EP0140032A1 - Procédé pour revêtir d'un film des substrats par pulvérisation cathodique - Google Patents

Procédé pour revêtir d'un film des substrats par pulvérisation cathodique Download PDF

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Publication number
EP0140032A1
EP0140032A1 EP19840110436 EP84110436A EP0140032A1 EP 0140032 A1 EP0140032 A1 EP 0140032A1 EP 19840110436 EP19840110436 EP 19840110436 EP 84110436 A EP84110436 A EP 84110436A EP 0140032 A1 EP0140032 A1 EP 0140032A1
Authority
EP
European Patent Office
Prior art keywords
silver
metal
stainless steel
substrate
copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19840110436
Other languages
German (de)
English (en)
Other versions
EP0140032B1 (fr
Inventor
Russell Caldwell Criss
Frank Howard Gillery
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Inc
Original Assignee
PPG Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/530,553 external-priority patent/US4512863A/en
Priority claimed from US06/530,570 external-priority patent/US4594137A/en
Application filed by PPG Industries Inc filed Critical PPG Industries Inc
Publication of EP0140032A1 publication Critical patent/EP0140032A1/fr
Application granted granted Critical
Publication of EP0140032B1 publication Critical patent/EP0140032B1/fr
Expired legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3607—Coatings of the type glass/inorganic compound/metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613—Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366—Low-emissivity or solar control coatings
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3689—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one oxide layer being obtained by oxidation of a metallic layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/70—Properties of coatings
    • C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant

