EP0144522A2 - Getter sorption pump having a heat accumulator for high-vacuum and gas discharge plants - Google Patents

Getter sorption pump having a heat accumulator for high-vacuum and gas discharge plants Download PDF

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Publication number
EP0144522A2
EP0144522A2 EP84109511A EP84109511A EP0144522A2 EP 0144522 A2 EP0144522 A2 EP 0144522A2 EP 84109511 A EP84109511 A EP 84109511A EP 84109511 A EP84109511 A EP 84109511A EP 0144522 A2 EP0144522 A2 EP 0144522A2
Authority
EP
European Patent Office
Prior art keywords
getter
sorption pump
individual
pump
gas discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP84109511A
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German (de)
French (fr)
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EP0144522A3 (en
Inventor
Heinz Ing. grad. Mägdefessel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
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Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of EP0144522A2 publication Critical patent/EP0144522A2/en
Publication of EP0144522A3 publication Critical patent/EP0144522A3/en
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering

Definitions

  • the invention relates to a getter sorption pump for high vacuum and gas discharge systems with at least one getter body made of non-evaporating getter material and an associated heating element.
  • the working temperature either had to be varied or the individual getters had to be kept at different temperatures with at least two heating circuits.
  • the invention has for its object to increase the specific performance of getter pumps with a simultaneous reduction in the required heating power and to stabilize long-term with the help of heat storage and to achieve a high pumping speed through an extremely large surface area in the smallest space.
  • the pumping speed of a getter body increases with its surface, i.e. also with its porosity, but the capacity with its mass. Both factors together determine the temporal stability over the amount of gas sorbed. Furthermore, this stability is influenced by the working temperature depending on the type of gas.
  • the reduction in the required heating output compared to the use of many individual getters results from the more economical use of the heating output from the heating element, e.g. a heating coil (less radiation losses).
  • the heat storage is achieved by the ceramic mass integrated in the construction.
  • the possibilities are extremely versatile and can be optimized in a practical way.
  • Another advantage of energy-saving heat storage is that the heat-related good pumping effect is retained for a long time after the heating voltage has been switched off. For example, such a cut-off 'is essential required in nuclear accelerator facilities to avoid interference from external fields.
  • the slow cooling of the getter body has an advantageous effect in that the temperature-sensitive selective optimal pumping areas pass very slowly and thus all important gas type-related sorption maxima are recorded.
  • the getter sorption pump shown in Fig. 1 consists essentially of the heating element 1, which is arranged in an insulating tube 2.
  • the plurality of single getter bodies 3 is spaced apart on the insulating. tube 2 attached.
  • This arrangement is surrounded by a pump vessel 7, which can be connected to the high vacuum system with a pump flange 8.
  • the heating connections 9 are passed through the pump vessel 7.
  • the insulating tube 2 again shows the insulating tube 2, which is provided with the heating element 1 and is preferably made of ceramic and serves as a heat store.
  • the individual getter bodies 3 are on metal disks 5 brought.
  • the metal disks 5 are provided with spacer beads 6.
  • the metal disks 5 can also be designed as tubular attachment parts. This creates both a good heat-conducting connection with the insulating tube 2 and the desired distance between the individual metal disks.
  • FIG. 3 shows a getter sorption pump in which the individual getter bodies 3 applied to the insulating tube 2, in which the heating element 1 runs, are spaced apart from one another by metal or ceramic rings 4.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

Die Erfindung bezieht sich auf eine Getter-Sorptionspumpe mit mindestens einem Getterkörper (3) aus nichtverdampfendem Gettermaterial und einem zugehörigen Heizelement (1). Bei dieser Getterpumpe soll eine hohe Pumpgeschwindigkeit durch eine extrem große Oberfläche auf kleinstem Raum erreicht werden. Die Erfindung sieht hierzu vor, daß das Heizelement (1) in einem Isolierrohr (2) angeordnet ist, und daß eine Vielzahl von Einzel-Getterkörpern (3) voneinander beabstandet auf dem Isolierrohr (2) angebracht ist. Eine erfindungsgemäße Getterpumpe findet in Hochvakuum- und Gasentladungsanlagen Verwendung.The invention relates to a getter sorption pump with at least one getter body (3) made of non-evaporating getter material and an associated heating element (1). With this getter pump, a high pump speed is to be achieved through an extremely large surface area in the smallest space. For this purpose, the invention provides that the heating element (1) is arranged in an insulating tube (2) and that a plurality of individual getter bodies (3) are mounted on the insulating tube (2) at a distance from one another. A getter pump according to the invention is used in high vacuum and gas discharge systems.

