EP0046522A1 - Method for the regeneration of an ammoniacal etchant - Google Patents

Method for the regeneration of an ammoniacal etchant Download PDF

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Publication number
EP0046522A1
EP0046522A1 EP81106058A EP81106058A EP0046522A1 EP 0046522 A1 EP0046522 A1 EP 0046522A1 EP 81106058 A EP81106058 A EP 81106058A EP 81106058 A EP81106058 A EP 81106058A EP 0046522 A1 EP0046522 A1 EP 0046522A1
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EP
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Prior art keywords
etching
etching solution
activated carbon
carbon powder
solution
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EP81106058A
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German (de)
French (fr)
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EP0046522B1 (en
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Bertel Professor Dr. Kastening
Wolfgang Faul
Leander Fürst
Walter Holzer
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Elo Chem Atztechnik GmbH
Forschungszentrum Juelich GmbH
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Elo Chem Atztechnik GmbH
Forschungszentrum Juelich GmbH
Kernforschungsanlage Juelich GmbH
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions

Definitions

  • the invention relates to a method for regenerating an ammoniacal etching solution which is supplied with oxygen for the reoxidation of the etchant contained in the etching solution.
  • Alkaline etchants are used for etching metallic objects, in particular for the production of printed circuit boards, which are also known under the name "printed circuits", especially when the printed circuit boards to be etched are metal parts which are not resistant to acidic etching media, for example made of lead, tin or nickel exhibit.
  • a reoxidation of the alkaline etching solution after etching off the metal is carried out with the addition of ammonia gas and / or ammonium chloride in the presence of oxygen or air.
  • waste solutions are also created that cannot be removed without prior detoxification treatment. Compare, for example, H. Bruch et al., "Printed circuit boards", Eugen G. Leutze-Verlag, Saulgau / Kunststoff, 1978.
  • the object of the invention is to provide a method for regenerating alkaline etching solutions in which no toxic residual solutions are obtained and in which the etching solution rapidly reoxidizes.
  • Activated carbon powder particles are suspended in the etching solution, which act as a catalyst when the etching agent reduced during the etching of the metal is oxidized back. Surprisingly, it has been found that after suspension of activated carbon powder particles in the alkaline etching solution and after their action as a catalyst, the etching process also occurs speed is increased significantly.
  • the activated carbon powder particles effective in the etching solution are previously annealed in a vacuum, in an inert, reducing atmosphere containing CO 2 or water vapor at a temperature between 900 and 1200 ° C.
  • a vacuum, in an inert, reducing atmosphere containing CO 2 or water vapor at a temperature between 900 and 1200 ° C.
  • the content of CO 2 and water vapor is adjusted so that only a slight degradation of the activated carbon powder takes place during the treatment. It has proven to be advantageous to glow the activated carbon powder particles in the aforementioned manner for over an hour, claim 2.
  • concentrations of the activated carbon powder particles in the etching solution between 5 and 25% by weight, preferably between 10 and 12% by weight, is obtained one has a viscosity suitable for transport and for spraying the etching solution, claims 3 and 4.
  • FIGS. 1 to 3 show the improvements achieved in the etching of copper using activated carbon powder.
  • An ammonium sulfate solution with a content of 150 g ammonium sulfate per liter is used as the etching solution, which is adjusted to a pH of 9 by adding gaseous ammonia.
  • etching rate As a function of the copper content in the solution, different copper contents are set and the rate of dissolution of a copper plate sprayed with air in an etching solution is measured.
  • the etching speeds achieved with etching solutions without activated carbon powder particles are inEig. 1 in curve I, the etching rate with 12% by weight of suspended activated carbon powder particles are shown in curve II. From the curve of curves I and II it can be seen that solutions with a copper content of about 20 g copper per liter or more when adding activated carbon powder have a considerably higher etching rate than etching solutions without activated carbon powder. It is particularly advantageous that the maximum of the etching speed in etching solutions with carbon powder parts compared to etching solutions without carbon powder parts is shifted towards higher copper contents in the solution.
  • a solution of 150 g ammonium sulfate and 30 g copper per liter was adjusted to a pH of 9 by adding gaseous ammonia.
  • the solution was sprayed into air by means of a nozzle for oxidation, collected in an upwardly open solvent tank and circulated.
  • the overpressure in the solution was 0.7 bar in front of the nozzle.
  • the potential of the solution was measured using a platinum pen against a mercury / mercury oxide reference electrode. 1.5 liters of this solution, which had been heated to 50 ° C., were circulated.
  • the etching system consists of an etching chamber 1, in which the objects 2 to be etched are sprayed with ammoniacal etching solution by means of a spray device 3.
  • the etching solution is circulated by a solvent pump 4 from the bottom of the etching chamber 1 via a pipeline 5 connected to the spray device 3 '.
  • a section of the pipeline 5 consists of a filter 6 which is permeable to the etching solution, but which retains the activated carbon powder particles suspended in the etching solution.
  • the part of the etching solution which passes through the filter 6 is led to the cathode chamber 7 of an electrolytic cell 8 and, after the etched metal has been deposited, is returned through the anode chamber 9 of the electrolytic cell into the circuit of the etching solution, in the exemplary embodiment into the etching chamber 1.
  • etching solution which contained 150 g of ammonium sulfate and 50 g of copper per liter and activated carbon powder in an amount of 10% by weight, are circulated and by means of the spray device equipped with nozzles at an overpressure between cathodes and anode space of the electrolytic cell there is a diaphragm 10, sprayed in air at 0.8 bar.
  • the etching solution had been heated to 50 ° C. and was adjusted to a pH of 9 by adding ammonia gas. Copper plates were etched. The etch rate was approximately 2.6 g copper per minute.
  • the cell voltage was 2.3 volts.
  • Brass was etched in the etching system shown in FIG. 4 using an ammoniacal etching solution.
  • a portion of the aqueous solution containing 150 g of ammonium sulfate, 21 g of copper and 44 g of zinc per liter was introduced into the cathode chamber of the stainless steel cathode electrolytic cell.
  • a solution temperature of 20 ° C and a current density of 5 amperes per dm 2 an alloy of 66% copper and 34% zinc is separated in the electrolytic cell on the stainless steel cathode.
  • the current efficiency for metal deposition was 92%.
  • activated carbon powder particles were suspended in the etching solution in the same way as in the previous exemplary embodiments, and the etching solution was sprayed in air to come into contact with oxygen.

