apparent from FIG. 2, there is an area which is referred to below as the hose area.
  • the points in the hose area are not taken into account in the window-based detection of the printed circuit boards. This means that in FIG.
  • conductor tracks are also recognized as being correct, which are narrowed in accordance with the dashed lines 31 or widened in accordance with the dashed lines 32. This means that widening and narrowing of the conductor tracks due to manufacturing processes are not taken into account and errors due to this be eliminated.

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  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Image Processing (AREA)

Abstract

A circuit board having conductor tracks is optically tested for functional faults by use of a computer controlled testing apparatus including at least one camera. The surface of the circuit board is scanned in a point-by-point manner by the camera to establish for each point scanned an image respresentative indicative of a conductor track area or a non-conductor track area. The surface of the circuit board is divided into a predetermined plurality of windows of predetermined size, and the image representations are associated with respective windows. For each window a determination is made of the sum of only the points of the window corresponding to a conductor track area or the sum of only the points of the window corresponding to a non-conductor track area. This establishes an identification value descriptive of the particular window. The identification values of the windows of the circuit board being tested are compared with predetermined values of corresponding respective windows of a reference master.

Description

Die Erfindung betrifft ein Verfahren zur optischen Prüfung von Leiterplatten nach dem Oberbegriff des Patentanspruches 1.The invention relates to a method for the optical testing of printed circuit boards according to the preamble of claim 1.

Es ist ein derartiges Verfahren bekannt, bei dem eine sogenannte "Design Rule"-Prüfung durchgeführt wird, bei der im mikroskopischen Bereich Leiterbahnen und Abstände zwischen zwei Leiterbahnen auf ihre Dimension geprüft werden. Dabei werden die zu bestimmenden Minimalbreiten der Leiterbahnen und Abstände vom Benutzer der die Prüfung ausführenden Maschine eingegeben. Genauer gesagt tastet die Maschine zur Überprüfung der genannten Dimensionen die ihr jeweils vorgelegte Leiterplatten ab, ohne daß ein Vergleich mit einer Master- oder Referenz-Leiterplatte bzw. mit irgendwelchen Speicherwerten erfolgt. Es werden nur lokale Konfigurationen der Leiterplatte in Bezug auf die Einhaltung der vorgegebenen Minimalbreiten geprüft. Die Lage der Leiterbahnen spielt jedoch bei einer derartigen "Design Rule"-Prüfung keine Rolle.Such a method is known, in which a so-called "design rule" test is carried out, in which conductor tracks and the distances between two conductor tracks are checked for their dimensions in the microscopic range. The minimum widths of the conductor tracks and distances to be determined are entered by the user of the machine performing the test. More precisely, the machine scans the printed circuit boards presented to it in order to check the dimensions mentioned, without a comparison being made with a master or reference printed circuit board or with any storage values. Only local configurations of the circuit board are checked with regard to compliance with the specified minimum widths. However, the position of the conductor tracks plays no role in such a "design rule" test.

Die Überprüfung erfolgt bekannterweise durch einen Abtastvorgang, bei dem das Bild in einzelne Bildpunkte zerlegt wird. Die dabei von einer Videokamera zeilenweise oder arrayweise gelieferten Videoinformationen werden analogisiert und aufbereitet, wobei unerwünschte Nebeneffekte beseitigt werden. Es entsteht dabei ein rasterisiertes Bild der Leiterplatte, das nur noch schwarze und weiße Bereiche enthält, die Metall- oder Nichtmetallgebieten entsprechen. Die so erhaltenen Schwarz-Weiß-Informationen werden zum Vergleich mit den vorgegebenen Mindestbreiten herangezogen.As is known, the check is carried out by a scanning process in which the image is broken down into individual pixels. The video information supplied line by line or array by line by a video camera is analogized and processed, whereby undesired side effects are eliminated. This creates a rasterized one Image of the circuit board that only contains black and white areas that correspond to metal or non-metal areas. The black and white information obtained in this way is used for comparison with the specified minimum widths.

Auf diese Weise kann ermittelt werden, ob die geforderten Mindestbedingungen der Leiterplatten erfüllt sind.In this way it can be determined whether the required minimum conditions of the printed circuit boards are met.

Zu den Vor- und Nachteilen dieses "Design Rule"-Verfahrens: Ein Nachteil dieses "Design Rule"-Prüfungsverfahrens besteht darin, daß nicht erkennbar ist, wenn z.B. falsche Leiterplatten geprüft werden, weil die Prüfung unabhängig von der Frage erfolgt, wie die Leiterbahnkonfiguration der Leiterplatten beschaffen ist. Es wird namlich immer nur unabhängig von dem speziellen Verlauf von Leiterbahnen geprüft, ob das Prüfobjekt den vorgegebenen Regeln (Mindestabstände, Mindestbreiten) entspricht. Allenfalls kann eine Prüfung auch im Hinblick auf Geometrieformen erfolgen, die nicht vorkommen dürfen. Bei derartigen verbotenen Geometrieformen handelt es sich beispielsweise um Leiterbahnen, die spitzwinklig verlaufen.Regarding the advantages and disadvantages of this "design rule" method: One disadvantage of this "design rule" test method is that it is not recognizable if e.g. wrong PCBs are checked because the check is independent of the question of how the circuit configuration of the PCBs is made. Namely, it is only ever checked whether the test object complies with the specified rules (minimum distances, minimum widths), regardless of the special course of conductor tracks. At most, a check can also be made with regard to geometric shapes that must not occur. Such forbidden geometrical shapes are, for example, conductor tracks that run at an acute angle.

