DK3172757T3 - Fremgangsmåde til automatisk korrektion af astigmastisme - Google Patents
Fremgangsmåde til automatisk korrektion af astigmastisme Download PDFInfo
- Publication number
- DK3172757T3 DK3172757T3 DK15824198.4T DK15824198T DK3172757T3 DK 3172757 T3 DK3172757 T3 DK 3172757T3 DK 15824198 T DK15824198 T DK 15824198T DK 3172757 T3 DK3172757 T3 DK 3172757T3
- Authority
- DK
- Denmark
- Prior art keywords
- astigmastism
- procedure
- automatic correction
- correction
- automatic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/153—Correcting image defects, e.g. stigmators
- H01J2237/1532—Astigmatism
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/22—Treatment of data
- H01J2237/221—Image processing
- H01J2237/223—Fourier techniques
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Optical Head (AREA)
- Image Analysis (AREA)
- Automatic Focus Adjustment (AREA)
- Image Processing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462027505P | 2014-07-22 | 2014-07-22 | |
| PCT/US2015/036117 WO2016014177A1 (en) | 2014-07-22 | 2015-06-17 | Method for automatic correction of astigmatism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3172757T3 true DK3172757T3 (da) | 2020-03-16 |
Family
ID=55163506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK15824198.4T DK3172757T3 (da) | 2014-07-22 | 2015-06-17 | Fremgangsmåde til automatisk korrektion af astigmastisme |
Country Status (24)
| Country | Link |
|---|---|
| US (1) | US9711323B2 (da) |
| EP (1) | EP3172757B1 (da) |
| JP (1) | JP6684717B2 (da) |
| KR (1) | KR102193285B1 (da) |
| CN (1) | CN106062917B (da) |
| AP (1) | AP2016009363A0 (da) |
| AU (1) | AU2015294547B2 (da) |
| BR (1) | BR112016026681B1 (da) |
| CA (1) | CA2934972C (da) |
| CL (1) | CL2016002175A1 (da) |
| DK (1) | DK3172757T3 (da) |
| EA (1) | EA035058B1 (da) |
| ES (1) | ES2776453T3 (da) |
| HK (1) | HK1225856A1 (da) |
| HU (1) | HUE048003T2 (da) |
| IL (1) | IL247695B (da) |
| MA (1) | MA39558B1 (da) |
| MX (1) | MX2017000334A (da) |
| MY (1) | MY181462A (da) |
| PL (1) | PL3172757T3 (da) |
| PT (1) | PT3172757T (da) |
| SG (1) | SG11201606864WA (da) |
| UA (1) | UA121864C2 (da) |
| WO (1) | WO2016014177A1 (da) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021030297A1 (en) * | 2019-08-09 | 2021-02-18 | The Board Of Regents Of The University Of Texas System | Methods for high-performance electron microscopy |
| CN111477529B (zh) * | 2020-05-19 | 2024-05-14 | 桂林狮达技术股份有限公司 | 自动消像散电子枪及电子枪自动消像散方法 |
| CN112924477B (zh) * | 2021-01-23 | 2022-02-11 | 北京大学 | 电镜定量消除像散的方法 |
| CN117612018B (zh) * | 2024-01-23 | 2024-04-05 | 中国科学院长春光学精密机械与物理研究所 | 用于光学遥感载荷像散的智能判别方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4180738A (en) * | 1977-07-30 | 1979-12-25 | National Research Development Corporation | Astigmatism in electron beam probe instruments |
| JPS5775473U (da) * | 1980-10-24 | 1982-05-10 | ||
| US4695725A (en) * | 1984-12-10 | 1987-09-22 | Fuji Photo Film Co., Ltd. | Method of detecting a focus defect of an electron microscope image |
| JPH07220669A (ja) * | 1994-01-31 | 1995-08-18 | Jeol Ltd | 非点・入射軸補正装置を備えた電子顕微鏡 |
