EP0173787B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP0173787B1
EP0173787B1 EP19850100240 EP85100240A EP0173787B1 EP 0173787 B1 EP0173787 B1 EP 0173787B1 EP 19850100240 EP19850100240 EP 19850100240 EP 85100240 A EP85100240 A EP 85100240A EP 0173787 B1 EP0173787 B1 EP 0173787B1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
sealing liquid
barrier
liquid
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP19850100240
Other languages
German (de)
French (fr)
Other versions
EP0173787A2 (en
EP0173787A3 (en
Inventor
Lutz Arndt
Paul Dr. Bachmann
Hanns-Peter Dr. Berges
Wolfgang Leier
Dieter Vorberg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19843425177 external-priority patent/DE3425177A1/en
Priority claimed from DE19843435921 external-priority patent/DE3435921A1/en
Application filed by Leybold AG filed Critical Leybold AG
Publication of EP0173787A2 publication Critical patent/EP0173787A2/en
Publication of EP0173787A3 publication Critical patent/EP0173787A3/en
Application granted granted Critical
Publication of EP0173787B1 publication Critical patent/EP0173787B1/en
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16—Filtration; Moisture separation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4463—Liquid seal in liquid flow line; flow liquid forms seal
    • Y10T137/4576—U-seals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4463—Liquid seal in liquid flow line; flow liquid forms seal
    • Y10T137/4576—U-seals
    • Y10T137/4606—Even diameter legs
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4456—With liquid valves or liquid trap seals
    • Y10T137/4643—Liquid valves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/85978—With pump
    • Y10T137/86083—Vacuum pump

