EP0078038A1 - Verfahren zum Betrieb eines Festkörper-Bildabtasters - Google Patents

Verfahren zum Betrieb eines Festkörper-Bildabtasters Download PDF

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Publication number
EP0078038A1
EP0078038A1 EP82109789A EP82109789A EP0078038A1 EP 0078038 A1 EP0078038 A1 EP 0078038A1 EP 82109789 A EP82109789 A EP 82109789A EP 82109789 A EP82109789 A EP 82109789A EP 0078038 A1 EP0078038 A1 EP 0078038A1
Authority
EP
European Patent Office
Prior art keywords
charge
shift register
charges
bias
horizontal readout
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP82109789A
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English (en)
French (fr)
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EP0078038B1 (de
Inventor
Yoshio Ohkubo
Yoshiaki Sone
Susumu Hashimoto
Kiyotsugu Ishikawa
Masanori Omae
Masao Hiramoto
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of EP0078038A1 publication Critical patent/EP0078038A1/de
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Publication of EP0078038B1 publication Critical patent/EP0078038B1/de
Expired legal-status Critical Current

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors

Definitions

  • the present invention relates to a method for driving a solid-state image sensor.
  • a solid-state image sensor comprises an array of photosensors which converts a pattern of light focused thereupon into a pattern of charges which in -turn are stored therein, and a scanning section or stage for scanning the photosensor array, thereby moving the resulting packs of charge to an output terminal.
  • a photosensor array consists of, for instance, an array of m x n photodiodes each of which is associated with a MOS transistor switch for transferring signal charge onto vertical signal line.
  • a vertical shift register is provided so that all the MOS transistor switches in each column are turned on and off and when the MOS transistor switch is turned on, it establishes an electrical connection between the associated photodiode and the vertical signal line.
  • the vertical signal lines are connected to a horizontal readout circuit which is adapted to scan the vertical signal lines one column at a time so that the signal charges or packs of charge can be serially transferred onto the horizontal signal output line.
  • the so-called solid-state image sensor comprises, in general, a horizontal readout circuit consisting of a horizontal shift register for generating the horizontal scanning pulses and an array of switching transistors which are interconnected between the vertical signal lines and the horizontal output signal line and which is controlled by the horizontal shift register.
  • the solid-state image sensor of the type just described above has a drawback that the noise produced when the horizontal switching transistors are turned on and off causes the noise in the form of fixed patterns on the reproduced picture, whereby the reproduced picture quality is much degraded. .
  • CCD charge-coupled device
  • One of the most simple solid-state image sensors of the type employing CCDs is such that the vertical signal lines are connected through transfer gates to a horizontal readout CCD (to be referred to as "the horizontal CCD" for brevity in this specification).
  • the horizontal CCD horizontal readout CCD
  • one end of each vertical signal line must be connected to an n-type diffused region of a pn junction so that the signal charge on the vertical signal line can be injected into the horizontal CCD.
  • the interior of the diffused region is not influenced by the electric fields, it becomes difficult to transfer the signal charge from the diffused region to other potential wells within a brief time period in an efficient manner.
  • the transfer section or stage has two gates and one charge storage means for each vertical line so that the signal charge which has been transferred onto the vertical signal line can be efficiently transferred into the horizontal CCD. More specifically, a first gate is turned on so that the charge of a predetermined value (to be referred to as "the internal bias charge Qp" in this specification) is transferred from the charge storage means onto the vertical signal line and added to the signal charge Q S transferred from the phtodiode. Thereafter the signal and internal bias charges Q S and Qp are returned back to the associated charge storage means and the first gate is turned off.
  • a predetermined value to be referred to as "the internal bias charge Qp" in this specification
