DK2652369T3 - Friktionssvag glidering med billig diamantbelægning - Google Patents

Friktionssvag glidering med billig diamantbelægning Download PDF

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Publication number
DK2652369T3
DK2652369T3 DK11764688.5T DK11764688T DK2652369T3 DK 2652369 T3 DK2652369 T3 DK 2652369T3 DK 11764688 T DK11764688 T DK 11764688T DK 2652369 T3 DK2652369 T3 DK 2652369T3
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DK
Denmark
Prior art keywords
base body
equal
less
diamond layer
diamond
Prior art date
Application number
DK11764688.5T
Other languages
English (en)
Inventor
Joachim Otschik
Andreas Schrüfer
Dieter Ziegenbein
Lothar Schäfer
Markus Höfer
Rudolf Kollinger
Markus Armgardt
Original Assignee
Eagleburgmann Germany Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eagleburgmann Germany Gmbh filed Critical Eagleburgmann Germany Gmbh
Application granted granted Critical
Publication of DK2652369T3 publication Critical patent/DK2652369T3/da

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/16—Sealings between relatively-moving surfaces
    • F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
    • F16J15/3496—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member use of special materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Mechanical Sealing (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Claims (11)

1. Glidering til en glideringstætning, omfattende: - et basislegeme (2) med et på basislegemet (2) påført diamantlag (3), som er tildannet som glideflade, - hvorved diamantlaget (3) har en tykkelse, som er mindre end eller lig med 4 pm, især mindre end eller lig med 3 pm, især mindre end eller lig med 2 pm, og fortrinsvis ca. 1 pm, kendetegnet ved, - at basislegemet (2) ikke har nogen ridser eller kun ridser, som på en overflade på basislegemet (2) eller i basislegemet (2) har en maksimal længdeudstrækning (L), som er mindre end eller lig med 5 pm.
2. Glidering ifølge krav 1, kendetegnet ved, at ridserne (4) i basislegemet (2) har en dybde (T) på mindre end eller lig med 3 pm.
3. Glidering ifølge et af de foregående krav, kendetegnet ved, at diamantlaget (3) har en tykkelse på mindst 0,5 pm.
4. Glidering ifølge et af de foregående krav, kendetegnet ved, at basislegemets (2) overflade er porefri, eller at overfladen kun har porer med en gennemsnitlig porediameter på mindre end eller lig med 0,4 mm, især mindre end eller lig med 0,3 mm, og fortrinsvis mindre end eller lig med 0,2 mm, og/eller at porerne (5) indbyrdes har en afstand på mindst 100 gange porediameteren.
5. Glidering ifølge et af de foregående krav, kendetegnet ved, at diamanterne i diamantlaget (3) har en krystallitstørrelse på imellem 0,2 til 5 pm, især 0,2 til 4 pm, fortrinsvis 0,2 til 3 pm, foretrukket 0,2 til 2,5 pm og især 0,2 til 1 pm.
6. Glidering ifølge et af de foregående krav, kendetegnet ved, at diamantlaget (3) har en ruhed (Ra) på mindre end eller lig med 0,2 pm, især mindre end eller lig med 0,5 pm, især mindre end lig med 0,1 pm.
7. Glidering ifølge et af de foregående krav, kendetegnet ved, at diamantlaget (3) har en SP3-andel på større end eller lig med 97%.
8. Glidering ifølge et af de foregående krav, kendetegnet ved, at basislegemet (2) har en vickershårdhed, der er større end eller lig med 1400 HV.
9. Glidering ifølge et af de foregående krav, kendetegnet ved, at en defektdybde i diamantlaget (3) er mindre end eller lig med 200 x 10-9, hvorved defektdybden er forholdet imellem defektfladerne og overfladens defektfrie belagte flader.
10. Glidering ifølge et af de foregående krav, kendetegnet ved, at basislegemet (2) er fremstillet af et karbidmateriale, især af siliciumkarbid (SiC) eller wolfram-karbid (WC).
11. Glidering ifølge et af de foregående krav, kendetegnet ved, at diamantlagets overflade svarer til en overflade på basislegemet (2) med en afvigelse på højest ± 0,2 pm.
DK11764688.5T 2010-12-17 2011-10-04 Friktionssvag glidering med billig diamantbelægning DK2652369T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010054875A DE102010054875B4 (de) 2010-12-17 2010-12-17 Reibungsarmer Gleitring mit kostengünstiger Diamantbeschichtung
PCT/EP2011/004942 WO2012079658A1 (de) 2010-12-17 2011-10-04 Reibungsarmer gleitring mit kostengünstiger diamantbeschichtung

Publications (1)

Publication Number Publication Date
DK2652369T3 true DK2652369T3 (da) 2015-08-03

Family

ID=44759652

Family Applications (1)

