DK164101B - Sliding element, which is coated with ceramic material components on one or more work surfaces, as well as the use of the sliding element. - Google Patents

Sliding element, which is coated with ceramic material components on one or more work surfaces, as well as the use of the sliding element. Download PDF

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DK164101B
DK164101B DK555985A DK555985A DK164101B DK 164101 B DK164101 B DK 164101B DK 555985 A DK555985 A DK 555985A DK 555985 A DK555985 A DK 555985A DK 164101 B DK164101 B DK 164101B
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sliding element
coating
element according
sliding
alumina
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DK555985A
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DK164101C (en
DK555985D0 (en
DK555985A (en
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Ulf Dworak
Dieter Fingerle
Hans Olapinski
Kilian Friederich
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Feldmuehle Ag
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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5053Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/85Coating or impregnation with inorganic materials
    • C04B41/87Ceramics
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81Coating or impregnation
    • C04B41/89Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02Parts of sliding-contact bearings
    • F16C33/04Brasses; Bushes; Linings
    • F16C33/043Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/34Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
    • F16J15/3496Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member use of special materials

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Sliding-Contact Bearings (AREA)
  • Sliding Valves (AREA)
  • Casting Support Devices, Ladles, And Melt Control Thereby (AREA)
  • Materials For Medical Uses (AREA)
  • Lubricants (AREA)

Description

DK 164101 BDK 164101 B

Den foreliggende opfindelse angår et glideelement, som på en eller flere arbejdsflader er belagt med en eller flere keramiske materialekomponenter, og er i friktionsindgreb med mindst yderligere et glideelement.The present invention relates to a sliding element which is coated with one or more ceramic material components on one or more working surfaces and is in frictional engagement with at least one further sliding element.

5 Der kendes glideelementer af den nævnte art. Hertil hører f.eks. glideringe til glideringtætninger, således som de i form af metalbærelegemer, der er belagt med keramisk materiale, f.eks. er beskrevet i de tyske brugsmønstre nr. 17 77 610 og nr. 77 18 782. Belægningen påføres her ved plasmasprøjtemetoden for det meste med 10 en tykkelse på ca. 100 pm. Den påførte belægning underkastes på den ved keramiske materialer sædvanlige måde en efterbehandling i form af slibning og lapning. I og for sig adskiller overfladerne af disse belægninger sig ikke fra de ligeledes kendte udelukkende af en keramisk komponent eller af en blanding af flere keramiske komponenter 15 bestående ubelagte massive keramiklegemer, der ligeledes anvendes som glidering eller som tætningsskive for blandebatterier. Hertil kan henvises til trykskrifterne DE-B- 12 82 377 FR-A- 14 54 755 DE-B- 12 91 957 20 DE-A- 28 34 146 EP-B- 43 4565 Sliding elements of the said kind are known. These include, for example. slides for sliding seals, such as those in the form of metal support bodies coated with ceramic material, e.g. are described in German usage patterns Nos. 17 77 610 and Nos. 77 18 782. The coating is applied here by the plasma spraying method for the most part by a thickness of approx. 100 pm. The applied coating is subjected in the usual manner to ceramic materials in the form of grinding and patching. By themselves, the surfaces of these coatings do not differ from those also known solely by a ceramic component or by a mixture of several ceramic components 15 consisting of uncoated solid ceramic bodies which are also used as sliding or as sealing disc for mixing batteries. Reference can be made to the printers DE-B- 12 82 377 FR-A- 14 54 755 DE-B- 12 91 957 20 DE-A- 28 34 146 EP-B- 43 456

Yderligere forslag findes i DE-A- 27 11 500, der angiver en med en polytetrafluorethylenbelægning forsynet metal konstruktionsdel til anvendelse i en blandeventil.Further proposals are found in DE-A-27 11 500, which discloses a metal structural part provided with a polytetrafluoroethylene coating for use in a mixing valve.

25 Alle disse forslag er behæftede med visse ulemper, der især består i, at de ved de ældre forslag foreslåede ubelagte af massivt keramik bestående keramiklegemer har en for hø] statisk friktion, hvorfor der også i den nævnte publikation EP-B 43 456 foreslås en speciel blanding af keramiske materialekomponenter til opnåelse af en 30 særlig lav profilbæreandel. Ved dette forslag fraviges ganske vist for første gang den hidtil sædvanlige opfattelse, at en tilstrækkelig tættevirkning kun kunne opnås med en høj profilbæreandel, men alligevel har også dette forslag visse fremstillingstekniske ulemper, idet fremstillingsomkostningerne i mange tilfælde som følge af det 35 keramiske udgangspulvers overordentligt høje finhed overskrider en økonomisk acceptabel grænse på grund af det høje energiforbrug.25 All of these proposals are subject to certain disadvantages, in particular that the unpainted solid ceramic bodies proposed by the earlier proposals have a too high static friction, which is why the aforementioned publication EP-B 43 456 also proposes a special blend of ceramic material components to obtain a particularly low profile support portion. This proposal, for the first time, derogates from the hitherto usual notion that a sufficiently dense effect can only be achieved with a high profile carrier, yet this proposal also has some manufacturing disadvantages, since in many cases the cost of manufacture due to the extremely high ceramic starting powder is high. fineness exceeds an economically acceptable limit due to the high energy consumption.

