EP0086460A1 - Hochvakuum-Rotationspumpe - Google Patents

Hochvakuum-Rotationspumpe Download PDF

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Publication number
EP0086460A1
EP0086460A1 EP83101276A EP83101276A EP0086460A1 EP 0086460 A1 EP0086460 A1 EP 0086460A1 EP 83101276 A EP83101276 A EP 83101276A EP 83101276 A EP83101276 A EP 83101276A EP 0086460 A1 EP0086460 A1 EP 0086460A1
Authority
EP
European Patent Office
Prior art keywords
pump
shaft
gas
sleeve
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP83101276A
Other languages
English (en)
French (fr)
Other versions
EP0086460B1 (de
Inventor
Claude Saulgeot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Compagnie Industrielle de Telecommunication CIT Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9271019&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP0086460(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA, Compagnie Industrielle de Telecommunication CIT Alcatel SA filed Critical Alcatel CIT SA
Publication of EP0086460A1 publication Critical patent/EP0086460A1/de
Application granted granted Critical
Publication of EP0086460B1 publication Critical patent/EP0086460B1/de
Expired legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings

Definitions

  • the present invention relates to a rotary high vacuum pump such as a molecular or turbomolecular vacuum pump.
  • high vacuum pumps which operate in the molecular or turbomolecular domain comprise a rotor rotating at high speed in a fixed stator.
  • the molecules transport effect is generated at the periphery of the rotor rotating at high speed by reflection of a large part of these molecules in the region of the stator opposite it; the stator then returns part of the molecules received in the part of the rotor which is located below and so on, so that the rotor-stator assembly has a pressure ratio between the partial pressure of the gas on the discharge side and the pressure of the same gas on the suction side.
  • It comprises a rotor driven by a motor arranged outside the pumping enclosure and connected to the latter by a drive shaft, the sealing of which is ensured by a dynamic seal with grooves.
  • the shaft is supported on the one hand by an external bearing disposed outside the pumping enclosure and on the other hand by an internal bearing disposed inside the pumping enclosure and lubricated to fat.
  • the internal bearing is arranged between the dynamic seal at groove and a viscous dynamic seal interposed between the inner bearing and the outer bearing.
  • a longitudinal groove connects the two faces of the internal bearing.
  • the cooling of the ball bearing located in the empty zone is easily carried out by conduction through the shaft, one end of which is easily cooled since it is located in the atmosphere.
  • the cooling of the rotor and of the stator of the motor is carried out by conventional means since these two parts are located in the atmosphere, as well as the external bearing.
  • the position of the ball bearings relative to the flow of pumped gas is not excellent despite the arrangement of the longitudinal groove avoiding the direct crossing of the bearing by the gas and on the other hand as the movable assembly has one of its ends situated in an enclosure at very low pressure and the other situated at atmospheric pressure, this results in a significant axial load supported by one of the two bearings which limits the service life of the pump.
  • the present invention aims to overcome these drawbacks while also ensuring good cooling of the bearings and the motor.
  • the subject of the invention is therefore a rotary high-vacuum pump of the type comprising a pump body to which a multistage stator is connected, and a rotor also with several stages mounted on a shaft driven by a motor, said shaft journalling in at at least two ball bearings arranged in a sleeve formed by an extension of said pump body, a dynamic seal being wedged on said shaft at the end close to the body of the sleeve, characterized in that the opposite end of the sleeve is closed, a nozzle connected to an external source of gas being disposed at this closed end, said pump body being moreover connected to an external primary vacuum pump, so that said ball bearings and the rotor of said motor are permanently swept by said gas / entering by said adjustment, evacuated by said dynamic joint and circulating under a pres between the atmospheric pressure and the discharge pressure of the pump.
  • the pump comprises, in known manner, a pump body 4 to which is linked a stator 3 with several stages, as well as a rotor 2 also with several stages mounted on a drive shaft 1.
  • the pump body 4 is open at its upper end to allow its connection to the enclosure (not shown) in which a high vacuum must be achieved.
  • the body 4 has at its lower part an extension constituting a sleeve 18 closed at its lower end by a closure tape 11.
  • the shaft 1 pivots in the body 4 by means of two ball bearings 5 and 6 respectively secured to the upper part and to the lower part of said sleeve 18 and it is driven by means of an electric motor, the rotor and the stator are referenced 9 and 10 respectively.
  • This motor is disposed between the bearings 5 and 6, but it could also be installed at the level of the lower part of the shaft 1.
  • a dynamic seal 7 with grooves is arranged on the shaft 1, at the upper part of the sleeve 18, above the ball bearing 5.
  • Such a dynamic seal seals along the shaft 1, and separates the ball bearings 5 and 6 as well as the rotor 9 of the electric motor from the pumping zone delimited by the body 4.
  • This pumping zone is moreover connected to an external primary vacuum pump (not shown) by means of the tubing 19.
  • a nozzle 8 is formed in the closure tape 11, this nozzle being able to introduce into the pump outside air or a neutral gas.
  • channels 12 and 12 ' provided in the wall of the sleeve 18 allow the two faces of each of the ball bearings 5 and 6 to be placed in communication.
  • the members such as in particular the ball bearings 5 and 6, the rotor 9 of the motor are continuously swept by a flow of said outside air or of said neutral gas under a pressure of the order of a few tens of Torr, intermediate between atmospheric pressure and the pump discharge pressure, such a gas flow being pumped by the primary pump connected to the pipe 19 , this pump also ensuring the discharge of the molecular pumping cell.
  • the pressure at the level of the lubricant is maintained at a value such that its evaporation rate has a minimum value. It is therefore possible not to periodically renew the lubrication of the ball bearings. Furthermore, and unlike the cited earlier document, the end of the moving assembly, situated on the side opposite the rotor, is no longer subjected to atmospheric pressure but only a few tens of Torr, the axial load supported by the bearings is therefore much lower.
  • said gaseous sweep prevents any migration of the lubricant towards the suction of the pump, thus giving said pump according to the invention the qualities required for a so-called "dry pump” pump.
  • the pump according to the invention allows more efficient cooling, since the heating zone located at the level of the ball bearings and the electric motor is subjected to a pressure of a few tens of Torr.
  • the invention is advantageously implemented in all types of molecular vacuum pumps and in particular in pumps used in microelectronic techniques.
  • the dynamic joint 7 with grooves can be replaced by a dynamic joint of very simple design and can be obtained simply by two opposite surfaces, suitably associated, with or without grooves, the condition of the surfaces then having the effect grooves.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Mounting Of Bearings Or Others (AREA)
EP83101276A 1982-02-16 1983-02-10 Hochvakuum-Rotationspumpe Expired EP0086460B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8202496A FR2521650A1 (fr) 1982-02-16 1982-02-16 Pompe rotative a vide eleve
FR8202496 1982-02-16