Application Number Title Priority Date Filing Date
DK11764688.5T DK2652369T3 (da) 2010-12-17 2011-10-04 Friktionssvag glidering med billig diamantbelægning

Country Status (9)

Country Link
US (1) US9010762B2 (da)
EP (1) EP2652369B1 (da)
KR (1) KR20130091777A (da)
CN (1) CN103261760B (da)
DE (1) DE102010054875B4 (da)
DK (1) DK2652369T3 (da)
ES (1) ES2543559T3 (da)
RU (1) RU2531486C1 (da)
WO (1) WO2012079658A1 (da)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013005926B4 (de) * 2013-04-04 2015-12-03 Eagleburgmann Germany Gmbh & Co. Kg Gleitringdichtungsanordnung mit unterschiedlich harten Gleitflächen
FR3009125B1 (fr) * 2013-07-24 2019-06-28 Areva Np Glace pour garniture d'etancheite pour systeme d'etancheite d'arbre
DE102014208738B3 (de) * 2014-05-09 2015-11-26 Eagleburgmann Germany Gmbh & Co. Kg Gleitringdichtungsanordnung mit verbesserter Gasabscheidung
JP6245239B2 (ja) * 2015-09-11 2017-12-13 日亜化学工業株式会社 半導体レーザ素子の製造方法
US11008655B2 (en) * 2016-03-03 2021-05-18 Lam Research Corporation Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems
RU2639437C1 (ru) * 2016-06-15 2017-12-21 федеральное государственное бюджетное образовательное учреждение высшего образования "Пермский национальный исследовательский политехнический университет" Способ получения кольца скольжения торцевого уплотнения
EP3415797A1 (en) 2017-06-12 2018-12-19 Huhnseal AB Dynamic mechanical seal assembly

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3820581A1 (de) * 1988-06-16 1989-12-28 Burgmann Dichtungswerk Feodor Gleitringdichtung
DE8915546U1 (de) * 1989-08-21 1990-09-13 Richter Chemie Technik GmbH, 47906 Kempen Kreiselpumpe mit trockenlaufgeeigneten Keramikgleitflächen
JP2924989B2 (ja) * 1992-01-28 1999-07-26 日本特殊陶業株式会社 ダイヤモンド膜被覆窒化珪素基部材及びその製造方法
US5909879A (en) * 1993-03-09 1999-06-08 Norton Company Diamond film coating for mating parts
US6209185B1 (en) * 1993-04-16 2001-04-03 Baker Hughes Incorporated Earth-boring bit with improved rigid face seal
KR100352985B1 (ko) * 1999-04-30 2002-09-18 한국과학기술연구원 균열이 없고 평탄한 다이아몬드막 합성 방법
RU2169640C1 (ru) * 2000-07-17 2001-06-27 Хамзин Шамиль Хурматович Способ изготовления контактных поверхностей торцевых пар трения
JP4420173B2 (ja) * 2002-09-24 2010-02-24 ▲高▼木 敏行 非鏡面ダイヤモンドによる低摩擦摺動面
US20050025973A1 (en) * 2003-07-25 2005-02-03 Slutz David E. CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same
JP2006275286A (ja) 2005-03-02 2006-10-12 Ebara Corp ダイヤモンド被覆軸受又はシール構造並びにその軸受又はシール構造を備えた流体機械
US20090060408A1 (en) * 2005-03-02 2009-03-05 Ebara Corporation Diamond-coated bearing or seal structure and fluid machine comprising the same
DE202006006425U1 (de) * 2006-04-21 2006-06-29 Burgmann Industries Gmbh & Co. Kg Bauteil, insbesondere Gleitring einer Gleitringdichtungsanordnung
US7793940B2 (en) * 2006-05-16 2010-09-14 Skf Usa Inc. Mechanical end face seal with ultrahard face material
DE202006009762U1 (de) * 2006-06-20 2006-08-24 Burgmann Industries Gmbh & Co. Kg Gleitring einer Gleitringdichtungsanordnung
CN101663495B (zh) * 2007-04-20 2012-07-04 株式会社荏原制作所 使用了碳系滑动部件的轴承或密封件
DE202007016868U1 (de) * 2007-12-04 2008-02-14 Burgmann Industries Gmbh & Co. Kg Gleitring einer Gleitringdichtungsanordnung

Also Published As

Publication number Publication date
EP2652369B1 (de) 2015-04-29
US20130313785A1 (en) 2013-11-28
KR20130091777A (ko) 2013-08-19
CN103261760B (zh) 2015-06-24
DE102010054875B4 (de) 2012-10-31
CN103261760A (zh) 2013-08-21
ES2543559T3 (es) 2015-08-20
RU2531486C1 (ru) 2014-10-20
DE102010054875A1 (de) 2012-06-21
US9010762B2 (en) 2015-04-21
EP2652369A1 (de) 2013-10-23
WO2012079658A1 (de) 2012-06-21

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