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  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
  • Physical Water Treatments (AREA)

Abstract

In addition to catalyzing the reoxidization of spent alkaline etching agent, the suspension of activated carbon powder in the etching solution also increases the speed of etching when the etching solution is recirculated in the etching of printed circuit boards. The ammonium sulfate etching solution is set to a pH of about 9 by the addition of ammonia gas. In the recirculation of the etching solution, a part of the solution can be freed by filtration from suspended carbon particles and passed through the cathode and anode chambers of an electrolysis cell for the recovery of the etched metal by deposition on the cathode. The activated carbon powder for this purpose is calcined before use, at a temperature of between 900 DEG and 1200 DEG C. in vacuum or in an atmosphere that is inert, reducing, or only slightly oxidizing as in the case of an atmosphere containing carbon dioxide, water vapor or both, in a concentration that does not appreciably oxidize the carbon particles.

Description

Die Erfindung bezieht sich auf ein Verfahren zum Regenerieren einer ammoniakalischen Ätzlösung, der zur Rückoxidation des in der Ätzlösung enthaltenden Ätzmittels Sauerstoff zugeführt wird.The invention relates to a method for regenerating an ammoniacal etching solution which is supplied with oxygen for the reoxidation of the etchant contained in the etching solution.

Alkalische Ätzmittel werden zum Ätzen metallischer Gegenstände, insbesondere zur Herstellung von Leiterplatten, die auch unter der Bezeichnung "gedruckte Schaltungen" bekannt sind, vor allem dann verwendet, wenn die zu ätzenden Leiterplatten gegen saure Ätzmedien nicht beständige Metallteile, beispielsweise aus Blei, Zinn oder Nickel aufweisen. Eine Rückoxidation der alkalischen Ätzlösung nach Abätzen des Metalls wird unter Zugabe von Ammoniakgas und/oder Ammoniumchlorid in Gegenwart von Sauerstoff beziehungsweise Luft durchgeführt. Dabei werden nicht nur die eingesetzten Chemikalien verbraucht, es entstehen auch Abfallösungen, die nicht ohne eine vorausgehende Entgiftungsbehandlung abführbar sind. Vergleiche hierzu beispielsweise H. Bruch u.a.,"Leiterplatten", Eugen G. Leutze-Verlag, Saulgau/Württemberg, 1978.Alkaline etchants are used for etching metallic objects, in particular for the production of printed circuit boards, which are also known under the name "printed circuits", especially when the printed circuit boards to be etched are metal parts which are not resistant to acidic etching media, for example made of lead, tin or nickel exhibit. A reoxidation of the alkaline etching solution after etching off the metal is carried out with the addition of ammonia gas and / or ammonium chloride in the presence of oxygen or air. Not only are the chemicals used used up, waste solutions are also created that cannot be removed without prior detoxification treatment. Compare, for example, H. Bruch et al., "Printed circuit boards", Eugen G. Leutze-Verlag, Saulgau / Württemberg, 1978.

Bei der Rüokoxidation der alkalischen Ätzlösung durch Einblasen von Sauerstoff wird zwar bei alkalischen Ätzlösungen eine raschere Regeneration als bei sauren Ätzlösungen erreicht, die Reaktionsgeschw-indigkeit bleibt jedoch hinter der unter Verwendung chemischer Oxidationsmittel erreichten Reaktionsgeschwindigkeit zurück.When the alkaline etching solution is reoxidized by blowing in oxygen, regeneration is quicker with alkaline etching solutions than with acidic etching solutions, but the reaction speed lags behind the reaction rate achieved using chemical oxidizing agents.

Aufgabe der Erfindung ist es, ein Verfahren zum Regenerieren alkalischer Ätzlösungen zu schaffen, bei dem keine toxisch wirksamen Restlösungen anfallen und bei dem eine rasche Rückoxidation der Ätzlösung eintritt.The object of the invention is to provide a method for regenerating alkaline etching solutions in which no toxic residual solutions are obtained and in which the etching solution rapidly reoxidizes.