  • the second gate is turned on, the signal charge Q S is transferred into the horizontal CCD.
  • the solid-state image sensors employing CCDs have come to be used in practice, but they have still have a problem to be solved. That is, only the signal charge Q is transferred from the charge storage means into the horizontal CCD so that if the quantity of the signal charge Q S is too small, the transfer efficiency is considerably reduced. The degradation in transfer efficiency in turn will result in the degradation of color--separation characteristics with the resultant color mixturing and the like. Moreover, in response to the intensity of the incident light, variations of hue in color occur.
  • BED bucket bridge device
  • IEE Journal of Solid-State Circuit, Vol. SC-15, No. 2, pp 206-213 the bias charge is transferred from BBD to a vertical signal line and added to the signal charge of a small value generated when the intensity of the incident light is low. Thereafter the signal charge plus the bias charge are transferred back into BBD, thereby attempting to increase the charge transfer efficiency.
  • the "buckets" of BBD consist of a diffused region or layer so that the control on the voltage on the vertical signal line and on the voltage at the associated "bucket" for the transfer of the charge becomes easy.
  • the primary object of the present invention is, therefore, to provide an improved method for driving the solid-state image sensor of the type employing CCDs as horizontal scanning circuits, in which the degradation in charge transfer efficiency can be almost eliminated by adding external bias charges so that the high-quality picture may be reproduced.
  • the present invention provides a driving method comprising the steps of
  • a solid-state image sensor element to which can be applied the present invention will be described first.
  • FIG. 1 is shown an example of a solid-state image sensor element to which can be applied the present invention.
  • a photosensor array consists of an m x n matrix consisting of photodiodes P 11 , P 12 , ... P ij , ..., and P mn' each of which is associated with a MOS transistor switch 5 11 , S 12 , ..., S ij , ... or S mn .
  • the gate electrodes 3 of the MOS transistor switches S in respective rows are connected in common to respective output terminals of a vertical shift register 7 which serves to generate the vertical scanning clock pulses.
  • the upper ends of vertical signal lines 4 1 , 4 2 , ..., and 4 n are connected to a horizontal readout CCD shift register 13 (to be referred to as "the horizontal CCD" for brevity in this specification) through a transfer gate consisting of transistor switches 5 1 , 5 2 , ..., and 5 n .
  • the lower ends of the vertical signal lines 4 1 , 4 2 , ..., and 4 n are connected a voltage terminal D S through transistor switches 6 1 , 6 2 , ..., and 6 n .
  • Such arrangement consisting of the voltage terminals D S and transistor switches 4 1 to 4 n as described is used for the explanation of the prior art operating system so that it is not used in the present invention.
  • the four-phase drive system is employed to drive the horizontal CCD 13 for charge transfer.
  • the output from the horizontal CCD 13 is transferred through an amplifier 12 to the output terminal 13.
  • Fig. 2 are shown in cross section the photodiode P.., the transistor switch S ij , the vertical signal line 4., the transistor switch 5, and a ⁇ H 2 clock phase stage of the horizontal shift register connected to them.
  • n-type diffused regions 2, 2', 2" and 2''' Over the upper surface of a p-type semiconductor substrate 1 are formed n-type diffused regions 2, 2', 2" and 2''' and an n-type diffused region which is an embedded region of the horizontal CCD.
  • the pn junction between the substrate 1 and the n-type diffused region 2 constitutes a photodiode P... ij
  • the solid-state image sensor element with the aforementioned construction is driven by a prior art operating system as described below.
  • the gate terminals TG of the transfer switches 5 1 through 5 n are raised to a HIGH level.
  • the signal charge on the vertical signal lines 4 1 through 4 n are entered or injected into the horizontal CCD 13.
  • the end of the vertical signal line is connected to the n-type diffused region 2" which has a pn junction and the diffused region is not influenced by the electric firlds so that it is impossible to transfer the charge from the vertical signal line to the horizontal CCD 13 within a brief time interval in an efficient manner.
  • the solid-state image sensor of the type as shown in Fig. 1 or 2 has not been used in practice.