Definitions

  • the present invention relates generally to the art of sputtering transparent metallic films for solar energy control, and more particularly to the art of controlling the color, adhesion and durability of sputtered films.
  • Transparent films of metals such as silver, copper, nickel and cobalt are readily produced by electroless deposition methods.
  • U.S. Patent No. 3,457,138 to Miller discloses an electroless (wet chemical) method for producing transparent copper films over a thin transparent silver film on glass.
  • produced wet chemical silver/copper films on glass have achieved commercial success as architectural products for solar energy control.
  • the coating effectively reflects solar heat energy while presenting an aesthetically appealling low reflectance pinkish colored surface to the observer.
  • U.S. Patent No. 4,462,884 to Gillery and Criss entitled "Low Reflectance, Low Emissivity Sputtered Films” discloses a method for producing transparent two-layer silver/copper films having a low reflectance pinkish colored appearance by cathode sputtering.
  • the method discloses therein requires the deposition of a first layer of silver in a discontinuous agglomerated state.
  • the deposition of a continuous copper film over the discontinuous agglomerated silver film produces the desired low reflectance pinkish colored appearance characteristic of the wet chemical product.
  • the deposition of silver in a discontinuous agglomerated state by cathode sputtering requires conditions which allow the silver arriving at the substrate surface sufficient time to agglomerate.
  • Slowing the arrival rate of the sputtered silver may be achieved by either lowering the power applied to the sputtering cathode or by increasing the gas pressure in the vacuum chamber in which the sputtering process is being performed.
  • Increasing the mobility of the silver may be achieved by raising the temperature or decreasing the surface energy of the substrate.
  • the discontinuous silver layer applied by cathode sputtering as described above does not have as good adhesion to glass as is desired for a commercial window unit.
  • the degree of agglomeration of the silver is difficult to control.
  • the deposition of the silver layer is affected by the condition of the glass surface and the method used to clean it.
  • the color and adhesion of a dual layer coating of silver and copper are particularly difficult to optimize if the glass substrate has been in storage and has stain or incipient stain on the surface to be coated.
  • the stability and durability of a sputtering film of a metal such as silver or copper is not sufficient for long periods.
  • the problem of the invention is solved by a method for coating a substrate with a film by cathode sputtering, wherein the film comprises a metal characterized by low adhesion to the substrate surface, the improvement which comprises first depositing onto the substrate surface a primer layer of a metal which bonds oxidatively to the substrate surface and subsequently sputtering at least one film of the low adhesion metal onto the primer layer, respectively by a method for coating a substrate with at least one elemental metal film by cathode sputtering, the improvement which comprises depositing over the elemental metal film or films a protective overcoat of a metal which forms a dense oxide surface.
  • the present invention provides a method for achieving improved adhesion and color control of a sputtering film of a metal such as silver or copper by means of a primary layer of a metal such as stainless steel.
  • the sputtering of a stainless steel primer layer is particularly useful in the production of a desirable silver/copper two-layer sputtered film on glass.
  • the stainless steel primer layer may be sputtered onto a substrate surface to a thickness on the order of an atomic layer to provide a suitable surface for the sputtering of more sensitive metals such as silver. Thicker primer layers are also useful, limited only by the desired final transmittance of coated article.
  • the present invention also provides a method for achieving improved stability and durability of a sputtering film of a metal such as silver or copper by means of an overcoat of a metal such as stainless steel.
  • the sputtering of a stainless steel protective overcoat is particularly useful in the production of a desirable silver/copper two-layer sputtered film on glass.
  • the stainless steel overcoat may be sputtered onto the metal film to a thickness of at least about 20 Angstroms. Thicker overcoats are also useful, limited only by the desired final transmittance of the coated article.
  • Nonmetallic substrates preferably transparent substrates such as glass
  • various metal and metal oxide films by cathode sputtering.
  • the adhesion of some metallic films, notably silver, is not as good as is desired in a commercial product.
  • the sputtered film may contain off-color spots, associated with the surface quality of the substrate, which render the product commercially unacceptable.
  • the film adhesion and substrate surface quality problems of the prior art are solved by means of a primer layer of an adherent, stable metal composition which bonds oxidatively to the substrate surface, such as stainless steel, chromium or titanium.
  • a stainless steel cathode is installed in a sputtering chamber.
  • a clean transparent substrate is coated with a very thin primer layer of stainless steel prior to the deposition of other metals which do not adhere as well such as gold, silver and/or copper.
  • An extremely thin layer of stainless steel, an essentially elemental layer only a few Angstroms thick, is sufficient to provide the desired adhesion and stability. Thicker primer layers are also useful, limited in thickness only by the desired transmittance of the final coated article.
  • glass substrates to be coated with a two-layer silver/copper film by cathode sputtering are first coated with a stainless steel primer layer.
  • the glass substrates are preferably first washed in a conventional washing operation to remove any accumulated dirt and debris.
  • the glass may be of any composition, but soda-line-silica float glass is preferred. Typical float glass substrates have a transmittance of about 90 percent in the visible wavelength range.
  • a clean glass substrate is placed in a sputtering chamber equipped with a stainless steel cathode. Sputtering is carried out to form a very thin primer layer of stainless steel on the glass surface.
  • the thickness of the stainless steel primer layer may be as little as a few Angstroms, essentially an elemental layer, which decreases the transmittance by only about 1 to 2 percent. Such a stainless steel primer layer is sufficient to produce the desired adhesion and stability of subsequently sputtered films.
  • a discontinuous silver film is not produced at useful thicknesses when silver is sputtered onto the stainless steel primer layer.
  • the resultant coated article may have a more highly reflective appearance and a more silvery or coppery color than is desired.
  • a desired low reflectance pinkish colored silver/copper coating can be formed by increasing the thickness of the stainless steel primer layer, typically to about 20 to 25 Angstroms. If the thicker primer layer produces a lower reflectance than is desired, the reflectance can be raised by increasing the amount of silver relative to the amount of copper in the overlying two-layer film.
