DK2937954T3 - Excimer-laser-kombinationsresonator - Google Patents
Excimer-laser-kombinationsresonator Download PDFInfo
- Publication number
- DK2937954T3 DK2937954T3 DK12890192.3T DK12890192T DK2937954T3 DK 2937954 T3 DK2937954 T3 DK 2937954T3 DK 12890192 T DK12890192 T DK 12890192T DK 2937954 T3 DK2937954 T3 DK 2937954T3
- Authority
- DK
- Denmark
- Prior art keywords
- excimer laser
- laser combination
- combination resonator
- resonator
- excimer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/082—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression
- H01S3/0823—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression incorporating a dispersive element, e.g. a prism for wavelength selection
- H01S3/0826—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection
- H01S3/08009—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection using a diffraction grating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/082—Construction or shape of optical resonators or components thereof comprising three or more reflectors defining a plurality of resonators, e.g. for mode selection or suppression
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08018—Mode suppression
- H01S3/08022—Longitudinal modes
- H01S3/08031—Single-mode emission
- H01S3/08036—Single-mode emission using intracavity dispersive, polarising or birefringent elements
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2012/086971 WO2014094262A1 (zh) | 2012-12-20 | 2012-12-20 | 准分子激光器复合腔 |
Publications (1)
Publication Number | Publication Date |
---|---|
DK2937954T3 true DK2937954T3 (da) | 2020-10-19 |
Family
ID=50977555
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK12890192.3T DK2937954T3 (da) | 2012-12-20 | 2012-12-20 | Excimer-laser-kombinationsresonator |
Country Status (7)
Country | Link |
---|---|
US (1) | US9325143B2 (da) |
EP (1) | EP2937954B1 (da) |
JP (1) | JP2016500482A (da) |
KR (1) | KR101804551B1 (da) |
DK (1) | DK2937954T3 (da) |
RU (1) | RU2607815C1 (da) |
WO (1) | WO2014094262A1 (da) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101710792B1 (ko) | 2015-07-14 | 2017-02-28 | 주식회사 유영제약 | 세레콕시브 및 트라마돌을 함유하는 약제학적 조성물 |
CN111541142A (zh) * | 2020-05-08 | 2020-08-14 | 中国航空制造技术研究院 | 脉冲激光光束的合成方法及装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5150370A (en) * | 1989-06-14 | 1992-09-22 | Matsushita Electric Industrial Co., Ltd. | Narrow-band laser apparatus |
JP2715608B2 (ja) * | 1990-01-12 | 1998-02-18 | 松下電器産業株式会社 | 狭帯域化レーザ装置 |
JP2631567B2 (ja) * | 1989-10-25 | 1997-07-16 | 株式会社小松製作所 | 狭帯域発振エキシマレーザ |
JPH03255688A (ja) * | 1990-03-05 | 1991-11-14 | Nec Corp | 波長狭帯域化エキシマレーザ発振器 |
JPH05291674A (ja) * | 1992-04-06 | 1993-11-05 | Mitsubishi Electric Corp | 狭帯域化光学素子 |
JP2729447B2 (ja) * | 1992-11-18 | 1998-03-18 | 株式会社小松製作所 | 狭帯域レーザ装置 |
CN1050234C (zh) * | 1996-01-05 | 2000-03-08 | 中国科学院物理研究所 | 复合腔调谐光参量振荡器 |
US6286326B1 (en) * | 1998-05-27 | 2001-09-11 | Worksmart Energy Enterprises, Inc. | Control system for a refrigerator with two evaporating temperatures |
US6700915B2 (en) * | 1999-03-12 | 2004-03-02 | Lambda Physik Ag | Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections |
US6801560B2 (en) * | 1999-05-10 | 2004-10-05 | Cymer, Inc. | Line selected F2 two chamber laser system |
US6594291B1 (en) * | 1999-06-16 | 2003-07-15 | Komatsu Ltd. | Ultra narrow band fluorine laser apparatus and fluorine exposure apparatus |
JP2001044550A (ja) * | 1999-08-03 | 2001-02-16 | Komatsu Ltd | 超狭帯域化レーザ装置 |
JP3365500B2 (ja) * | 2000-01-19 | 2003-01-14 | ウシオ電機株式会社 | 狭帯化ArFエキシマレーザ装置 |
CN1411113A (zh) * | 2001-10-08 | 2003-04-16 | 中国科学院物理研究所 | 大功率全固态红、黄、蓝光激光装置 |
WO2007053335A2 (en) * | 2005-11-01 | 2007-05-10 | Cymer, Inc. | Laser system |
JP4972427B2 (ja) * | 2007-02-15 | 2012-07-11 | 株式会社小松製作所 | 高繰返し動作が可能で狭帯域化効率の高いエキシマレーザ装置 |
CN102810810A (zh) * | 2012-03-02 | 2012-12-05 | 中国科学院光电研究院 | 单腔双电极放电腔及准分子激光器 |
CN102969649A (zh) * | 2012-12-20 | 2013-03-13 | 中国科学院光电研究院 | 准分子激光器复合腔 |
-
2012
- 2012-12-20 JP JP2015548136A patent/JP2016500482A/ja active Pending
- 2012-12-20 US US14/652,223 patent/US9325143B2/en active Active
- 2012-12-20 WO PCT/CN2012/086971 patent/WO2014094262A1/zh active Application Filing
- 2012-12-20 EP EP12890192.3A patent/EP2937954B1/en active Active
- 2012-12-20 KR KR1020157019589A patent/KR101804551B1/ko active IP Right Grant
- 2012-12-20 DK DK12890192.3T patent/DK2937954T3/da active
- 2012-12-20 RU RU2015128764A patent/RU2607815C1/ru active
Also Published As
Publication number | Publication date |
---|---|
KR20150099808A (ko) | 2015-09-01 |
EP2937954A1 (en) | 2015-10-28 |
JP2016500482A (ja) | 2016-01-12 |
WO2014094262A1 (zh) | 2014-06-26 |
KR101804551B1 (ko) | 2017-12-04 |
US9325143B2 (en) | 2016-04-26 |
US20150372443A1 (en) | 2015-12-24 |
EP2937954A4 (en) | 2016-09-07 |
EP2937954B1 (en) | 2020-07-22 |
RU2607815C1 (ru) | 2017-01-20 |
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