DK2726640T3 - En fremgangsmåde til at fremstille en neutrondetektorkomponent omfattende et borkarbidlag til anvendelse i en neutrondetekterende indretning - Google Patents

En fremgangsmåde til at fremstille en neutrondetektorkomponent omfattende et borkarbidlag til anvendelse i en neutrondetekterende indretning Download PDF

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Publication number
DK2726640T3
DK2726640T3 DK11868729.2T DK11868729T DK2726640T3 DK 2726640 T3 DK2726640 T3 DK 2726640T3 DK 11868729 T DK11868729 T DK 11868729T DK 2726640 T3 DK2726640 T3 DK 2726640T3
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DK
Denmark
Prior art keywords
neutron detector
borar
procedure
manufacturing
component including
Prior art date
Application number
DK11868729.2T
Other languages
English (en)
Inventor
Lars Hultman
Jens Birch
Carina Höglund
Original Assignee
European Spallation Source Eric
Lars Hultman
Jens Birch
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Spallation Source Eric, Lars Hultman, Jens Birch filed Critical European Spallation Source Eric
Application granted granted Critical
Publication of DK2726640T3 publication Critical patent/DK2726640T3/da

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T3/00—Measuring neutron radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T3/00—Measuring neutron radiation
    • G01T3/08—Measuring neutron radiation with semiconductor detectors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measurement Of Radiation (AREA)
DK11868729.2T 2011-06-30 2011-06-30 En fremgangsmåde til at fremstille en neutrondetektorkomponent omfattende et borkarbidlag til anvendelse i en neutrondetekterende indretning DK2726640T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SE2011/050891 WO2013002697A1 (en) 2011-06-30 2011-06-30 A method for producing a neutron detector component comprising a boron carbide layer for use in a neutron detecting device

Publications (1)

Publication Number Publication Date
DK2726640T3 true DK2726640T3 (da) 2022-02-21

Family

ID=47002387

Family Applications (1)

Application Number Title Priority Date Filing Date
DK11868729.2T DK2726640T3 (da) 2011-06-30 2011-06-30 En fremgangsmåde til at fremstille en neutrondetektorkomponent omfattende et borkarbidlag til anvendelse i en neutrondetekterende indretning

Country Status (7)

Country Link
US (1) US20140299781A1 (da)
EP (1) EP2726640B1 (da)
CA (1) CA2839780A1 (da)
DK (1) DK2726640T3 (da)
HU (1) HUE057802T2 (da)
SE (1) SE535805C2 (da)
WO (1) WO2013002697A1 (da)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103132040B (zh) * 2013-03-12 2014-11-26 四川大学 4H-SiC基半导体中子探测器用B4C转换薄膜制备工艺方法
EP2975154A1 (de) * 2014-07-14 2016-01-20 Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH Verfahren zur Herstellung von Neutronen Konvertern
KR101616403B1 (ko) * 2015-05-14 2016-04-28 세종대학교산학협력단 보론카바이드 다중 코팅막을 갖는 중성자 흡수판
FR3038988B1 (fr) 2015-07-17 2019-04-19 Centre National De La Recherche Scientifique Cnrs Detecteur sous irradiation de particules nucleaires
WO2017042916A1 (ja) * 2015-09-09 2017-03-16 野洲メディカルイメージングテクノロジー株式会社 熱中性子検出装置、シンチレータユニット及び熱中性子検出システム
CN110767343A (zh) * 2019-11-15 2020-02-07 散裂中子源科学中心 一种用于高真空环境下的中子屏蔽管道
US20240045087A1 (en) * 2020-12-11 2024-02-08 Hiroshima University Neutron detection element

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4587088A (en) * 1983-08-26 1986-05-06 Westinghouse Electric Corp. Coating a nuclear fuel with a burnable poison
US6123797A (en) * 1995-06-23 2000-09-26 The Dow Chemical Company Method for coating a non-wetting fluidizable and material onto a substrate
US6771730B1 (en) * 1998-11-25 2004-08-03 Board Of Regents Of University Of Nebraska Boron-carbide solid state neutron detector and method of using the same
US6919576B2 (en) * 2002-02-04 2005-07-19 Bechtel Bwxt Idaho Llc Composite neutron absorbing coatings for nuclear criticality control
US6774013B2 (en) * 2002-11-06 2004-08-10 Board Of Regents Of University Of Nebraska N-type boron-carbide semiconductor polytype and method of fabricating the same
EP1578375B1 (en) * 2002-11-13 2018-01-03 Proportional Technologies, Inc. Boron coated straw neutron detector
US7183701B2 (en) * 2003-05-29 2007-02-27 Nova Scientific, Inc. Electron multipliers and radiation detectors
US7233007B2 (en) * 2004-03-01 2007-06-19 Nova Scientific, Inc. Radiation detectors and methods of detecting radiation
US20090302226A1 (en) * 2005-02-08 2009-12-10 Yissum Research Development Company Of The Hebrew University Of Jerusalem Solid-state neutron and alpha particles detector and methods for manufacturing and use thereof
CN101669042A (zh) * 2007-04-24 2010-03-10 株式会社东芝 放射线照相术测定装置及放射线照相术测定方法
WO2008140747A1 (en) * 2007-05-10 2008-11-20 Seldon Technologies, Inc. Methods of gas confinement within the voids of crystalline material and articles thereof
WO2010087844A1 (en) * 2009-01-30 2010-08-05 Alliance For Sustainable Energy, Llc High sensitivity, solid state neutron detector
US8569710B2 (en) * 2009-06-02 2013-10-29 Proportional Technologies, Inc. Optimized detection of fission neutrons using boron coated straw detectors distributed in moderator material
US8445859B2 (en) * 2009-06-15 2013-05-21 Los Alamos National Security, Llc Neutron detectors comprising boron powder
US8492730B2 (en) * 2009-06-15 2013-07-23 Los Alamos National Security, Llc Neutron detectors comprising ultra-thin layers of boron powder
US8237161B2 (en) * 2010-08-10 2012-08-07 North Dakota State University Research Foundation Amorphous boron carbide films for p-n junctions and method for fabricating same
US8973257B2 (en) * 2011-09-15 2015-03-10 Material Innovations, Inc. Method of making a neutron detector
US8729487B2 (en) * 2011-09-15 2014-05-20 Material Innovations, Inc. Neutron detector and method of making

Also Published As

Publication number Publication date
EP2726640A4 (en) 2015-02-25
EP2726640B1 (en) 2021-12-08
WO2013002697A1 (en) 2013-01-03
SE535805C2 (sv) 2012-12-27
EP2726640A1 (en) 2014-05-07
US20140299781A1 (en) 2014-10-09
HUE057802T2 (hu) 2022-06-28
CA2839780A1 (en) 2013-01-03
SE1250745A1 (sv) 2012-08-20

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