Publications (2)

Publication Number Publication Date
EP0086460A1 true EP0086460A1 (de) 1983-08-24
EP0086460B1 EP0086460B1 (de) 1985-10-09

Family

ID=9271019

Family Applications (1)

Application Number Title Priority Date Filing Date
EP83101276A Expired EP0086460B1 (de) 1982-02-16 1983-02-10 Hochvakuum-Rotationspumpe

Country Status (5)

Country Link
US (1) US4512725A (de)
EP (1) EP0086460B1 (de)
JP (1) JPS58150096A (de)
DE (1) DE3360947D1 (de)
FR (1) FR2521650A1 (de)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0159464A1 (de) * 1984-03-24 1985-10-30 Leybold Aktiengesellschaft Molekularvakuumpumpe
FR2567208A1 (fr) * 1984-07-05 1986-01-10 Cit Alcatel Pompe rotative a vide eleve
EP0245843A2 (de) * 1986-05-15 1987-11-19 ALCATEL HOCHVAKUUMTECHNIK GmbH Heliumlecksuchanlage
CN103671578A (zh) * 2012-09-26 2014-03-26 上海阔步机械模具有限公司 一种用于动压轴承的润滑装置
EP2826999A1 (de) * 2013-07-15 2015-01-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
US11338258B2 (en) * 2019-09-19 2022-05-24 Limited Liability Company “Bioenergy” Rotary-pulsation device