Ein weiterer Nachteil des genannten, bekannten Verfahrens besteht darin, daß es in Situationen versagt, in denen ein Fehler im Herstellungsverfahren von Leiterplatten zu einem Muster führt, das den vorgegebenen Designregeln (Mindestabstand, Mindestbreite) entspricht. Beispielsweise können durch dieses Verfahren unerwünschte Unterbrechungen von Leiterbahnen als richtig anerkannt werden, deren Abmessungen den vorgegebenen und erlaubten Leiterbahnabständen entsprechen. Wenn derartige Fehler nicht erkannt werden, können bei der weiteren Verwendung derartiger fehlerhafter Leiterplatten erhebliche Kosten entstehen. Diese sind beispielsweise auf den Verlust von Bauelementen bei der Bestückung und auf die fehlerhafte Funktion von bestückten derartigen Leiterplatten zurückzuführen.Another disadvantage of the known method mentioned is that it fails in situations in which a Errors in the manufacturing process of printed circuit boards lead to a pattern that corresponds to the given design rules (minimum distance, minimum width). For example, unwanted interruptions of conductor tracks can be recognized as correct by this method, the dimensions of which correspond to the predetermined and permitted conductor track spacings. If such errors are not recognized, the further use of such defective printed circuit boards can result in considerable costs. These can be attributed, for example, to the loss of components during assembly and to the faulty functioning of printed circuit boards of this type.

Um solche Fehlermöglichkeiten auszuschließen, könnte man mit Referenzleiterplatten einen Bit für Bit-Vergleich ausführen. Auch wenn der Vergleich mit einem gröberen Raster, z.B. mit einer Reduktion von 4:1, ausgeführt wird, müssen ungeheuer große Datenmengen verarbeitet werden, so daß ein derartiger Vergleich mit einer Referenzleiterplatte kaum praktikabel ist.To rule out such possible errors, one could carry out a bit-by-bit comparison with reference circuit boards. Even if the comparison with a coarser grid, e.g. with a reduction of 4: 1, enormous amounts of data have to be processed, so that such a comparison with a reference circuit board is hardly practical.

Aus der Druckschrift EP-A-0 032 592 geht ein Verfahren hervor, bei dem mit einer Fernsehkamera ein Bild eines Prüfobjektes, bei dem es sich beispielsweise um eine Kachel oder dergleichen handelt, erzeugt, digitalisiert und in einem Speicher gespeichert wird. Das digitalisierte Bild wird dann in kleine Flächen unterteilt. Es folgt dann ein bildlicher Vergleich mit den entsprechenden Flächen eines Bezugsobjekts.EP-A-0 032 592 discloses a method in which an image of a test object, which is, for example, a tile or the like, is generated, digitized and combined in one with a television camera Memory is saved. The digitized image is then divided into small areas. A pictorial comparison with the corresponding surfaces of a reference object then follows.

Aus der EP-A-0 149 852 geht ein Verfahren zum opto-elektronischen Prüfen eines Flächenmusters an einem Objekt hervor, bei dem ebenfalls eine Makroprüfung dadurch erfolgt, daß aufgenommene Bildpunkte in Bildfelder zusammengefaßt werden, die auf eine einzige charakteristische Bildinformation reduziert wird. Diese wird dann mit der entsprechenden Bildinformation eines Referenzbildes verglichen.EP-A-0 149 852 discloses a method for optoelectronic checking of a surface pattern on an object, in which a macro check is also carried out by combining recorded pixels in image fields, which is reduced to a single characteristic image information. This is then compared with the corresponding image information of a reference image.

In der Druckschrift Patent + Abstracts of Japan, Band 8, Nr. 23 (P-251) (1460), 31.1.1984 und JP-A-5817934.3 (Nippon Denki K.K.) 20.10.1983 ist ein Verfahren beschrieben, bei dem eine zu untersuchende Leiterplatte in eine Mehrzahl von Fenstern unterteilt wird. Anschließend wird für jedes dieser Fenster untersucht, ob dieselbe Anzahl von Leiterbahnelementen vorhanden ist wie in dem entsprechenden Fenster einer Referenzplatte. Genauer gesagt wird dabei auf die Überein-Stimmung der Formen der Leiterbahnelemente geprüft.Patent + Abstracts of Japan, Volume 8, No. 23 (P-251) (1460), January 31, 1984 and JP-A-5817934.3 (Nippon Denki KK) October 20, 1983 describes a method in which one of the methods described in US Pat investigating circuit board is divided into a plurality of windows. Then it is examined for each of these windows whether the same number of conductor track elements is present as in the corresponding window of a reference plate. To be more precise, it is checked for the conformity of the shapes of the conductor track elements.