  • the silver/copper two-layer films of the present invention may be stabilized by treatment with passivating agents.
  • the stability and durability problems of the prior art are solved by means of an overcoat of a durable, stable metal, such as stainless steel, chromium or titanium, which forms a dense oxide surface.
  • a stainless steel cathode is installed in a sputtering chamber.
  • the stainless steel overcoat is applied in conjunction with a stainless steel primer layer.
  • a clean, transparent substrate is preferably coated with a very thin primer layer of stainless steel prior to the deposition of other compositions such as silver and/or copper.
  • a stainless steel overcoat is then sputtered over the silver and/or copper film to provide stability and durability to the exposed surface of the film.
  • a thin layer of stainless steel, about 20 Angstroms thick, is sufficient to provide the desired stability and durability. Thicker overcoats are also useful, limited in thickness only by the desired transmittance of the final coated article.
  • glass substrates to be coated with a two-layer silver/copper film by cathode sputtering are first coated with a stainless steel primer layer.
  • a silver layer is then sputtered onto the primer layer, and a copper layer sputtered over the silver layer.
  • a stainless steel overcoat is sputtered over the copper.
  • the thickness of the stainless steel overcoat may be as little as about 20 Angstroms, which decreases the transmittance by only about 3 percent.
  • Such a stainless steel overcoat is sufficient to produce the desired stability and durability of the underlying sputtered films. Thicker overcoats, on the order of 30 to 40 Angstroms, are generally preferred. Since the stainless steel overcoat further reduces the reflectance and transmittance of the coated article, the amount of silver may be further increased relative to the amount of copper to achieve the desired appearance.
  • primer metals may include chromium, titanium, vanadium, aluminum, tin, tantalum and nickel alloys such as Inconel.
  • other sputtered metals such as gold, platinum and palladium may benefit from the primer and/or overcoat layers of the present invention.
  • other metals which form a dense oxide surface are suitable protective overcoats, such as titanium, chromium, vanadium, aluminum, tin, tantalum and nickel alloys such as Inconel.
  • suitable protective overcoats such as titanium, chromium, vanadium, aluminum, tin, tantalum and nickel alloys such as Inconel.
  • Nonmetallic substrates other than glass may be coated, and need not be transparent. The present invention will be further understood from the descriptions of specific examples which follow.
  • Stainless steel, silver and copper cathodes are installed in the coater in sequence. Each cathode is powered by a standard 120 kilowatt power supply operating under power control at various percentages of the rated power. The speed of the conveyor and number of cathodes may be varied to obtain the desired film thickness.
  • the atmosphere in the sputtering chamber is argon at a pressure of 3 nillitorr. In this example, the line speed is about 80 inches (about 2 meters) per minute for a single pass under stainless steel, silver and copper cathodes in sequence.
  • a transmission photometer which reads luminous transmission is installed on-line to monitor the :ransmission of the film after each stage of coating.
  • a glass substrate is conveyed under the stainless steel cathode, which comprises 19 percent chromium, 9 percent nickel, no nore than 0.08 percent carbon and the balance iron, at an applied voltage of 360 volts.
  • a stainless steel primer layer is sputtered onto the glass surface, decreasing the transmittance from about 90 percent to about 74 percent, corresponding to a stainless steel primer Layer thickness of about 24 Angstroms.
  • the stainless steel primer coated glass is then conveyed under the silver cathode.
  • a continuous silver layer is sputtered, at an applied voltage of 331 volts, over the stainless steel primer layer, decreasing the transmittance of the coated glass to about 63 percent, corresponding to a silver layer thickness of about 22 Angstroms.
  • the silver coated, stainless steel primed glass is conveyed under the copper cathode, at an applied voltage of 423 volts, sputtering a layer of copper over the silver layer, decreasing the transmittance to about 16 percent, corresponding to a copper layer thickness of about 257 Angstroms.
  • the stainless steel primer layer of this example in combination with preferred silver and copper layer thicknesses, duplicates a desired low reflectance pinkish colored appearance.
  • the improved adhesion of the silver/copper film with the stainless steel primer is evaluated by means of a tape test wherein an adhesive tape (Scotch® brand transparent tape) is pressed against the coating and then removed. Without the primer, essentially all of the silver/copper film is removed with the tape. However, when the silver/copper film is sputtered over a primer layer in accordance with the present invention, as in this example, none of the film is removed with the tape.
  • a glass substrate is conveyed under a stainless steel cathode as in Example I.
  • a stainless steel primer layer is sputtered onto the glass surface, decreasing the transmittance from about 90 percent to about 77 percent, corresponding to a stainless steel primer layer thickness of about 21 Angstroms.
  • the stainless steel primer coated glass is then conveyed under the silver cathode.
  • a continuous silver layer is sputtered, at an applied voltage of 325 volts, over the stainless steel primer layer, decreasing the transmittance of the coated glass to about 63 percent, corresponding to a silver layer thickness of about 27 Angstroms.
  • the silver coated, stainless steel primed glass is conveyed under the copper cathode, at an applied voltage of 424 volts, sputtering a layer of copper over the silver layer, decreasing the transmittance to about 16 percent, corresponding to a copper layer thickness of about 257 Angstroms.
  • the stainless steel overcoat is sputtered at an applied voltage of 389 volts, decreasing the transmittance to 12 percent, corresponding to a stainless steel overcoat thickness of about 34 Angstroms.
  • the stainless steel layers of this example in combination with preferred silver and copper layer thicknesses, duplicate a desired low reflectance pinkish colored appearance.
  • the improved stability of the silver/copper film with the stainless steel overcoat is evaluated by means of a heat soak test wherein coated samples are placed in an oven at 275°F. (135°C.) for 5 hours. Without the overcoat, untreated silver/copper films undergo significant visible color changes.
  • Silver/copper films treated with a passivating agent do not significantly change color, but become nonuniform, e.g., streaked. However, when the silver/copper film is overcoated with stainless steel in accordance with the present invention, as in this example, there is no significant visible change in the film, in either the color or the uniformity.