Sammenlignet med disse nævnte forslag er ulemperne ved de med keramiske materialer belagte metalformlegemer, at de termiske udvidelseskoefficienter mellem metalbærelegemet og belægningen ikkeCompared with these aforementioned proposals, the disadvantages of the ceramic materials coated with ceramic materials are that the thermal expansion coefficients between the metal support body and the coating do not

DK 164101 BDK 164101 B

2 stemmer overens, og at disse glideelementer derfor ikke kan anvendes inden for bestemte termisk højt belastede anvendelsesområder, idet der i tilfælde af et termochock er fare for, at belægningen skaller af bærelegemet. Allerede mikroafskalninger fører til en dramatisk for-5 mindskelse af tætningsvirkningen. En yderligere ulempe er korrosionen mellem metal og keramik. Dertil kommer, at overfladebeskaffenheden ved keramikbelagte metalglideelementer ikke er af bedre kvalitet end ved de såkaldte massivkeramikglideelementer, og disse glideeie-menter har derfor også forholdsvis høje friktionsværdier.2 corresponds and that these sliding elements cannot therefore be used within certain thermally high applications, since in the case of a thermal shock there is a danger that the coating will peel off the support body. Already micro peeling leads to a dramatic reduction in the sealing effect. A further disadvantage is the corrosion between metal and ceramics. In addition, the surface texture of ceramic coated metal sliding elements is not of better quality than the so-called solid ceramic sliding elements, and these sliding elements therefore also have relatively high friction values.

10 Formalet med opfindelsen er at udvikle et glideelement, der, når det er i friktionsindgreb med et efter dettes form tilpasset yderligere glideelement, har en lille friktionskoefficient og især en lille statisk friktionskoefficient. Samtidig skal glideelementet i anvendelsestilfælde, hvor det er nødvendigt også have en god tættende virkning, 15 og desuden skal det have en forbedret termochockbestandighed og korrosionsbestandighed.The object of the invention is to develop a sliding element which, when in frictional engagement with a further sliding element adapted to its shape, has a small coefficient of friction and in particular a small static friction coefficient. At the same time, the sliding element, where necessary, must also have a good sealing effect, and in addition it must have improved thermal shock resistance and corrosion resistance.

Denne opgave løses ifølge opfindelsen ved hjælp af et glideelement med de i krav l's kendetegnende del angivne ejendommeligheder.This object is solved according to the invention by means of a sliding element having the characteristics specified in claim 1.

20 Angivelserne i kravene og i beskrivelsen med hensyn til belægningens kornstørrelse gælder for parallelt med belægningsplanet fremstillede slibepræparater.The particulars in the claims and in the description with respect to the grain size of the coating apply to abrasive preparations made in parallel with the coating plane.

Opfindelsen baserer sig på den erkendelse, at der ved glideelementer kan opnås tydeligt reducerede friktionskoefficienter, 25 dersom en finkornet og meget tynd - ikke efterbearbejdet - belægning påføres på et plant bearbejdet bærelegeme selv under forudsætning af, at bærelegemet på grund af den overfladebehandling, der er foretaget på dette, har en høj profilbæreandel.The invention is based on the recognition that sliding elements can achieve significantly reduced coefficients of friction if a fine-grained and very thin - not post-worked - coating is applied to a flat machined support body, even if the support body, due to the surface treatment that is made on this, has a high profile carrier.

Til realisering af opfindelsen anvendes de i og for sig 30 kendte kemiske og fysiske pådampningsmetoder, der ikke er genstand for opfindelsen, og anvendes inden for helt andre områder af teknikken, nemlig ved belægning af skæreplatter til for det meste af hårdlegeringer bestående formlegemer. En sådan metode kendes f.eks. fra DE-C 31 44 192.In order to realize the invention, the prior art chemical and physical evaporation methods which are not subject to the invention are used per se and are used in quite other areas of the art, namely, by coating cutting plates for mostly hard alloys consisting of moldings. Such a method is known e.g. from DE-C 31 44 192.

