DK3781918T3 - Måler til termisk ledeevne - Google Patents
Måler til termisk ledeevne Download PDFInfo
- Publication number
- DK3781918T3 DK3781918T3 DK19710855.8T DK19710855T DK3781918T3 DK 3781918 T3 DK3781918 T3 DK 3781918T3 DK 19710855 T DK19710855 T DK 19710855T DK 3781918 T3 DK3781918 T3 DK 3781918T3
- Authority
- DK
- Denmark
- Prior art keywords
- measures
- thermal conductivity
- conductivity
- thermal
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
- G01L21/14—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured using thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/025—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Thermistors And Varistors (AREA)
- Cable Accessories (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/955,266 US10845263B2 (en) | 2018-04-17 | 2018-04-17 | Thermal conductivity gauge |
| PCT/US2019/019368 WO2019203929A1 (en) | 2018-04-17 | 2019-02-25 | Thermal conductivity gauge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3781918T3 true DK3781918T3 (da) | 2022-05-23 |
Family
ID=65763778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK19710855.8T DK3781918T3 (da) | 2018-04-17 | 2019-02-25 | Måler til termisk ledeevne |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US10845263B2 (da) |
| EP (2) | EP3781918B1 (da) |
| CN (2) | CN112005089B (da) |
| DK (1) | DK3781918T3 (da) |
| TW (2) | TW202317954A (da) |
| WO (1) | WO2019203929A1 (da) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10845263B2 (en) | 2018-04-17 | 2020-11-24 | Mks Instruments, Inc. | Thermal conductivity gauge |
| US11237067B2 (en) * | 2019-08-20 | 2022-02-01 | Kidde Technologies, Inc. | Uncertainty diagnosis for temperature detection systems |
| CN116547510A (zh) | 2020-11-16 | 2023-08-04 | 万机仪器公司 | 导热仪 |
| CN113865784A (zh) * | 2021-09-26 | 2021-12-31 | 成都国光电气股份有限公司 | 一种宽量程热偶真空计 |
| US20240118158A1 (en) | 2022-10-11 | 2024-04-11 | Mks Instruments, Inc. | Pirani Gauge |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB8603999D0 (en) * | 1986-02-18 | 1986-03-26 | Vg Instr Group | Vacuum monitoring apparatus |
| US4765188A (en) | 1986-11-24 | 1988-08-23 | Bourns Instruments, Inc. | Pressure transducer with integral digital temperature compensation |
| US5079954A (en) | 1990-12-27 | 1992-01-14 | The Boc Group, Inc. | Vacuum gauge |
| CH684805A5 (de) | 1992-07-20 | 1994-12-30 | Balzers Hochvakuum | Verfahren zur Wandlung eines gemessenen Signals, Wandler zu dessen Ausführung sowie Messanordnung. |
| DE4308434A1 (de) | 1993-03-17 | 1994-09-22 | Leybold Ag | Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter |
| DE4308433A1 (de) | 1993-03-17 | 1994-09-22 | Leybold Ag | Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel |
| US5557972A (en) | 1994-09-13 | 1996-09-24 | Teledyne Industries, Inc. | Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures |
| US5668320A (en) | 1995-06-19 | 1997-09-16 | Cardiometrics, Inc. | Piezoresistive pressure transducer circuitry accommodating transducer variability |
| US6023979A (en) | 1997-07-21 | 2000-02-15 | Helix Technology | Apparatus and methods for heat loss pressure measurement |
| FR2785046B1 (fr) | 1998-10-23 | 2001-01-26 | Claude Launay | Dispositif de mesure reposant sur la mesure indirecte de la permittivite |
| IL128878A0 (en) * | 1999-03-08 | 2000-01-31 | Newthan Ltd | Wide-range pressure gauge |
| KR100407815B1 (ko) | 2001-05-04 | 2003-12-01 | 학교법인 포항공과대학교 | 펠티어 효과를 이용한 열전도형 진공 게이지 |
| US20090056464A1 (en) | 2004-07-26 | 2009-03-05 | The Boc Group Plc | Pirani pressure gauge |
| US6973834B1 (en) | 2004-10-18 | 2005-12-13 | A.T.C.T. Advanced Thermal Chips Technologies Ltd. | Method and apparatus for measuring pressure of a fluid medium and applications thereof |
