DK3475625T3 - Styresystem til renrum og fremgangsmåde - Google Patents

Styresystem til renrum og fremgangsmåde Download PDF

Info

Publication number
DK3475625T3
DK3475625T3 DK17734432.2T DK17734432T DK3475625T3 DK 3475625 T3 DK3475625 T3 DK 3475625T3 DK 17734432 T DK17734432 T DK 17734432T DK 3475625 T3 DK3475625 T3 DK 3475625T3
Authority
DK
Denmark
Prior art keywords
procedure
control system
clean space
clean
space
Prior art date
Application number
DK17734432.2T
Other languages
Danish (da)
English (en)
Inventor
Robert Wallace
Shuji Chen
Original Assignee
Energy Efficiency Consultancy Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Energy Efficiency Consultancy Group Ltd filed Critical Energy Efficiency Consultancy Group Ltd
Application granted granted Critical
Publication of DK3475625T3 publication Critical patent/DK3475625T3/da

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00Enclosures; Chambers
    • B01L1/04Dust-free rooms or enclosures
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00Control or safety arrangements
    • F24F11/30Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00Control or safety arrangements
    • F24F11/62Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14Process control and prevention of errors
    • B01L2200/143Quality control, feedback systems
    • B01L2200/146Employing pressure sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14Process control and prevention of errors
    • B01L2200/143Quality control, feedback systems
    • B01L2200/147Employing temperature sensors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00Control or safety arrangements
    • F24F11/30Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F24F11/46Improving electric energy efficiency or saving
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00Control inputs relating to air properties
    • F24F2110/50Air quality properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fuzzy Systems (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Signal Processing (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Air Conditioning Control Device (AREA)
  • Ventilation (AREA)
  • Medicinal Preparation (AREA)
DK17734432.2T 2016-06-27 2017-06-23 Styresystem til renrum og fremgangsmåde DK3475625T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1611107.2A GB2551714A (en) 2016-06-27 2016-06-27 Cleanroom control system and method
PCT/GB2017/051837 WO2018002589A1 (en) 2016-06-27 2017-06-23 Cleanroom control system and method

Publications (1)

Publication Number Publication Date
DK3475625T3 true DK3475625T3 (da) 2022-01-10

Family

ID=56891618

Family Applications (1)

Application Number Title Priority Date Filing Date
DK17734432.2T DK3475625T3 (da) 2016-06-27 2017-06-23 Styresystem til renrum og fremgangsmåde

Country Status (10)

Country Link
US (1) US20190234631A1 (zh)
EP (1) EP3475625B1 (zh)
CN (1) CN109312941B (zh)
AU (1) AU2017289701B2 (zh)
DK (1) DK3475625T3 (zh)
ES (1) ES2902870T3 (zh)
GB (1) GB2551714A (zh)
PL (1) PL3475625T3 (zh)
SG (1) SG11201811173VA (zh)
WO (1) WO2018002589A1 (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3645949A1 (en) * 2017-06-29 2020-05-06 American Air Filter Company, Inc. Sensor array environment for an air handling unit
US11745033B2 (en) * 2019-03-17 2023-09-05 Brett Patrick Process and apparatus to preclude unfiltered atmospheric gases and human respiration products including carbon-dioxide with carbon-14 from entering controlled greenhouse atmospheric gases
JP7325066B2 (ja) * 2019-06-28 2023-08-14 パナソニックIpマネジメント株式会社 空調システム、及び、その制御方法
US10997845B2 (en) * 2019-10-07 2021-05-04 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
CN110767917A (zh) * 2019-11-21 2020-02-07 四川新敏雅电池科技有限公司 电池生产环境自动控制系统以及控制系统的控制方法
BE1027785B1 (nl) * 2019-11-25 2021-06-22 Advipro Bvba Werkwijze voor het regelen van drukverschillen, temperatuur en luchtvochtigheid in een stofvrije ruimte
BE1027790B1 (nl) * 2019-11-25 2021-06-23 Advipro Bvba Inrichting voor het monitoren en regelen van een stofvrije ruimte
CN111693409B (zh) * 2020-05-27 2023-08-15 北京蛙鸣华清环保科技有限公司 一种气体及生物气溶胶校准系统及方法
FR3111282A1 (fr) * 2020-06-12 2021-12-17 Airinspace Salle blanche avec suivi du niveau de particules
JP7487034B2 (ja) 2020-07-28 2024-05-20 清水建設株式会社 設計方法、設計システム、及びプログラム
EP3985317A1 (en) * 2020-10-16 2022-04-20 Neuroplast Beheer B.V. A clean room system as well as a computer implemented method for controlling such clean room system
CN112255983B (zh) * 2020-10-24 2021-12-21 陈彦均 基于化妆品生产的大数据处理方法及生产数据处理中心
US11852364B2 (en) * 2021-03-18 2023-12-26 Life Balance Technologies Llc HVAC air balance monitoring and testing system
FR3129460B1 (fr) * 2021-11-22 2024-02-02 Commissariat Energie Atomique Installation de protection vis-à-vis de polluants présents dans l’air au sein d’un bâtiment industriel
CN114413546A (zh) * 2022-03-03 2022-04-29 四川科特空调净化有限责任公司 一种智能低温操作洁净室环境保障系统
CN117742279B (zh) * 2024-02-20 2024-05-07 广州诗妃生物科技有限公司 一种化妆品生产控制方法及系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4530272A (en) * 1984-01-13 1985-07-23 International Business Machines Corporation Method for controlling contamination in a clean room
US5195922A (en) * 1990-08-29 1993-03-23 Intelligent Enclosures Corporation Environmental control system
US5538471A (en) * 1994-11-15 1996-07-23 Innovative Air Systems, Inc. Dynamic particulate control system and method of operation
US6503462B1 (en) * 2001-06-19 2003-01-07 Honeywell International Inc. Smart air cleaning system and method thereof
WO2003102475A1 (fr) * 2002-06-03 2003-12-11 Sankyo Seiki Mfg. Co., Ltd. Module d'assemblage propre, appareillage de production le contenant, robot industriel et systeme antipollution
CN100432561C (zh) * 2004-07-08 2008-11-12 乐金电子(天津)电器有限公司 换气系统风量控制方法
EP1856453B1 (en) * 2005-03-10 2016-07-13 Aircuity Incorporated Dynamic control of dilution ventilation in one-pass, critical environments
WO2012112775A2 (en) * 2011-02-16 2012-08-23 Fiorita John L Jr Clean room control system and method
JP2012247078A (ja) * 2011-05-25 2012-12-13 Omron Corp 空気の品質調整制御方法、換気風量制御方法および換気風量制御システム
US9285792B2 (en) * 2012-11-09 2016-03-15 Veltek Associates, Inc. Programmable logic controller-based control center and user interface for air sampling in controlled environments
US9109981B2 (en) * 2013-03-15 2015-08-18 Aircuity, Inc. Methods and apparatus for indoor air contaminant monitoring
AU2014254089B2 (en) * 2013-04-19 2017-10-12 Google Llc Controlling an HVAC system during demand response events
KR101489221B1 (ko) * 2013-07-16 2015-02-04 주식회사 시스웍 다기능 청정공조 제어장치
US9280884B1 (en) * 2014-09-03 2016-03-08 Oberon, Inc. Environmental sensor device with alarms
EP2995875B1 (de) * 2014-09-11 2018-06-20 Weiss Klimatechnik GmbH Verfahren zum Betrieb eines Reinraums und Steuervorrichtung
CN104482634A (zh) * 2014-12-24 2015-04-01 上海市建筑科学研究院(集团)有限公司 一种室内空气品质多参数综合控制系统

