DK3388876T3 - Integration af fiberoptisk integreret kredsløb af silicium til høj datahastighed - Google Patents

Integration af fiberoptisk integreret kredsløb af silicium til høj datahastighed Download PDF

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Publication number
DK3388876T3
DK3388876T3 DK18159675.0T DK18159675T DK3388876T3 DK 3388876 T3 DK3388876 T3 DK 3388876T3 DK 18159675 T DK18159675 T DK 18159675T DK 3388876 T3 DK3388876 T3 DK 3388876T3
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Denmark
Prior art keywords
silicium
integration
high data
data speed
fiber optically
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DK18159675.0T
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English (en)
Inventor
Hong Liu
Ryohei Urata
Woon Seong Kwon
Teckgyu Kang
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Google Llc
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Publication of DK3388876T3 publication Critical patent/DK3388876T3/da

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    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/16Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
    • H01L25/167Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits comprising optoelectronic devices, e.g. LED, photodiodes
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    • H01ELECTRIC ELEMENTS
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    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
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    • G02B6/424Mounting of the optical light guide
    • G02B6/4243Mounting of the optical light guide into a groove
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4219Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4236Fixing or mounting methods of the aligned elements
    • G02B6/4245Mounting of the opto-electronic elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4274Electrical aspects
    • G02B6/428Electrical aspects containing printed circuit boards [PCB]
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  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Led Device Packages (AREA)
  • Light Receiving Elements (AREA)
  • Optical Integrated Circuits (AREA)
DK18159675.0T 2017-04-14 2018-03-02 Integration af fiberoptisk integreret kredsløb af silicium til høj datahastighed DK3388876T3 (da)