Die Aufgabe der vorliegenden Erfindung besteht darin, ein wie eingangs genanntes Verfahren zur optischen Prüfung von Leiterplatten, das im mikroskopischen Bereich arbeitet und dabei die oben erläuterte "Design-Rule"-Prüfung ausführt, dahingehend zu verbessern, daß es so intelligent wird, daß eine Prüfung im makroskopischen Bereich bei einer erheblichen Reduzierung der zu speichernden und zu verarbeitenden Daten möglich ist.The object of the present invention is to provide a method for the optical inspection of printed circuit boards, as mentioned in the introduction, which operates in the microscopic range and thereby carries out the "design rule" test explained above, to be improved in such a way that it becomes so intelligent that a test in the macroscopic range is possible with a considerable reduction in the data to be stored and processed.

Diese Aufgabe wird durch ein Verfahren der eingangs genannten Art gelöst, das durch die in dem kennzeichnenden Teil des Patentanspruches 1 angegebenen Merkmale gekennzeichnet ist.This object is achieved by a method of the type mentioned, which is characterized by the features specified in the characterizing part of patent claim 1.

Der wesentliche Vorteil des erfindungsgemäßen Verfahrens, bei dem neben der bekannten Prüfung im mikroskopischen Bereich auf die Einhaltung der Abmessungen der Leiterbahnen und der Abstände zwischen den Leiterbahnen eine Prüfung im makroskopischen Bereich erfolgt, besteht darin, daß das Verfahren erkennen kann, ob gerade bestimmte Leiterplatten geprüft werden oder nicht. Dabei sind vorteilhafterweise wesentlich weniger Informationen zu verarbeiten bzw. auszuwerten, als dies bei einem Bit für Bit-Vergleich mit einer Referenzleiterplatte erforderlich ist. Dies führt dazu, daß das erfindungsgemäße Prüfungsverfahren mit vergleichsweise einfach aufgebauten elektronischen Schaltungen bzw. Einrichtungen ausgeführt werden kann.The main advantage of the method according to the invention, in which, in addition to the known testing in the microscopic range for compliance with the dimensions of the conductor tracks and the distances between the conductor tracks, a test is carried out in the macroscopic range, is that the method can recognize whether certain circuit boards are being tested be or not. Advantageously, far less information is to be processed or evaluated than is required for a bit-by-bit comparison with a reference circuit board. This means that the test method according to the invention can be carried out with comparatively simple electronic circuits or devices.

Im Hinblick auf die Reduzierung von Information beim Abspeichern des Bildes eines Fensters kann es vorteilhaft sein, im makroskopischen Bereich ausschließlich eine Grauwerterfassung auszuführen. Besonders vorteilhaft im Hinblick auf die zu verarbeitende Information und auf die Empfindlichkeit ist es, fensterweise neben der Grauwerterfassung auch eine Schwerpunktbestimmung auszuführen. Besonders vorteilhaft ist es, neben der Grauwerterfassung oder neben der Grauwert- und Schwerpunkterfassung fensterweise auch einen Granulationswert zu bestimmen, um beim Herstellungsprozeß bewirkte Verbreiterungen bzw. Verschmälerungen der Leiterbahnen als tolerierbar erfassen zu können.With regard to the reduction of information when saving of the image of a window, it can be advantageous to carry out only gray value detection in the macroscopic area. It is particularly advantageous with regard to the information to be processed and the sensitivity to also carry out a determination of the center of gravity in addition to the gray value detection. It is particularly advantageous to determine a granulation value in addition to the gray value detection or in addition to the gray value and center of gravity detection, in order to be able to detect broadening or narrowing of the conductor tracks caused in the manufacturing process as tolerable.

Im folgenden werden die Erfindung und deren Ausgestaltungen im Zusammenhang mit den Figuren erläutert. Es zeigt:

Fig. 1
eine zu prüfende Leiterplatte; und
Fig. 2
eine Weiterbildung der Erfindung.
The invention and its embodiments are explained below in connection with the figures. It shows:
Fig. 1
a circuit board to be tested; and
Fig. 2
a development of the invention.