Also Published As

Publication number Publication date
CN109312941B (zh) 2022-06-17
CN109312941A (zh) 2019-02-05
SG11201811173VA (en) 2019-01-30
AU2017289701B2 (en) 2020-12-03
GB201611107D0 (en) 2016-08-10
WO2018002589A1 (en) 2018-01-04
US20190234631A1 (en) 2019-08-01
GB2551714A (en) 2018-01-03
EP3475625A1 (en) 2019-05-01
ES2902870T3 (es) 2022-03-30
PL3475625T3 (pl) 2022-04-19
EP3475625B1 (en) 2021-10-13
AU2017289701A1 (en) 2019-01-31

Similar Documents

Publication Publication Date Title
DK3475625T3 (da) Styresystem til renrum og fremgangsmåde
DK3537765T3 (da) Fremgangsmåde og indretning til omskiftning
DK3265947T3 (da) Fremgangsmåde og system til kryptering
DK3280441T3 (da) Anti-sortilin-antistoffer og fremgangsmåder til anvendelse deraf
DK3213065T3 (da) System og fremgangsmåder til todimensionel rplc-sfc-kromatografi
DK3090416T3 (da) Fremgangsmåde og system til overvågning
DK3194123T3 (da) System og fremgangsmåde til fleksibelt menneske-maskine-samarbejde
DK3270944T3 (da) Optimerede leverspecifikke ekspressionssystemer til FVIII og FIX
DK3260813T3 (da) System og fremgangsmåde til afstandsbedømmelse
DK3472455T3 (da) Kontrol- eller behandlingssystem og fremgangsmåde
DK2983379T3 (da) Systemer og fremgangsmåder til hørehjælps-rf-flerbåndsdrift
DK3129912T3 (da) Fremgangsmåde og system til sikring af data
DK3319611T3 (da) Oxysteroler og fremgangsmåder til anvendelse deraf
DK3485201T3 (da) Ventilationssystem og fremgangsmåde
DK3481581T3 (da) Metalwiretilførselssystem og fremgangsmåde
DK3319612T3 (da) Oxysteroler og fremgansmåder til anvendelse derfor
DK3175588T3 (da) Systemer og fremgangsmåder til beskedredigering
DK3221267T3 (da) System og fremgangsmåde til vandrensning
DK3626602T3 (da) Styreanordning og fremgangsmåde til styreanordningen
DK3230795T3 (da) Prægelak og fremgangsmåde til prægning
DK3152291T3 (da) Fremgangsmåder og indretninger til kapillar-understøttet vitrificering
DK3346056T3 (da) Rengøringssystem og fremgangsmåde
DK3304394T3 (da) Fremgangsmåder og systemer til godkendelse
DK3558635T3 (da) System til supplerende fremstillingsprocesser og relateret styringsfremgangsmåde
DK3177876T3 (da) Fremgangsmåde og indretning til affugtning