Description

Die Erfindung betrifft eine Getter-Sorptionspumpe für Hochvakuum- und Gasentladungsanlagen mit mindestens einem Getterkörper aus nichtverdampfendem Gettermaterial und einem zugehörigen Heizelement.The invention relates to a getter sorption pump for high vacuum and gas discharge systems with at least one getter body made of non-evaporating getter material and an associated heating element.

Um eine große Pumpleistung zu erzielen, mußten bisher eine Vielzahl von Einzelgettern zusammengeschaltet werden, wodurch sich der auf der Heizleistung bezogene Wirkungsgrad zunehmend verschlechterte, das Problem der Wärmeabführung sich vergrößerte sowie der Platzbedarf für die Unterbringung der Einzelgetter sich problematisch erhöhte. Um die Pumpleistung über längere Zeit zu stabilisieren mußte ständig Heizleistung zugeführt werden.In order to achieve a high pumping capacity, a large number of individual getters had to be connected up to now, as a result of which the efficiency in relation to the heating power deteriorated, the problem of heat dissipation increased and the space required for accommodating the individual getters increased problematically. In order to stabilize the pump power over a long period of time, heating power had to be supplied continuously.

Da die gebräuchlichen Getterstoffe ihre optimalen Pumpfähigkeiten für verschiedene Gase nur bei bestimmten Temperaturen entfalten (selektive Pumpeigenschaften), mußte die Arbeitstemperatur entweder variiert werden oder mit mindestens zwei Heizstromkreisen die einzelnen Getter auf unterschiedliche Temperaturen gehalten werden.Since the customary getter materials only develop their optimal pumping capabilities for different gases at certain temperatures (selective pump properties), the working temperature either had to be varied or the individual getters had to be kept at different temperatures with at least two heating circuits.

In der Anwendungspraxis wurden diese notwendigen Maßnahmen in der Regel vernachlässigt, so daß die optimalen Gettereigenschaften der nichtverdampfenden Getter ungenutzt blieben. Auch die bisher bekannten Getterpumpen, die an Stelle vieler Einzelgetter einen größeren kompakten Getterkörper besitzen, weisen die wesentlichsten genannten Nachteile auf.In practice, these necessary measures have generally been neglected, so that the optimal getter properties of the non-evaporating getters have not been used. The previously known getter pumps, which have a larger, compact getter body instead of many individual getters, also have the most important disadvantages mentioned.

Der Erfindung liegt die Aufgabe zugrunde, die spezifische Leistungsfähigkeit von Getterpumpen bei gleichzeitiger Herabsetzung der erforderlichen Heizleistung zu erhöhen und mit Hilfe einer Wärmespeicherung langzeitig zu stabilisieren sowie eine hohe Pumpgeschwindigkeit durch eine extrem große Oberfläche auf kleinstem Raum zu erreichen.The invention has for its object to increase the specific performance of getter pumps with a simultaneous reduction in the required heating power and to stabilize long-term with the help of heat storage and to achieve a high pumping speed through an extremely large surface area in the smallest space.

Diese Aufgabe wird erfindungsgemäß durch eine Getter-Sorptionspumpe mit den Merkmalen des Anspruchs 1 gelöst.This object is achieved according to the invention by a getter sorption pump with the features of claim 1.

Weitere vorteilhafte Ausgestaltungen der Erfindung sind Gegenstand zusätzlicher Ansprüche.Further advantageous embodiments of the invention are the subject of additional claims.

Die Pumpgeschwindigkeit eines Getterkörpers erhöht sich mit seiner Oberfläche, d.h. auch mit seiner Porosität, die Kapazität hingegen mit seiner Masse. Beide Faktoren zusammen bestimmen die zeitliche Stabilität über die sorbierte Gasmenge. Ferner wird diese Stabilität von der gasartabhängigen Arbeitstemperatur beeinflußt.The pumping speed of a getter body increases with its surface, i.e. also with its porosity, but the capacity with its mass. Both factors together determine the temporal stability over the amount of gas sorbed. Furthermore, this stability is influenced by the working temperature depending on the type of gas.