Zu der Erfindung führten die folgenden Überlegungen:
Zur Durchführung der Prüfung im makroskopischen Bereich wird eine zu prüfende Leiterplatte 1 mit einem speziellen Leiterbahnmuster in der aus der Fig. 1 ersichtlichen Weise in bestimmte Ausschnitte bzw. Fenster 2 unterteilt. Diese Fenster 2 werden, wenn die Leiterbahnen aus Kupfer bestehen, im Hinblick auf ihren Kupferanteil untersucht. Dies erfolgt dadurch, daß für jedes Fenster punktweise auf "Kupfer" oder "nicht Kupfer" bzw. "kupferfrei" geprüft wird, und daß zusätzlich noch die Koordinaten des Schwerpunktes der Kupferbereiche bzw. der kupferfreien Bereiche festgehalten werden. Beispielsweise entsprechen dabei Kupferbereiche schwarzen Punkten und kupferfreie Bereiche weißen Punkten. Vorzugsweise werden für die Fenster 2 die jeweiligen Koordinaten der Schwerpunkte der Kupferbereiche ermittelt. Dadurch ergibt sich für jedes einzelne Fenster 2 durch Aufaddieren ein ganz bestimmter Grauwert, der ein ganz charakteristisches Identifizierungsmerkmal darstellt. Es kann zusätzlich auch der Schwerpunkt der schwarzen oder weißen Bereiche, beispielsweise der schwarzen Bereiche erfaßt werden. Auch dieser Schwerpunkt stellt für das ihm zugeordnete Fenster ein ganz charakteristisches Identifizierungsmerkmal dar. Einer der sogenannten Identifizierungsmerkmale oder beide der so gewonnenen Identifizierungsmerkmale jedes Fensters werden mit den gleichartigen Identifizierungsmerkmalen entsprechend der Fenster einer Master- bzw. Referenzleiterplatte verglichen. Dies bedeutet, daß bei diesem fensterweisen Vergleich jede Grauwert- und ggf. Schwerpunktverteilung eines Fensters 2 der zu prüfenden Leiterplatte 1, die von der Grauwert- und ggf. Schwerpunkverteilung eines entsprechenden Fensters der Master- bzw. Referenzplatte abweicht, auf einen Fehler hindeutet bzw. zu einer Fehleranzeige führt. Dadurch, daß von jedem Fenster einer Master- bzw. Referenzleiterplatte nur ein Grauwert und ggf. die Koordination des Schwerpunktes der Kupferbereiche oder der kupferfreien Bereiche gespeichert und später mit denjenigen des entsprechenden Fensters 2 der zu prüfenden Leiterplatte 1 verglichen werden müssen, ergibt sich eine entscheidende Verringerung der zu speichernden bzw. zu verarbeitenden Daten, die zu den bereits erwähnten Vorteilen führt.
The following considerations led to the invention:
To carry out the test in the macroscopic area, a circuit board 1 to be tested with a special conductor pattern is divided into certain cutouts or windows 2 in the manner shown in FIG. 1. These windows 2 are when the conductor tracks are made of copper exist, examined with regard to their copper content. This is done by checking for "copper" or "not copper" or "copper-free" for each window, and by additionally recording the coordinates of the center of gravity of the copper areas or the copper-free areas. For example, copper areas correspond to black dots and copper-free areas correspond to white dots. The respective coordinates of the centers of gravity of the copper areas are preferably determined for the windows 2. This results in a very specific gray value for each individual window 2 by adding them up, which represents a very characteristic identification feature. The center of gravity of the black or white areas, for example the black areas, can also be detected. This focus also represents a very characteristic identification feature for the window assigned to it. One of the so-called identification features or both of the identification features obtained in this way in each window are compared with the identical identification features corresponding to the windows of a master or reference circuit board. This means that in this window-by-window comparison, each gray value and, if applicable, center of gravity distribution of a window 2 of the circuit board 1 to be tested, which is based on the gray value and possibly center of gravity distribution of a corresponding window of the master or Reference plate deviates, indicates an error or leads to an error display. The fact that only one gray value of each window of a master or reference circuit board and possibly the coordination of the center of gravity of the copper areas or the copper-free areas have to be stored and later compared with that of the corresponding window 2 of the circuit board 1 to be tested results in a decisive one Reduction of the data to be stored or processed, which leads to the advantages already mentioned.

Es wird darauf hingewiesen, daß die Leiterbahnen in bekannter Weise auch aus anderen Materialien bestehen können, da beim vorliegenden Verfahren lediglich der Kontrast zwischen den Leiterbahnbereichen und den leiterbahnfreien Bereichen erfaßt wird.It is pointed out that the conductor tracks can also consist of other materials in a known manner, since in the present method only the contrast between the conductor track regions and the conductor path-free regions is detected.

Die Größe der Fenster 2 wird in Abhängigkeit von der gewünschten Genauigkeit bestimmt. Allgemein kann gesagt werden, daß die Grauwertanalyse und ggf. die Schwerpunktmessung umso genauer ausgeführt werden müssen, je größer die Fenster 2 sind. Dies bedeutet, daß man, wenn man die Fenster zu groß macht, in einen Bereich kommt, in dem die natürlichen Fehler bei der Meßwertaufnahme in eine Größenordnung gelangen, die den zu erfassenden Fehlern etwa bei einer fehlenden Leiterbahn entsprechen, so daß dann kein vernünftiges Meßergebnis mehr erhalten wird. Zu große Fenster führen also zu zu großen Meßtoleranzen.The size of the window 2 is determined depending on the desired accuracy. In general, it can be said that the larger the window 2, the more precisely the gray value analysis and possibly the center of gravity measurement have to be carried out. This means that if you make the windows too large, you come into an area in which the natural errors in the recording of the measured values are of a magnitude which correspond to the errors to be recorded, for example in the case of a missing conductor track, so that no reasonable measurement result is then obtained. Windows that are too large therefore lead to measurement tolerances that are too large.