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  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Optical Filters (AREA)
  • Laminated Bodies (AREA)
EP19840110436 1983-09-09 1984-09-03 Procédé pour revêtir d'un film des substrats par pulvérisation cathodique Expired EP0140032B1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US530553 1983-09-09
US06/530,553 US4512863A (en) 1983-09-09 1983-09-09 Stainless steel primer for sputtered films
US530570 1983-09-09
US06/530,570 US4594137A (en) 1983-09-09 1983-09-09 Stainless steel overcoat for sputtered films

Publications (2)

Publication Number Publication Date
EP0140032A1 true EP0140032A1 (fr) 1985-05-08
EP0140032B1 EP0140032B1 (fr) 1990-02-28

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EP19840110436 Expired EP0140032B1 (fr) 1983-09-09 1984-09-03 Procédé pour revêtir d'un film des substrats par pulvérisation cathodique

Country Status (5)

Country Link
EP (1) EP0140032B1 (fr)
JP (1) JPH0621345B2 (fr)
AU (1) AU572881B2 (fr)
DE (1) DE3481433D1 (fr)
ES (1) ES8601820A1 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0386993A1 (fr) * 1989-03-09 1990-09-12 Guardian Industries Corp. Verre recouvert par pulvérisation pouvant être traité à chanol
EP0391708A2 (fr) * 1989-04-06 1990-10-10 Motorola, Inc. Configuration de métallisation de face arrière pour dispositifs à semiconducteur
EP0546470A1 (fr) * 1991-12-09 1993-06-16 Guardian Industries Corp. Verre recouvert par pulvérisation pouvant être traité à chaud
FR2753725A1 (fr) * 1996-09-26 1998-03-27 Tecmachine Revetement de surface de materiaux isolants, son procede d'obtention et son application pour la realisation de blindages pour boitiers isolants
WO1999008974A1 (fr) * 1997-08-13 1999-02-25 Glaverbel Miroirs a base de cuivre et de verre
WO1999008972A1 (fr) * 1997-08-13 1999-02-25 Glaverbel Miroirs a base de cuivre et de verre
US6132881A (en) * 1997-09-16 2000-10-17 Guardian Industries Corp. High light transmission, low-E sputter coated layer systems and insulated glass units made therefrom
WO2010069104A1 (fr) * 2008-12-17 2010-06-24 Chin Raymond Revêtement antibactérien, ses procédés de préparation et pièce métallique contenant le revêtement
WO2010103097A1 (fr) * 2009-03-12 2010-09-16 Centre National De La Recherche Scientifique (Cnrs) Decoration par pulverisation plasma magnetron sur des contenants en verre pour les secteurs de la cosmetique
CN111769251A (zh) * 2020-04-10 2020-10-13 上海大学 金属电极的保护方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6212184A (ja) * 1985-07-09 1987-01-21 田中貴金属工業株式会社 石英板に銅をスパツタめつきする方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2334152B2 (de) * 1973-07-05 1975-05-15 Flachglas Ag Delog-Detag, 8510 Fuerth Wärmereflektierende, 20 bis 60% des sichtbaren Lichtes durchlassende Fensterscheibe mit verbesserter Farbneutralltät In der Ansicht und ihre Verwendung
DE2924824B2 (de) * 1979-06-20 1981-07-23 Bfg Glassgroup, Paris Wärmereflexionsscheibe, insbesondere wärmereflektierende Fensterscheibe, und deren Verwendung als Außenscheibe einer Mehrscheibenanordnung
DE2924833B2 (de) * 1979-06-20 1981-08-06 Bfg Glassgroup, Paris Wärmereflexionsscheibe mit farbneutraler Außenansicht und deren Verwendung als Außenscheibe einer Mehrscheibenanordnung
US4342632A (en) * 1981-05-01 1982-08-03 The United States Of America As Represented By The Secretary Of The Army Method of metallizing a ceramic substrate
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Cited By (15)