Die Herabsetzung der erforderlichen Heizleistung gegenüber der Verwendung von vielen Einzelgettern ergibt sich aus der wirtschaftlicheren Ausnutzung der Heizleistung aus dem Heizelement, z.B. einer Heizspirale (weniger Strahlungsverluste).The reduction in the required heating output compared to the use of many individual getters results from the more economical use of the heating output from the heating element, e.g. a heating coil (less radiation losses).

Die Wärmespeicherung wird durch die in die Konstruktion integrierte Keramikmasse erzielt. Die Möglichkeiten sind außerordentlich vielseitig und zweckdienlich optimierbar.The heat storage is achieved by the ceramic mass integrated in the construction. The possibilities are extremely versatile and can be optimized in a practical way.

Ein weiterer Vorteil der energiesparenden Wärmespeicherung ist, daß die wärmebedingte gute Pumpwirkung längere Zeit erhalten bleibt, nachdem die Heizspannung abgeschaltet ist. Eine solche Abschaltung' ist z.B. unbedingt erforderlich in Nuklear-Beschleunigeranlagen, um Störungen durch Fremdfelder zu vermeiden.Another advantage of energy-saving heat storage is that the heat-related good pumping effect is retained for a long time after the heating voltage has been switched off. For example, such a cut-off 'is essential required in nuclear accelerator facilities to avoid interference from external fields.

Außerdem wirkt sich die langsame Abkühlung des Getterkörper dadurch vorteilhaft aus, daß die temperaturbedürftigen selektiven optimalen Pumpbereiche sehr langsam durchfahren und damit alle wichtigen gasartbedingten Sorptionsmaxima erfaßt werden.In addition, the slow cooling of the getter body has an advantageous effect in that the temperature-sensitive selective optimal pumping areas pass very slowly and thus all important gas type-related sorption maxima are recorded.

Die Erfindung wird anhand von Ausführungsbeispielen weiter erläutert. Teile, die nicht unbedingt zum Verständnis der Erfindung beitragen, sind in den Figuren unbezeichnet oder weggelassen. Einander entsprechende Teile sind in den Figuren mit den gleichen Bezugszeichen versehen.The invention is further explained on the basis of exemplary embodiments. Parts which do not necessarily contribute to an understanding of the invention are not shown in the figures or are omitted. Corresponding parts are provided with the same reference symbols in the figures.

Es zeigen schematisch teilweise im Schnitt:

  • Fig. 1 eine erfindungsgemäße Getter-Sorptionspumpe und die
  • Fig. 2 und 3 weitere Ausführungsbeispiele der erfindungsgemäßen Getter-Sorptionspumpe.
They show schematically partly in section:
  • Fig. 1 is a getter sorption pump according to the invention and the
  • 2 and 3 further embodiments of the getter sorption pump according to the invention.

Die in Fig. 1 dargestellte Getter-Sorptionspumpe besteht im wesentlichen aus dem Heizelement 1, das in einem Isolierrohr 2 angeordnet ist. Die Vielzahl von Einzelgetterkörpern 3 ist voneinander beabstandet auf dem Isolier-. rohr 2 angebracht. Diese Anordnung ist von einem Pumpgefäß 7 umgeben, das mit einem Pumpflansch 8 an die Hochvakuumanlage angeschlossen werden kann. Die Heizanschlüsse 9 sind durch das Pumpgefäß 7 hindurchgeführt.The getter sorption pump shown in Fig. 1 consists essentially of the heating element 1, which is arranged in an insulating tube 2. The plurality of single getter bodies 3 is spaced apart on the insulating. tube 2 attached. This arrangement is surrounded by a pump vessel 7, which can be connected to the high vacuum system with a pump flange 8. The heating connections 9 are passed through the pump vessel 7.