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62153597A (ja) * 1985-12-27 1987-07-08 Hitachi Ltd 真空ポンプ
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
FR2611819B1 (fr) * 1987-02-25 1989-05-05 Cit Alcatel Pompe a vide, rotative
US5501583A (en) * 1992-08-19 1996-03-26 Hitachi, Ltd. Turbo vacuum pump
JP2998441B2 (ja) * 1992-08-19 2000-01-11 株式会社日立製作所 ターボ真空ポンプ
JP3125207B2 (ja) * 1995-07-07 2001-01-15 東京エレクトロン株式会社 真空処理装置
IT1292764B1 (it) * 1997-06-11 1999-02-11 Varian Spa Pompa da vuoto.
FR2783883B1 (fr) * 1998-09-10 2000-11-10 Cit Alcatel Procede et dispositif pour eviter les depots dans une pompe turbomoleculaire a palier magnetique ou gazeux
US6196813B1 (en) 1999-07-06 2001-03-06 Flowserve Management Company Pump assembly including integrated adapter
DE10004263A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Dynamische Dichtung
US6821099B2 (en) * 2002-07-02 2004-11-23 Tilia International, Inc. Rotary pump
DE10256086A1 (de) * 2002-11-29 2004-06-17 Leybold Vakuum Gmbh Kugellager und mit einem Lager dieser Art ausgerüstete Vakuumpumpe
DE202006017846U1 (de) * 2006-11-23 2008-03-27 Oerlikon Leybold Vacuum Gmbh Hochvakuumpumpe
PE20142007A1 (es) * 2008-06-13 2014-12-19 Weir Minerals Australia Ltd Un soporte para alojamiento de bomba
DE102008036623A1 (de) * 2008-08-06 2010-02-11 Oerlikon Leybold Vacuum Gmbh Verwendung eines Wälzlagers zur Lagerung rotierender Bauteile in Vakuumeinirchtungen sowie Vakuumeinrichtung

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1559385A (de) * 1967-03-23 1969-03-07
DE1428239A1 (de) * 1961-08-04 1969-06-19 Commissariat Energie Atomique Turbomolekular-Vakuumpumpe
FR2161180A5 (de) * 1971-11-16 1973-07-06 Cit Alcatel
DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1230206A (en) * 1911-04-27 1917-06-19 Richmond Radiator Company Suction-producer.
US1657550A (en) * 1922-04-29 1928-01-31 Doherty Res Co Method and apparatus for cooling electrical apparatus
US3355179A (en) * 1964-08-24 1967-11-28 Gen Electric Gas buffered screw seal
DE2359456A1 (de) * 1973-11-29 1975-06-05 Leybold Heraeus Gmbh & Co Kg Turbomolekularvakuumpumpe mit gasgelagertem rotor
IT1032818B (it) * 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1428239A1 (de) * 1961-08-04 1969-06-19 Commissariat Energie Atomique Turbomolekular-Vakuumpumpe
FR1559385A (de) * 1967-03-23 1969-03-07
FR2161180A5 (de) * 1971-11-16 1973-07-06 Cit Alcatel
DE2349033A1 (de) * 1973-09-29 1975-04-10 Leybold Heraeus Gmbh & Co Kg Turbomolekularpumpe
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
US4311004A (en) * 1979-10-26 1982-01-19 Rotoflow Corporation Gas compression system and method
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0159464A1 (de) * 1984-03-24 1985-10-30 Leybold Aktiengesellschaft Molekularvakuumpumpe
FR2567208A1 (fr) * 1984-07-05 1986-01-10 Cit Alcatel Pompe rotative a vide eleve
US4588361A (en) * 1984-07-05 1986-05-13 Compagnie Industrielle Des Telecommunications Cit-Alcatel High vacuum rotary pump
EP0245843A2 (de) * 1986-05-15 1987-11-19 ALCATEL HOCHVAKUUMTECHNIK GmbH Heliumlecksuchanlage
EP0245843A3 (en) * 1986-05-15 1988-02-03 Alcatel Hochvakuumtechnik Gmbh Device for helium leak indicator
CN103671578A (zh) * 2012-09-26 2014-03-26 上海阔步机械模具有限公司 一种用于动压轴承的润滑装置
EP2826999A1 (de) * 2013-07-15 2015-01-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
US11338258B2 (en) * 2019-09-19 2022-05-24 Limited Liability Company “Bioenergy” Rotary-pulsation device

Also Published As

Publication number Publication date
DE3360947D1 (en) 1985-11-14
FR2521650B1 (de) 1984-04-06
JPS58150096A (ja) 1983-09-06
FR2521650A1 (fr) 1983-08-19
US4512725A (en) 1985-04-23
JPH0133677B2 (de) 1989-07-14
EP0086460B1 (de) 1985-10-09

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