EP0041291A1 - Verfahren und Vorrichtung zum Formen eines metallischen Produktes unter Anwendung eines Photo-Halbleiter-Materials - Google Patents

Verfahren und Vorrichtung zum Formen eines metallischen Produktes unter Anwendung eines Photo-Halbleiter-Materials Download PDF

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Publication number
EP0041291A1
EP0041291A1 EP81200541A EP81200541A EP0041291A1 EP 0041291 A1 EP0041291 A1 EP 0041291A1 EP 81200541 A EP81200541 A EP 81200541A EP 81200541 A EP81200541 A EP 81200541A EP 0041291 A1 EP0041291 A1 EP 0041291A1
Authority
EP
European Patent Office
Prior art keywords
carrier
plastics
metal
conductive material
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP81200541A
Other languages
English (en)
French (fr)
Inventor
Anand Mohan
Frank Barendregt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Veco Beheer BV
Original Assignee
Veco Beheer BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Veco Beheer BV filed Critical Veco Beheer BV
Publication of EP0041291A1 publication Critical patent/EP0041291A1/de
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G13/00—Electrographic processes using a charge pattern
    • G03G13/26—Electrographic processes using a charge pattern for the production of printing plates for non-xerographic printing processes

Definitions

  • the invention relates to a process of forming a metal product by applying a plastics pattern upon a metal carrier, whether or not directly followed by a metal removal or metal deposition or chemical treatment, known per se.
  • a coating of photo semi-conductive material upon a conducting substrate is provided with a primary pattern of a latent electrostatic image whereupon plastics particles possessing an opposite charge are deposited upon said photo semi-conducting material, said plastics particles being transferred to an electrically conducting carrier by means of a potential difference whereupon the transferred plastics particles are fixed upon said carrier and the carrier is subjected to a treatment, wherein either metal ions are removed from non-coated portions of the carrier or metal is deposited upon non-coated portions of the carrier, followed by a removal of the fixed plastics particles. Said removal can be conveniently effected by means of a solvent.
  • carriers can be obtained possessing the desired plastics pattern, without the necessity of first coating each carrier with a photo lacquer coating, drying said photo lacquer coating and exposing each carrier separately.
  • the deposited removable plastics coating upon the photo semi-conductive material will, as a matter of fact, directly form the desired pattern upon the carrier, which pattern, after fixation, may serve either to protect portions not to be etched away from said carrier, or for protecting those portions upon which no metal should be deposited during a galvanic metal deposition.
  • metal articles are obtained which may, for instance, be used for integrated circuits, whilst depositing metals upon non-coated portions of the carrier at pre-determined locations, may result in an optimum deposit of small quantities of e.g. very expensive metals, such as gold or silver, without any dis - advantageous result upon the clarity of the pattern, either obtained by a galvanic deposition or by etching.
  • a very appropriate manner of depositing plastics particles upon a photo semi-conductive material is charging a continuous layer of photo semi-conductive material upon a metal substrate, in a dark space with an electric charge of a certain polarity, preferably by means of a corona discharge and by exposing with an image the charged layer of the electrically charged photo semi-conductive material, so that a primary charge pattern will be formed upon the photo semi-conductive material, which pattern is brought into contact with oppositely charged plastics particles.
  • the plastics particles to be deposited upon the electrically charged predetermined primary pattern are obtained from a dispersion of plastics particles in a non-electrically conducting liquid particularly an isoparaffin or, more generally, a liquid toner.
  • a non-electrically conducting liquid particularly an isoparaffin or, more generally, a liquid toner.
  • the present invention also relates to a metal product obtained by applying the process in accordance with the invention.
  • the invention furthermore relates to an installation for forming a metal product by coating the surface of a metal carrier, with a plastics coating and by a fixation of said coating, followed by a metal removal or metal deposition or chemical treatment known per se, at least comprising a support for the carrier, a plastics applying member and a fixation member for the fixation of applied plastics, characterized in that the installation comprises a member for charging a photo semi-conductive material in the darkness, an image exposing device for applying an image exposure, a plastics applying member for applying plastics particles and a member for providing a potentidto the carrier.
  • a copper substrate sheet 5 is conveyed, being provided with a homogeneous coating of a photo-semi-conductive material 2 adhering to the substrate 5, which material may for instance consist of selenium.
  • Said coating 2 is in the darkness provided with an electrostatic charge by means of a corona discharge 10.
  • the substrate 5, comprising the image exposed continuous coating of photo semi-conductive material 2 is positioned below a developing electrode 18, which is at a fixed distance from the surface of the photo semi-conductive material 2.
  • Said developing electrode 18 is provided by the installation 19, with a potential of the same polarity as the polarity of the charged pattern upon the photo semi-conductive materiah which potential, however, is lower in absolute value, and corresponds to the potential of the photo semi-conductive material 2.