Aus den zuvor genannten Erwägungen heraus gelangt man beispielsweise bei der makroskopischen Betrachtung der aus der zuvor abgelaufenen "Design Rule"-Prüfung stammenden Meßergebnisse zu einer Datenreduzierung von 1:64. Es wird jedoch darauf hingewiesen, daß dieses bestimmte Reduzierungsmaß nur als Beispiel zu verstehen ist. Die wesentliche Forderung für das anzuwendende Reduzierungsmaß besteht darin, daß der Flächeninhalt, d.h. die Anzahl der Prüfpunkte des Fensters um einige 100 mal größer ist als die durch die Kamera bestimmte Bit-Einheit. Die Größe der Fenster wird so bemessen, daß bei der Auswertung das charakteristische Aussehen dieses Fensters, d.h. also der Kupfergehalt und dessen Anordnung bzw. die schwarzen oder weißen Bereiche und der Schwerpunkt dieser Bereiche, mit einer ausreichend großen Sicherheit beschrieben wird.Based on the above-mentioned considerations, a macroscopic examination of the measurement results from the previously run "Design Rule" test leads to a data reduction of 1:64. However, it is pointed out that this particular reduction measure is only to be understood as an example. The essential requirement for the reduction measure to be used is that the area, i.e. the number of test points in the window is several hundred times larger than the bit unit determined by the camera. The size of the window is dimensioned so that the characteristic appearance of this window, i.e. So the copper content and its arrangement or the black or white areas and the focus of these areas is described with a sufficiently high degree of certainty.

Die Auswertung erfolgt im einzelnen dadurch, daß die während der "Design Rule"-Prüfung sich ergebenden Daten parallel auf eine Zählvorrichtung zur fensterweisen Grauwert- und ggf. Schwerpunktsermittlung gegeben werden. Die Zählvorrichtung ermittelt dabei den Grauwert eines Fensters dadurch, daß die Anzahl der den Kupferbereichen entsprechenden Punkte und die Anzahl der kupferfreien Bereichen entsprechenden Punkte gezählt werden. Die Ermittlung des Schwerpunktes der Kupferbereiche erfolgt durch die koordinatenmäßige Erfassung der den Kupferbereichen bzw. den kupferfreien Bereichen entsprechenden Punkte in der X- und Y-Richtung des Fensters. Für jedes abgetastete Fenster wird auf diese Weise ein Grau- und ggf. Schwerpunktswert ermittelt. Diese Werte werden mit den gespeicherten Grau- und ggf. Schwerpunktswerten jeweils entsprechender Fenster einer Master- bzw. Referenzleiterplatte verglichen.The evaluation is carried out in detail by the fact that the data resulting during the "design rule" test are given in parallel to a counting device for window-wise gray value and possibly center of gravity determination. The counting device determines the gray value of one Window in that the number of points corresponding to the copper areas and the number of copper-free areas corresponding points are counted. The center of gravity of the copper areas is determined by the coordinate determination of the points corresponding to the copper areas or the copper-free areas in the X and Y directions of the window. In this way, a gray and, if applicable, center of gravity value is determined for each scanned window. These values are compared with the stored gray and possibly center of gravity values of respective windows of a master or reference circuit board.