Aus DE-PS 27 14 075 ist ein Verfahren bekannt, bei dem zur Sohadstoffbeseitigung in wässriger Lösung suspendierte Aktivkohlepulverteilchen als Katalysator zur Oxidation von Schadstoffen, wie Nitrit, Zyanid oder Sulfit, eingesetzt werden. Von dieser bekannten Wirkung der Aktivkohlepulverteilchen geht die Erfindung aus.From DE-PS 27 14 075 a method is known in which activated carbon powder particles suspended in aqueous solution are used as a catalyst for the oxidation of pollutants, such as nitrite, cyanide or sulfite, for the removal of oxygen. The invention is based on this known effect of the activated carbon powder particles.

Die Aufgabe wird beim eingangs genannten Verfahren gemäß der Erfindung durch die im Patentanspruch 1 angegebenen Maßnahmen gelöst. In der Ätzlösung werden Aktivkohlepulverteilchen suspendiert, die bei Rüokoxidation des beim Ätzen des Metalles reduzierten Ätzmittels in Anwesenheit von Sauerstoff als Katalysator wirken. Überraschend hat sich gezeigt, daß nach Suspension von im Patentanspruch 1 angegebenen Aktivkohlepulverteilchen in der alkalischen Ätzlösung und nach deren Wirkung als Katalysator auch die Ätzgeschwindigkeit erheblich gesteigert wird.The object is achieved in the above-mentioned method according to the invention by the measures specified in claim 1. Activated carbon powder particles are suspended in the etching solution, which act as a catalyst when the etching agent reduced during the etching of the metal is oxidized back. Surprisingly, it has been found that after suspension of activated carbon powder particles in the alkaline etching solution and after their action as a catalyst, the etching process also occurs speed is increased significantly.

Die in der Ätzlösung wirksamen Aktivkohlepulverteilchen werden zuvor in Vakuum, in inerter, reduzierender, CO2 oder Wasserdampf enthaltender Atmosphäre bei einer Temperatur zwischen 900 und 1200° C geglüht. Dabei wird beim Glühen in 002 oder Wasserdampf enthaltender Atmosphäre der Gehalt an C02 und Wasserdampf so eingestellt, daß während der Behandlung nur ein ge-' ringer Abbau des Aktivkohlepulvers erfolgt. Es hat sich als günstig erwiesen, die Aktivkohlepulverteilchen in der vorgenannten Weise über eine Stunde lang zu glühen, Patentanspruch 2. Bei Konzentrationen der Aktivkohlepulverteilchen in der Ätzlösung zwischen 5 und 25 Gew.-%, bevorzugt zwischen 10 und 12 Gew.-%, erhält man eine für Transport und zum Versprühen der Ätzlösung geeignete Viskosität, Patentansprüche 3 und 4.The activated carbon powder particles effective in the etching solution are previously annealed in a vacuum, in an inert, reducing atmosphere containing CO 2 or water vapor at a temperature between 900 and 1200 ° C. When glowing in an atmosphere containing 00 2 or water vapor, the content of CO 2 and water vapor is adjusted so that only a slight degradation of the activated carbon powder takes place during the treatment. It has proven to be advantageous to glow the activated carbon powder particles in the aforementioned manner for over an hour, claim 2. At concentrations of the activated carbon powder particles in the etching solution between 5 and 25% by weight, preferably between 10 and 12% by weight, is obtained one has a viscosity suitable for transport and for spraying the etching solution, claims 3 and 4.

Zum Abscheiden von in der Ätzlösung gelösten Metallionen dienen in Ausgestaltung des erfindungsgemäßen Verfahrens in Patentansprüchen 5 und 6 angegebenen Maßnahmen. Ein Teil der Ätzlösung wird nach dem Ätzen des Metalls und nach Abtrennen der in der Ätzlösung suspendierten Aktivkohlepulverteilchen durch den Kathodenraum einer Elektrolysezelle geführt. Die durch die Elektrolysezelle geführte Teilmenge der Ätzlösung und *dabei so eingestellt, daß die durch Abscheiden der Metallionen an der Kathode sich einstellende Metallkonzentration innerhalb der die suspendierten Aktivkohlepulverteilohen enthaltenden Ätzlösung für eine der Elektrolysestrom werden optimale Ätzgeschwindigkeit ausreichend ist. Den durch die Elektrolysezelle geführten Teil der Ätzlösung leitet man nach Durchströmen des Kathodenraums in den Ätzlösungskreislauf wieder zurück.For the deposition of metal ions dissolved in the etching solution, measures specified in patent claims 5 and 6 are used in an embodiment of the method according to the invention. After the metal has been etched and the activated carbon powder particles suspended in the etching solution have been separated off, part of the etching solution is passed through the cathode compartment of an electrolysis cell. The partial amount of the etching solution passed through the electrolytic cell and * adjusted so that the metal concentration which results from the deposition of the metal ions on the cathode becomes within the etching solution containing the suspended activated carbon powder for one of the electrolysis streams optimal etching speed is sufficient. The part of the etching solution passed through the electrolytic cell is returned to the etching solution circuit after flowing through the cathode space.