  • the present invention provides an improved drive system so that the above-stated solid-state image sensor element can be successfully used in practice.
  • Fig. 3 is shown an another example of a solid--state image sensor element to which can be applied the drive method in accordance with the present invention.
  • the second example is similar to the solid-state image sensor element as shown in Fig. 1 or 2 except that a vertical charge transfer gate 15 is interconnected between the vertical signal lines 4 1 - 4 n and the horizontal CCD 13 so that the efficiency of the signal charge transfer may be increased.
  • the vertical charge transfer gate 15 comprises a first transistor switch array consisting of transistors 16 1 , 16 2 , ..., 16 j , ..., and 16 n and a second transistor switch array consisting of transistors 17 1 , 17 2 , ..., 17 , ..., and 17 n and charge storages 18 1 , 18 2 , ..., 18 j, ... and 18 . n
  • Fig. 4 is shown in cross section the vertical charge transfer gate 15, the horizontal CCD 13, the transistor switch S 1j and the photodiode P 1j
  • the charge storage is made up of the diffused region 2"" immediately below the electrode TC and the substrate 1.
  • Fig. 5 is the timing diagram of drive pulses applied to the vertical charge transfer gate. Time is plotted along the abscissa, whereas the voltage along the ordinate.
  • Fig. 6 shows the potential levels below the gates at t 1 through t 6 (See Fig. 5). It illustrates how the signal charge Q S on the vertical signal line 4 is transferred to the horizontal CCD 13 in response to the variations in potential levels.
  • the pulse VG applied from the vertical shift register 7 See Fig.
  • the operation from t l to t 4 is called a priming process.
  • the above-described charge-transfer inefficiency is almost eliminated or reduced to a minimum by adding external bias charge as will be described in detail below.
  • external bias charge may be injected into the vertical lines by controlling the voltage at the gate T S and the voltage at the terminal D in the solid-state image sensor element as shown in Fig. 1.
  • the conventional method for injecting external bias charge will inherently result in the formation of a fixed pattern.
  • the horizontal CCD shift register is utilized so that the charge may be uniformly injected into all the vertical signal lines as will be described in detail below.
  • the first embodiment of the present invention is a method for driving the solid-state image sensor element as shown in Fig. 1.
  • an injection means is employed so that in response to horizontal clock pulses, a predetermined bias charge is serially injected into the stages of the horizontal CCD 13.
  • a terminal H IS is provided for applying a suitable voltage to the diffused regions of the input injection means. The voltage at the terminal HIS and the potential at the control gate terminal H IG are so controlled that the transfer clock pulses are applied to the respective stages of the horizontal CCD 13 and consequently the same amount of the bias charge Q B are injected into the respective stages.
  • the signal charge from the photodiodes in one row is transferred onto the vertical signal lines at t 1 in response to the pulse VG applied from the vertical shift register 7.
  • the initial voltage V i at the vertical signal line 4. and the diffused regions 2' and 2" (See Fig. 2) is dependent upon the high level HG at which remain the transistor switches 5 1 through 5 of the transfer gate TG.
  • the clock voltage ⁇ H2 (See Fig. 8C) is lowered to the low level L 2 so that the bias charge Q B accumulated in a potential well in the horizontal CCD can be transferred to the vertical signal lines 4 1 through 4 n .
  • the absolute value of H that is,
  • H denotes the high level of the clock ⁇ H2.
  • the absolute value V. also remains at a high value so that the overall efficiency for transferring the charge Q B + Q S to the horizontal CCD 13 is decreased. Therefore, as indicated by the broken lines in Fig. 8C and in Fi g. 7, t 3 ⁇ t ⁇ t 3' the high level H G of the gate terminal TG is preferably maintained at the highest level of "the three states".
  • the minimum sensitivity can be improved to the order of 70 lux as compared with the minimum sensitivity of 200 lux attainable by the prior art drive system.
  • the transfer efficiency can be automatically controlled in response to the variations of the intensity of incident light. Therefore, when the intensity of the incident or input light is high, the bias charge Q B can be automatically decreased so that the degradation in dynamic range due to the addition of the bias charge Q B can be avoided.