35 Ved hjælp af den foranstaltning, at formlegemerne, inden deres belægning, slibes og/eller lappes, opnås, at glideelementerne også efter belægningen har en god planhed, således som det f.eks. er nødvendigt ved glideelementer, der anvendes som tætningsskiver. Glideelementer med krumme arbejdsflader får den for deres anvendelse35 By means of the measure that, before their coating, the mold members are abraded and / or patched, the sliding elements also have a good flatness after coating, such as for example. is necessary for sliding elements used as sealing washers. Sliding elements with curved work surfaces get it for their use

DK 164101 BDK 164101 B

3 nødvendige tolerance ved denne forbehandling. Pi grund af deres planhed henholdsvis deres tolerance virker glideelementerne ifølge opfindelsen også i høj grad tættende, dersom de som maskinkonstruktionsdele f.eks. anvendes, hvor der kræves en høj aftætning. Eksemp-5 ler på disse anvendelsesområder er ligeledes glideringe for glidering-tætninger og tætningsskiver til blandebatterier.3 required tolerance for this pretreatment. Due to their flatness and their tolerance, the sliding elements according to the invention also appear to be highly sealing if, as machine structural parts, e.g. used where a high seal is required. Examples of these applications are also slides for sliding seals and sealing washers for mixing batteries.

Skønt det endnu ikke er fuldt ud klarlagt, hvad den overraskende lille friktionskoefficient ved glideelementerne ifølge opfindelsen skyldes, må det formodes, at den skyldes udformningen af over-10 fladen, der antageligt kan forklares som følger: Ved hjælp af den med overordentlig ringe tykkelse udformede belægning med en kornfinhed, der fortrinsvis ikke overskrider 0,5 pm, fås en meget lille profilbære-andel, fordi den med overordentlig ensartethed påførte belægning ikke kræver nogen som helst efterbearbejdning, som f.eks. slibning eller 15 lapning. I fremstillingsteknisk henseende fås der en forskel i forhold til de kendte ved plasmasprøjtning belagte glideelementer, idet der ved disse først skulle foretages en overfladebearbejdning af belægningen ved slibning og lapning, før den nødvendige planhed kunne opnås, hvilket imidlertid medførte en høj profilbærearidel, der forø-20 gede friktionen.Although it is not yet fully understood what the surprisingly small coefficient of friction is due to the sliding elements according to the invention, it is presumed to be due to the design of the surface, which can probably be explained as follows: By means of the extremely small thickness designed coating with a grain fineness which preferably does not exceed 0.5 µm is obtained a very small profile carrier proportion, because the coating applied with extremely uniformity does not require any subsequent machining, e.g. grinding or patching. In manufacturing, there is a difference in relation to the known sliding elements coated by plasma spraying, in which they must first be surface-coated by grinding and patching before the required flatness can be obtained, which, however, resulted in a high profile support part, which is increased. 20 goat friction.

Med de nu kendte undersøgelsesmetoder, til hvilke også den i EP-B 43 456 beskrevne fremgangsmåde til bedømmelse af i påfaldende lys fremstillede mi krofotografier, er det ikke muligt mileteknisk at registrere den yderst fine overfladestruktur af belægningen på glide-25 elementerne ifølge opfindelsen, idet sædvanlige mikroskopers opløsningsevne ikke er tilstrækkelig. For udformningen af en lille profil-bæreandel taler imidlertid de meget små friktionsværdier ved glideelementerne ifølge opfindelsen, som gengives i den følgende tabel.With the now known study methods, to which also the method described in EP-B 43,456 for assessing strikingly prepared micrographs, it is not possible to mileage technically to detect the extremely fine surface structure of the coating on the sliding elements according to the invention, the solubility of conventional microscopes is not sufficient. However, for the design of a small profile support portion, the very small frictional values of the sliding elements of the invention speak, as presented in the following table.

Den følgende tabel gengiver gennemsnitsværdierne af fire enkeltmå-30 linger af tør glidefriktion og statisk friktion ved glideelementer ifølge opfindelsen og kendte glideelementer, der er fremstillet ved belægning af et i og for sig kendt af aluminiumoxidkeramik med høj renhed bestående bærelegeme med forskellige keramiske materialer. Glideelementerne ifølge opfindelsen var herunder i friktionsindgreb med et i 35 og for sig kendt ikke-belagt glideelement af aluminiumoxidkeramik af høj renhed.The following table shows the average values of four single measurements of dry sliding friction and static friction by sliding elements according to the invention and known sliding elements produced by coating a high purity aluminum oxide ceramic known per se with various ceramic materials. The sliding elements according to the invention were, below, in frictional engagement with a non-coated non-coated sliding element of high purity alumina ceramic.