Definitions

  • Vacuum pumps are often used to pump or extract reactive gases that react in particular with moisture and / or oxygen. Such reactions can result in solid substances which accumulate in the exhaust area of the vacuum pump, initially taper it and finally clog it. Furthermore, these solid substances can shorten the life of the vacuum pump considerably due to their mechanical effect. However, the reactions described can also lead to liquid or gaseous substances which have a corrosive effect on the materials of the vacuum pump or - if it is a liquid-sealed vacuum pump - impair the properties of the sealing liquid. So z. B. Form titanium chloride with moisture corrosive hydrochloric acid and solid titanium oxide. Another example of the formation of a solid residue is the reaction of SiH 4 with oxygen to Si0 2 . In the presence of, SiH z Ci z reactions with water occur, through which hydrochloric acid and solid silicon oxide are formed.
  • the outlet valve is usually superimposed with liquid on the sealing liquid (see, for example, DE-A-569 212).
  • this liquid does not prevent moisture and / or oxygen from diffusing into the exhaust space of the vacuum pump.
  • the disadvantageous chemical reactions described can therefore occur in the area of the exhaust space and cause clogging of the lines and / or contamination of the sealant of the vacuum pump.
  • the object of the present invention is to equip a vacuum pump in such a way that the disadvantages described can no longer occur.
  • this object is achieved in that the outlet is followed by a barrier preventing the entry of water vapor or oxygen, which includes a separate from the vacuum pump, partially filled with a sealing liquid housing and a dip tube connected to the outlet of the vacuum pump, which partially in the barrier liquid is immersed.
  • a vacuum pump equipped with such a lock is completely protected against moisture or oxygen. Adverse reactions leading to solid deposits or corrosive substances can therefore no longer take place in the area of the vacuum pump.
  • the reactive gases or vapors conveyed by the pump flow from the outlet of the vacuum pump to the barrier according to the invention and penetrate the liquid present therein, which prevents the ingress of moisture or oxygen into the vacuum pump.
  • the reaction zone between the reactive gases or vapors and the moisture or oxygen has thus been moved from the area of the vacuum pump into a simple external component, which, for. B. may consist of corrosion-resistant components.
  • Substances which form solids during reactions with moisture or oxygen and which would block the outlet of the vacuum pump without the lock according to the invention are deposited in the housing of the lock according to the invention.
  • the capacity of the lock according to the invention is at least 20 times greater until it becomes blocked. Regular maintenance of these external accessories can easily prevent constipation.
  • An important advantage of the lock according to the invention is that the vacuum pump is also protected from moisture or oxygen when the pump is operating or at a standstill at low suction pressures and thus low gas flow. Without the lock according to the invention, a back diffusion of moisture or oxygen into the pump takes place in these states, which is particularly considerable when the vacuum pump is followed by a device filled with water or aqueous solutions, with which the reactive gases or vapors to protect the Environment.
  • the immersion tube which projects into the sealing liquid with its free opening, is a reliable lock for the vacuum pump.
  • the exhaust gas stream passes through the barrier liquid in the form of bubbles.
  • the barrier liquid is foamed and / or drops of the barrier liquid are entrained by the cas stream.
  • the lock could be made sufficiently large to prevent these processes.
  • a particularly advantageous solution is that the Tuach pipe is bent or kinked in the region of its end immersed in the barrier liquid in such a way that its end opening lies above the barrier liquid level and that its wall section below the barrier liquid level has openings.
  • the barrier liquid enters the tube and effects the desired sealing.
  • the liquid plug in the pipe is expelled, so that the pipe no longer contains any barrier liquid.
  • the presence of the liquid plug is not necessary, since due to the high gas velocity in the tube, the escape of harmful vapors is reliably avoided.
  • the straight pipe section lying below the level of the barrier liquid is expediently designed to drop slightly in relation to the direction of the gas flow and in relation to the horizontal.
  • the liquid level located inside the immersion tube only ever releases the number of openings which is necessary for the escape of the gases flowing through the immersion tube. This prevents undesirable movements of the liquid and the associated adverse turbulence.
  • Fig. 1 shows schematically a vacuum pump 1 with inlet 2 and outlet 3.
  • the lock 4 is connected, the inlet with 5 and the outlet with 6 are designated.
  • the barrier liquid 7 is located in the barrier 4.
  • the dip tube 8 connected to the inlet 5 projects into the barrier liquid 7.
  • the entering gas passes through the barrier liquid 7 and leaves the barrier 4 through the outlet 6.
  • the barrier liquid 7 ensures that moisture or oxygen cannot pass from the outlet 6 to the inlet 5 of the barrier 4.
  • Suitable barrier liquids are mineral oils, technical white oils, perfluorinated polyethers, silicone oils or generally liquids that are not miscible with water, not water-soluble or water-absorbing or not hygroscopic.
  • the vacuum pump 1 can be a dry-running or a liquid-sealed vacuum pump. A wide variety of oils, ethers or esters can be used as sealing fluids.
  • a device is connected to the lock 4 with which reactive gases or vapors can be intercepted in order to protect the environment.
  • the exhaust gases of the vacuum pump 1 are passed through a liquid 11 with suitable properties.
  • suitable liquids are water or aqueous solutions of substances that bind the gases to be trapped.
  • FIG. 2 shows details of an exemplary embodiment of the lock 4. It comprises an upper and a lower housing section 12 and 13 respectively.
  • the inlet 5 and the outlet 6 are attached to the upper housing section 12.
  • the outlet 5 is connected to the interior of the dip tube 8, which is detachably attached to the upper housing section.
  • In the lower housing section 13 is the barrier liquid 7, into which the dip tube 8 protrudes.
  • the eye 15 is provided to check the barrier liquid level 14. With 16 a locking liquid drain screw is designated.
  • the annular space formed by the lower housing section 4 and the immersion tube 8 is connected to the outlet 6.
  • the figures. 3 to 5 show an embodiment in which the dip tube 8 is bent or angled such that its free opening 17 lies above the level of the barrier liquid 7.
  • the openings or bores 18 are provided, which are preferably arranged in the upper region of the immersing pipe section.
  • the part of the tube 8 below the barrier liquid level preferably has a straight section 19, the upper side of which is equipped with the openings 18.
  • the section 19 is designed to be slightly sloping. This ensures that only a portion of the openings 18 corresponding to the strength of the gas flow is released.
  • Figures 3 to 5 show different operating states.
  • Fig. 3 shows the state when the pump is stopped.
  • the tube 8 is filled with liquid and represents a safe shut-off of the tube 8 and thus the vacuum pump.
  • Fig. 4 shows the state with low gas throughput. The gas passes through a portion of the openings 16 corresponding to the strength of the gas flow. The pump is also protected against backflow.
  • FIG. 5 shows the state with a high gas throughput.
  • the tube 8 is free of sealing liquid. Foaming of the barrier liquid or entrainment of liquid drops is avoided.
  • the pressure prevailing in the section 19 as a result of the high gas throughput prevents barrier liquid from entering through the openings 18. If necessary, the pressure can be influenced with the aid of a throttle arranged in the region of the opening 17, which at high gas throughputs reduces the pressure in the immersion tube 8 has an increasing effect. Even in this operating state, the pump is protected against backflows, since the high gas velocity in the tube 8 reliably prevents the backflow of harmful vapors. If the gas throughput is reduced again, liquid automatically enters the pipe 8 through the openings 18 in accordance with the reduced speed and thereby ensures the blocking function with a low or zero throughput.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Description