  • the system for driving the solid-state image sensor in accordance with the present invention can remarkably improve the signal-charge--transfer efficiency.
  • the second embodiment is featured in that the bias charge injection is effected not only during the priming process but also during the skimming process, whereby the charge transfer efficiency during the skimming process or period can be improved.
  • Fig. 9 is the timing diagram of the drive pulses for vertical transfer and Figs. lOA to lOG show the potentials below gate electrodes at t 1 through t .
  • the priming process from t 1 through t 4 is substantially similar to that described with reference to Fig. 6.
  • the bias charge Q B which is injected from the horizontal charge injection terminals HIS and H IG into the horizontal CCD 13 is transferred to the charge storages 18 1 through 18 n at t 5 .
  • the charge Q S + Q B is transferred into the horizontal CCD 13 by the skimming process at t 6 .
  • the internal bias charge Q P remains in the charge storages 181 through 18 n while the charge Q S + Q B has been transferred into the horizontal CCD 13 as described above, whereby the horizontal readout is ready at t 7 . Thereafter, following the procedure of the prior art operating system, the horizontal CCD 13 is driven in response to the clocks ⁇ H1 through ⁇ H4 so that the contents are shifted and appear at the output terminal lO.
  • the horizontal CCD 13 is of the embedded type and the transistor switches 17 1 through 17 n are of EMOS construction. Therefore, in order attain the highly efficient bias charge Q B transfer from the horizontal CCD 13 to the charge storages 18 1 through 18n, the level TG2H of TG2 gate at t 5 is maintained higher than the skimming level TG2M. Otherwise the level TG2H of three state pulse to be applied on TG2 gate is avoided in the case that the threshold voltage of TG2 gate is lower several volts than those of TG1 gate.
  • Fig. 11 shows the dependence of the vertical transfer efficiency on TG2H level.
  • TG2H voltage is plotted along the abscissa, whereas the vertical transfer efficiency along the ordinate. ( ⁇ ⁇ : the aperture is stepped down by four steps from the saturated aperture.) It is seen that when TG2H is higher than 15 volts, the vertical transfer efficiency is remarkably improved. The reason is that TG2 gate potential falls below the low level potential of the horizontal CCD so that the bias charge Q B is efficiently transferred into the charge storages in the horizontal CCD.
  • Fig. 12 shows the dependence of the vertical transfer efficiency upon the intensity of the incident light.
  • the lens stop (F) is plotted along the abscissa, whereas the vertical transfer efficiency along the ordinate.
  • the broken-line curve shows the efficiency when the bias charge Q B is 0%; that is, when the prior art operating system is employed; the one-dot-chain-line curve shows the efficiency when the bias charge Q B is 15% of the saturated charge in the element (sic); and the solid-line curve shows the efficiency when the bias charge Q B is 30%. It is apparent that the injection of the bias charge Q B considerably improves the vertical transfer efficiency. If the bias charge exceeds 30%, the vertical transfer efficiency remains almost constant regardless of the intensity of the incident light.
  • Fig. 13 shows the dependence of the vertical waveform response on the intensity of the incident light when a rectangular light pattern (EIAJ-J chart) of 3/10 V (where V is the vertical length or height of the image receiving surface which comprises photodiodes P.. and switch S..).
  • the line number is plotted along the ordinate ij whereas the intensity of the incident light along the abscissa.
  • the output of the element normalized by using the intensity of the incident light is also plotted along the abscissa.
  • the waveform response is dependent upon the intensity of the incident light, but according to the present invention, there exists no correlationship between the waveform response and the intensity of the incident light.
  • the vertical transfer efficiency can be much improved during the skimming period so that the overall vertical transfer efficiency ( ⁇ ⁇ ) can be remarkably increased.
EP82109789A 1981-10-22 1982-10-22 Verfahren zum Betrieb eines Festkörper-Bildabtasters Expired EP0078038B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP169870/81 1981-10-22
JP56169870A JPS5870687A (ja) 1981-10-22 1981-10-22 固体撮像素子の駆動方法