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44

TabelTable

Belægnings- GI idefriktions- Statisk friktionskomponent koefficient koefficient 5 μ μ0 · (løsnekraft)Coating GI idea friction Static friction component coefficient coefficient 5 μ μ0 · (detachment)

Aluminiumoxid 0,105 0,154Alumina 0.105 0.154

Titannitrid 0,09 0,153 10 Titancarbonitrid 0,133 0,197Titanium nitride 0.09 0.153 Titanium carbon nitride 0.133 0.197

Sammenligningsforsøg: kendte glideelementer ifølge EP-B- 43 456 0,196 0,379 15Comparative experiments: known sliding elements according to EP-B-43 456 0.196 0.379 15

Kendte glideelemnter af aluminiumoxidkeramik af høj renhed 0,4 0,45 20 Til fremstilling af belægningerne kan anvendes chlorider af de egnede metaller, f.eks. titantetrachlorid til titannitrid- eller titan-carbidbelægninger, hvor der som en egnet gas tilsættes ammoniak, og der i tilfælde af titancarbid desuden anvendes metangas. Til fremstilling af titancarbonnitridbelægninger anvendes gasblandinger af 25 ammoniak og metan. Til fremstilling af et aluminiumoxidlag anvendes aluminiumchlorid som udgangsmateriale, og som iltbærer anvendes vanddamp.Known high purity aluminum oxide sliding elements 0.4 0.45 For the preparation of the coatings, chlorides of the suitable metals can be used, e.g. titanium tetrachloride for titanium nitride or titanium carbide coatings, where ammonia is added as a suitable gas and methane gas is also used in the case of titanium carbide. For the preparation of titanium carbon nitride coatings, gas mixtures of 25 ammonia and methane are used. To prepare an alumina layer, aluminum chloride is used as the starting material and as an oxygen carrier water vapor is used.

Som en særlig foretrukken udførelsesform har g lideelementet ifølge opfindelsen en belægning med en tykkelse på 0,8 - 3 pm. En 30 belægning med denne yderst ringe tykkelse er navnlig en fordel, dersom glideelementerne ikke kun skal have en meget ringe friktion men også skal virke tættende, idet en sidan ringe tykkelse af belægningen lader konturen af det slebne og lappede bærelegeme være næsten uændret, og der derved fis et glideelement med næsten uæn-35 dret planhed.As a particularly preferred embodiment, the grease element according to the invention has a coating having a thickness of 0.8 to 3 microns. A coating with this extremely low thickness is particularly advantageous if the sliding elements must not only have very low friction but also have to be sealing, since a side small thickness of the coating leaves the contour of the abrasive and patched support body almost unchanged and there thereby a sliding element with almost unchanged flatness.

Ifølge yderligere en foretrukken udførelsesform består bærelegemet af keramiske materialer på basis af aluminiumoxid, mullit, zirkoniumsilikat, zirkoniumoxid, hafniumoxid, aluminiummagnesiumspi-According to a further preferred embodiment, the support body consists of ceramic materials based on alumina, mullite, zirconium silicate, zirconia, hafnium oxide, aluminum magnesium silicon.

DK 164101 BDK 164101 B

5 nel, siliciumcarbid, siliciumnitrid eller en blanding af disse komponenter. Muligheden for at kunne vælge mellem disse materialer gør det muligt at afstemme sideelementerne specielt til det foreliggende anvendelsesområde. Således vil man f.eks. som biokompatibel materiale især 5 anvende aluminiumoxid, eller dersom der ønskes en særlig god korro-sionsbestandighed, et bærelegeme af aluminiumoxid, zirkoniumoxid, siliciumcarbid eller siliciumnitrid.5 nel, silicon carbide, silicon nitride or a mixture of these components. The ability to choose between these materials makes it possible to tailor the side elements specifically to the present application. Thus, e.g. as biocompatible material, in particular, use alumina or, if a particularly good corrosion resistance is desired, a support of alumina, zirconia, silicon carbide or silicon nitride.

Ifølge yderligere foretrukne udførelsesformer for opfindelsen består belægningen af oxiderne, nitriderne, karbiderne eller borider-10 ne af aluminium, zirkonium, titan, hafnium, vanadium, niob, silicium, tantal, chrom, molybdæn eller wolfram eller disses kombinationer. Til opnåelse af særligt korrosionsbestandige belægninger er oxiderne af aluminium og zirkonium samt siliciumcarbid og siliciumnitrid egnet, medens titannitrid, titankarbid og titancarbonnitrid er egnet til frem-15 stilling af særligt hårde belægninger.According to further preferred embodiments of the invention, the coating of the oxides, nitrides, carbides or borides consists of aluminum, zirconium, titanium, hafnium, vanadium, niobium, silicon, tantalum, chromium, molybdenum or tungsten or their combinations. For obtaining particularly corrosion-resistant coatings, the oxides of aluminum and zirconium as well as silicon carbide and silicon nitride are suitable, while titanium nitride, titanium carbide and titanium carbon nitride are suitable for making particularly hard coatings.