Vakuumpumpen dienen häufig der Förderung oder dem Absaugen reaktiver Gase, die insbesondere mit Feuchtigkeit und/oder Sauerstoff reagieren. Bei solchen Reaktionen können feste Stoffen entstehen, die sich im Auspuffbereich der Vakuumpumpe anlagern, diesen zunächst verjüngen und schließlich zusetzen. Weiterhin können diese festen Stoffe die Lebensdauer der Vakuumpumpe infolge ihrer mechanischen Wirkung beträchtlich verkürzen. Die beschriebenen Reaktionen können aber auch zu flüssigen oder gasförmigen Stoffen führen, die auf die Werkstoffe der Vakuumpumpe korrosiv wirken oder - falls es sich um eine flüssigkeitsgedichtete Vakuumpumpe handelt - die Eigenschaften der Dichtflüssigkeit beeinträchtigen. So kann z. B. Titanchlorid mit Feuchtigkeit korrosiv wirkende Salzsäure und festes Titanoxid bilden. Ein anderes Beispiel für die Bildung eines festen Rückstandes ist die Reaktion von SiH4 mit Sauerstoff zu Si02. Im Falle der Anwesenheit von , SiHzCiz treten mit Wasser Reaktionen auf, durch die Salzsäure und festes Siliciumoxid entstehen.Vacuum pumps are often used to pump or extract reactive gases that react in particular with moisture and / or oxygen. Such reactions can result in solid substances which accumulate in the exhaust area of the vacuum pump, initially taper it and finally clog it. Furthermore, these solid substances can shorten the life of the vacuum pump considerably due to their mechanical effect. However, the reactions described can also lead to liquid or gaseous substances which have a corrosive effect on the materials of the vacuum pump or - if it is a liquid-sealed vacuum pump - impair the properties of the sealing liquid. So z. B. Form titanium chloride with moisture corrosive hydrochloric acid and solid titanium oxide. Another example of the formation of a solid residue is the reaction of SiH 4 with oxygen to Si0 2 . In the presence of, SiH z Ci z reactions with water occur, through which hydrochloric acid and solid silicon oxide are formed.

Bei flüssigkeitsgedichteten Vakuumpumpen ist zwar das Auslaßventil üblicherweise mit Flüssigkeit der Dichtflüssigkeit überlagert (vgl. z. B. die DE-A- 569 212). Diese Flüssigkeit verhindert aber nicht, daß Feuchtigkeit und/oder Sauerstoff in den Auspuffraum der Vakuumpumpe hineindiffundiert. Die beschriebenen, nachteiligen chemischen Reaktionen können deshalb im Bereich des Auspuffraumes eintreten und dort ein Zusetzen der Leitungen und/oder eine Verunreinigung des Dichtmittels der Vakuumpumpe bewirken.In liquid-sealed vacuum pumps, the outlet valve is usually superimposed with liquid on the sealing liquid (see, for example, DE-A-569 212). However, this liquid does not prevent moisture and / or oxygen from diffusing into the exhaust space of the vacuum pump. The disadvantageous chemical reactions described can therefore occur in the area of the exhaust space and cause clogging of the lines and / or contamination of the sealant of the vacuum pump.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe derart auszurüsten, daß die beschriebenen Nachteile nicht mehr eintreten können.The object of the present invention is to equip a vacuum pump in such a way that the disadvantages described can no longer occur.

Erfindungsgemäß wird diese Aufgabe dadurch gelost, daß dem Auslaß eine den Eintritt von Wasserdampf oder Sauerstoff verhindernde Sperre nachgeordnet ist, die ein von der Vakuumpumpe separates, zum Teil mit einer Sperrflüssigkeit gefülltes Gehäuse und ein an den Auslaß der Vakuumpumpe angeschlossenes Tauchrohr umfaßt, welches teilweise in die Sperrflüssigkeit eintaucht.According to the invention, this object is achieved in that the outlet is followed by a barrier preventing the entry of water vapor or oxygen, which includes a separate from the vacuum pump, partially filled with a sealing liquid housing and a dip tube connected to the outlet of the vacuum pump, which partially in the barrier liquid is immersed.

