DK317684A - Termiske krakkere til dannelse af pnictidfilm ved hoejvakuumprocesser - Google Patents

Termiske krakkere til dannelse af pnictidfilm ved hoejvakuumprocesser Download PDF

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Publication number
DK317684A
DK317684A DK317684A DK317684A DK317684A DK 317684 A DK317684 A DK 317684A DK 317684 A DK317684 A DK 317684A DK 317684 A DK317684 A DK 317684A DK 317684 A DK317684 A DK 317684A
Authority
DK
Denmark
Prior art keywords
pnictime
movies
preparation
high vacuum
vacuum processes
Prior art date
Application number
DK317684A
Other languages
Danish (da)
English (en)
Other versions
DK317684D0 (da
Inventor
David G Brock
John Andrew Baumann
Original Assignee
Stauffer Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/509,159 external-priority patent/US4596721A/en
Application filed by Stauffer Chemical Co filed Critical Stauffer Chemical Co
Publication of DK317684D0 publication Critical patent/DK317684D0/da
Publication of DK317684A publication Critical patent/DK317684A/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
DK317684A 1983-06-29 1984-06-28 Termiske krakkere til dannelse af pnictidfilm ved hoejvakuumprocesser DK317684A (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/509,159 US4596721A (en) 1981-12-30 1983-06-29 Vacuum evaporating films of alkali metal polyphosphide
US06/581,139 US4649024A (en) 1983-06-29 1984-02-17 Method for forming evaporated pnictide and alkali metal polypnictide films

Publications (2)

Publication Number Publication Date
DK317684D0 DK317684D0 (da) 1984-06-28
DK317684A true DK317684A (da) 1984-12-30

Family

ID=27056454

Family Applications (1)

Application Number Title Priority Date Filing Date
DK317684A DK317684A (da) 1983-06-29 1984-06-28 Termiske krakkere til dannelse af pnictidfilm ved hoejvakuumprocesser

Country Status (4)

Country Link
US (1) US4649024A (de)
EP (1) EP0132322A3 (de)
AU (1) AU2992884A (de)
DK (1) DK317684A (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5032472A (en) * 1981-12-30 1991-07-16 Stauffer Chemical Company Films of catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them
US4818636A (en) * 1981-12-30 1989-04-04 Stauffer Chemical Company Films of catenated phosphorus materials, their preparation and use, and semiconductor and other devices employing them
US4822581A (en) * 1982-11-16 1989-04-18 Stauffer Chemical Company Catenated phosphorus materials and their preparation
GB2195663B (en) * 1986-08-15 1990-08-22 Nippon Telegraph & Telephone Chemical vapour deposition method and apparatus therefor
ES2067381B1 (es) * 1993-01-14 1995-10-16 Consejo Superior Investigacion Celula de efusion de fosforo para epitaxia de haces moleculares.
GB2274468B (en) * 1993-01-14 1996-09-18 Consejo Superior Investigacion Phosphorous effusion apparatus and method for molecular beam epitaxy
JP3913296B2 (ja) * 1996-10-02 2007-05-09 フィルジェン株式会社 プラズマ成膜装置
US6030458A (en) * 1997-02-14 2000-02-29 Chorus Corporation Phosphorus effusion source
GB2493020B (en) * 2011-07-21 2014-04-23 Ilika Technologies Ltd Vapour deposition process for the preparation of a chemical compound
GB2493022B (en) 2011-07-21 2014-04-23 Ilika Technologies Ltd Vapour deposition process for the preparation of a phosphate compound
JP2016222984A (ja) * 2015-06-01 2016-12-28 株式会社フィルテック ヒートビーム成膜装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE143705C (de) *
NL46111C (de) * 1935-10-12
US2656287A (en) * 1949-06-29 1953-10-20 Westinghouse Electric Corp Process for the precision evaporation of antimony
US2803569A (en) * 1953-12-03 1957-08-20 Jacobs Harold Formation of junctions in semiconductors
DE1204494B (de) * 1956-06-09 1965-11-04 Siemens Ag Verfahren und Vorrichtung zum Aufdampfen von Schichten aus einer bei Aufdampftemperatur nicht bestaendigen, als Halbleiter-Grundstoff verwendbaren Stoechiometrisch genaubestimmten Mehrstoffverbindung
US3082124A (en) * 1959-08-03 1963-03-19 Beckman Instruments Inc Method of making thin layer semiconductor devices
US3607135A (en) * 1967-10-12 1971-09-21 Ibm Flash evaporating gallium arsenide
JPS5120784A (en) * 1974-08-14 1976-02-19 Hitachi Ltd Kinitsuna cvd makuno keiseiho
US4006268A (en) * 1975-03-17 1977-02-01 Airco, Inc. Vapor collimation in vacuum deposition of coatings
NL7802116A (nl) * 1977-03-14 1978-09-18 Getters Spa Alkalimetaaldampgenerator.
US4359406A (en) * 1977-06-17 1982-11-16 Exxon Research And Engineering Co. Highly dispersed supported group VIII metal-phosphorus compounds, and highly dispersed, supported group VIII metal-arsenic and a process for making said compounds
US4454246A (en) * 1977-06-17 1984-06-12 Exxon Research And Engineering Co. Highly dispersed supported group VIII noble metal phosphorus compounds
US4145314A (en) * 1977-06-17 1979-03-20 Exxon Research & Engineering Co. Preparation of highly dispersed supported group viii metal catalysts and the redispersion of sintered or agglomerated supported group viii metal catalysts by the addition of phosphorus
US4150065A (en) * 1977-07-21 1979-04-17 Phillips Petroleum Company Olefin isomerization using alkali metal-graphite intercalate catalyst
US4239584A (en) * 1978-09-29 1980-12-16 International Business Machines Corporation Molecular-beam epitaxy system and method including hydrogen treatment

Also Published As

Publication number Publication date
EP0132322A2 (de) 1985-01-30
US4649024A (en) 1987-03-10
DK317684D0 (da) 1984-06-28
AU2992884A (en) 1985-01-03
EP0132322A3 (de) 1986-06-11

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Legal Events

Date Code Title Description
AHB Application shelved due to non-payment