| JP3340327B2 (ja) * | 1996-09-30 | 2002-11-05 | 株式会社東芝 | 非点収差補正方法及び非点収差補正装置 |
| US20060060781A1 (en) * | 1997-08-11 | 2006-03-23 | Masahiro Watanabe | Charged-particle beam apparatus and method for automatically correcting astigmatism and for height detection |
| JP4069545B2 (ja) * | 1999-05-19 | 2008-04-02 | 株式会社日立製作所 | 電子顕微方法及びそれを用いた電子顕微鏡並び生体試料検査方法及び生体検査装置 |
| US6552340B1 (en) * | 2000-10-12 | 2003-04-22 | Nion Co. | Autoadjusting charged-particle probe-forming apparatus |
| JP3951590B2 (ja) * | 2000-10-27 | 2007-08-01 | 株式会社日立製作所 | 荷電粒子線装置 |
| JP3645198B2 (ja) * | 2001-06-15 | 2005-05-11 | 独立行政法人理化学研究所 | 電子顕微鏡及びその焦点位置制御方法 |
| US7301625B2 (en) * | 2005-01-19 | 2007-11-27 | Duke University | Static two-dimensional aperture coding for multimodal multiplex spectroscopy |
| JP4400745B2 (ja) * | 2003-11-28 | 2010-01-20 | 株式会社ニコン | 露光方法及びデバイス製造方法、露光装置、並びにプログラム |
| US7619220B2 (en) * | 2005-11-30 | 2009-11-17 | Jeol Ltd. | Method of measuring aberrations and correcting aberrations using Ronchigram and electron microscope |
| JP4790567B2 (ja) * | 2005-11-30 | 2011-10-12 | 日本電子株式会社 | ロンチグラムを用いた収差測定方法及び収差補正方法及び電子顕微鏡 |
| US10121243B2 (en) * | 2006-09-22 | 2018-11-06 | Koninklijke Philips N.V. | Advanced computer-aided diagnosis of lung nodules |
| EP2511936B1 (en) | 2011-04-13 | 2013-10-02 | Fei Company | Distortion free stigmation of a TEM |
| EP2584584A1 (en) * | 2011-10-19 | 2013-04-24 | FEI Company | Method for adjusting a STEM equipped with an aberration corrector |
-
2015
- 2015-06-17 MX MX2017000334A patent/MX2017000334A/es active IP Right Grant
- 2015-06-17 KR KR1020167032232A patent/KR102193285B1/ko active IP Right Grant
- 2015-06-17 BR BR112016026681-1A patent/BR112016026681B1/pt not_active IP Right Cessation
- 2015-06-17 ES ES15824198T patent/ES2776453T3/es active Active
- 2015-06-17 PL PL15824198T patent/PL3172757T3/pl unknown
- 2015-06-17 DK DK15824198.4T patent/DK3172757T3/da active
- 2015-06-17 HU HUE15824198A patent/HUE048003T2/hu unknown
- 2015-06-17 EA EA201600651A patent/EA035058B1/ru not_active IP Right Cessation
- 2015-06-17 US US15/124,099 patent/US9711323B2/en active Active
- 2015-06-17 AU AU2015294547A patent/AU2015294547B2/en active Active
- 2015-06-17 AP AP2016009363A patent/AP2016009363A0/en unknown
- 2015-06-17 MA MA39558A patent/MA39558B1/fr unknown
- 2015-06-17 CN CN201580006977.7A patent/CN106062917B/zh active Active
- 2015-06-17 SG SG11201606864WA patent/SG11201606864WA/en unknown
- 2015-06-17 MY MYPI2016703717A patent/MY181462A/en unknown
- 2015-06-17 EP EP15824198.4A patent/EP3172757B1/en active Active
- 2015-06-17 CA CA2934972A patent/CA2934972C/en active Active
- 2015-06-17 PT PT158241984T patent/PT3172757T/pt unknown
- 2015-06-17 UA UAA201613146A patent/UA121864C2/uk unknown
- 2015-06-17 JP JP2016555328A patent/JP6684717B2/ja active Active
- 2015-06-17 WO PCT/US2015/036117 patent/WO2016014177A1/en active Application Filing
-
2016
- 2016-08-30 CL CL2016002175A patent/CL2016002175A1/es unknown
- 2016-09-08 IL IL247695A patent/IL247695B/en active IP Right Grant
- 2016-12-08 HK HK16114013A patent/HK1225856A1/zh unknown
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