Publications (2)

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EP0078038A1 true EP0078038A1 (de) 1983-05-04
EP0078038B1 EP0078038B1 (de) 1986-01-15

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US (1) US4551757A (de)
EP (1) EP0078038B1 (de)
JP (1) JPS5870687A (de)
DE (1) DE3268589D1 (de)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0115225A1 (de) * 1982-12-21 1984-08-08 Thomson-Csf Verfahren zur Abtastung eines nach dem Zwischenspaltenprinzips wirkenden Bildsensors und Anordnung zur Durchführung des Verfahrens
FR2551938A2 (fr) * 1983-09-09 1985-03-15 Thomson Csf Procede d'analyse d'un dispositif photosensible a transfert de ligne et dispositif de mise en oeuvre d'un tel procede
FR2553920A1 (fr) * 1983-10-21 1985-04-26 Thomson Csf Procede d'analyse d'un dispositif photosensible a structure interligne et dispositif pour sa mise en oeuvre
FR2580883A1 (fr) * 1985-04-19 1986-10-24 Thomson Csf Dispositif de lecture par transfert de ligne avec contre-reaction
US5019702A (en) * 1985-11-15 1991-05-28 Canon Kabushiki Kaisha Photoelectric transducer apparatus having a plurality of transducer elements and a plurality of capacitor elements
US5311320A (en) * 1986-09-30 1994-05-10 Canon Kabushiki Kaisha Solid state image pickup apparatus
US5331421A (en) * 1985-11-15 1994-07-19 Canon Kabushiki Kaisha Solid state image pickup apparatus
US5737016A (en) * 1985-11-15 1998-04-07 Canon Kabushiki Kaisha Solid state image pickup apparatus for reducing noise
US5771070A (en) * 1985-11-15 1998-06-23 Canon Kabushiki Kaisha Solid state image pickup apparatus removing noise from the photoelectric converted signal
US6538693B1 (en) 1996-01-24 2003-03-25 Canon Kabushiki Kaisha Photoelectric conversion apparatus having reset noise holding and removing units
US8530463B2 (en) 2007-05-07 2013-09-10 Hale Biopharma Ventures Llc Multimodal particulate formulations

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5115321A (en) * 1987-01-06 1992-05-19 Minolta Camera Kabushiki Kaisha Image sensing system
US5227834A (en) * 1987-01-06 1993-07-13 Minolta Camera Kabushiki Kaisha Image sensing system having a one chip solid state image device
US4905033A (en) * 1987-01-06 1990-02-27 Minolta Camera Kabushiki Kaisha Image sensing system
US4985774A (en) * 1988-01-20 1991-01-15 Minolta Camera Kabushiki Kaisha Image sensing device having direct drainage of unwanted charges
US5258846A (en) * 1990-02-05 1993-11-02 Mitsubishi Denki Kabushiki Kaisha CCD imager including serially connected inverter circuits connected in parallel to charge transfer elements
JP3155877B2 (ja) * 1993-12-15 2001-04-16 株式会社東芝 固体撮像装置及びその電荷転送方法
JPH07255013A (ja) * 1994-01-31 1995-10-03 Sony Corp 固体撮像装置
JPH10257392A (ja) * 1997-03-14 1998-09-25 Matsushita Electron Corp 物理量分布検知半導体装置およびその駆動方法ならびにその製造方法
US10347681B2 (en) 2016-02-19 2019-07-09 Semiconductor Energy Laboratory Co., Ltd. Imaging device
US10192911B2 (en) 2017-05-09 2019-01-29 Apple Inc. Hybrid image sensors with improved charge injection efficiency

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US3925657A (en) * 1974-06-21 1975-12-09 Rca Corp Introduction of bias charge into a charge coupled image sensor
DE2611771B2 (de) * 1976-03-19 1978-01-05 Siemens AG, 1000 Berlin und 8000 München Verfahren zum betrieb einer cidsensormatrix
US4173765A (en) * 1978-05-26 1979-11-06 Eastman Kodak Company V-MOS imaging array
US4189749A (en) * 1977-09-16 1980-02-19 Matsushita Electronics Corporation Solid state image sensing device