Til en sikker forbindelse af belægningen med bærelegemet kan det være nødvendigt at anbringe et mellemlag til fastholdelse af belægningen. Ved forskellige bærelegemekombinationer og keramiske materialekomponenter for belægningen kan der Ifølge en foretrukken 20 udførelsesform også anvendes flere mellemlag, hvor hvert enkelt mellemlag forbedrer fastholdelsen i forhold til det næste mellemlag. Til forskellige anvendelsesområder har et glideelement ifølge opfindelsen uden mellemlag imidlertid vist sig at være absolut tilstrækkeligt. Til glideelementer med en belægning af aluminiumoxid har et mellemlag af 25 titancarbonnitrid vist sig at være særligt hensigtsmæssigt. Også her har det til bibeholdelse af bærelegemets konturer og dermed af tolerancen henholdsvis af planheden vist sig at være hensigtsmæssigt at fremstille mellemlaget i en tykkelse på indtil 2 pm.For a secure connection of the coating with the support body, it may be necessary to apply an intermediate layer for retaining the coating. In various support body combinations and ceramic material components for the coating, according to a preferred embodiment, several intermediate layers can also be used, each intermediate layer improving retention relative to the next intermediate layer. However, for various applications, a sliding element according to the invention without intermediate layers has proved to be absolutely sufficient. For sliding elements with an alumina coating, an intermediate layer of 25 titanium carbon nitride has been found to be particularly suitable. Here, too, in order to maintain the contour of the support body and, therefore, of the tolerance and flatness respectively, it has been found appropriate to prepare the intermediate layer in a thickness of up to 2 µm.

Valget af belægningsmetoden (PVD eller CVD) er i og for 30 sig ikke kritisk, men til komplicerede konstruktionsformer og en belægning på alle sider har CVD-metoden vist sig at være særligt egnet, medens PVD-metoden frembyder visse økonomiske fordele på grund af de forholdsvis lave arbejdstemperaturer på 200-400°C i forhold til 1000°C ved CVD-metoden.The choice of coating method (PVD or CVD) is not in itself critical, but for complicated designs and a coating on all sides, the CVD method has proven to be particularly suitable, while the PVD method offers certain economic benefits due to the relatively low operating temperatures of 200-400 ° C compared to 1000 ° C by the CVD method.

35 Ifølge yderligere foretrukne udførelsesformer består bære legemet af aluminiumoxid og er forsynet med en belægning ligeledes af aluminiumoxid eller af siliciumnitrid, siliciumcarbid, titannitrid, titan-carbid eller titancarbonnitrid. Til fremstilling af bærelegemet er blandinger særligt foretrukne, der består af mindst 90 vægtprocentAccording to further preferred embodiments, the support body consists of alumina and is also coated with alumina or silicon nitride, silicon carbide, titanium nitride, titanium carbide or titanium carbon nitride. For the preparation of the carrier, mixtures are particularly preferred, consisting of at least 90% by weight

DK 164101 BDK 164101 B

6 aluminiumoxid og resten af en eller flere af oxiderne af magnesium, silicium, titan og zirkonium, der også skal forstås at falde ind under begrebet aluminiumoxid. Bærelegemer af aluminiumoxid, som er belagt med aluminiumoxid, er særligt biokompatible, og disse glideelementer 5 kan derfor fortrinsvis anvendes til fremstilling af kunstige ledproteser. Belægninger af titancarbid og titancarbonnitrid er foretrukne, fordi der uden mellemlag kan opnås en god fastholdelse på bærelegemer af aluminiumoxid.6 alumina and the remainder of one or more of the oxides of magnesium, silicon, titanium and zirconium, which are also understood to fall within the concept of alumina. Aluminum oxide support bodies are particularly biocompatible, and these sliding elements 5 can therefore preferably be used to make artificial joint prostheses. Coatings of titanium carbide and titanium carbon nitride are preferred because good adhesion to alumina support can be achieved without intermediate layers.

Glideelementer ifølge den foreliggende opfindelse kan anven-10 des inden for mange områder af teknikken. Særligt foretrukket er anvendelsen af et glideelement ifølge opfindelsen, der har et bærelegeme af aluminiumoxid, som er forsynet med en belægning af aluminiumoxid som tætningsskive i en blandeventil, der også er kendt under betegnelsen etgrebsbtandebatteri eller sanitært blandebatteri. Et andet 15 foretrukkent anvendelsesområde er anvendelsen af glideelementer ifølge opfindelsen med et bærelegeme af aluminiumoxid og belægninger af titannitrid, titancarbonnitrid eller titancarbid som glidering ved en glideringtætning.Sliding elements of the present invention can be used in many areas of the art. Particularly preferred is the use of a sliding element according to the invention having an alumina support body which is provided with a coating of alumina as a sealing disc in a mixing valve, also known as one-handle toothed battery or sanitary mixing battery. Another preferred field of application is the use of sliding elements according to the invention with a support of alumina and coatings of titanium nitride, titanium carbon nitride or titanium carbide as sliding at a sliding seal.

De følgende eksempler og beskrivelsen af figurerne tjener 20 til nærmere forklaring af opfindelsen.The following examples and the description of the figures serve to further explain the invention.

