DK317784A - Pnictidfaelde til vakuumsystemer - Google Patents

Pnictidfaelde til vakuumsystemer Download PDF

Info

Publication number
DK317784A
DK317784A DK317784A DK317784A DK317784A DK 317784 A DK317784 A DK 317784A DK 317784 A DK317784 A DK 317784A DK 317784 A DK317784 A DK 317784A DK 317784 A DK317784 A DK 317784A
Authority
DK
Denmark
Prior art keywords
pnic
time field
vacuum systems
vacuum
systems
Prior art date
Application number
DK317784A
Other languages
Danish (da)
English (en)
Other versions
DK317784D0 (da
Inventor
Robert Walter Parry
John Andrew Baumann
Rozalie Schachter
Original Assignee
Stauffer Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stauffer Chemical Co filed Critical Stauffer Chemical Co
Publication of DK317784D0 publication Critical patent/DK317784D0/da
Publication of DK317784A publication Critical patent/DK317784A/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00—Phosphorus; Compounds thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
DK317784A 1984-02-17 1984-06-28 Pnictidfaelde til vakuumsystemer DK317784A (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/581,101 US4613485A (en) 1984-02-17 1984-02-17 Pnictide trap for vacuum systems

Publications (2)

Publication Number Publication Date
DK317784D0 DK317784D0 (da) 1984-06-28
DK317784A true DK317784A (da) 1985-08-18

Family

ID=24323888

Family Applications (1)

Application Number Title Priority Date Filing Date
DK317784A DK317784A (da) 1984-02-17 1984-06-28 Pnictidfaelde til vakuumsystemer

Country Status (6)

Country Link
US (1) US4613485A (fr)
EP (1) EP0153525A1 (fr)
JP (1) JPS60172302A (fr)
KR (1) KR850005985A (fr)
CA (1) CA1243472A (fr)
DK (1) DK317784A (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4818636A (en) * 1981-12-30 1989-04-04 Stauffer Chemical Company Films of catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them
US4867952A (en) * 1984-02-17 1989-09-19 American Cyanamid Company Cracking traps for process gas components having a condensed phase
US5820641A (en) * 1996-02-09 1998-10-13 Mks Instruments, Inc. Fluid cooled trap
US6030458A (en) * 1997-02-14 2000-02-29 Chorus Corporation Phosphorus effusion source
US6238514B1 (en) 1999-02-18 2001-05-29 Mks Instruments, Inc. Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent
US6197119B1 (en) 1999-02-18 2001-03-06 Mks Instruments, Inc. Method and apparatus for controlling polymerized teos build-up in vacuum pump lines
US6488745B2 (en) 2001-03-23 2002-12-03 Mks Instruments, Inc. Trap apparatus and method for condensable by-products of deposition reactions
US7154373B2 (en) 2002-03-25 2006-12-26 Minowa Koa Inc. Surface mounting chip network component
JP4718302B2 (ja) * 2005-11-04 2011-07-06 株式会社アルバック 真空排気装置
CN108131274B (zh) * 2017-11-15 2019-10-15 中国科学院合肥物质科学研究院 一种真空抽气系统

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US25858A (en) * 1859-10-18 Carpet-stretcher
FR786008A (fr) * 1935-02-21 1935-08-24 Minami Manshu Tetsudo Kabushik Procédé pour effectuer l'hydrogénation et d'autres réactions catalytiques d'une façon continue
US2203554A (en) * 1937-01-29 1940-06-04 Jr William C Uhri Exhaust gas burner
US3024009A (en) * 1944-05-08 1962-03-06 Jr Eugene T Booth Condensation can
US3287434A (en) * 1963-09-24 1966-11-22 Monsanto Co Process for the partial combustion of hydrocarbons to produce acetylene
DE1519861A1 (de) * 1964-03-14 1970-10-22 Siemens Ag Reinstdarstellung von Elementen und Verbindungen durch Sublimation
US3382585A (en) * 1965-12-28 1968-05-14 Fmc Corp Internal sublimation condenser apparatus
US3617226A (en) * 1968-04-26 1971-11-02 Huels Chemische Werke Ag Apparatus for the continuous preparation of esters
US4357303A (en) * 1980-03-31 1982-11-02 Rockwell International Corporation Apparatus for refluorinating uranium pentafluoride precipitate
US4508931A (en) * 1981-12-30 1985-04-02 Stauffer Chemical Company Catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them

Also Published As

Publication number Publication date
JPS60172302A (ja) 1985-09-05
KR850005985A (ko) 1985-09-28
EP0153525A1 (fr) 1985-09-04
CA1243472A (fr) 1988-10-25
US4613485A (en) 1986-09-23
DK317784D0 (da) 1984-06-28

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Legal Events

Date Code Title Description
AHB Application shelved due to non-payment