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Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10884551B2 (en) 2013-05-16 2021-01-05 Analog Devices, Inc. Integrated gesture sensor module
US10025047B1 (en) * 2017-04-14 2018-07-17 Google Llc Integration of silicon photonics IC for high data rate
CN109564332B (zh) * 2017-05-23 2020-04-14 华为技术有限公司 一种光模块结构及其制作方法
US10712197B2 (en) * 2018-01-11 2020-07-14 Analog Devices Global Unlimited Company Optical sensor package
US10615567B1 (en) * 2018-02-14 2020-04-07 Inphi Corporation Packaging of a directly modulated laser chip in photonics module
JP6774456B2 (ja) * 2018-04-26 2020-10-21 日本電信電話株式会社 光モジュール
US10924269B1 (en) * 2018-08-02 2021-02-16 Inphi Corporation Compact optical module integrated for communicating cryptocurrency transaction
US10928585B2 (en) 2018-10-26 2021-02-23 Micron Technology, Inc. Semiconductor devices having electro-optical substrates
US11024617B2 (en) * 2018-10-26 2021-06-01 Micron Technology, Inc. Semiconductor packages having photon integrated circuit (PIC) chips
US11152308B2 (en) * 2018-11-05 2021-10-19 Ii-Vi Delaware, Inc. Interposer circuit
FR3089310A1 (fr) * 2018-12-04 2020-06-05 Stmicroelectronics (Grenoble 2) Sas Dispositif électronique comprenant une puce électronique pourvue d’un câble optique
US10598875B2 (en) * 2018-12-14 2020-03-24 Intel Corporation Photonic package with a bridge between a photonic die and an optical coupling structure
WO2020173561A1 (en) * 2019-02-27 2020-09-03 Telefonaktiebolaget Lm Ericsson (Publ) Optical module and method of fabrication
CN112103275B (zh) * 2019-05-30 2022-04-12 上海新微技术研发中心有限公司 硅光模块的封装方法及硅光模块
DE102019115307A1 (de) 2019-06-06 2020-12-10 Infineon Technologies Ag Halbleitervorrichtungen mit planaren wellenleiter-übertragungsleitungen
CN114930525B (zh) * 2020-03-31 2024-05-03 华为技术有限公司 一种光电合封集成器件
WO2022029941A1 (ja) * 2020-08-05 2022-02-10 日本電信電話株式会社 光モジュール
US11177219B1 (en) 2020-09-16 2021-11-16 Hewlett Packard Enterprise Development Lp Photonic integrated circuit with integrated optical transceiver front-end circuitry for photonic devices and methods of fabricating the same
US11564312B2 (en) 2020-09-28 2023-01-24 Google Llc Laser light source co-packaged with photonic integrated circuit and substrate
CN117043948A (zh) 2021-03-05 2023-11-10 艾维森纳科技有限公司 用光纤的led芯片到芯片垂直发射光学通信
KR102671347B1 (ko) * 2021-03-17 2024-06-03 오프로세서 인코퍼레이티드 광학 모듈 패키지
US11923269B2 (en) 2021-04-07 2024-03-05 International Business Machines Corporation Co-packaged optical module
CN113985533A (zh) * 2021-10-18 2022-01-28 上海曦智科技有限公司 光子半导体装置及其制造方法
US11929357B2 (en) * 2021-10-20 2024-03-12 Advanced Semiconductor Engineering, Inc. Optoelectronic package structure and method of manufacturing the same
CN115588618B (zh) * 2022-12-06 2023-03-10 盛合晶微半导体(江阴)有限公司 三维堆叠光电封装结构及制备方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6563210B2 (en) 2000-12-19 2003-05-13 Intel Corporation Parallel plane substrate
US6512861B2 (en) 2001-06-26 2003-01-28 Intel Corporation Packaging and assembly method for optical coupling
US6754407B2 (en) 2001-06-26 2004-06-22 Intel Corporation Flip-chip package integrating optical and electrical devices and coupling to a waveguide on a board
TWI268581B (en) 2002-01-25 2006-12-11 Advanced Semiconductor Eng Stack type flip-chip package including a substrate board, a first chip, a second chip, multiple conductive wire, an underfill, and a packaging material
US6955481B2 (en) 2003-09-17 2005-10-18 International Business Machines Corporation Method and apparatus for providing parallel optoelectronic communication with an electronic device
US7058247B2 (en) 2003-12-17 2006-06-06 International Business Machines Corporation Silicon carrier for optical interconnect modules
US7084496B2 (en) * 2004-01-14 2006-08-01 International Business Machines Corporation Method and apparatus for providing optoelectronic communication with an electronic device
JP4214406B2 (ja) * 2004-09-27 2009-01-28 日本電気株式会社 光信号入出力機構を有する半導体装置
JP2010060793A (ja) 2008-09-03 2010-03-18 Nec Electronics Corp 光伝送装置及びその製造方法
US8290008B2 (en) 2009-08-20 2012-10-16 International Business Machines Corporation Silicon carrier optoelectronic packaging
US20110206379A1 (en) * 2010-02-25 2011-08-25 International Business Machines Corporation Opto-electronic module with improved low power, high speed electrical signal integrity
WO2013100995A1 (en) * 2011-12-28 2013-07-04 Intel Corporation Photonic package architecture
CN104051286B (zh) * 2013-03-12 2018-01-05 台湾积体电路制造股份有限公司 封装结构及其形成方法
US8971676B1 (en) 2013-10-07 2015-03-03 Oracle International Corporation Hybrid-integrated photonic chip package
US20150153524A1 (en) 2013-12-03 2015-06-04 Forelux Inc. Integrated optoelectronic module
US9269700B2 (en) 2014-03-31 2016-02-23 Micron Technology, Inc. Stacked semiconductor die assemblies with improved thermal performance and associated systems and methods
US9671572B2 (en) * 2014-09-22 2017-06-06 Oracle International Corporation Integrated chip package with optical interface
TWI615647B (zh) * 2014-10-27 2018-02-21 藝蘭能工藝有限責任公司 電子電路之光子介面
SG10201805058VA (en) 2014-10-29 2018-07-30 Acacia Communications Inc Optoelectronic ball grid array package with fiber
US9678271B2 (en) 2015-01-26 2017-06-13 Oracle International Corporation Packaged opto-electronic module
US20160377823A1 (en) * 2015-06-25 2016-12-29 Kyocera America Inc Optical module and optical module package incorporating a high-thermal-expansion ceramic substrate
CN105336795B (zh) * 2015-08-26 2017-03-22 中国科学院微电子研究所 一种基于光栅接口的光子芯片封装结构及其制作方法
US9651751B1 (en) 2016-03-10 2017-05-16 Inphi Corporation Compact optical transceiver by hybrid multichip integration
US10025047B1 (en) * 2017-04-14 2018-07-17 Google Llc Integration of silicon photonics IC for high data rate

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EP3388876A1 (en) 2018-10-17
DE202018101163U1 (de) 2018-06-18
CN108735688A (zh) 2018-11-02
GB201803082D0 (en) 2018-04-11
DE102018104775A1 (de) 2018-10-18
EP3388876B1 (en) 2021-07-21
GB2561691A (en) 2018-10-24
GB2561691B (en) 2020-02-26
CN208256644U (zh) 2018-12-18
WO2018190957A1 (en) 2018-10-18
GB2561691B8 (en) 2021-05-12
US10025047B1 (en) 2018-07-17
TWI684254B (zh) 2020-02-01
TW201901888A (zh) 2019-01-01

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