Die Einjustierung der zu prüfenden Leiterplatten erfolgt mit der Hilfe von Referenzpunkten, die beim Einrichten der Prüfmaschine einprogrammiert werden. Beispielsweise werden vier oder auch acht Referenzpunkte vorgegeben. Beim Einbringen der zu testenden Leiterplatte mißt die Maschine die Lage der Referenzpunkte und bestimmt so die tatsächliche Lage der Leiterplatte unter Berücksichtigung von Längentoleranzen. Diese Lagebestimmung erfolgt als Vorbereitungshandlung vor der "Design Rule"-Prüfung und der makroskopischen Prüfung. Ausgehend von dieser Lagebestimmung der Leiterplatte insgesamt erfolgt dann die Betrachtung der einzelnen Fenster, deren Größe beispielsweise 0,8 × 0,8 mm bzw. 32 × 32 Pixel entspricht, wobei ein Pixel eine von der Kamera gelieferte Bit-Einheit ist. Beispielsweise werden die einzelnen Fenster durch mäanderförmiges Abtasten der Leiterplatte durch die Kamera geliefert. Jede Abweichung oder fehlerhafte Veränderung der Leiterplatte 1 in einem Fenster 2 führt zu einer drastischen Veränderung der Dichte bzw. des Grauwertes und der Lage des Schwerpunktes der Kupferbereiche. Eine solche Veränderung der makroskopischen Werte kann ohne weiteres erkannt werden. Wenn beispielsweise in einem Fenster eine Leiterbahn fehlt, wird dies sofort erkannt, weil sich der für das Fenster ermittelte Grauwert erheblich ändert. Das gleiche tritt auch dann ein, wenn sich die Lage einer Leiterbahn gegenüber dem Sollwert erheblich verändert, weil sich dann z.B. der Schwerpunkt der schwarzen Bereiche bzw. der Kupferbereiche erheblich verändert. Durch die makroskopische Prüfung läßt sich mit hoher Wahrscheinlichkeit bestimmen, daß eine entscheidende Abweichung vom Sollwert vorliegt, ohne daß die genaue Lage von bestimmten Bildwerten erfaßt wird.The PCBs to be tested are adjusted with the help of reference points that are programmed when the test machine is set up. For example, four or even eight reference points are specified. When inserting the circuit board to be tested, the machine measures the position of the reference points and thus determines the actual position of the circuit board, taking length tolerances into account. This position determination is carried out as a preparatory action before the "Design Rule" test and the macroscopic test. On the basis of this determination of the overall position of the printed circuit board, the individual windows are then considered, the size of which corresponds, for example, to 0.8 × 0.8 mm or 32 × 32 pixels, where a pixel is a bit unit supplied by the camera. For example, the individual windows are delivered by the camera by meandering scanning of the circuit board. Any deviation or incorrect change in the printed circuit board 1 in a window 2 leads to a drastic change in the density or the gray value and the position of the center of gravity of the copper areas. Such a change in the macroscopic values can be easily recognized. If, for example, a conductor track is missing in a window, this is recognized immediately because the gray value determined for the window changes significantly. The same also occurs if the position of a conductor track changes significantly compared to the target value because, for example, the center of gravity of the black areas or the copper areas changes significantly. The macroscopic examination can be determined with a high degree of probability that there is a decisive deviation from the target value without the exact position of certain image values being recorded.

Bei der Verwendung eines Filmes an der Stelle einer Referenzleiterplatte ist es möglich, die während des Herstellungsprozesses entstehenden Unterschiede zwischen dem Film und der Leiterplatte einfach auszuwerten. Auf der geprüften Leiterplatte ergeben sich in Abhängigkeit von dem Ätzprozeß grundsätzlich etwas breitere Leiterbahnen als auf dem Film. Diese Unterschiede lassen sich bei der erfindungsgemäß gewählten Erfassungsmethode sehr einfach prozentual darstellen, da bekannt ist, daß sich die Kupferwerte um einen bestimmten bzw. vorgegebenen Wert verändern. Dies bedeutet, daß an der Stelle eines richtigen Bild-Processings einfache Zahlenwertvergleiche ausreichend sind.When using a film instead of a reference circuit board, it is possible to easily evaluate the differences between the film and the circuit board that arise during the manufacturing process. Depending on the etching process basically slightly wider conductor tracks than on the film. These differences can be represented very simply as a percentage in the detection method chosen according to the invention, since it is known that the copper values change by a certain or predetermined value. This means that simple numerical value comparisons are sufficient at the point of correct image processing.

Bei der Herstellung von Leiterbahnen ergeben sich aufgrund des Herstellungsprozesses oft Leiterbahnen, die im Verhältnis zu den gewünschten Abmessungen vergrößert oder verschmälert sind. Dies kann aber dann dazu führen, daß sich in einem Fenster bei gleichem Kupferanteil unterschiedliche Dichteveränderungen ergeben. Um diese Veränderungen erfassen zu können bzw. um feststellen zu können, ob diese Veränderungen in Abhängigkeit vom Herstellungsprozeß akzeptabel sind oder nicht, kann man gemäß einer besonders vorteilhaften Weiterbildung der Erfindung in der Musterleiterplatte die Länge aller Grenzlinien zwischen den Leiterbahnen (Kupferbereiche) und den leiterbahnfreien Bereichen pro Fenster feststellen. Dies erfolgt dadurch, daß man alle Punkte im Grenzlinienbereich zählt und die sich ergebenden Werte abspeichert. Dies sind genauer gesagt die Kupferpunkte, die an einen kupferfreien Bereich angrenzen oder die Punkte des kupferfreien Bereiches, die an einen Kupferbereich angrenzen.In the production of conductor tracks, the production process often results in conductor tracks that are enlarged or narrowed in relation to the desired dimensions. However, this can lead to different density changes occurring in one window with the same copper content. In order to be able to detect these changes or to be able to determine whether these changes are acceptable or not depending on the manufacturing process, according to a particularly advantageous development of the invention, the length of all boundary lines between the conductor tracks (copper areas) and the conductor track-free ones can be found in the sample circuit board Determine areas per window. This is done by counting all points in the borderline area and storing the resulting values. Specifically, these are the copper points that adjoin a copper-free area or the points of the copper-free area that adjoins a copper area.

