AU2017289701B2 - Cleanroom control system and method - Google Patents

Cleanroom control system and method Download PDF

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Publication number
AU2017289701B2
AU2017289701B2 AU2017289701A AU2017289701A AU2017289701B2 AU 2017289701 B2 AU2017289701 B2 AU 2017289701B2 AU 2017289701 A AU2017289701 A AU 2017289701A AU 2017289701 A AU2017289701 A AU 2017289701A AU 2017289701 B2 AU2017289701 B2 AU 2017289701B2
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AU
Australia
Prior art keywords
cleanroom
control system
control
concentration
hvac
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AU2017289701A
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English (en)
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AU2017289701A1 (en
Inventor
Shuji CHEN
Robert Wallace
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Energy Efficiency Consultancy Group Ltd
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Energy Efficiency Consultancy Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of AU2017289701A1 publication Critical patent/AU2017289701A1/en
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Publication of AU2017289701B2 publication Critical patent/AU2017289701B2/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B01L2200/143—Quality control, feedback systems
    • B01L2200/146—Employing pressure sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/14—Process control and prevention of errors
    • B01L2200/143—Quality control, feedback systems
    • B01L2200/147—Employing temperature sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F11/00—Control or safety arrangements
    • F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
    • F24F11/46—Improving electric energy efficiency or saving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F2110/00—Control inputs relating to air properties
    • F24F2110/50—Air quality properties

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Combustion & Propulsion (AREA)
  • Mathematical Physics (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • Fuzzy Systems (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Air Conditioning Control Device (AREA)
  • Ventilation (AREA)
  • Medicinal Preparation (AREA)
AU2017289701A 2016-06-27 2017-06-23 Cleanroom control system and method Active AU2017289701B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1611107.2A GB2551714A (en) 2016-06-27 2016-06-27 Cleanroom control system and method
GB1611107.2 2016-06-27
PCT/GB2017/051837 WO2018002589A1 (en) 2016-06-27 2017-06-23 Cleanroom control system and method

Publications (2)

Publication Number Publication Date
AU2017289701A1 AU2017289701A1 (en) 2019-01-31
AU2017289701B2 true AU2017289701B2 (en) 2020-12-03

Family

ID=56891618

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2017289701A Active AU2017289701B2 (en) 2016-06-27 2017-06-23 Cleanroom control system and method

Country Status (10)

Country Link
US (1) US20190234631A1 (zh)
EP (1) EP3475625B1 (zh)
CN (1) CN109312941B (zh)
AU (1) AU2017289701B2 (zh)
DK (1) DK3475625T3 (zh)
ES (1) ES2902870T3 (zh)
GB (1) GB2551714A (zh)
PL (1) PL3475625T3 (zh)
SG (1) SG11201811173VA (zh)
WO (1) WO2018002589A1 (zh)

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WO2019006350A1 (en) * 2017-06-29 2019-01-03 American Air Filter Company, Inc. SENSOR NETWORK ENVIRONMENT FOR AIR TREATMENT UNIT
US11745033B2 (en) * 2019-03-17 2023-09-05 Brett Patrick Process and apparatus to preclude unfiltered atmospheric gases and human respiration products including carbon-dioxide with carbon-14 from entering controlled greenhouse atmospheric gases
WO2020261928A1 (ja) * 2019-06-28 2020-12-30 パナソニックＩｐマネジメント株式会社 空調システム、及び、その制御方法
US10997845B2 (en) * 2019-10-07 2021-05-04 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
CN110767917A (zh) * 2019-11-21 2020-02-07 四川新敏雅电池科技有限公司 电池生产环境自动控制系统以及控制系统的控制方法
BE1027790B1 (nl) * 2019-11-25 2021-06-23 Advipro Bvba Inrichting voor het monitoren en regelen van een stofvrije ruimte
BE1027785B1 (nl) * 2019-11-25 2021-06-22 Advipro Bvba Werkwijze voor het regelen van drukverschillen, temperatuur en luchtvochtigheid in een stofvrije ruimte
CN111693409B (zh) * 2020-05-27 2023-08-15 北京蛙鸣华清环保科技有限公司 一种气体及生物气溶胶校准系统及方法
FR3111282A1 (fr) * 2020-06-12 2021-12-17 Airinspace Salle blanche avec suivi du niveau de particules
JP7487034B2 (ja) 2020-07-28 2024-05-20 清水建設株式会社 設計方法、設計システム、及びプログラム
EP3985317A1 (en) * 2020-10-16 2022-04-20 Neuroplast Beheer B.V. A clean room system as well as a computer implemented method for controlling such clean room system
CN113110318A (zh) * 2020-10-24 2021-07-13 陈彦均 基于化妆品的生产指标变量获取方法及可读信号介质
US11852364B2 (en) * 2021-03-18 2023-12-26 Life Balance Technologies Llc HVAC air balance monitoring and testing system
FR3129460B1 (fr) * 2021-11-22 2024-02-02 Commissariat Energie Atomique Installation de protection vis-à-vis de polluants présents dans l’air au sein d’un bâtiment industriel
CN114413546A (zh) * 2022-03-03 2022-04-29 四川科特空调净化有限责任公司 一种智能低温操作洁净室环境保障系统
CN117742279B (zh) * 2024-02-20 2024-05-07 广州诗妃生物科技有限公司 一种化妆品生产控制方法及系统

