DK135257C - - Google Patents

Info

Publication number
DK135257C
DK135257C DK310375A DK310375A DK135257C DK 135257 C DK135257 C DK 135257C DK 310375 A DK310375 A DK 310375A DK 310375 A DK310375 A DK 310375A DK 135257 C DK135257 C DK 135257C
Authority
DK
Denmark
Application number
DK310375A
Other languages
Danish (da)
Other versions
DK135257B (da
DK310375A (cs
Inventor
E Jespersen
O A Skilbreid
Original Assignee
Danfysik A/S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfysik A/S filed Critical Danfysik A/S
Priority to DK310375AA priority Critical patent/DK135257B/da
Priority to US05/701,498 priority patent/US4044266A/en
Priority to JP51081462A priority patent/JPS5211775A/ja
Publication of DK310375A publication Critical patent/DK310375A/da
Publication of DK135257B publication Critical patent/DK135257B/da
Application granted granted Critical
Publication of DK135257C publication Critical patent/DK135257C/da

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K17/00—Use of the energy of nuclear particles in welding or related techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
DK310375AA 1975-07-09 1975-07-09 Apparat til ion-implantation i emner, især skiver af halvledermateriale. DK135257B (da)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DK310375AA DK135257B (da) 1975-07-09 1975-07-09 Apparat til ion-implantation i emner, især skiver af halvledermateriale.
US05/701,498 US4044266A (en) 1975-07-09 1976-07-01 Apparatus for ion-implantation in elements, especially discs of semi-conducting material
JP51081462A JPS5211775A (en) 1975-07-09 1976-07-08 Apparatus for ion implantation into material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK310375AA DK135257B (da) 1975-07-09 1975-07-09 Apparat til ion-implantation i emner, især skiver af halvledermateriale.

Publications (3)

Publication Number Publication Date
DK310375A DK310375A (cs) 1977-01-10
DK135257B DK135257B (da) 1977-03-21
DK135257C true DK135257C (cs) 1977-08-29

Family

ID=8119131

Family Applications (1)

Application Number Title Priority Date Filing Date
DK310375AA DK135257B (da) 1975-07-09 1975-07-09 Apparat til ion-implantation i emner, især skiver af halvledermateriale.

Country Status (3)

Country Link
US (1) US4044266A (cs)
JP (1) JPS5211775A (cs)
DK (1) DK135257B (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4247781A (en) * 1979-06-29 1981-01-27 International Business Machines Corporation Cooled target disc for high current ion implantation method and apparatus
JPS6245085Y2 (cs) * 1980-10-03 1987-12-01
US4405864A (en) * 1981-09-08 1983-09-20 Rca Corporation Ion implanter end processing station

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3356844A (en) * 1963-07-02 1967-12-05 Centre Nat Rech Metall Rotatable sample changer for an electron probe microanalyzer having means for maintaining a vacuum in the analysis chamber
BE646014A (cs) * 1964-04-01 1964-10-01
US3342992A (en) * 1964-06-30 1967-09-19 Zeiss Jena Veb Carl Sample changing devices for electron microscopes and electron diffraction apparatus
GB1426865A (en) * 1972-02-15 1976-03-03 Boc International Ltd Carousel

Also Published As

Publication number Publication date
DK135257B (da) 1977-03-21
US4044266A (en) 1977-08-23
JPS5211775A (en) 1977-01-28
DK310375A (cs) 1977-01-10

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