  • a liquid toner is fed from a storage vessel 13, to the surface of the coating 2 of photo semi-oonductive material upon the substrate 5.
  • the mouth 12 is accommodated in such a manner that the toner is fed between the developing electrode 18 and the upper surface of the layer 2 upon the substrate 5.
  • the toner possesses good di-electric and film-forming properties.
  • the developing electrode 18 is of great importance as the plastics particles are substantially deposited upon charged portions of the photo-semi-conductive material and not beside those portions. Moreover, the developing electrode prevents that plastics particles will be deposited upon those portions, even when impurities are present in non-charged portions of the photo semi-conductive material.
  • the substrate 5 comprising the photo semi-conductive coating 2 and areas of deposited plastics particles 4a, 4b, 4c and 4d, is positioned below a carrier 1, which can be displaced by means of a second endless belt 14, comprising a plurality of carriers 1.
  • Said carriers 1 may, for instance, consist of a copper sheet 1, having only a slight thickness of, for instance, 0,1 mm.
  • the carrier 1 is brought at a potential being higher than, but of the same polarity as the portions 2a, 2b, 2c and 2d upon which plastics particles have been deposited.
  • the plastics in the portions 2a, 2b, 2c and 2d are transferred to the carrier 1, which is subsequently conveyed towards an area above a heating member 16, where the plastics particles in the portions 4a, 4b, 4c and 4d are fused upon the carrier 1.
  • Apertures 6a, 6b and 6c are now present between portions 4a, 4b, 4c and 4d.
  • a carrier 1, consisting of a copper sheet is obtained, upon which the above outlined portions of plastics are situated, whereinbetween non-coated portions form the bottom of apertures 6a, 6b and 6c.
  • etching means for instance hydrochloric acid
  • etching liquid applying member 9 the portions of sheet 1 situated below the apertures 6a, 6b and 6c can be removed by etching, so that continuous apertures 7a, 7b and 7c are formed.
  • plastics removing bath 21 the plastics regions 4a, 4b, 4c and 4d are removed by means of a suitable solvent, so that a metal article is obtained as shown in fig. 6A.
  • the obtained products may, for instance, be used for manufacturing integrated circuits.
  • FIG. 7 another embodiment is illustrated, wherein, by means of a galvanic metal deposit member 20, precious metals, e.g. silver and gold, can be deposited in cavities 6a, 6b and 6c, thereby forming metal deposit areas 8a, 8b and 8c. It is obvious that said galvanic deposit is not restricted to precious metals, although very good results are obtained hereby.
  • the plastics in the portions 4a, 4b, 4c and 4d is also removed in the plastics removing bath 21. The product obtained in that manner is schematically illustrated in fig. 7a.
  • a nickel substrate 5 having a thickness of 0,2 mm comprises an adhering selenium coating 2.
  • Said photo semi-conductive selenium material 2 is subjected in the darkness to a corona discharge so that the semi-conductive material is electrostatically charged with a charge having a positive polarity, whereas the substrate has been given earth potential.
  • portions 2a, 2b, 2c and 2d are obtained, still being electrostatically charged whilst the portions,3a, 3b thereinbetween are no longer charged.
  • the surface of the charged photo semi-conductive material areas 2a to 2d included is provided with plastics particles by using a liquid toner supplied in the area between the surface of the charged portions 2a to 2d included and a developing electrode 18, being situated at a constant distance thereabove.
  • Said developing electrode 18 is, by means of installation 19, brought at a potential having the same polarity as the potential of the charged areas of the photo semi-conductive material 2a, 2b, 2c and 2d, said areas having a potential of, for instance, + 400 volt, the developing electrode having a potential of for instance + 25 volt.
  • the toner consists e.g. of epoxy resin particles, being dispersed in an isoparaffin.
  • the substrate 5 comprising the photo semi-conductive coating 2 and the plastics particles areas 4a, 4b, 4c and 4d applied thereupon, is positioned below a carrier 1 consisting of copper having a thickness of e.g. 0,10 mm.
  • a carrier 1 consisting of copper having a thickness of e.g. 0,10 mm.
  • said carrier 1 is given a potential being 200 V higher than that of the areas 2a, 2b, 2c and 2d, being coated with plastics particles. Due to the applied potential, said plastics particles areas 4a, 4b, 4c and 4d are transferred to the carrier.
  • Said plastics articles are fused during further transport of the carrier 1, by means of the heating device 16. It is also possible to use a heated pressure roller and/or solvents, vapours, which will cause the plastics particles to be fixed to each other, as well as vapourized reactive gases which bind said plastics particles to each other.
  • a carrier By etching with 0,1 N hydrochloric acid, a carrier is obtained comprising continuous apertures 7a, 7b and 7c, which carrier can be used for integrated circuits.
  • a galvanic deposit a carrier is obtained comprising metal areas, consisting of gold or silver in the regions 8a, 8b and 8c between the plastics portions 4a, 4b, 4c and 4d upon the carrier 1.
  • the plastics coating in the regions 4a to 4d inclusive is removed from the formed products, whereupon metal products are obtained as shown in figures 6A and 7A, which products are suitable for use in electrical appliances.
  • suitable solvents for instance a ketone for an epoxy resin