Die Erfindung wird im folgenden anhand von Ausführungsbeispielen näher erläutert. Die in der Zeichnung wiedergegebenen Diagramme zeigen im einzelnen:

  • Figur 1 Abhängigkeit der Ätzgeschwindigkeit vom Kupfergehalt einer Ammoniumsulfat enthaltenden Ätzlösung zum Ätzen von Kupfer ohne (Kurve I) und mit in der Ätzlösung suspendierten Aktivkohlepulverteilchen (Kurve II).
  • Figur 2 Zeitlicher Verlauf des Potentials einer Ätzlösung für das Ätzen von Kupfer ohne (Kurve I) und mit suspendierten Aktivkohlepulverteilchen (Kurve II) bei Rückoxidation in Gegenwart von Sauerstoff
  • Figur 3 Abhängigkeit der Ätzgesohwindigkeit einer Ätzlösung für Kupfer vom Potential der Ätzlösung ohne (Kurve I) und mit suspendierten Aktivkohlepulverteilchen (Kurve II),
  • Figur 4 Ätzanlage mit Elektrolysezelle (schematisch)
The invention is explained in more detail below on the basis of exemplary embodiments. The diagrams shown in the drawing show in detail:
  • 1 dependence of the etching rate on the copper content of an etching solution containing ammonium sulfate for etching copper without (curve I) and with activated carbon powder particles suspended in the etching solution (curve II).
  • FIG. 2 Time course of the potential of an etching solution for the etching of copper without (curve I) and with suspended activated carbon powder particles (curve II) during reoxidation in the presence of oxygen
  • FIG. 3 dependence of the etching speed of an etching solution for copper on the potential of the etching solution without (curve I) and with suspended activated carbon powder particles (curve II),
  • FIG. 4 etching system with electrolysis cell (schematic)

In den Diagrammen werden im Vergleich mit Ätzlösungen, die keine Aktivkohlepulverteilohen enthalten, die unter Zugabe von Aktivkohlepulverteilchen zu den Ätzlösungen erreichten Wirkungen verdeutlicht. Die suspendierten Aktivkohlepulverteilchen wurden zuvor in Vakuum oder reduzierender Atmosphäre bei 1000° C eine Stunde lang geglüht. Vergleichbare Resultate wurden auch mit Aktivkohlepulvern erzielt, die in inerter, C02 oder Wasserdampf enthaltender Atmosphäre bei Temperaturen über 900° C geglüht wurden. Dabei war der C02 oder Wasserdampfgehalt in der Atmosphäre so eingestellt, daß das Aktivkohlepulver nur geringfügig oxidiert wurde.In the diagrams, in comparison with etching solutions which do not contain any active carbon powder particles, those with the addition of activated carbon powder particles to the etching solutions are shown illustrated effects. The suspended activated carbon powder particles were previously annealed in a vacuum or reducing atmosphere at 1000 ° C for one hour. Comparable results were also achieved with activated carbon powders which were annealed in an inert atmosphere containing CO 2 or water vapor at temperatures above 900 ° C. The C0 2 or water vapor content in the atmosphere was adjusted so that the activated carbon powder was only slightly oxidized.

Alle in Figuren 1 bis 3 wiedergegebenen Diagramme zeigen die unter Verwendung von Aktivkohlepulver erzielten Verbesserungen beim Ätzen von Kupfer. Als Ätzlösung wird eine Ammonium-Sulfat-Lösung mit einem .Gehalt von 150 g Ammoniumsulfat pro Liter verwendet, die durch Zugabe gasförmigen Ammoniaks auf einen pH-Wert von 9 eingestellt ist.All of the diagrams shown in FIGS. 1 to 3 show the improvements achieved in the etching of copper using activated carbon powder. An ammonium sulfate solution with a content of 150 g ammonium sulfate per liter is used as the etching solution, which is adjusted to a pH of 9 by adding gaseous ammonia.

Für das Messen der Ätzgeschwindigkeit in Abhängigkeit vom Kupfergehalt in der Lösung werden unterschiedliche Kupfergehalte eingestellt und die Auflösungsgeschwindigkeit einer an Luft mit Ätzlösung besprühten Kupferplatte gemessen. Die erzielten Ätzgeschwindigkeiten bei Ätzlösungen ohne Aktivkohlepulverteilchen sind inEig. 1 in Kurve I die Ätzgeschwindigkeit mit 12 Gew.-% suspendierten Aktivkohlepulverteilchen sind in Kurve II wiedergegeben. Aus dem Kurvenverlauf der Kurve I und II ist ersichtlich, daß Lösungen mit einem Kupfergehalt ab etwa 20 g Kupfer pro Liter bei Zugabe von Aktivkohlepulver eine erheblich höhere Ätzgeschwindigkeit aufweisen als Ätzlösungen ohne Aktivkohlepulver. Vorteilhaft ist insbesondere, daß das Maximum der Ätzgesohwindigkeit bei Ätzlösungen mit Kohlepulverteilohen gegenüber Ätzlösungen ohne Kohlepulverteilohen zu höheren Kupfergehalten in der Lösung hin verschoben ist.To measure the etching rate as a function of the copper content in the solution, different copper contents are set and the rate of dissolution of a copper plate sprayed with air in an etching solution is measured. The etching speeds achieved with etching solutions without activated carbon powder particles are inEig. 1 in curve I, the etching rate with 12% by weight of suspended activated carbon powder particles are shown in curve II. From the curve of curves I and II it can be seen that solutions with a copper content of about 20 g copper per liter or more when adding activated carbon powder have a considerably higher etching rate than etching solutions without activated carbon powder. It is particularly advantageous that the maximum of the etching speed in etching solutions with carbon powder parts compared to etching solutions without carbon powder parts is shifted towards higher copper contents in the solution.

