DK106237C - Elektronmikroskop med indstilleligt objektbord. - Google Patents

Elektronmikroskop med indstilleligt objektbord.

Info

Publication number
DK106237C
DK106237C DK405763AA DK405763A DK106237C DK 106237 C DK106237 C DK 106237C DK 405763A A DK405763A A DK 405763AA DK 405763 A DK405763 A DK 405763A DK 106237 C DK106237 C DK 106237C
Authority
DK
Denmark
Prior art keywords
electron microscope
object table
adjustable object
adjustable
microscope
Prior art date
Application number
DK405763AA
Other languages
Danish (da)
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Application granted granted Critical
Publication of DK106237C publication Critical patent/DK106237C/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Sampling And Sample Adjustment (AREA)
DK405763AA 1962-08-29 1963-08-26 Elektronmikroskop med indstilleligt objektbord. DK106237C (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL282644A NL282644A (enEXAMPLES) 1962-08-29 1962-08-29

Publications (1)

Publication Number Publication Date
DK106237C true DK106237C (da) 1967-01-09

Family

ID=19754071

Family Applications (1)

Application Number Title Priority Date Filing Date
DK405763AA DK106237C (da) 1962-08-29 1963-08-26 Elektronmikroskop med indstilleligt objektbord.

Country Status (6)

Country Link
US (1) US3218457A (enEXAMPLES)
BE (1) BE636666A (enEXAMPLES)
CH (1) CH401286A (enEXAMPLES)
DK (1) DK106237C (enEXAMPLES)
GB (1) GB981447A (enEXAMPLES)
NL (1) NL282644A (enEXAMPLES)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1238889A (enEXAMPLES) * 1968-11-26 1971-07-14
JPS55165628A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Apparatus for electron-beam irradiation
JPS58161235A (ja) * 1982-03-19 1983-09-24 Internatl Precision Inc 走査型電子線装置
JPS58169762A (ja) * 1982-03-30 1983-10-06 Internatl Precision Inc 電子線装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE566571A (enEXAMPLES) * 1957-04-09
US2953970A (en) * 1957-09-26 1960-09-27 Indiana General Corp Mount for optical system component

Also Published As

Publication number Publication date
CH401286A (de) 1965-10-31
BE636666A (enEXAMPLES) 1964-02-27
US3218457A (en) 1965-11-16
GB981447A (en) 1965-01-27
NL282644A (enEXAMPLES) 1964-12-28

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