Citations (7)

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US5538471A (en) * 1994-11-15 1996-07-23 Innovative Air Systems, Inc. Dynamic particulate control system and method of operation
WO2006099125A2 (en) * 2005-03-10 2006-09-21 Aircuity, Inc. Dynamic control of dilution ventilation in one-pass, critical environments
EP2527755A2 (en) * 2011-05-25 2012-11-28 Omron Corporation Method for controlling air quality adjustment, method for controlling ventilation air flow and ventilation air flow controlling system
US20140132415A1 (en) * 2012-11-09 2014-05-15 Veltek Associates, Inc. Programmable logic controller-based control center and user interface for air sampling in controlled environments
US20140260692A1 (en) * 2013-03-15 2014-09-18 Aircuity, Inc. Methods and apparatus for indoor air contaminant monitoring
US20160063833A1 (en) * 2014-09-03 2016-03-03 Oberon, Inc. Environmental Sensor Device with Alarms
US20160076780A1 (en) * 2014-09-11 2016-03-17 Weiss Klimatechnik Gmbh Process For Operating A Clean Room And Control Device

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US4530272A (en) * 1984-01-13 1985-07-23 International Business Machines Corporation Method for controlling contamination in a clean room
US5195922A (en) * 1990-08-29 1993-03-23 Intelligent Enclosures Corporation Environmental control system
US6503462B1 (en) * 2001-06-19 2003-01-07 Honeywell International Inc. Smart air cleaning system and method thereof
KR20050007588A (ko) * 2002-06-03 2005-01-19 가부시기가이샤 산교세이기 세이사꾸쇼 클린 조립 모듈 장치, 이것에 의해 구성한 생산 시스템,산업용 로봇 및 오염 전파 방지 시스템
CN100432561C (zh) * 2004-07-08 2008-11-12 乐金电子(天津)电器有限公司 换气系统风量控制方法
WO2012112775A2 (en) * 2011-02-16 2012-08-23 Fiorita John L Jr Clean room control system and method
CA2909797C (en) * 2013-04-19 2023-01-03 Google Inc. Controlling an hvac system during demand response events
KR101489221B1 (ko) * 2013-07-16 2015-02-04 주식회사 시스웍 다기능 청정공조 제어장치
CN104482634A (zh) * 2014-12-24 2015-04-01 上海市建筑科学研究院(集团)有限公司 一种室内空气品质多参数综合控制系统

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5538471A (en) * 1994-11-15 1996-07-23 Innovative Air Systems, Inc. Dynamic particulate control system and method of operation
WO2006099125A2 (en) * 2005-03-10 2006-09-21 Aircuity, Inc. Dynamic control of dilution ventilation in one-pass, critical environments
EP2527755A2 (en) * 2011-05-25 2012-11-28 Omron Corporation Method for controlling air quality adjustment, method for controlling ventilation air flow and ventilation air flow controlling system
US20140132415A1 (en) * 2012-11-09 2014-05-15 Veltek Associates, Inc. Programmable logic controller-based control center and user interface for air sampling in controlled environments
US20140260692A1 (en) * 2013-03-15 2014-09-18 Aircuity, Inc. Methods and apparatus for indoor air contaminant monitoring
US20160063833A1 (en) * 2014-09-03 2016-03-03 Oberon, Inc. Environmental Sensor Device with Alarms
US20160076780A1 (en) * 2014-09-11 2016-03-17 Weiss Klimatechnik Gmbh Process For Operating A Clean Room And Control Device

Also Published As

Publication number Publication date
GB2551714A (en) 2018-01-03
DK3475625T3 (da) 2022-01-10
US20190234631A1 (en) 2019-08-01
ES2902870T3 (es) 2022-03-30
CN109312941B (zh) 2022-06-17
PL3475625T3 (pl) 2022-04-19
WO2018002589A1 (en) 2018-01-04
AU2017289701A1 (en) 2019-01-31
SG11201811173VA (en) 2019-01-30
EP3475625B1 (en) 2021-10-13
CN109312941A (zh) 2019-02-05
EP3475625A1 (en) 2019-05-01
GB201611107D0 (en) 2016-08-10

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