Um den Einfluß des Aktivkohlepulvers auf die Rückoxidation einer Ätzlösung festzustellen, wurden die folgenden Ausführungsbeispiele durchgeführt:The following exemplary embodiments were carried out in order to determine the influence of the activated carbon powder on the reoxidation of an etching solution:

Ausführungsbeispiel 1Embodiment 1

Eine Lösung von 150 g Ammoniumsulfat und 30 g Kupfer pro Liter wurde durch Zugabe gasförmigen Ammoniaks auf einen pH-Wert von 9 eingestellt. Die Lösung wurde zur Oxidation mittels einer Düse in Luft versprüht, in einem nach oben offenen Lösungsmittelbecken gesammelt und im Kreislauf geführt. Vor der Düse betrug der Überdruck in der Lösung 0,7 bar. Das Potential der Lösung wurde über einen Platinstift gegen eine Quecksilber/Quecksilberoxid-Referenzelektrode gemessen. Im Kreislauf wurden 1,5 Liter dieser Lösung geführt, die auf 50° C erwärmt worden waren.A solution of 150 g ammonium sulfate and 30 g copper per liter was adjusted to a pH of 9 by adding gaseous ammonia. The solution was sprayed into air by means of a nozzle for oxidation, collected in an upwardly open solvent tank and circulated. The overpressure in the solution was 0.7 bar in front of the nozzle. The potential of the solution was measured using a platinum pen against a mercury / mercury oxide reference electrode. 1.5 liters of this solution, which had been heated to 50 ° C., were circulated.

In der Lösung wurden dann 40 g Kupferpulver gelöst, was eine Absenkung des Potentials in der Lösung um 330 Millivolt zur Folge hatte. Der zeitliche Verlauf des Potentials in der Lösung ist in Figur 2, Kurve I wiedergegeben. Das Ausgangspotential in der Lösung war zu 80 % etwa nach 32 Minuten wieder erreicht.40 g of copper powder were then dissolved in the solution, which resulted in a reduction of the potential in the solution by 330 millivolts. The time course of the potential in the solution is shown in FIG. 2, curve I. 80% of the initial potential in the solution was reached again after about 32 minutes.

Unter den gleichen Bedingungen wurde eine Ätzlösung gleicher Zusammensetzung gemessen, in der Zusätzlich 12 Gew.-% Aktivkohlepulver suspendiert waren. Nach Zugabe von 40 g Kupferpulver in die im Kreislauf geführten 1,5 Liter der Ätzlösung sank das Potential der Lösung um 310 Millivolt. Bereits nach etwa 15 Minuten war das Ausgangspotential in der Ätzlösung zu 80 % wieder erreicht. Der Verlauf des Potentials der Lösung ist in Figur 2, Kurve II wiedergegeben.An etching solution of the same composition was measured under the same conditions, in which an additional 12% by weight of activated carbon powder was suspended. After adding 40 g of copper powder to the 1.5 liters of the etching solution, the potential of the solution decreased by 310 millivolts. After about 15 minutes, 80% of the initial potential in the etching solution was reached again. The course of the potential of the solution is shown in Figure 2, curve II.

Ausführungsbeispiel 2Embodiment 2

Bei einer Temperatur von 48° C und einem pH-Wert von 9,2 wurden 1,5 Liter einer wässrigen Lösung mit 150 g Ammoniumsulfat und 35 g Kupfer pro Liter bei einem Druck von 1,5 bar mittels einer Düse in Luft versprüht und im Kreislauf geführt. In Abhängigkeit vom Potential der Lösung gemessen gegen eine Quecksilber/Quecksilberoxid-Referenzelektrode wurde die Ätzgeschwindigkeit beim Ätzen von Kupfer gemessen. Die Abhängigkeit von Ätzgeschwindigkeit und Potential der Lösung ist in Figur 3 dargestellt. Kurve I in Figur 3 zeigt die Abhängigkeit der Ätzgeschwindigkeit vom Potential einer Ätzlösung ohne Aktivkohlepulverteilchen. Werden einer Ätzlösung gleicher Zusammensetzung 12 Gew.-% Aktivkohlepulver zugegeben, wird bei gleichem Potential der Lösung eine weit höhere Ätzgeschwindigkeit erreicht, Kurve II in Figur 3.At a temperature of 48 ° C and a pH of 9.2, 1.5 liters of an aqueous solution with 150 g of ammonium sulfate and 35 g of copper per liter were sprayed in air at a pressure of 1.5 bar using a nozzle and in Cycle. Depending on the potential of the solution measured against a mercury / mercury oxide reference electrode, the etching rate was measured when etching copper. The dependence of the etching speed and potential of the solution is shown in FIG. 3. Curve I in FIG. 3 shows the dependence of the etching speed on the potential of an etching solution without activated carbon powder particles. If 12% by weight of activated carbon powder is added to an etching solution of the same composition, a much higher etching rate is achieved with the same potential of the solution, curve II in FIG. 3.

In Gegenwart von Aktivkohlepulver in der Ätzlösung wird demnach nicht nur die Rückoxidation der Ätzlösung beschleunigt, es werden darüberhinaus auch höhere Ätzgeschwindigkeiten erreicht.In the presence of activated carbon powder in the etching solution, it is not only the reoxidation of the etching solution accelerated, higher etching speeds are also achieved.