Fig. 2 zeigt wiederum das mit dem Heizelement 1 versehene vorzugsweise aus Keramik bestehende und als Wärmespeicher dienende Isolierrohr 2. In diesem Ausführungsbeispiel sind die Einzel-Getterkörper 3 auf Metallscheiben 5 aufgebracht. Die Metallscheiben 5 sind mit Abstandssicken 6 versehen. Die Metallscheiben 5 können auch als Rohransatzteile ausgebildet sein. Damit wird sowohl eine gut wärmeleitende Verbindung mit dem Isolierrohr 2 als auch der gewünschte Abstand der einzelnen Metallscheiben geschaffen.2 again shows the insulating tube 2, which is provided with the heating element 1 and is preferably made of ceramic and serves as a heat store. In this exemplary embodiment, the individual getter bodies 3 are on metal disks 5 brought. The metal disks 5 are provided with spacer beads 6. The metal disks 5 can also be designed as tubular attachment parts. This creates both a good heat-conducting connection with the insulating tube 2 and the desired distance between the individual metal disks.

In Fig. 3 ist eine Getter-Sorptionspumpe dargestellt,bei der die auf das Isolierrohr 2, in dem das Heizelement 1 verläuft, aufgebrachten Einzel-Getterkörper 3 durch Metall- oder Keramikringe 4 voneinander beabstandet sind.FIG. 3 shows a getter sorption pump in which the individual getter bodies 3 applied to the insulating tube 2, in which the heating element 1 runs, are spaced apart from one another by metal or ceramic rings 4.

Claims (5)

1. Getter-Sorptionspumpe für Hochvakuum- und Gasentladungsanlagen mit mindestens einem Getterkörper aus nichtverdampfendem Gettermaterial und einem zugehörigen Heizelement, dadurch gekennzeichnet, daß das Heizelement (1) in einem Isolierrohr (2) angeordnet ist, und daß eine Vielzahl von Einzel-Getterkörpern (3) voneinander beabstandet auf dem Isolierrohr (2) angebracht ist.1. Getter sorption pump for high vacuum and gas discharge systems with at least one getter body made of non-evaporating getter material and an associated heating element, characterized in that the heating element (1) is arranged in an insulating tube (2), and in that a plurality of individual getter bodies (3 ) spaced apart on the insulating tube (2). 2. Getter-Sorptionspumpe nach Anspruch 1, dadurch gekennzeichnet, daß die Einzel-Getterkörper (3) durch Metall- oder Keramikringe (4) voneinander beabstandet sind.2. Getter sorption pump according to claim 1, characterized in that the individual getter body (3) by metal or ceramic rings (4) are spaced apart. 3. Getter-Sorptionspumpe nach Anspruch 1, dadurch gekennzeichnet, daß die Einzel-Getterkörper (3) auf Metallscheiben (5) aufgebracht sind, die mit Abstandssicken (6) versehen sind.3. Getter sorption pump according to claim 1, characterized in that the individual getter body (3) are applied to metal disks (5) which are provided with spacer beads (6). 4. Getter-Sorptionspumpe nach Anspruch 3, dadurch gekennzeichnet, daß die Metallscheiben (5) aus Molybdän oder Wolfram bestehen.4. Getter sorption pump according to claim 3, characterized in that the metal disks (5) consist of molybdenum or tungsten. 5. Getter-Sorptionspumpe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß die Einzel-Getterkörper (5) aus Zirkon, Titan, Thorium, Tantal, Platin, Niob, Cer, Palladium sowie deren Mischungen oder Legierungen bestehen.5. Getter sorption pump according to one of claims 1 to 4, characterized in that the individual getter body (5) made of zirconium, titanium, thorium, tantalum, platinum, niobium, cerium, palladium and mixtures or alloys thereof.
EP84109511A 1983-09-09 1984-08-09 Getter sorption pump having a heat accumulator for high-vacuum and gas discharge plants Withdrawn EP0144522A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19833332606 DE3332606A1 (en) 1983-09-09 1983-09-09 GETTER SORPTION PUMP WITH HEAT STORAGE FOR HIGH VACUUM AND GAS DISCHARGE SYSTEMS
DE3332606 1983-09-09

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EP0144522A2 true EP0144522A2 (en) 1985-06-19
EP0144522A3 EP0144522A3 (en) 1986-10-15

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EP84109511A Withdrawn EP0144522A3 (en) 1983-09-09 1984-08-09 Getter sorption pump having a heat accumulator for high-vacuum and gas discharge plants