Eksempel 1Example 1

Til fremstilling af en til sanitære blandebatterier bestemt 25 tætningsskive, der er beregnet til indgreb med en anden ikke til opfindelsen hørende sædvanlig tætningsskive af aluminiumoxid, fremstilles et bærelegeme af en pulverblanding bestående af 99,2 vægtprocent aluminiumoxid, 0,5 vægtprocent magnesiumoxid og 0,3 vægtprocent siliciumoxid, idet pulverblandingen på i og for sig kendt måde forma-30 les til en finhed på d^Q=0,8 pm, og en tætningsskive formes af pulverblandingen og sintres. Efter afkøling bearbejdes tætningsskiven ved slibning og lapning til en planhed på 2 heliumlysbånd. Der måles en profilbæreandel på 80% i overensstemmelse med den i EP-B 43 456 beskrevne målemetode.For the manufacture of a 25-sealing disc for sanitary mixing batteries intended for engagement with another conventional alumina sealing disc, a carrier is prepared from a powder blend of 99.2% by weight alumina, 0.5% by weight magnesium oxide and 0, 3% by weight of silica, the powder mixture being milled in a manner known per se to a fineness of d 2 Q = 0.8 µm, and a sealing disk being formed by the powder mixture and sintered. After cooling, the sealing disc is machined by grinding and patching to a flatness of 2 helium strips. A profile support portion of 80% is measured in accordance with the measurement method described in EP-B 43 456.

35 På den til dannelsen af funktionsfladen forsynede side af tætningsskiven påføres et mellemlag af titancarbonnitrid med en tykkelse på 0,5 pm ved CVD-fremgangsmåden. Umiddelbart derefter påføres en belægning af rent AI^O^ med en tykkelse på 2pm, der danner funktionsfladen. Belægningens middelkornstørrelse er 0,5 pm.35 On the side of the sealing disk provided for the formation of the functional surface, an intermediate layer of titanium carbon nitride having a thickness of 0.5 µm is applied by the CVD method. Immediately thereafter, a coating of pure AI ^ O ^ with a thickness of 2pm is applied forming the interface. The average grain size of the coating is 0.5 µm.

Friktionen ved den ifølge opfindelsen fremstillede tætningsskive mod en standardtætningsskive af ren aluminiumoxidkeramik konstateredes at være: 7The friction of the sealing disc according to the invention against a standard sealing plate of pure alumina ceramics was found to be: 7

DK 164101 BDK 164101 B

5 Glidefriktionskoefficient Statisk friktionskoefficient μ M0 0,09 0,13 ίο5 Sliding friction coefficient Static friction coefficient μ M0 0.09 0.13 ίο

En sammenligningsmiling af det i dette eksempel beskrevne bærelegeme i form af en tætningsskive inden belægningen med CVD-la-get af titancarbonnitrid giver: 15 Glidefriktionskoefficient Statisk friktionskoefficient μ μ0 0,25 0,42 20A comparative milling of the carrier described in this example in the form of a sealing disk prior to coating with the CVD layer of titanium carbon nitride gives: 15 Sliding friction coefficient Static friction coefficient μ μ0 0.25 0.42 20

Malingen af friktionsværdierne viser, at der ved hjælp af belægningen kunne opnås en væsentlig mindre friktion.The grinding of the friction values shows that by means of the coating a significantly less friction could be obtained.

Eksempel 2 25 På det i eksempel 1 beskrevne bærelegeme påføres uden mellemlag et lag af titancarbonnitrid med en tykkelse på 2,5 pm. Belægningens kornstørrelse er 0,3 pm. Der konstateredes en glidefriktionskoefficient på 0,1 og en statisk friktionskoefficient på 0,17 af friktionen mod den i eksempel 1 beskrevne standardtætningsskive af 30 aluminiumoxid.Example 2 To the support body described in Example 1, a layer of titanium carbon nitride having a thickness of 2.5 microns is applied without intermediate layer. The grain size of the coating is 0.3 µm. A slip friction coefficient of 0.1 and a static friction coefficient of 0.17 of the friction against the standard alumina sealing disc described in Example 1 were found.

Eksempel 3Example 3

Der fremstilles en glidering til en glideringtætning, idet der fremstilles et bærelegeme af 98 vægtprocent aluminiumoxid, 0,8 vægt- 35 procent magnesiumoxid og 1,2 vægtprocent siliciumoxid ved den i eksempel 1 beskrevne fremgangsmåde, hvorpå bærelegemet efter slibning og polering til en planhed på 2 heliumlysbånd belægges med en belægning af titancarbonnitrid i en tykkelse på 5 pm efter CVD-meto-den. De udfundne friktionsværdier svarer til værdierne i eksempel 1.A sliding to a sliding seal is made, producing a support body of 98% by weight alumina, 0.8% by weight 35% magnesium oxide and 1.2% by weight of silica by the method described in Example 1, after which the support body after grinding and polishing to a flatness of 2 helium bands are coated with a coating of titanium carbon nitride at a thickness of 5 µm according to the CVD method. The friction values found correspond to the values in Example 1.