Die folgenden Ausführungsbeispiele 3 und 4 werden in einer in Figur 4 sohematisch dargestellten Ätzanlage durchgeführt.The following exemplary embodiments 3 and 4 are carried out in an etching system shown schematically in FIG.

Die Ätzanlage besteht aus einer Ätzkammer 1, in dem die zu ätzenden Gegenstände 2 mittels einer Sprüheinrichtung 3 mit ammoniakalischer Ätzlösung besprüht werden. Die Ätzlösung wird von einer Lösungsmittelpumpe 4 vom Boden der Ätzkammer 1. über eine mit der Sprüheinrichtung 3' verbundene Rohrleitung 5 im Kreislauf geführt. Ein Abschnitt der Rohrleitung 5 besteht aus einem Filter 6, der für die Ätzlösung durchlässig ist, die in der Ätzlösung suspendierten Aktivkohlepulverteilchen jedoch zurückhält. Der den Filter 6 passierende Teil der Ätzlösung wird zum Kathodenraum 7 einer Elektrolysezelle 8 geführt und nach Abscheidung des abgeätzten Metalls durch den Anodenraum 9 der Elektrolysezelle hindurch in den Kreislauf der Ätzlösung, im Ausführungsbeispiel in die Ätzkammer 1 zurückgegeben.The etching system consists of an etching chamber 1, in which the objects 2 to be etched are sprayed with ammoniacal etching solution by means of a spray device 3. The etching solution is circulated by a solvent pump 4 from the bottom of the etching chamber 1 via a pipeline 5 connected to the spray device 3 '. A section of the pipeline 5 consists of a filter 6 which is permeable to the etching solution, but which retains the activated carbon powder particles suspended in the etching solution. The part of the etching solution which passes through the filter 6 is led to the cathode chamber 7 of an electrolytic cell 8 and, after the etched metal has been deposited, is returned through the anode chamber 9 of the electrolytic cell into the circuit of the etching solution, in the exemplary embodiment into the etching chamber 1.

Ausführungsbeispiel 3Embodiment 3

In der in Figur 4 dargestellten Ätzanlage werden 15 Liter Ätzlösung, die 150 g Ammoniumsulfat und 50 g Kupfer pro Liter sowie Aktivkohlepulver in einer Menge von 10 Gew.-% enthielten, im Kreislauf geführt und mittels der mit Düsen ausgerüsteten Sprüheinrichtung bei einem Überdruck zwischen Kathoden- und Anodenraum der Elektrolysezelle befindet sich ein Diaphragma 10, von 0,8 bar in Luft versprüht. Die Ätzlösung war auf 50° C erwärmt worden und wurde durch Zusatz von Ammoniakgas auf einen pH-Wert von 9 eingestellt. Es wurden Kupferplatten geätzt. Die Ätzgeschwindigkeit betrug etwa 2,6 g Kupfer pro Minute. Etwa 20 Milliliter der Lösung wurden kontinuierlich durch ein Diaphragma hinduroh, das in der Rohrleitung als Filter eingesetzt war, aktivkohlepulverfrei aus dem Kreislauf abgetrennt und in den Kathodenraum der Elektrolysezelle eingeführt. Mit 30 Ampere Gleichstrom, entsprechend einer Stromdichte von 5 Ampere pro dm2 wurde an einer Edelstahlkathode aus der Ätzlösung Kupfer abgeschieden. Die an Kupfer abgereioherte Ätzlösung drang durch das Kathoden- und Anodenraum der Elektrolysezelle trennende Diaphragma hindurch in den Anodenraum der Elektrolysezelle ein. Als Diaphragma wurde ein gegenüber der Ätzlösung beständiges Kunststoffnetz verwendet. Die Ätzlösung wurde aus dem Anodenraum in den Kreislauf der die suspendierten Aktivkohlepulverteilchen enthaltenden Ätzlösung zurückgeführt.In the etching system shown in FIG. 4, 15 liters of etching solution, which contained 150 g of ammonium sulfate and 50 g of copper per liter and activated carbon powder in an amount of 10% by weight, are circulated and by means of the spray device equipped with nozzles at an overpressure between cathodes and anode space of the electrolytic cell there is a diaphragm 10, sprayed in air at 0.8 bar. The etching solution had been heated to 50 ° C. and was adjusted to a pH of 9 by adding ammonia gas. Copper plates were etched. The etch rate was approximately 2.6 g copper per minute. About 20 milliliters of the solution were continuously separated from the circuit through a hinduroh diaphragm, which was used as a filter in the pipeline, and introduced into the cathode compartment of the electrolysis cell. Copper was deposited from the etching solution on a stainless steel cathode with 30 ampere direct current, corresponding to a current density of 5 ampere per dm 2 . The copper solution-etched solution penetrated through the diaphragm separating the cathode and anode space of the electrolysis cell and into the anode space of the electrolysis cell. A plastic net resistant to the etching solution was used as the diaphragm. The etching solution was returned from the anode compartment to the circuit of the etching solution containing the suspended activated carbon powder particles.