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • ing And Chemical Polishing (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
EP81200541A 1980-05-29 1981-05-21 Verfahren und Vorrichtung zum Formen eines metallischen Produktes unter Anwendung eines Photo-Halbleiter-Materials Withdrawn EP0041291A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8003134A NL8003134A (nl) 1980-05-29 1980-05-29 Werkwijze en inrichting voor het vormen van een metaal-voortbrengsel onder toepassing van een fotohalfgeleidend materiaal.
NL8003134 1980-05-29

Publications (1)

Publication Number Publication Date
EP0041291A1 true EP0041291A1 (de) 1981-12-09

Family

ID=19835382

Family Applications (1)

Application Number Title Priority Date Filing Date
EP81200541A Withdrawn EP0041291A1 (de) 1980-05-29 1981-05-21 Verfahren und Vorrichtung zum Formen eines metallischen Produktes unter Anwendung eines Photo-Halbleiter-Materials

Country Status (3)

Country Link
EP (1) EP0041291A1 (de)
JP (1) JPS5719378A (de)
NL (1) NL8003134A (de)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1480896A (fr) * 1965-05-24 1967-05-12 Rank Xerox Ltd Procédé de préparation d'un cliché d'impression
US3361058A (en) * 1966-10-17 1968-01-02 Fairchild Camera Instr Co Method of forming printing stencil
DE2539025A1 (de) * 1974-09-02 1976-03-11 Australia Res Lab Verfahren zur herstellung von wiederverwendbaren lithographiedruckoberflaechen
US3999481A (en) * 1974-11-15 1976-12-28 Xerox Corporation Method for making a master

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1480896A (fr) * 1965-05-24 1967-05-12 Rank Xerox Ltd Procédé de préparation d'un cliché d'impression
US3361058A (en) * 1966-10-17 1968-01-02 Fairchild Camera Instr Co Method of forming printing stencil
DE2539025A1 (de) * 1974-09-02 1976-03-11 Australia Res Lab Verfahren zur herstellung von wiederverwendbaren lithographiedruckoberflaechen
US3999481A (en) * 1974-11-15 1976-12-28 Xerox Corporation Method for making a master

Also Published As

Publication number Publication date
NL8003134A (nl) 1982-01-04
JPS5719378A (en) 1982-02-01

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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AK Designated contracting states

Designated state(s): AT BE CH DE FR GB IT LI LU NL SE

17P Request for examination filed

Effective date: 19811027

STAA Information on the status of an ep patent application or granted ep patent

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18D Application deemed to be withdrawn

Effective date: 19840117

RIN1 Information on inventor provided before grant (corrected)

Inventor name: MOHAN, ANAND

Inventor name: BARENDREGT, FRANK