Eine mit einer solchen Sperre ausgerüstete Vakuumpumpe ist vollständig vor Feuchtigkeit oder Sauerstoff geschützt. Nachteilige, zu festen Ablagerungen oder korrosiven Stoffen führende Reaktionen können deshalb im Bereich der Vakuumpumpe nicht mehr stattfinden. Die von der Pumpe geförderten reaktiven Gase oder Dämpfe strömen von Auslaß der Vakuumpumpe zu der erfindungsgemäßen Sperre und durchsetzen die darin vorhandene Flüssigkeit, die das Eindringen von Feuchtigkeit oder Sauerstoff in die Vakuumpumpe verhindert Die Reaktionszone zwischen den reaktiven Gasen oder Dämpfen und der Feuchtigkeit oder dem Sauerstoff ist damit aus dem Bereich der Vakuumpumpe in ein einfaches externes Bauteil verlagert worden, welches z. B. aus korrosionsfesten Bauteilen bestehen kann. Substanzen, die bei Reaktionen mit Feuchtigkeit oder Sauerstoff Feststoffe bilden und ohne die erfindungsgemäße Sperre den Auslaß der Vakuumpumpe zusetzen würden, lagern sich im Gehäuse der erfindungsgemäßen Sperre ab. Gegenüber einem ungeschützten Auspuff der Vakuumpumpe ist die Kapazität der erfindungsgemäßen Sperre bis zur Verstopfung mindestens um den Faktor 20 größer. Durch regelmäßige Wartung dieses externen Zubehörs kann die Verstopfung problemlos verhindert werden.A vacuum pump equipped with such a lock is completely protected against moisture or oxygen. Adverse reactions leading to solid deposits or corrosive substances can therefore no longer take place in the area of the vacuum pump. The reactive gases or vapors conveyed by the pump flow from the outlet of the vacuum pump to the barrier according to the invention and penetrate the liquid present therein, which prevents the ingress of moisture or oxygen into the vacuum pump. The reaction zone between the reactive gases or vapors and the moisture or oxygen has thus been moved from the area of the vacuum pump into a simple external component, which, for. B. may consist of corrosion-resistant components. Substances which form solids during reactions with moisture or oxygen and which would block the outlet of the vacuum pump without the lock according to the invention are deposited in the housing of the lock according to the invention. Compared to an unprotected exhaust of the vacuum pump, the capacity of the lock according to the invention is at least 20 times greater until it becomes blocked. Regular maintenance of these external accessories can easily prevent constipation.

Ein wesentlicher vorteil der erfindungsgemäßen Sperre besteht darin, daß die Vakuumpumpe auch dann vor Feuchtigkeit oder Sauerstoff geschützt ist, wenn die Pumpe bei niedrigen Ansaugdrücken und damit geringer Gasströmung arbeitet oder stillsteht. Ohne die erfindungsgemäße Sperre findet in diesen Zuständen eine Rückdiffusion von Feuchtigkeit oder Sauerstoff in die Pumpe statt, die insbesondere dann beträchtlich ist, wenn sich an die vakuumpumpe eine mit wasser oder wäßrigen Lösungen gefüllte Einrichtung anschließt, mit der die reaktiven Gase öder Dämpfe zum Schutz der Umwelt abgefangen werden.An important advantage of the lock according to the invention is that the vacuum pump is also protected from moisture or oxygen when the pump is operating or at a standstill at low suction pressures and thus low gas flow. Without the lock according to the invention, a back diffusion of moisture or oxygen into the pump takes place in these states, which is particularly considerable when the vacuum pump is followed by a device filled with water or aqueous solutions, with which the reactive gases or vapors to protect the Environment.

Es wäre denkbar, die Vakuumpumpe mit Hilfe von Ventilen oder Klappen in der Auspuffleitung vor dem Eindringen von Feuchtigkeit oder Sauerstoff zu schützen. Bei dieser Lösung besteht jedoch der Nachteil, daß die kritische Reaktionszone zwischen den geförderten Gasen einerseits und der Feuchtigkeit oder des Sauerstoffs andererseits im Bereich dieser Klappen oder Ventile liegen würde, so daß ihre Funktion durch Korrosion oder Belagbildung sehr schnell beeinträchtigt wäre. Bei einem Nichtöffnen eines derartigen Ventils baut sich im Innern der Vakuumpumpe ein unzulässig hoher Druck auf, der bis zur explosionsartigen Zerstörungführen kann.It would be conceivable to protect the vacuum pump from the ingress of moisture or oxygen by means of valves or flaps in the exhaust line. However, this solution has the disadvantage that the critical reaction zone between the extracted gases on the one hand and the moisture or oxygen on the other hand would be in the area of these flaps or valves, so that their function would be impaired very quickly by corrosion or deposit formation. If such a valve is not opened, an inadmissibly high pressure builds up inside the vacuum pump, which can lead to explosive destruction.

