DK145064C - Apparat til fremstilling af roerformede legemer af silicium - Google Patents
Apparat til fremstilling af roerformede legemer af siliciumInfo
- Publication number
- DK145064C DK145064C DK488872A DK488872A DK145064C DK 145064 C DK145064 C DK 145064C DK 488872 A DK488872 A DK 488872A DK 488872 A DK488872 A DK 488872A DK 145064 C DK145064 C DK 145064C
- Authority
- DK
- Denmark
- Prior art keywords
- substanced
- silicone
- bodies
- preparation
- substanced bodies
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
Landscapes
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2149526 | 1971-10-04 | ||
DE2149526A DE2149526C3 (de) | 1970-10-12 | 1971-10-04 | Vorrichtung zum Herstellen von Rohren aus Silicium |
Publications (2)
Publication Number | Publication Date |
---|---|
DK145064B DK145064B (da) | 1982-08-16 |
DK145064C true DK145064C (da) | 1983-01-24 |
Family
ID=5821454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK488872A DK145064C (da) | 1971-10-04 | 1972-10-03 | Apparat til fremstilling af roerformede legemer af silicium |
Country Status (6)
Country | Link |
---|---|
US (1) | US3820935A (da) |
JP (1) | JPS4844159A (da) |
CS (1) | CS188126B4 (da) |
DD (1) | DD99550A5 (da) |
DK (1) | DK145064C (da) |
IT (1) | IT1012045B (da) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2518853C3 (de) * | 1975-04-28 | 1979-03-22 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Vorrichtung zum Abscheiden von elementarem Silicium aus einem Reaktionsgas |
JP2725081B2 (ja) * | 1990-07-05 | 1998-03-09 | 富士通株式会社 | 半導体装置製造用熱処理装置 |
WO2007120871A2 (en) * | 2006-04-13 | 2007-10-25 | Cabot Corporation | Production of silicon through a closed-loop process |
US9683286B2 (en) | 2006-04-28 | 2017-06-20 | Gtat Corporation | Increased polysilicon deposition in a CVD reactor |
KR101811872B1 (ko) * | 2007-09-20 | 2017-12-22 | 미츠비시 마테리알 가부시키가이샤 | 다결정 실리콘 반응로 및 다결정 실리콘의 제조 방법 |
JP5309963B2 (ja) * | 2007-12-28 | 2013-10-09 | 三菱マテリアル株式会社 | 多結晶シリコンのシリコン芯棒組立体及びその製造方法、多結晶シリコン製造装置、多結晶シリコン製造方法 |
KR101064176B1 (ko) * | 2009-01-15 | 2011-09-15 | 주식회사수성기술 | 다결정 실리콘 로드 제조용 시드 필라멘트 |
CN103158202B (zh) * | 2011-12-09 | 2016-07-06 | 洛阳金诺机械工程有限公司 | 一种空心硅芯的搭接方法 |
CN103158200B (zh) * | 2011-12-09 | 2016-07-06 | 洛阳金诺机械工程有限公司 | 一种c形硅芯的搭接方法 |
CN103158201B (zh) * | 2011-12-09 | 2016-03-02 | 洛阳金诺机械工程有限公司 | 一种空心硅芯与实心硅芯的搭接方法 |
US10100439B2 (en) | 2015-05-08 | 2018-10-16 | Sunpower Corporation | High throughput chemical vapor deposition electrode |
-
1972
- 1972-09-25 US US00291787A patent/US3820935A/en not_active Expired - Lifetime
- 1972-09-29 IT IT29841/72A patent/IT1012045B/it active
- 1972-09-29 DD DD165952A patent/DD99550A5/xx unknown
- 1972-10-03 CS CS726679A patent/CS188126B4/cs unknown
- 1972-10-03 DK DK488872A patent/DK145064C/da not_active IP Right Cessation
- 1972-10-04 JP JP47099107A patent/JPS4844159A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CS188126B4 (en) | 1979-02-28 |
US3820935A (en) | 1974-06-28 |
DD99550A5 (da) | 1973-08-12 |
DK145064B (da) | 1982-08-16 |
JPS4844159A (da) | 1973-06-25 |
IT1012045B (it) | 1977-03-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PBP | Patent lapsed |