In der Praxis geht man dabei an der Musterleiterplatte folgendermaßen vor. Es werden die Punkte als Grenzpunkte bestimmt, für die in einer Umgebungsrichtung ein anderer Wert als für den Punkt selbst ermittelt wird. Dabei können die Umgebungsrichtungen willkürlich, z.B. entsprechend den vier Achsen eines Koordinatensystemes oder auch feiner unterteilt festgelegt werden. Es wird dann die Summe dieser Punkte ermittelt. Dabei ergibt sich, da jeder Grenzpunkt automatisch doppelt erfaßt wird, das in der Fig. 2 für jede Grenzlinie durch die gestrichelten Linien dargestellte Gebiet. Für jede Leiterbahn ergibt sich in der ebenfalls aus der Fig. 2 ersichtlichen Weise ein Gebiet, das im folgenden als Schlauchgebiet bezeichnet wird. Bei der fenstermäßigen Erfassung der Leiterplatten werden die Punkte nicht berücksichtigt, die im Schlauchgebiet liegen. Dies bedeutet, daß in der Fig. 2 an der Stelle der tatsächlichen Leiterbahn 3 auch Leiterbahnen als richtig erkannt werden, die entsprechend den strichlierten Linien 31 verschmälert oder entsprechend den strichlierten Linien 32 verbreitert sind. Dies bedeutet, daß auf Herstellungsprozesse zurückzuführende Verbreiterungen und Verschmälerungen der Leiterbahnen nicht berücksicht werden und darauf zurückzuführende Fehler eliminiert werden.In practice, the sample circuit board is operated as follows. The points are determined as limit points for which a different value is determined in a surrounding direction than for the point itself. The surrounding directions can be determined arbitrarily, for example in accordance with the four axes of a coordinate system or also more finely divided. The sum of these points is then determined. As a result, since each boundary point is automatically detected twice, the area shown in FIG. 2 for each boundary line by the dashed lines. For each conductor track, in the manner also apparent from FIG. 2, there is an area which is referred to below as the hose area. The points in the hose area are not taken into account in the window-based detection of the printed circuit boards. This means that in FIG. 2, at the location of the actual conductor track 3, conductor tracks are also recognized as being correct, which are narrowed in accordance with the dashed lines 31 or widened in accordance with the dashed lines 32. This means that widening and narrowing of the conductor tracks due to manufacturing processes are not taken into account and errors due to this be eliminated.

In Wirklichkeit werden infolge des ausgeführten nicht analytischen Zählverfahrens auch Bahnverbreiterungen bzw. Bahnverschmälerungen erfaßt, die nicht einer Verbreiterung bzw. Verschmälerung um 1 Pixel entsprechen. Dies ist darauf zurückzuführen, weil in Abhängigkeit von dem geometrischen Verlauf der Leiterbahnen bzw. Grenzlinien (schräger Verlauf usw.) auch eine geringere Pixelzahl, beispielsweise die um einen Faktor von 0,3 verringerte Pixelzahl, ermittelt werden kann. Dies bedeutet, daß das dann erfaßte Schlauchgebiet enger ist als das durch 2 Pixel bestimmte Schlauchgebiet, so daß das gesamte Verfahren feiner wird.In reality, due to the non-analytical counting process carried out, web widenings or web narrowing are also recorded which do not correspond to a widening or narrowing by 1 pixel. This is due to the fact that a smaller number of pixels, for example the number of pixels reduced by a factor of 0.3, can also be determined depending on the geometric course of the conductor tracks or boundary lines (oblique course, etc.). This means that the tube area then detected is narrower than the tube area determined by 2 pixels, so that the entire method becomes finer.

Um zu einer erheblichen Reduzierung von Information beim Abspeichern des Bildes eines Fensters zu gelangen, d.h., wenn die abzuspeichernde Datenmenge in Grenzen gehalten werden soll, kann im makroskopischen Bereich pro Fenster lediglich die Bestimmung des Grauwerts oder die Bestimmung der Grauwerte und der Schwerpunktwerte vorgenommen werden. Es ist auch denkbar, lediglich eine Grauwert- und Granulationserfassung auszuführen. In diesem Fall kann die Menge der zu erfassenden Daten etwa um 2/3 verringert werden, wobei der Fehlerabdeckungsprozeß noch sehr gut ist und wobei die Parameterveränderung bei der Herstellung der Leiterplatten gleichzeitig über den Granulationswert normiert werden kann.In order to achieve a considerable reduction in information when the image of a window is saved, ie if the amount of data to be saved is to be kept within limits, only the determination of the gray value or the determination of the gray values and the center of gravity values can be carried out in the macroscopic area for each window. It is also conceivable to carry out only gray value and granulation detection. In this case, the amount of data to be acquired can be reduced by approximately 2/3, the error coverage process still being very good and the parameter change during the production of the Printed circuit boards can be standardized at the same time via the granulation value.

