EA201291130A1 - Электрод для плазменной обработки диэлектрическим барьерным разрядом - Google Patents

Электрод для плазменной обработки диэлектрическим барьерным разрядом

Info

Publication number
EA201291130A1
EA201291130A1 EA201291130A EA201291130A EA201291130A1 EA 201291130 A1 EA201291130 A1 EA 201291130A1 EA 201291130 A EA201291130 A EA 201291130A EA 201291130 A EA201291130 A EA 201291130A EA 201291130 A1 EA201291130 A1 EA 201291130A1
Authority
EA
Eurasian Patent Office
Prior art keywords
barrier discharge
dielectric barrier
electrode
plasma treatment
active part
Prior art date
Application number
EA201291130A
Other languages
English (en)
Other versions
EA024404B1 (ru
Inventor
Эрик Тиксо
Эрик Мишель
Жозеф Леклерк
Original Assignee
Агк Гласс Юроп
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Агк Гласс Юроп filed Critical Агк Гласс Юроп
Publication of EA201291130A1 publication Critical patent/EA201291130A1/ru
Publication of EA024404B1 publication Critical patent/EA024404B1/ru

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/3255—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Плоский электрод для плазменной обработки поверхности диэлектрическим барьерным разрядом (DBD), содержащий металлическую оболочку (8), подающую высокое напряжение и снабжённую активной частью (2), предназначенной для параллельного размещения с подлежащей обработке поверхностью (27). Данная активная часть (2) закрыта с наружной стороны листом (4) диэлектрического материала, к которой он прикреплён полимерным слоем (6). Внутренняя поверхность активной части (2) образует с металлической оболочкой (8) теплообменник, соединённый с вторичной системой (34) охлаждения, по которой циркулирует охладитель (10).
EA201291130A 2010-04-30 2011-04-27 Электрод для плазменной обработки диэлектрическим барьерным разрядом EA024404B1 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP10161557 2010-04-30
PCT/EP2011/056621 WO2011134978A1 (fr) 2010-04-30 2011-04-27 Electrode pour procede plasma dbd

Publications (2)

Publication Number Publication Date
EA201291130A1 true EA201291130A1 (ru) 2013-04-30
EA024404B1 EA024404B1 (ru) 2016-09-30

Family

ID=42738894

Family Applications (1)

Application Number Title Priority Date Filing Date
EA201291130A EA024404B1 (ru) 2010-04-30 2011-04-27 Электрод для плазменной обработки диэлектрическим барьерным разрядом

Country Status (9)

Country Link
US (1) US20130038196A1 (ru)
EP (1) EP2564412B1 (ru)
JP (1) JP5756514B2 (ru)
CN (1) CN102859638B (ru)
AR (1) AR081458A1 (ru)
BR (1) BR112012027756B1 (ru)
EA (1) EA024404B1 (ru)
PL (1) PL2564412T3 (ru)
WO (1) WO2011134978A1 (ru)

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Also Published As

Publication number Publication date
JP5756514B2 (ja) 2015-07-29
EA024404B1 (ru) 2016-09-30
CN102859638A (zh) 2013-01-02
EP2564412A1 (fr) 2013-03-06
BR112012027756A2 (ru) 2017-08-15
PL2564412T3 (pl) 2018-08-31
BR112012027756B1 (pt) 2021-09-21
AR081458A1 (es) 2012-09-05
EP2564412B1 (fr) 2018-03-14
JP2013530489A (ja) 2013-07-25
US20130038196A1 (en) 2013-02-14
CN102859638B (zh) 2016-09-21
WO2011134978A1 (fr) 2011-11-03

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Designated state(s): AM AZ KZ KG MD TJ TM