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Publication number Priority date Publication date Assignee Title
EP0386993A1 (fr) * 1989-03-09 1990-09-12 Guardian Industries Corp. Verre recouvert par pulvérisation pouvant être traité à chanol
EP0391708A2 (fr) * 1989-04-06 1990-10-10 Motorola, Inc. Configuration de métallisation de face arrière pour dispositifs à semiconducteur
EP0391708A3 (fr) * 1989-04-06 1991-03-20 Motorola, Inc. Configuration de métallisation de face arrière pour dispositifs à semiconducteur
EP0546470A1 (fr) * 1991-12-09 1993-06-16 Guardian Industries Corp. Verre recouvert par pulvérisation pouvant être traité à chaud
US5298048A (en) * 1991-12-09 1994-03-29 Guardian Industries Corp. Heat treatable sputter-coated glass systems
EP0834600A1 (fr) * 1996-09-26 1998-04-08 Tecmachine Revêtement de surface de matériaux isolants, son procédé d'obtention et son application pour la réalisation de blindages pour boítiers isolants
FR2753725A1 (fr) * 1996-09-26 1998-03-27 Tecmachine Revetement de surface de materiaux isolants, son procede d'obtention et son application pour la realisation de blindages pour boitiers isolants
US6042950A (en) * 1996-09-26 2000-03-28 Tecmachine Surface coating for insulative materials, method of obtaining it and its application to shielding insulative cases
WO1999008974A1 (fr) * 1997-08-13 1999-02-25 Glaverbel Miroirs a base de cuivre et de verre
WO1999008972A1 (fr) * 1997-08-13 1999-02-25 Glaverbel Miroirs a base de cuivre et de verre
US6132881A (en) * 1997-09-16 2000-10-17 Guardian Industries Corp. High light transmission, low-E sputter coated layer systems and insulated glass units made therefrom
WO2010069104A1 (fr) * 2008-12-17 2010-06-24 Chin Raymond Revêtement antibactérien, ses procédés de préparation et pièce métallique contenant le revêtement
WO2010103097A1 (fr) * 2009-03-12 2010-09-16 Centre National De La Recherche Scientifique (Cnrs) Decoration par pulverisation plasma magnetron sur des contenants en verre pour les secteurs de la cosmetique
FR2943072A1 (fr) * 2009-03-12 2010-09-17 Centre Nat Rech Scient Decoration par pulverisation plasma magnetron sur des contenants en verre pour les secteurs de la cosmetique.
CN111769251A (zh) * 2020-04-10 2020-10-13 上海大学 金属电极的保护方法

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AU572881B2 (en) 1988-05-19
AU3235784A (en) 1986-03-20
JPH0621345B2 (ja) 1994-03-23
JPS6086265A (ja) 1985-05-15
DE3481433D1 (de) 1990-04-05
ES535746A0 (es) 1985-11-01
EP0140032B1 (fr) 1990-02-28
ES8601820A1 (es) 1985-11-01

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