DK0946961T3 - Magnetisk system, især til ECR-kilder, til tilvejebringelse af lukkede overflader med samme modulus B og med enhver form og dimensioner - Google Patents

Magnetisk system, især til ECR-kilder, til tilvejebringelse af lukkede overflader med samme modulus B og med enhver form og dimensioner

Info

Publication number
DK0946961T3
DK0946961T3 DK97952086T DK97952086T DK0946961T3 DK 0946961 T3 DK0946961 T3 DK 0946961T3 DK 97952086 T DK97952086 T DK 97952086T DK 97952086 T DK97952086 T DK 97952086T DK 0946961 T3 DK0946961 T3 DK 0946961T3
Authority
DK
Denmark
Prior art keywords
shapes
dimensions
magnetic system
provide closed
closed surfaces
Prior art date
Application number
DK97952086T
Other languages
Danish (da)
English (en)
Inventor
Jean-Yves Pacquet
Renan Leroy
Original Assignee
Commissariat Energie Atomique
Centre Nat Rech Scient
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Centre Nat Rech Scient filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of DK0946961T3 publication Critical patent/DK0946961T3/da

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
DK97952086T 1996-12-18 1997-12-17 Magnetisk system, især til ECR-kilder, til tilvejebringelse af lukkede overflader med samme modulus B og med enhver form og dimensioner DK0946961T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9615572A FR2757310B1 (fr) 1996-12-18 1996-12-18 Systeme magnetique, en particulier pour les sources ecr, permettant la creation de surfaces fermees d'equimodule b de forme et de dimensions quelconques
PCT/FR1997/002328 WO1998027572A1 (fr) 1996-12-18 1997-12-17 Systeme magnetique, en particulier pour les sources ecr, permettant la creation de surfaces fermees d'equimodule b de forme et de dimensions quelconques

Publications (1)

Publication Number Publication Date
DK0946961T3 true DK0946961T3 (da) 2007-07-09

Family

ID=9498806

Family Applications (1)

Application Number Title Priority Date Filing Date
DK97952086T DK0946961T3 (da) 1996-12-18 1997-12-17 Magnetisk system, især til ECR-kilder, til tilvejebringelse af lukkede overflader med samme modulus B og med enhver form og dimensioner

Country Status (6)

Country Link
US (1) US6194836B1 (fr)
EP (1) EP0946961B1 (fr)
DE (1) DE69737461T2 (fr)
DK (1) DK0946961T3 (fr)
FR (1) FR2757310B1 (fr)
WO (1) WO1998027572A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6664548B2 (en) * 2002-05-01 2003-12-16 Axcelis Technologies, Inc. Ion source and coaxial inductive coupler for ion implantation system
FR2933532B1 (fr) 2008-07-02 2010-09-03 Commissariat Energie Atomique Dispositif generateur d'ions a resonance cyclotronique electronique
US20100290575A1 (en) * 2009-05-15 2010-11-18 Rosenthal Glenn B Particle beam isotope generator apparatus, system and method
FR2947378A1 (fr) * 2009-06-29 2010-12-31 Quertech Ingenierie Systeme magnetique formant des surfaces iso modules fermees a partir de structures magnetiques de type "cusp" et sources d'ions de type rce mettant en oeuvre un tel systeme
RU2448387C2 (ru) * 2010-03-29 2012-04-20 Объединенный Институт Ядерных Исследований Способ получения пучка ионов высокой зарядности
FR2969372B1 (fr) * 2010-12-21 2015-04-17 Commissariat Energie Atomique Dispositif d’ionisation a la resonance cyclotron electronique

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede
FR2551302B1 (fr) * 1983-08-30 1986-03-14 Commissariat Energie Atomique Structure ferromagnetique d'une source d'ions creee par des aimants permanents et des solenoides
FR2553574B1 (fr) * 1983-10-17 1985-12-27 Commissariat Energie Atomique Dispositif de regulation d'un courant d'ions notamment metalliques fortement charges
US4641060A (en) * 1985-02-11 1987-02-03 Applied Microwave Plasma Concepts, Inc. Method and apparatus using electron cyclotron heated plasma for vacuum pumping
FR2668642B1 (fr) * 1990-10-25 1993-11-05 Commissariat A Energie Atomique Source d'ions fortement charges a sonde polarisable et a resonance cyclotronique electronique.
JPH08102279A (ja) * 1994-09-30 1996-04-16 Hitachi Ltd マイクロ波プラズマ生成装置

Also Published As

Publication number Publication date
DE69737461T2 (de) 2007-12-06
EP0946961A1 (fr) 1999-10-06
US6194836B1 (en) 2001-02-27
FR2757310A1 (fr) 1998-06-19
FR2757310B1 (fr) 2006-06-02
DE69737461D1 (de) 2007-04-19
WO1998027572A1 (fr) 1998-06-25
EP0946961B1 (fr) 2007-03-07

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