Claims (3)

  1. Method for the optical testing of printed circuit boards or the like for functional faults, such as short-circuits, interruptions and faulty components, with the aid of a computer-controlled testing apparatus having one or more cameras, in which first of all in the scanning of the surface of the circuit board the maintaining of a given minimum width of the conductive tracks or of a given minimum spacing thereof from one another is checked point-by-point, the data produced during the scanning of the circuit board (1) being allocated in each case to certain windows (2) of a preselected size into which the circuit board (1) is subdivided, characterised in that for each window (2) only the total of the picture points corresponding to the conductive tracks or of the picture points which correspond to regions free of conductive tracks is detected and compared with previously determined desired values of corresponding windows on a reference circuit board or the like.
  2. Method according to Claim 1, characterised in that for each window in addition the point of concentration of the regions of the picture points which correspond to the conductive tracks or the regions free of conductive tracks is also determined by coordinate-wise detection of the points corresponding to the conductive track regions or to the regions free of conductive tracks and is compared with previously determined desired point of concentration values of corresponding windows of a reference board or the like.
  3. Method according to Claim 1 or 2, characterised in that in addition a granulation value is determined in each window (2) in that for each window of the reference plate all the picture points which are located on a boundary line between a conductive track and the region free of conductive tracks are counted in that all the picture points are counted for which in a surrounding direction a different value from the value determined for the point itself is determined, and that the corresponding totals of the respective windows of the conductive tracks are corrected with this granulation value.
EP86111299A 1985-11-12 1986-08-14 Printed circuit boards optical testing method Expired - Lifetime EP0222079B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT86111299T ATE76522T1 (en) 1985-11-12 1986-08-14 METHODS OF OPTICAL INSPECTION OF CIRCUIT BOARDS.

Applications Claiming Priority (2)

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DE3540100 1985-11-12
DE19853540100 DE3540100A1 (en) 1985-11-12 1985-11-12 METHOD FOR THE OPTICAL INSPECTION OF CIRCUIT BOARDS

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EP0222079A2 EP0222079A2 (en) 1987-05-20
EP0222079A3 EP0222079A3 (en) 1988-06-29
EP0222079B1 true EP0222079B1 (en) 1992-05-20

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EP (1) EP0222079B1 (en)
JP (1) JPS62201339A (en)
AT (1) ATE76522T1 (en)
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US4955062A (en) * 1986-12-10 1990-09-04 Canon Kabushiki Kaisha Pattern detecting method and apparatus
DE3737869A1 (en) * 1987-11-09 1989-05-24 Wagner Hans Juergen Dipl Ing Method and device for the optical testing of objects
JP2651199B2 (en) * 1988-06-06 1997-09-10 富士通株式会社 Automatic pattern verification system for masks or reticles
EP0354782B1 (en) * 1988-08-12 1996-11-27 Sumitomo Wiring Systems, Ltd. Image processor for detecting incomplete articles
DE69212195T2 (en) 1991-04-11 1996-12-19 Methode Electronics Inc Device for the electronic testing of printed circuit boards or the like
DE4113606C1 (en) * 1991-04-23 1992-08-27 Eac Automation-Consulting-Gmbh, 1000 Berlin, De PCB functional control and monitoring system - feeds test signal to additional thin conductor track formed between PCB connectors as control loop
US5448650A (en) * 1992-04-30 1995-09-05 International Business Machines Corporation Thin-film latent open optical detection with template-based feature extraction
DE69331433T2 (en) * 1992-10-22 2002-10-02 Advanced Interconnection Tech Device for the automatic optical inspection of printed circuit boards with wires laid therein
US5517234A (en) * 1993-10-26 1996-05-14 Gerber Systems Corporation Automatic optical inspection system having a weighted transition database
GB2362459A (en) * 2000-05-16 2001-11-21 Lloyd Doyle Ltd Method and apparatus for inspection of printed wiring boards
DE102006060741A1 (en) * 2006-12-21 2008-06-26 Henkel Kgaa Method and device for the optical inspection of objects
CN116223515B (en) * 2023-05-05 2023-07-11 成都中航华测科技有限公司 Conductive pattern defect detection method for circuit board test process

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US4056716A (en) * 1976-06-30 1977-11-01 International Business Machines Corporation Defect inspection of objects such as electronic circuits
IT1129509B (en) * 1980-01-14 1986-06-04 Tasco Spa PROCEDURE AND EQUIPMENT FOR THE REAL-TIME FINDING OF DEFECTS IN INDUSTRIAL OBJECTS
JPS5821110A (en) * 1981-07-29 1983-02-07 Nippon Kogaku Kk <Nikon> Inspecting device for pattern
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DE3347645C1 (en) * 1983-12-30 1985-10-10 Dr.-Ing. Ludwig Pietzsch Gmbh & Co, 7505 Ettlingen Method and device for opto-electronic testing of a surface pattern on an object

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ATE76522T1 (en) 1992-06-15
JPS62201339A (en) 1987-09-05
CA1257009A (en) 1989-07-04
US4745296A (en) 1988-05-17
EP0222079A2 (en) 1987-05-20
DE3540100A1 (en) 1987-06-11
DE3685403D1 (en) 1992-06-25
EP0222079A3 (en) 1988-06-29

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