Das mit seiner freien Öffnung in die Sperrflüssigkeit hineinragende Tauchrohr ist eine zuverlässige Sperre für die Vakuumpumpe. Bei geringem Durchsatz tritt der Auspuffgasstrom in Form von Blasen durch die Sperrflüssigkeit hindurch. Bei höherem Casdurchsatz besteht jedoch die Gefahr, daß die Sperrflüssigkeit aufgeschäumt wird und/oder Tropfen der Sperrflüssigkeit vom Casstrom mitgerissen werden. Zur Verhinderung dieser Vorgänge könnte die Sperre ausreichend groß gestaltet sein. Eine besonders vorteilhafte Lösung besteht jedoch darin, daß das Tuachrohr im Bereich seines in die Sperrflüssigkeit eintauchenden Endes derart abgebogen oder abgeknickt ist, daß seine Endöffnung oberhalb des Sperrflüssigkeitsspiegels liegt und daß sein unterhalb des Sperrflüssigkeitsspiegels liegender Wandungsabschnitt Durchbrechungen aufweist. Durch die Durchbrechungen oder Bohrungen, die vorzugsweise im oberen Bereich der Rohrwandung angeordnet sind, tritt die Sperrflüssigkeit in das Rohr ein und bewirkt die gewünschte Abdichtung. Bei hohen Gasdurchsätzen wird der im Rohr befindliche Flüssigkeitspfropfen ausgestoßen, so daß das Rohr keine Sperrflüssigkeit mehr enthält. In dieser Betriebsphase ist das Vorhandensein des Flüssigkeitspfropfens nicht erforderlich, da aufgrund der hohen Gasgeschwindigkeit in dem Rohr der Rücktritt schädlicher Dämpfe sicher vermieden ist.The immersion tube, which projects into the sealing liquid with its free opening, is a reliable lock for the vacuum pump. At a low throughput, the exhaust gas stream passes through the barrier liquid in the form of bubbles. With a higher cas throughput, however, there is a risk that the barrier liquid is foamed and / or drops of the barrier liquid are entrained by the cas stream. The lock could be made sufficiently large to prevent these processes. A particularly advantageous solution, however, is that the Tuach pipe is bent or kinked in the region of its end immersed in the barrier liquid in such a way that its end opening lies above the barrier liquid level and that its wall section below the barrier liquid level has openings. Through the openings or bores, which are preferably arranged in the upper region of the tube wall, the barrier liquid enters the tube and effects the desired sealing. At With high gas throughputs, the liquid plug in the pipe is expelled, so that the pipe no longer contains any barrier liquid. In this operating phase, the presence of the liquid plug is not necessary, since due to the high gas velocity in the tube, the escape of harmful vapors is reliably avoided.

Zweckmäßigerweise ist der unterhalb des Spiegels der Sperrflüssigkeit liegende gerade Rohrabschnitt in bezug auf die Richtung des Gasstromes und in bezug auf die Horizontale leicht abfallend gestaltet. Bei dieser Ausführung gibt der innerhalb des Tauchrohres befindliche Flüssigkeitsspiegel immer nur eine solche Anzahl von Durchbrechungen frei, die für das Austreten der durch das Tauchrohr hindurch strömenden Gase erforderlich ist. Unerwünschte Bewegungen der Fiüssigkeit und die damit verbundenen nachteiligen Turbulenzen werden dadurch verhindert.The straight pipe section lying below the level of the barrier liquid is expediently designed to drop slightly in relation to the direction of the gas flow and in relation to the horizontal. In this embodiment, the liquid level located inside the immersion tube only ever releases the number of openings which is necessary for the escape of the gases flowing through the immersion tube. This prevents undesirable movements of the liquid and the associated adverse turbulence.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 5 dargestellten Ausführungsbeispielen erläutert werden.Further advantages and details of the invention will be explained on the basis of the exemplary embodiments illustrated in FIGS. 1 to 5.