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EP (1) EP0144522A3 (en)
DE (1) DE3332606A1 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0238908A1 (en) * 1986-03-19 1987-09-30 Siemens Aktiengesellschaft Cryosorption pump for thermal vacuum insulation of the rotor of an electric machine provided with a supra-conducting field coil
WO1996017171A2 (en) * 1994-12-02 1996-06-06 Saes Pure Gas, Inc. Getter pump module and system
US5555304A (en) * 1992-03-16 1996-09-10 Fujitsu Limited Storage medium for preventing an illegal use by a third party
EP0753663A1 (en) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Improved getter pump, particularly for a portable chemical analysis instrument
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
USRE39802E1 (en) 1992-03-16 2007-08-28 Fujitsu Limited Storage medium for preventing an irregular use by a third party

Families Citing this family (8)

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US5317900A (en) * 1992-10-02 1994-06-07 The Lyle E. & Barbara L. Bergquist Trust Ultrasensitive helium leak detector for large systems
US5328336A (en) * 1992-12-09 1994-07-12 Praxair Technology, Inc. Getter capsule
WO1998048168A2 (en) * 1997-04-18 1998-10-29 Saes Pure Gas, Inc. In situ getter pump system and method
IT1295340B1 (en) * 1997-10-15 1999-05-12 Getters Spa HIGH SPEED GAS ABSORPTION GETTER PUMP
US6988924B2 (en) * 2003-04-14 2006-01-24 Hewlett-Packard Development Company, L.P. Method of making a getter structure
US7045958B2 (en) * 2003-04-14 2006-05-16 Hewlett-Packard Development Company, L.P. Vacuum device having a getter
CN100554681C (en) * 2004-03-23 2009-10-28 株式会社大阪真空机器制作所 Pump-unit and pump unit thereof
JP6095586B2 (en) * 2013-01-25 2017-03-15 有限会社真空実験室 Getter member storage device, getter device and getter pump

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US3662522A (en) * 1969-07-24 1972-05-16 Getters Spa Getter pump cartridge
GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

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GB1586676A (en) * 1976-11-03 1981-03-25 Getters Spa Modular getter pumps

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4727724A (en) * 1986-03-19 1988-03-01 Siemens Aktiengesellschaft Crysosorption pump for the rotor of an electric machine having a superconducting exciter winding
EP0238908A1 (en) * 1986-03-19 1987-09-30 Siemens Aktiengesellschaft Cryosorption pump for thermal vacuum insulation of the rotor of an electric machine provided with a supra-conducting field coil
US5796824A (en) * 1992-03-16 1998-08-18 Fujitsu Limited Storage medium for preventing an irregular use by a third party
USRE39802E1 (en) 1992-03-16 2007-08-28 Fujitsu Limited Storage medium for preventing an irregular use by a third party
US5555304A (en) * 1992-03-16 1996-09-10 Fujitsu Limited Storage medium for preventing an illegal use by a third party
US6043137A (en) * 1994-10-31 2000-03-28 Saes Getters S.P.A. Getter pump module and system
US5980213A (en) * 1994-10-31 1999-11-09 Saes Getters S.P.A. Getter pump module and system
US6165328A (en) * 1994-10-31 2000-12-26 Saes Getters S.P.A. Method for processing wafers with in situ gettering
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US5879134A (en) * 1994-10-31 1999-03-09 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5972183A (en) * 1994-10-31 1999-10-26 Saes Getter S.P.A Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5993165A (en) * 1994-10-31 1999-11-30 Saes Pure Gas, Inc. In Situ getter pump system and method
US5997255A (en) * 1994-10-31 1999-12-07 Saes Getters S.P.A. Method for pumping a chamber using an in situ getter pump
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
WO1996017171A3 (en) * 1994-12-02 1996-10-24 Saes Pure Gas Inc Getter pump module and system
WO1996017171A2 (en) * 1994-12-02 1996-06-06 Saes Pure Gas, Inc. Getter pump module and system
EP0753663A1 (en) * 1995-07-10 1997-01-15 SAES GETTERS S.p.A. Improved getter pump, particularly for a portable chemical analysis instrument
US5772404A (en) * 1995-07-10 1998-06-30 Saes Getters S.P.A. Compact getter pump with nested thermally insulating shields

Also Published As

Publication number Publication date
DE3332606A1 (en) 1985-03-28
EP0144522A3 (en) 1986-10-15
US4571158A (en) 1986-02-18

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