DK 164101 BDK 164101 B

8 På tegningen viser: fig. 1 i tværsnit et skematisk billede af et udsnit af et bærelegeme, således som det anvendes ifølge den foreliggende opfindelse, 5 fig. 2 et skematisk billede af et tværsnit gennem det i fig. 1 viste bærelegeme efter udførelsen af belægningen ifølge opfindelsen, fig. 3 et skematisk billede af et tværsnit gennem yderligere en udførelsesform for et glideelement ifølge 10 den foreliggende opfindelse med et mellemlag.8 In the drawing: FIG. 1 is a schematic cross-sectional view of a section of a support body as used in the present invention; 2 is a schematic view of a cross-section through the embodiment of FIG. 1 after carrying out the coating according to the invention; FIG. 3 is a schematic view of a cross-section through a further embodiment of a sliding element according to the present invention with an intermediate layer.

Ved det i fig. 1 viste bærelegeme 2 drejer det sig om et kendt glideelement, hvis overflade 6 er slebet og lappet. Et kornudbrudssted 7, der er opstået under slibeprocessen, har en dybde x og er vist stærkt forstørret.In the embodiment shown in FIG. 1, it is a known sliding element whose surface 6 is sanded and patched. A grain burst site 7 that occurred during the grinding process has a depth x and is shown to be greatly enlarged.

15 Det i fig. 2 viste glideelement 1 er dannet ved, at der ved CVD-metoden er påført en belægning 3 på overfladen 6 af det i fig. 1 viste bærelegeme 2. Belægningen 3 har en tykkelse på 1,8 øm og følger i sin kontur konturen af bæreelementet 2's overflade 6, således som det kan ses i området ved kornudbrudsstedet 7. Overfladen af 20 belægningen 3 danner glideelementet 1's arbejdsflade 4. Den i området ved kornudbrudsstedet 7 optrædende fordybning 7' har en dybde på X'.15 The embodiment of FIG. 2, slide element 1 is formed by applying a coating 3 to the surface 6 of the CVD method of FIG. 1, the coating 3 has a thickness of 1.8 mm and in its contour follows the contour of the surface 6 of the support element 2, as can be seen in the area at the grain burst point 7. The surface of the coating 3 forms the working surface 4. of the sliding element 1. in the area at the grain burst site 7 recess 7 'has a depth of X'.

Til fremstilling af det i fig. 3 viste glideelement anvendtes det i forbindelse med fig. 1 beskrevne bærelegeme 2. Et mellemlag 5 25 med en tykkelse på 0,5 øm påførtes ved CVD-metoden, og en belægning 3, der danner arbejdsfladen 4, blev anbragt oven på mellemlaget 5 i en tykkelse på 1,6 øm. Også her ses, at mellemlaget 5 henholdsvis belægningen 3 følger konturen af bærelegemet 2's overflade 6. En fordybning 7" i området ved kornudbrudsstedet 7 henholdsvis for-30 dybningen 7' har en dybde på X".For the preparation of the embodiment shown in FIG. 3, the slide element shown in FIG. Carrier 2 described at 0.5 mm thickness was applied by the CVD method and a coating 3 forming the working surface 4 was placed on top of intermediate layer 5 at a thickness of 1.6 mm. Here again, it is seen that the intermediate layer 5 and the coating 3, respectively, follow the contour of the surface 6 of the support body 2. A depression 7 "in the area of the grain burst point 7 and the depression 7 'has a depth of X".

Det skal udtrykkeligt anføres, at belægningen 3 også følger bærelegemet 2's kontur ved sådanne steder, der er finere end det viste kornudbrudssted 7. Af hensyn til enkeltheden er dette imidlertid ikke vist.It should be expressly stated that the coating 3 also follows the contour of the support body 2 at such locations that are finer than the grain burst site 7 shown. However, for the sake of simplicity this is not shown.

3333

Claims (13)