Fig. 1 zeigt schematisch eine Vakuumpumpe 1 mit Einlaß 2 und Auslaß 3. An den Auslaß 3 ist die Sperre 4 angeschlossen, deren Einlaß mit 5 und deren Auslaß mit 6 bezeichnet sind. In der Sperre 4 befindet sich die Sperrflüssigkeit 7. In die Sperrflüssigkeit 7 ragt das mit dem Einlaß 5 verbundene Tauchrohr 8 hinein. Das eintretende Gas tritt durch die Sperrflüssigkeit 7 hindurch und verläßt die Sperre 4 durch den Auslaß 6. Durch die Sperrflüssigkeit 7 ist sichergestellt, daß Feuchtigkeit oder Sauerstoff nicht vom Auslaß 6 zum Einlaß 5 der Sperre 4 gelangen können. Geeignete Sperrflüssigkeiten sind Mineralöle, technische Weißöle, perfluorierte Polyäther, Siliconöle oder allgemein Flüssigkeiten, die nicht mit Wasser mischbar, nicht wasserlösend oder -adsorbierend oder nicht hygroskopisch sind. Die Vakuumpumpe 1 kann eine trockenlaufende oder eine flüssigkeitsgedichtete Vakuumpumpe sein. Als' Dichtflüssigkeiten können die verschiedensten Öle, Äther oder Ester verwendet werden.Fig. 1 shows schematically a vacuum pump 1 with inlet 2 and outlet 3. At the outlet 3, the lock 4 is connected, the inlet with 5 and the outlet with 6 are designated. The barrier liquid 7 is located in the barrier 4. The dip tube 8 connected to the inlet 5 projects into the barrier liquid 7. The entering gas passes through the barrier liquid 7 and leaves the barrier 4 through the outlet 6. The barrier liquid 7 ensures that moisture or oxygen cannot pass from the outlet 6 to the inlet 5 of the barrier 4. Suitable barrier liquids are mineral oils, technical white oils, perfluorinated polyethers, silicone oils or generally liquids that are not miscible with water, not water-soluble or water-absorbing or not hygroscopic. The vacuum pump 1 can be a dry-running or a liquid-sealed vacuum pump. A wide variety of oils, ethers or esters can be used as sealing fluids.

Bei dem in Fig. 1 dargestellten Ausführungsbeispiel schließt sich an die Sperre 4 eine Einrichtung an, mit der reaktive Gase oder Dämpfe zum Schutz der Umwelt abgefangen werden können. Dazu werden die Auspuffgase der Vakuumpumpe 1 durch eine Flüssigkeit 11 mit dazu geeigneten Eigenschaften geführt. Dazu geeignete Flüssigkeiten sind Wasser oder wäßrige Lösungen von Stoffen, die die abzufangenden Gase binden.In the exemplary embodiment shown in FIG. 1, a device is connected to the lock 4 with which reactive gases or vapors can be intercepted in order to protect the environment. For this purpose, the exhaust gases of the vacuum pump 1 are passed through a liquid 11 with suitable properties. Suitable liquids are water or aqueous solutions of substances that bind the gases to be trapped.

Fig. 2 zeigt Einzelheiten eines Ausführungsbeispiels für die Sperre 4. Sie umfaßt einen oberen und einen unteren Gehäuseabschnitt 12 bzw. 13. An den oberen Gehäuseabschnitt 12 sind der Einlaß 5 und der Auslaß 6 angebracht. Der Auslaßt 5 steht mit dem Innern des Tauchrohres 8 in Verbindung, das lösbar am oberen Gehäuseabschnitt befestigt ist. Im unteren Gehäuseabschnitt 13 befindet sich die Sperrflüssigkeit 7, in die das Tauchrohr 8 hineinragt. Zur Kontrolle des Sperrflüssigkeitsstandes 14 ist das Auge 15 vorgesehen. Mit 16 ist eine Sperrflüssigkeits-Ablaßschraube bezeichnet. Der vom unteren Gehäuseabschnitt 4 und dem Tauchrohr 8 gebildete Ringraum steht mit dem Auslaß 6 in Verbindung.2 shows details of an exemplary embodiment of the lock 4. It comprises an upper and a lower housing section 12 and 13 respectively. The inlet 5 and the outlet 6 are attached to the upper housing section 12. The outlet 5 is connected to the interior of the dip tube 8, which is detachably attached to the upper housing section. In the lower housing section 13 is the barrier liquid 7, into which the dip tube 8 protrudes. The eye 15 is provided to check the barrier liquid level 14. With 16 a locking liquid drain screw is designated. The annular space formed by the lower housing section 4 and the immersion tube 8 is connected to the outlet 6.

Die Figuren. 3 bis 5 zeigen ein Ausführungsbeispiel, bei dem das Tauchrohr 8 derart abgebogen oder abgewinkelt ist, daß seine freie Öffnung 17 oberhalb des Spiegels der Sperrflüssigkeit 7 liegt. Um das Eintreten von Sperrflüssigkeit in das Rohr zu ermöglichen, sind die Durchbrechungen oder Bohrungen 18 vorgesehen, die vorzugsweise im oberen Bereich des eintauchenden Rohrabschnittes angeordnet sind.The figures. 3 to 5 show an embodiment in which the dip tube 8 is bent or angled such that its free opening 17 lies above the level of the barrier liquid 7. In order to allow barrier liquid to enter the pipe, the openings or bores 18 are provided, which are preferably arranged in the upper region of the immersing pipe section.

