DK3467457T3 - Vibrationssensor - Google Patents

Vibrationssensor Download PDF

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Publication number
DK3467457T3
DK3467457T3 DK19153514.5T DK19153514T DK3467457T3 DK 3467457 T3 DK3467457 T3 DK 3467457T3 DK 19153514 T DK19153514 T DK 19153514T DK 3467457 T3 DK3467457 T3 DK 3467457T3
Authority
DK
Denmark
Prior art keywords
vibrationssensor
Prior art date
Application number
DK19153514.5T
Other languages
English (en)
Inventor
Peter Christiaan Post
Raymond Mögelin
Original Assignee
Sonion Nederland Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sonion Nederland Bv filed Critical Sonion Nederland Bv
Application granted granted Critical
Publication of DK3467457T3 publication Critical patent/DK3467457T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/22—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired frequency characteristic only 
    • H04R1/28—Transducer mountings or enclosures modified by provision of mechanical or acoustic impedances, e.g. resonator, damping means
    • H04R1/2807—Enclosures comprising vibrating or resonating arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0016—Protection against shocks or vibrations, e.g. vibration damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
    • G01H3/04—Frequency
    • G01H3/06—Frequency by electric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/20—Arrangements for obtaining desired frequency or directional characteristics
    • H04R1/32—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only
    • H04R1/34—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means
    • H04R1/38—Arrangements for obtaining desired frequency or directional characteristics for obtaining desired directional characteristic only by using a single transducer with sound reflecting, diffracting, directing or guiding means in which sound waves act upon both sides of a diaphragm and incorporating acoustic phase-shifting means, e.g. pressure-gradient microphone
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/02—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
    • H04R31/006—Interconnection of transducer parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0257—Microphones or microspeakers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use
DK19153514.5T 2018-04-30 2019-01-24 Vibrationssensor DK3467457T3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18170039 2018-04-30

Publications (1)

Publication Number Publication Date
DK3467457T3 true DK3467457T3 (en) 2022-10-17

Family

ID=62091736

Family Applications (1)

Application Number Title Priority Date Filing Date
DK19153514.5T DK3467457T3 (en) 2018-04-30 2019-01-24 Vibrationssensor

Country Status (4)

Country Link
US (2) US11350208B2 (da)
EP (2) EP3995795A1 (da)
CN (2) CN109916502B (da)
DK (1) DK3467457T3 (da)

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EP3995795A1 (en) * 2018-04-30 2022-05-11 Sonion Nederland B.V. Vibration sensor
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WO2020258174A1 (zh) * 2019-06-27 2020-12-30 瑞声声学科技(深圳)有限公司 振动传感器和音频设备
CN110230031B (zh) * 2019-06-28 2021-03-02 中北大学 一种宽频带无源耐高温柔性振动传感器及其制备工艺
CN110602615A (zh) * 2019-08-22 2019-12-20 歌尔股份有限公司 用于振动感测装置的振动组件以及振动感测装置
CN210513400U (zh) * 2019-08-22 2020-05-12 歌尔科技有限公司 一种振动感测装置
CN110536220A (zh) * 2019-08-22 2019-12-03 歌尔股份有限公司 振动感测装置感测振动的方法以及振动感测装置
CN110972045B (zh) * 2019-11-18 2021-11-16 潍坊歌尔微电子有限公司 一种振动感测装置以及电子设备
CN114710734A (zh) * 2019-12-30 2022-07-05 美商楼氏电子有限公司 平衡电枢式接收器
TWI732617B (zh) * 2020-03-25 2021-07-01 美律實業股份有限公司 振動感測器
CN112333618A (zh) * 2020-10-27 2021-02-05 歌尔微电子有限公司 骨声纹传感器模组和电子设备
EP3993437A1 (en) 2020-10-28 2022-05-04 Sonion Nederland B.V. Micro-electromechanical transducer with suspended mass
CN117441349A (zh) * 2021-06-18 2024-01-23 深圳市韶音科技有限公司 一种振动传感器
TWI773389B (zh) * 2021-06-18 2022-08-01 大陸商美律電子(深圳)有限公司 振動感測組件
CN113777163A (zh) * 2021-10-20 2021-12-10 广东奥迪威传感科技股份有限公司 用于频率测试的传感装置
CN114136426A (zh) * 2021-11-25 2022-03-04 歌尔微电子股份有限公司 传感器及可穿戴设备
WO2023144365A1 (en) * 2022-01-31 2023-08-03 Sonion Nederland B.V. Compact vibration sensor
WO2023144366A1 (en) * 2022-01-31 2023-08-03 Sonion Nederland B.V. Vibration sensor with controlled vibration mode

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Also Published As

Publication number Publication date
CN109916502B (zh) 2023-10-10
CN109916502A (zh) 2019-06-21
US11856360B2 (en) 2023-12-26
US11350208B2 (en) 2022-05-31
EP3467457A3 (en) 2019-09-25
CN117213614A (zh) 2023-12-12
US20220182753A1 (en) 2022-06-09
US20190335271A1 (en) 2019-10-31
EP3467457B1 (en) 2022-07-20
EP3995795A1 (en) 2022-05-11
EP3467457A2 (en) 2019-04-10

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