1. Glideelement, som pi en eller flere arbejdsflader er belagt med en eller flere keramiske materialekomponenter og er i 5 friktionsindgreb med mindst yderligere et glideelement, kende tegnet ved, at mindst ét af glideelementerne (1) har et ved formning og sintring af keramiske materialer fremstillet slebet og/eller lappet bærelegeme (2), der i det mindste på dets arbejdsflader (4) har en ved kemisk eller fysisk pådampningsmetode (CVD eller PVD) 10 opnået belægning (3) af en eller flere keramiske komponenter i en tykkelse på 0,2 - 10 pm og en kornstørrelse, der ikke overskrider 1 pm.A sliding element which is coated on one or more working surfaces with one or more ceramic material components and is in frictional engagement with at least one further sliding element, characterized in that at least one of the sliding elements (1) has one when forming and sintering ceramic materials. manufactured ground and / or patched support body (2) having at least on its working surfaces (4) a coating (3) of one or more ceramic components of a thickness of 0 obtained by chemical or physical evaporation method (CVD or PVD) 10 , 2 - 10 pm and a grain size not exceeding 1 pm. 2. Glideelement ifølge krav 1, kendetegnet ved, at bærelemeget (2) består af keramiske materialer på basis af alumini- 15 umoxid, mullit, zirkoniumsilikat, zirkoniumoxid, hafniumoxid, alumini-ummagnesiumspinel, siliciumcarbid, siliciumnitrid eller en blanding af disse komponenter.Sliding element according to claim 1, characterized in that the support element (2) consists of ceramic materials based on alumina, mullite, zirconium silicate, zirconia, hafnium oxide, aluminum magnesium spinel, silicon carbide, silicon nitride or a mixture of these components. 3. Glideelement ifølge kravene 1 og 2, kendetegnet ved, at belægningen (3) består af oxider, nitrider, carbider 20 eller borider af aluminium, zirkonium, titan, hafnium, vanadium, niob, tantal, chrom, molybdæn, wolfram og silicium eller kombinationer deraf.Sliding element according to claims 1 and 2, characterized in that the coating (3) consists of oxides, nitrides, carbides 20 or borides of aluminum, zirconium, titanium, hafnium, vanadium, niobium, tantalum, chromium, molybdenum, tungsten and silicon or combinations thereof. 4. Glideelement ifølge krav 1-3, kendetegnet ved, at glideelementet (1) desuden har et eller flere mellemlag (5) mellem 25 bærelegemet (2) og belægningen (3).Sliding element according to claims 1-3, characterized in that the sliding element (1) additionally has one or more intermediate layers (5) between the supporting body (2) and the coating (3). 5. Glideelement ifølge krav 4, kendetegnet ved, at det har et mellemlag (5) af titancarbonnitrid.Sliding element according to claim 4, characterized in that it has an intermediate layer (5) of titanium carbon nitride. 6. Glideelement ifølge kravene 4 og 5, kendetegnet ved, at mellemlaget (5) har en tykkelse på indtil 2 pm.Sliding element according to claims 4 and 5, characterized in that the intermediate layer (5) has a thickness of up to 2 µm. 7. Glideelement ifølge kravene 1-6, kendetegnet ved, at bærelegemet (2) og belægningen (3) består af aluminiumoxid.Sliding element according to claims 1-6, characterized in that the support body (2) and the coating (3) consist of alumina. 8. Glideelement ifølge kravene 1-6, kendetegnet ved, at bærelegemet (2) består af aluminiumoxid og belægningen (3) af siliciumnitrid.Sliding element according to claims 1-6, characterized in that the support body (2) consists of alumina and the coating (3) of silicon nitride. 9. Glideelement ifølge kravene 1-6, kendetegnet ved, at bærelegemet (2) består af aluminiumoxid og belægningen (3) af siliciumcarbid.Sliding element according to claims 1-6, characterized in that the support body (2) consists of alumina and the coating (3) of silicon carbide. 10. Glideelement ifølge kravene 1-6, kendetegnet ved, at bærelegemet (2) består af silicumnitrid og belægningen (3) af DK 164101 B aluminiumoxid.Sliding element according to claims 1-6, characterized in that the support body (2) consists of silicon nitride and the coating (3) of alumina DK 164101 B. 11. Glideelement ifølge kravene 1-6, kendetegnet ved, at bærelegemet (2) består af aluminiumoxid og belægningen (3) af titannitrid, titancarbid eller titancarbonnitrid.Sliding element according to claims 1-6, characterized in that the support body (2) consists of alumina and the coating (3) of titanium nitride, titanium carbide or titanium carbon nitride. 12. Anvendelse af et glideelement ifølge krav 7 som tæt ningsskive i et blandebatteri.Use of a sliding element according to claim 7 as a sealing disk in a mixing battery. 13. Anvendelse af et glideelement ifølge krav 11 som glidering * en glideringtætning. 15 20 25 30 35Use of a sliding element according to claim 11 as sliding * a sliding seal. 15 20 25 30 35
DK555985A 1985-03-16 1985-11-29 Sliding element, which is coated with ceramic material components on one or more work surfaces, as well as the use of the sliding element. DK164101C (en)

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FI80671C (en) 1990-07-10
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DK164101C (en) 1992-10-05
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DE3509572C1 (en) 1986-07-10
FI854855A (en) 1986-09-17
FI854855A0 (en) 1985-12-09
JPS61215279A (en) 1986-09-25
EP0195205B1 (en) 1989-06-07
NO854948L (en) 1986-09-17
DE3663800D1 (en) 1989-07-13
EP0195205A2 (en) 1986-09-24
EP0195205A3 (en) 1987-08-19
DK555985D0 (en) 1985-11-29
DK555985A (en) 1986-09-17

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