Der unterhalb des Sperrflüssigkeitsspiegels liegende Teil des Rohres 8 weist vorzugsweise einen geraden Abschnitt 19 auf, dessen obere Seitemit den Durchbrechungen 18 ausgerüstet ist. In bezug auf die Richtung der strömenden Gase, angedeutet durch die Pfeile 21, und in bezug auf die Horizontale 22 ist der Abschnitt 19 leicht abfallend gestaltet. Dadurch wird erreicht, daß immer nur ein der Stärke des Gasstromes entsprechender Teil der Durchbrechungen 18 freigegeben wird.The part of the tube 8 below the barrier liquid level preferably has a straight section 19, the upper side of which is equipped with the openings 18. With respect to the direction of the flowing gases, indicated by the arrows 21, and with respect to the horizontal 22, the section 19 is designed to be slightly sloping. This ensures that only a portion of the openings 18 corresponding to the strength of the gas flow is released.

Die Figuren 3 bis 5 zeigen verschiedene Betriebszustände. Fig. 3 zeigt den Zustand bei stillstehender Pumpe. Das Rohr 8 ist mit Flüssigkeit gefüllt und stellt eine sichere Absperrung des Rohres 8 und damit der Vakuumpumpe dar. Fig. 4 zeigt den Zustand bei geringem Gasdurchsatz. Durch einen der Stärke des Gasstromes entsprechenden Teil der Durchbrechungen 16 tritt das Gas hindurch. Die Pumpe ist ebenfalls gegenüber Rückströmungen geschützt.Figures 3 to 5 show different operating states. Fig. 3 shows the state when the pump is stopped. The tube 8 is filled with liquid and represents a safe shut-off of the tube 8 and thus the vacuum pump. Fig. 4 shows the state with low gas throughput. The gas passes through a portion of the openings 16 corresponding to the strength of the gas flow. The pump is also protected against backflow.

Schließlich zeigt Fig. 5 den Zustand bei hohem Gasdurchsatz. Das Rohr 8 ist frei von Sperrflüssigkeit. Ein Aufschäumen der Sperrflüssigkeit oder ein Mitreißen von Flüssigkeitstropfen ist vermieden. Der infolge des hohen Gasdurchsatzes im Abschnitt 19 herrschende Druck verhindert ein Eintreten von Sperrflüssigkeit durch die Öffnungen 18. Falls erforderlich, kann auf den Druck mit Hilfe einer im Bereich der Öffnung 17 angeordneten Drossel Einfluß genommen werden, die bei hohen Gasdurchsätzen eine den Druck im Tauchrohr 8 erhöhende Wirkung hat. Auch in diesem Betriebszustand ist die Pumpe vor Rückströmungen geschützt, da aufgrund der hohen Gasgeschwindigkeit in dem Rohr 8 das Zurückströmen von schädlichen Dämpfen sicher vermieden ist. Wird der Gasdurchsatz wieder reduziert, tritt automatisch entsprechend der gesunkenen Geschwindigkeit durch die Öffnungen 18 Flüssigkeit in das Rohr 8 ein und stellt dadurch die Sperrfunktion bei kleinem oder Null-Durchsatz sicher.Finally, FIG. 5 shows the state with a high gas throughput. The tube 8 is free of sealing liquid. Foaming of the barrier liquid or entrainment of liquid drops is avoided. The pressure prevailing in the section 19 as a result of the high gas throughput prevents barrier liquid from entering through the openings 18. If necessary, the pressure can be influenced with the aid of a throttle arranged in the region of the opening 17, which at high gas throughputs reduces the pressure in the immersion tube 8 has an increasing effect. Even in this operating state, the pump is protected against backflows, since the high gas velocity in the tube 8 reliably prevents the backflow of harmful vapors. If the gas throughput is reduced again, liquid automatically enters the pipe 8 through the openings 18 in accordance with the reduced speed and thereby ensures the blocking function with a low or zero throughput.

Da bei der Ausführungsform nach den Figuren 3 bis 5 der gesamte Gasdurchsatz im Falle großer Durchsätze nicht mehr durch die Sperrflüssigkeit gefördert werden muß, tritt ein Aufschäumen der Sperrflüssigkeit nicht mehr ein. Außerdem ist es möglich, die Einrichtung relativ klein zu gestalten.Since in the embodiment according to FIGS. 3 to 5 the total gas throughput no longer has to be conveyed through the sealing liquid in the case of large throughputs, foaming of the sealing liquid no longer occurs. It is also possible to make the device relatively small.