Im Verlauf von 8 Betriebsstunden wurden in der Ätzanlage diskontinuierlich 306 g Kupfer abgetragen, entsprechend einer durchschnittlichen Menge von 0,64 g Kupfer pro Minute. Während dieser Zeit wurden 278 g Kupfer an der Kathode abgeschieden, entsprechend einer Kupfermenge von 0,62 g pro Minute. Diese Menge abgeschiedenen Kupfers entspricht 98 % der theoretisch möglich abscheidbaren Menge von 284,5 g bezogen auf den durch die Elektrolysezelle geflossenen Strom.In the course of 8 operating hours, 306 g of copper were removed continuously in the etching system, corresponding to an average amount of 0.64 g of copper per minute. During this time, 278 g of copper was deposited on the cathode, corresponding to an amount of copper of 0.62 g per minute. This amount of deposited copper corresponds to 98% of the theoretically possible depositable amount of 284.5 g based on the current flowing through the electrolytic cell.

Bei einem Elektrodenabstand von 2 om in der Elektrolysezelle betrug die Zellspannung 2,3 Volt.With an electrode spacing of 2 μm in the electrolysis cell, the cell voltage was 2.3 volts.

Ausführungsbeispiel 4Embodiment 4

Mit einer ammoniakalischen Ätzlösung wurde in der in Figur 4 dargestellten Ätzanlage Messing geätzt. Ein Teil der wässrigen Lösung, die 150 g Ammoniumsulfat, 21 g Kupfer und 44 g Zink pro Liter enthielt, wurde in die Kathodenkammer der Elektrolysezelle mit Edelstahlkathode eingeführt. Bei einem pH-Wert von 9,5, einer Lösungstemperatur von 20° C und einer Stromdichte von 5 Ampere pro dm2 scheidet sich in der Elektrolysezelle an der Edelstahlkathode eine Legierung von 66 % Kupfer und 34 % Zink. Die Stromausbeute für die Metallabscheidung betrug 92 %.Brass was etched in the etching system shown in FIG. 4 using an ammoniacal etching solution. A portion of the aqueous solution containing 150 g of ammonium sulfate, 21 g of copper and 44 g of zinc per liter was introduced into the cathode chamber of the stainless steel cathode electrolytic cell. At a pH of 9.5, a solution temperature of 20 ° C and a current density of 5 amperes per dm 2 , an alloy of 66% copper and 34% zinc is separated in the electrolytic cell on the stainless steel cathode. The current efficiency for metal deposition was 92%.

Zur Rückoxidation waren in der Ätzlösung in gleicher Weise wie bei den vorangegangenen Ausführungsbeispielen Aktivkohlepulverteilchen suspendiert und die Ätzlösung zum Kontakt mit Sauerstoff in Luft versprüht.For reoxidation, activated carbon powder particles were suspended in the etching solution in the same way as in the previous exemplary embodiments, and the etching solution was sprayed in air to come into contact with oxygen.

Claims (6)

1. Verfahren zum Regenerieren einer ammoniakalischen Ätzlösung, der zur Rückoxidätion des in der Ätzlösung enthaltenden Ätzmittels Sauerstoff zugeführt wird, dadurch gekennzeichnet, daß in der Ätzlösung Aktivkohlepulverteilchen suspendiert werden, die zuvor in Vakuum, inerter, reduzierender, C02 oder Wasserdampf enthaltender Atmosphäre bei einer Temperatur zwischen 900 und 1200° geglüht wurden.1. A method for regenerating an ammoniacal etching solution, which is supplied for the reoxidation of the etching agent containing oxygen in the etching solution, characterized in that activated carbon powder particles are suspended in the etching solution, which previously contained in a vacuum, inert, reducing, C0 2 or water vapor atmosphere Temperature between 900 and 1200 ° were annealed. 2. Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß das Aktivkohlepulver über eine Stunde lang geglüht wurde.2. The method according to claim 1, characterized in that the activated carbon powder was annealed for over an hour. 3. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß in der Ätzlösung Aktivkohlepulverteilchen in einer Konzentration zwischen 5 und 25 Gew.-% suspendiert werden.3. The method according to claim 1 or 2, characterized in that activated carbon powder particles are suspended in a concentration between 5 and 25 wt .-% in the etching solution. 4. Verfahren nach Anspruch 3, dadurch gekennzeichnet, daß in der Ätzlösung Aktivkohlepulverteilchen in einer Konzentration zwischen 10 und 12 Gew.-% suspendiert sind.4. The method according to claim 3, characterized in that activated carbon powder particles are suspended in a concentration between 10 and 12 wt .-% in the etching solution. 5. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß ein Teil der Ätzlösung nach dem Ätzen des Metalls und nach Abtrennen der in der Lösung suspendierten Aktivkohlepulverteilchen zur Metallrückgewinnung durch den Kathodenraum einer Elektrolysezelle hindurchgeführt wird.5. The method according to any one of the preceding claims, characterized in that a part of the etching solution after the etching of the metal and after separating the activated carbon powder particles suspended in the solution for metal recovery is passed through the cathode space of an electrolytic cell. 6. Verfahren nach dem vorhergehenden Anspruch, dadurch gekennzeichnet, daß die die Aktivkohlepulverteilchen enthaltende Ätzlösung im Kreislauf geführt wird und der den Kathodenraum der Elektrolysezelle durchströmende Teil der Ätzlösung nach Abscheiden des Metalls in den Kreislauf der Ätzlösung wieder eingeführt wird.6. The method according to the preceding claim, characterized in that the etching solution containing the activated carbon powder particles is circulated and the part of the etching solution flowing through the cathode space of the electrolytic cell is re-introduced into the circuit of the etching solution after deposition of the metal.
EP81106058A 1980-08-21 1981-08-03 Method for the regeneration of an ammoniacal etchant Expired EP0046522B1 (en)