| WO2006057148A1 (ja) * | 2004-11-24 | 2006-06-01 | Ulvac, Inc. | ピラニ真空計 |
| US7207224B2 (en) | 2005-06-10 | 2007-04-24 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
| GB0516274D0 (en) * | 2005-08-08 | 2005-09-14 | Boc Group Plc | Thermal conductivity gauge |
| US7331237B2 (en) | 2006-02-01 | 2008-02-19 | Brooks Automation, Inc. | Technique for improving Pirani gauge temperature compensation over its full pressure range |
| KR101501426B1 (ko) * | 2006-06-02 | 2015-03-11 | 어플라이드 머티어리얼스, 인코포레이티드 | 차압 측정들에 의한 가스 유동 제어 |
| US7456634B2 (en) | 2006-10-26 | 2008-11-25 | Brooks Automation, Inc. | Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments |
| US7613586B2 (en) | 2007-01-16 | 2009-11-03 | Honeywell International Inc. | Thermal vacuum gauge |
| JP4316007B2 (ja) | 2007-09-13 | 2009-08-19 | キヤノンアネルバテクニクス株式会社 | ピラニ真空計 |
| US8047711B2 (en) * | 2008-08-06 | 2011-11-01 | Heinz Ploechinger | Thermocouple vacuum gauge |
| JP5745205B2 (ja) * | 2008-08-22 | 2015-07-08 | 木村 光照 | 加熱励振を利用した熱伝導型気圧センサ |
| US8171801B2 (en) | 2008-12-19 | 2012-05-08 | Institut National D'optique | Micro-thermistor gas pressure sensor |
| CN101588117B (zh) | 2009-06-02 | 2011-04-06 | 永济新时速电机电器有限责任公司 | 高速交流客运机车用变频调速异步牵引电动机 |
| WO2011099238A1 (ja) * | 2010-02-12 | 2011-08-18 | 株式会社アルバック | トランスデューサ型真空計 |
| US8893554B2 (en) | 2012-11-20 | 2014-11-25 | Hamilton Sundstrand Corporation | System and method for passively compensating pressure sensors |
| CN203011621U (zh) * | 2012-12-04 | 2013-06-19 | 姚文利 | 一种电阻真空计 |
| JP6217226B2 (ja) * | 2013-08-09 | 2017-10-25 | 日立金属株式会社 | 熱式質量流量計、質量流量制御装置、及び熱式質量流量計の製造方法 |
| DE102013226138A1 (de) | 2013-12-17 | 2015-06-18 | Robert Bosch Gmbh | Drucksensorvorrichtung, Luftmassenmessvorrichtung, Luftmassenmesssystem und Druckmessverfahren |
| US9335231B2 (en) | 2014-03-25 | 2016-05-10 | Mks Instruments, Inc. | Micro-Pirani vacuum gauges |
| JP6261463B2 (ja) | 2014-06-27 | 2018-01-17 | 東京エレクトロン株式会社 | 圧力測定装置および圧力測定方法 |
| DE202014007298U1 (de) | 2014-09-12 | 2015-12-16 | Vacuubrand Gmbh + Co Kg | Gasdruckmessvorichtung |
| FR3067809B1 (fr) | 2017-06-15 | 2021-11-19 | Kevin Kornelsen | Dispositifs de jauge a vide micro-fabriques sans etalonnage et procede de mesure de pression |
| CN107894300A (zh) * | 2017-12-29 | 2018-04-10 | 李涛 | 一种真空度测量装置 |
| US10845263B2 (en) | 2018-04-17 | 2020-11-24 | Mks Instruments, Inc. | Thermal conductivity gauge |
-
2018
- 2018-04-17 US US15/955,266 patent/US10845263B2/en active Active
-
2019
- 2019-02-25 DK DK19710855.8T patent/DK3781918T3/da active
- 2019-02-25 WO PCT/US2019/019368 patent/WO2019203929A1/en unknown
- 2019-02-25 CN CN201980026369.0A patent/CN112005089B/zh active Active
- 2019-02-25 EP EP19710855.8A patent/EP3781918B1/en active Active
- 2019-02-25 EP EP22156549.2A patent/EP4016034A1/en active Pending
- 2019-02-25 CN CN202210214855.9A patent/CN114577392A/zh active Pending
- 2019-03-12 TW TW112100187A patent/TW202317954A/zh unknown
- 2019-03-12 TW TW108108240A patent/TWI789501B/zh active
-
2020
- 2020-11-20 US US16/953,923 patent/US11656139B2/en active Active
-
2023
- 2023-04-19 US US18/303,222 patent/US11946823B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US11946823B2 (en) | 2024-04-02 |
| EP3781918B1 (en) | 2022-04-06 |
| CN112005089A (zh) | 2020-11-27 |
| US20210208016A1 (en) | 2021-07-08 |
| US10845263B2 (en) | 2020-11-24 |
| WO2019203929A1 (en) | 2019-10-24 |
| CN112005089B (zh) | 2022-03-25 |
| US20230366763A1 (en) | 2023-11-16 |
| TW201944039A (zh) | 2019-11-16 |
| US11656139B2 (en) | 2023-05-23 |
| EP4016034A1 (en) | 2022-06-22 |
| TW202317954A (zh) | 2023-05-01 |
| US20190316981A1 (en) | 2019-10-17 |
| EP3781918A1 (en) | 2021-02-24 |
| TWI789501B (zh) | 2023-01-11 |
| CN114577392A (zh) | 2022-06-03 |
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