Claims (7)

1. Vacuum pump with an inlet and an outlet, characterised in that a barrier (4) which prevents water vapour and oxygen from entering is disposed after the outlet, which barrier comprises a housing (12, 13), which is separate from the vacuum pump (1) and partly filled with a sealing liquid (7), and an immersion tube (8), which is connected to the outlet of the vacuum pump (1) and is partly immersed in the sealing liquid (7).
2. Vacuum pump according to claim 1, characterised in that the housing is formed in two parts and comprises an upper section (12) with the inlet and outlet connections (5 and 6, respectively) and a lower section (13) with the sealing liquid (7).
3. Vacuum pump according to claim 2, characterised in that the immersion tube (8) is secured in a detachable manner to the upper housing section (12).
4. Vacuum pump according to one of the preceding claims, characterised in that a device (9) for trapping the reactive gases or vapours is disposed after the barrier (4).
5. Vacuum pump according to one of the preceding claims, characterised in that the immersion tube (8) is bent in the area of its section which is immersed in the sealing liquid (7) such that its end opening (17) lies above the sealing liquid surface and that its wall section (19) which lies below the sealing liquid surface comprises apertures (18).
6. Vacuum pump according to claim 5, characterised in that the apertures (18) are arranged in the upper part of the wall section which lies below the sealing liquid surface.
7. Vacuum pump according to claim 5 or 6, characterised in that the part of the immersion tube (8) which lies below the sealing liquid surface comprises a straight section (19) which slopes slightly downwards with respect to the direction of the gas flow and with respect to the horizontal.
EP19850100240 1984-02-09 1985-01-11 Vacuum pump Expired EP0173787B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
DE3404556 1984-02-09
DE3404556 1984-02-09
DE19843425177 DE3425177A1 (en) 1984-02-09 1984-07-09 Vacuum pump
DE3425177 1984-07-09
DE19843435921 DE3435921A1 (en) 1984-09-29 1984-09-29 Vacuum pump
DE3435921 1984-09-29

Publications (3)

Publication Number Publication Date
EP0173787A2 EP0173787A2 (en) 1986-03-12
EP0173787A3 EP0173787A3 (en) 1986-10-08
EP0173787B1 true EP0173787B1 (en) 1989-05-17

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EP19850100240 Expired EP0173787B1 (en) 1984-02-09 1985-01-11 Vacuum pump

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EP (1) EP0173787B1 (en)
DE (1) DE3570266D1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8905452U1 (en) * 1989-04-29 1989-08-10 Leybold AG, Zweigniederlassung Köln, 5000 Köln Filters for use in vacuum systems
DE19952144B4 (en) * 1998-11-17 2014-01-16 Ixetic Bad Homburg Gmbh Pressure medium conveying device with a pump device above a pressure medium reservoir with connection to the associated pressure line
KR20010102639A (en) * 2000-05-03 2001-11-16 김명희 a siphon system
US20070166101A1 (en) * 2006-01-18 2007-07-19 Michael Scheu Vehicle Shield
US7967083B2 (en) * 2007-09-06 2011-06-28 Schlumberger Technology Corporation Sensor for determining a position of a jack element

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US339749A (en) * 1886-04-13 Abraham edwards
DE569212C (en) * 1933-01-30 Wolfgang Gaede Dr Wet-dry air pump, especially rotary lobe pump
US953040A (en) * 1909-12-18 1910-03-29 Heinrich Krueger Pressure-regulator.
US1243604A (en) * 1916-04-03 1917-10-16 Honeywell Heating Specialties Company Safafety relief device for low-pressure steam-boilers.
US2620749A (en) * 1950-07-08 1952-12-09 Standard Railway Equipment Mfg Hatch frame and insulation supporting pan for refrigerator cars
US2929335A (en) * 1958-07-30 1960-03-22 Ernst E Seiler Liquid valves
US3802455A (en) * 1969-07-31 1974-04-09 Zink Co John Apparatus for controlling the flow of gases
NL147942B (en) * 1971-01-19 1975-12-15 Anvar HYDRAULIC PROTECTION DEVICE FOR GAS FLUIDA.
AT309911B (en) * 1971-08-13 1973-09-10 Maximilian Gruber Gas cleaning device
GB1517115A (en) * 1977-04-29 1978-07-12 Hunslet Ltd Exhaust gas water conditioner for an internal combustion engine
DE2913580A1 (en) * 1979-04-04 1980-10-09 Crede Helfried Diesel engine exhaust gas decontamination system - passes cooled gas repeatedly through cooled condensate, dissolving contaminants

Also Published As

Publication number Publication date
EP0173787A2 (en) 1986-03-12
US4612957A (en) 1986-09-23
DE3570266D1 (en) 1989-06-22
EP0173787A3 (en) 1986-10-08

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