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JPS5217253A (en) * 1975-07-31 1977-02-09 Esutetsuku:Kk Flow ratio mixing device
JPS55163957A (en) * 1979-06-08 1980-12-20 Nec Corp Driving method for electric charge transfer device
JPS6030151B2 (ja) * 1979-10-19 1985-07-15 松下電子工業株式会社 固体撮像装置
US4316221A (en) * 1980-08-05 1982-02-16 General Electric Company Apparatus for sequential row injection readout of CID imagers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3925657A (en) * 1974-06-21 1975-12-09 Rca Corp Introduction of bias charge into a charge coupled image sensor
DE2611771B2 (de) * 1976-03-19 1978-01-05 Siemens AG, 1000 Berlin und 8000 München Verfahren zum betrieb einer cidsensormatrix
US4189749A (en) * 1977-09-16 1980-02-19 Matsushita Electronics Corporation Solid state image sensing device
US4173765A (en) * 1978-05-26 1979-11-06 Eastman Kodak Company V-MOS imaging array

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0115225A1 (de) * 1982-12-21 1984-08-08 Thomson-Csf Verfahren zur Abtastung eines nach dem Zwischenspaltenprinzips wirkenden Bildsensors und Anordnung zur Durchführung des Verfahrens
FR2551938A2 (fr) * 1983-09-09 1985-03-15 Thomson Csf Procede d'analyse d'un dispositif photosensible a transfert de ligne et dispositif de mise en oeuvre d'un tel procede
FR2553920A1 (fr) * 1983-10-21 1985-04-26 Thomson Csf Procede d'analyse d'un dispositif photosensible a structure interligne et dispositif pour sa mise en oeuvre
EP0143030A1 (de) * 1983-10-21 1985-05-29 Thomson-Csf Verfahren zur Abtastung einer fotoempfindlichen Anordnung mit Zwischenspaltenstruktur und Anordnung zur Durchführung des Verfahrens
US4695890A (en) * 1985-04-19 1987-09-22 Thomson-Csf Line transfer reading device with feedback regulating the drive charge
EP0200624A1 (de) * 1985-04-19 1986-11-05 Thomson-Csf Ausleseanordnung durch Zeilenübertragung mit Rückkopplung
FR2580883A1 (fr) * 1985-04-19 1986-10-24 Thomson Csf Dispositif de lecture par transfert de ligne avec contre-reaction
US5019702A (en) * 1985-11-15 1991-05-28 Canon Kabushiki Kaisha Photoelectric transducer apparatus having a plurality of transducer elements and a plurality of capacitor elements
US5331421A (en) * 1985-11-15 1994-07-19 Canon Kabushiki Kaisha Solid state image pickup apparatus
US5737016A (en) * 1985-11-15 1998-04-07 Canon Kabushiki Kaisha Solid state image pickup apparatus for reducing noise
US5771070A (en) * 1985-11-15 1998-06-23 Canon Kabushiki Kaisha Solid state image pickup apparatus removing noise from the photoelectric converted signal
US6747699B2 (en) 1985-11-15 2004-06-08 Canon Kabushiki Kaisha Solid state image pickup apparatus
US5311320A (en) * 1986-09-30 1994-05-10 Canon Kabushiki Kaisha Solid state image pickup apparatus
US6538693B1 (en) 1996-01-24 2003-03-25 Canon Kabushiki Kaisha Photoelectric conversion apparatus having reset noise holding and removing units
US8530463B2 (en) 2007-05-07 2013-09-10 Hale Biopharma Ventures Llc Multimodal particulate formulations

Also Published As

Publication number Publication date
EP0078038B1 (de) 1986-01-15
US4551757A (en) 1985-11-05
JPS5870687A (ja) 1983-04-27
DE3268589D1 (en) 1986-02-27

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