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DE19803031567 DE3031567A1 (en) 1980-08-21 1980-08-21 METHOD FOR REGENERATING AN AMMONIA ACAL SOLUTION

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DE3305319A1 (en) * 1983-02-16 1984-08-16 Siemens AG, 1000 Berlin und 8000 München Electrolytic full regeneration process for an ammoniacal etching solution
EP0117068A2 (en) * 1983-01-20 1984-08-29 The Electricity Council Method and apparatus for etching copper
EP0122963A1 (en) * 1983-04-13 1984-10-31 Forschungszentrum Jülich Gmbh Apparatus for regenerating an ammoniacal etching solution
EP0137123A2 (en) * 1983-07-07 1985-04-17 Forschungszentrum Jülich Gmbh Etching solution containing ammonium sulfate, and process for regenerating it
EP0144742A1 (en) * 1983-11-08 1985-06-19 Forschungszentrum Jülich Gmbh Process and apparatus for regenerating an ammoniacal etching solution
EP0158910A2 (en) * 1984-04-16 1985-10-23 Lancy International, Inc. Process for recovering copper from an ammoniacal copper-etching solution, and regeneration of this solution

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DE3348401C2 (en) * 1983-02-16 1993-08-26 Siemens Ag, 8000 Muenchen, De Electrolyte regeneration of ammoniacal etching soln.
DE3340343A1 (en) * 1983-04-13 1984-10-18 Kernforschungsanlage Jülich GmbH, 5170 Jülich METHOD AND PLANT FOR REGENERATING AN AMMONIA ACID SOLUTION
FR2567914B1 (en) * 1984-07-19 1989-04-07 Univ Languedoc METHOD FOR THE CONTINUOUS RECOVERY OF METAL CATIONS FROM DILUTED SOLUTIONS AND APPARATUS FOR IMPLEMENTING SAME
DE3539886A1 (en) * 1985-11-11 1987-05-14 Hoellmueller Maschbau H METHOD AND DEVICE FOR ETCHING AN AT LEAST PARTLY OF METAL, PREFERABLY COPPER, EXISTING AGENT
US20090106888A1 (en) * 2002-08-02 2009-04-30 Roy W. Mattson, Jr. Safety device
US6760931B1 (en) 2002-08-02 2004-07-13 Roy W. Mattson, Jr. Non-electric sanitation water vessel system
US7146659B2 (en) 2002-08-02 2006-12-12 Mattson Jr Roy W Hydromassage antimicrobial whirlpool bathtub
DE102006051952A1 (en) * 2006-11-01 2008-05-08 Merck Patent Gmbh Particle-containing etching pastes for silicon surfaces and layers
CN108149249A (en) * 2017-07-05 2018-06-12 叶涛 A kind of ammonia still process recycling circulation technology of wiring board alkaline etching waste liquid for producing
WO2022022461A1 (en) * 2020-07-28 2022-02-03 叶涛 Method and apparatus for regeneration and reuse of alkaline etching waste liquid

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EP0011799A1 (en) * 1978-11-22 1980-06-11 Forschungszentrum Jülich Gmbh Process and apparatus for regenerating an etching solution containing cupric and/or ferric chloride in an electrolytic cell

Cited By (9)

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EP0117068A2 (en) * 1983-01-20 1984-08-29 The Electricity Council Method and apparatus for etching copper
EP0117068A3 (en) * 1983-01-20 1986-04-16 The Electricity Council Method and apparatus for etching copper
DE3305319A1 (en) * 1983-02-16 1984-08-16 Siemens AG, 1000 Berlin und 8000 München Electrolytic full regeneration process for an ammoniacal etching solution
EP0122963A1 (en) * 1983-04-13 1984-10-31 Forschungszentrum Jülich Gmbh Apparatus for regenerating an ammoniacal etching solution
EP0137123A2 (en) * 1983-07-07 1985-04-17 Forschungszentrum Jülich Gmbh Etching solution containing ammonium sulfate, and process for regenerating it
EP0137123A3 (en) * 1983-07-07 1986-05-07 Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung Etching solution containing ammonium sulfate, and process for regenerating it
EP0144742A1 (en) * 1983-11-08 1985-06-19 Forschungszentrum Jülich Gmbh Process and apparatus for regenerating an ammoniacal etching solution
EP0158910A2 (en) * 1984-04-16 1985-10-23 Lancy International, Inc. Process for recovering copper from an ammoniacal copper-etching solution, and regeneration of this solution
EP0158910A3 (en) * 1984-04-16 1987-10-07 Lancy International, Inc. Process for recovering copper from an ammoniacal copper-etching solution, and regeneration of this solution

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AU548856B2 (en) 1986-01-02
CA1175323A (en) 1984-10-02
DK368981A (en) 1982-02-22
JPH0329868B2 (en) 1991-04-25
DE3031567A1 (en) 1982-04-29
DK158156C (en) 1990-09-03
ATE22935T1 (en) 1986-11-15
EP0046522B1 (en) 1986-10-15
JPS5773183A (en) 1982-05-07
US4385969A (en) 1983-05-31
DK158156B (en) 1990-04-02
DE3031567C2 (en) 1987-09-03
AU7397581A (en) 1982-02-25

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